JP6564930B2 - 誘電体組成物、誘電体素子、電子部品および積層電子部品 - Google Patents
誘電体組成物、誘電体素子、電子部品および積層電子部品 Download PDFInfo
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- JP6564930B2 JP6564930B2 JP2018501901A JP2018501901A JP6564930B2 JP 6564930 B2 JP6564930 B2 JP 6564930B2 JP 2018501901 A JP2018501901 A JP 2018501901A JP 2018501901 A JP2018501901 A JP 2018501901A JP 6564930 B2 JP6564930 B2 JP 6564930B2
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- 239000000203 mixture Substances 0.000 title claims description 107
- 239000002245 particle Substances 0.000 claims description 72
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- 238000010304 firing Methods 0.000 claims description 13
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- 229910002367 SrTiO Inorganic materials 0.000 claims description 10
- 239000013078 crystal Substances 0.000 claims description 9
- 238000001354 calcination Methods 0.000 claims description 8
- 239000011575 calcium Substances 0.000 claims description 8
- 239000007858 starting material Substances 0.000 claims description 8
- 229910052712 strontium Inorganic materials 0.000 claims description 7
- 229910052719 titanium Inorganic materials 0.000 claims description 7
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 claims description 6
- 229910052684 Cerium Inorganic materials 0.000 claims description 6
- 229910052692 Dysprosium Inorganic materials 0.000 claims description 6
- 229910052693 Europium Inorganic materials 0.000 claims description 6
- 229910052688 Gadolinium Inorganic materials 0.000 claims description 6
- 229910052689 Holmium Inorganic materials 0.000 claims description 6
- 229910052779 Neodymium Inorganic materials 0.000 claims description 6
- 229910052777 Praseodymium Inorganic materials 0.000 claims description 6
- 229910052772 Samarium Inorganic materials 0.000 claims description 6
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 claims description 6
- 229910052771 Terbium Inorganic materials 0.000 claims description 6
- 229910052769 Ytterbium Inorganic materials 0.000 claims description 6
- 229910052788 barium Inorganic materials 0.000 claims description 6
- 229910052797 bismuth Inorganic materials 0.000 claims description 6
- 229910052791 calcium Inorganic materials 0.000 claims description 6
- 229910052746 lanthanum Inorganic materials 0.000 claims description 6
- 229910052749 magnesium Inorganic materials 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 6
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- 229910052708 sodium Inorganic materials 0.000 claims description 6
- 229910052725 zinc Inorganic materials 0.000 claims description 6
- 239000011230 binding agent Substances 0.000 claims description 5
- 229910052802 copper Inorganic materials 0.000 claims description 5
- 229910052737 gold Inorganic materials 0.000 claims description 5
- 229910052709 silver Inorganic materials 0.000 claims description 5
- 238000002156 mixing Methods 0.000 claims description 4
- 229910052697 platinum Inorganic materials 0.000 claims description 4
- 229910015902 Bi 2 O 3 Inorganic materials 0.000 claims description 3
- AYJRCSIUFZENHW-UHFFFAOYSA-L barium carbonate Chemical compound [Ba+2].[O-]C([O-])=O AYJRCSIUFZENHW-UHFFFAOYSA-L 0.000 claims description 3
- 229910000416 bismuth oxide Inorganic materials 0.000 claims description 3
- 229910000019 calcium carbonate Inorganic materials 0.000 claims description 3
- TYIXMATWDRGMPF-UHFFFAOYSA-N dibismuth;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Bi+3].[Bi+3] TYIXMATWDRGMPF-UHFFFAOYSA-N 0.000 claims description 3
- BDAGIHXWWSANSR-NJFSPNSNSA-N hydroxyformaldehyde Chemical compound O[14CH]=O BDAGIHXWWSANSR-NJFSPNSNSA-N 0.000 claims description 3
- CMGJQFHWVMDJKK-UHFFFAOYSA-N lanthanum;trihydrate Chemical compound O.O.O.[La] CMGJQFHWVMDJKK-UHFFFAOYSA-N 0.000 claims description 3
- 229910000029 sodium carbonate Inorganic materials 0.000 claims description 3
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- 238000002149 energy-dispersive X-ray emission spectroscopy Methods 0.000 description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 5
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- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 229920002451 polyvinyl alcohol Polymers 0.000 description 5
- 239000000919 ceramic Substances 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- 229910010413 TiO 2 Inorganic materials 0.000 description 3
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
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- 238000005259 measurement Methods 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
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- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 2
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- 239000000470 constituent Substances 0.000 description 2
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- 238000009826 distribution Methods 0.000 description 2
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- 239000012856 weighed raw material Substances 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 229910001252 Pd alloy Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910000272 alkali metal oxide Inorganic materials 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
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- 238000007772 electroless plating Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- CMIHHWBVHJVIGI-UHFFFAOYSA-N gadolinium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[Gd+3].[Gd+3] CMIHHWBVHJVIGI-UHFFFAOYSA-N 0.000 description 1
- CKHJYUSOUQDYEN-UHFFFAOYSA-N gallium(3+) Chemical compound [Ga+3] CKHJYUSOUQDYEN-UHFFFAOYSA-N 0.000 description 1
- 238000009499 grossing Methods 0.000 description 1
- 238000001027 hydrothermal synthesis Methods 0.000 description 1
- 150000004679 hydroxides Chemical class 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- ZLNQQNXFFQJAID-UHFFFAOYSA-L magnesium carbonate Chemical compound [Mg+2].[O-]C([O-])=O ZLNQQNXFFQJAID-UHFFFAOYSA-L 0.000 description 1
- PLDDOISOJJCEMH-UHFFFAOYSA-N neodymium(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Nd+3].[Nd+3] PLDDOISOJJCEMH-UHFFFAOYSA-N 0.000 description 1
- 150000002823 nitrates Chemical class 0.000 description 1
- 150000002902 organometallic compounds Chemical class 0.000 description 1
- 150000003891 oxalate salts Chemical class 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- FKTOIHSPIPYAPE-UHFFFAOYSA-N samarium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[Sm+3].[Sm+3] FKTOIHSPIPYAPE-UHFFFAOYSA-N 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
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Description
少なくともBi、Na、SrおよびTiを含有するペロブスカイト型の結晶構造を含む誘電体組成物であって、
La、Ce、Pr、Nd、Sm、Eu、Gd、Tb、Dy、Ho、Yb、Ba、Ca、MgおよびZnの中から選ばれる少なくとも1種以上を含み、
前記誘電体組成物が、SrTiO3を含むコア部を少なくとも一つ持つコアシェル構造を有する特定粒子を含み、
前記誘電体組成物に含まれる全粒子数に対する前記特定粒子数の比率をαとした場合に、α<0.20であることを特徴とする。
酸化ビスマス(Bi2O3)、炭酸ナトリウム(Na2CO3)、炭酸ストロンチウム(SrCO3)、炭酸バリウム(BaCO3)、炭酸カルシウム(CaCO3)、炭酸マグネシウム(MgCO3)、酸化亜鉛(ZnO)、水酸化ランタン(La(OH)3)、酸化ネオジウム(Nd2O3)、酸化サマリウム(Sm2O3)、酸化ガドリニウム(Gd2O3)、酸化チタン(TiO2)の原料粉末を準備した。ここで、各原料粉末の平均粒径を0.1μm〜1μmの範囲で適宜調整し、前記誘電体組成物試料のαが表1に示す値となるようにした。
2,3…電極
5…積層体
6A,6B…内部電極層
7…誘電体層
11A,11B…端子電極
8…コア
9…シェル
10…粒界
20…単一相粒子
30…コアシェル粒子
100…セラミックコンデンサ
200…積層セラミックコンデンサ
300…誘電体組成物
Claims (13)
- 少なくともBi、Na、SrおよびTiを含有するペロブスカイト型の結晶構造を含む誘電体組成物であって、
La、Ce、Pr、Nd、Sm、Eu、Gd、Tb、Dy、Ho、Yb、Ba、Ca、MgおよびZnの中から選ばれる少なくとも1種以上を含み、
前記誘電体組成物が、SrTiO3を含むコア部を少なくとも一つ持つコアシェル構造を有する特定粒子を含み、
前記誘電体組成物に含まれる全粒子数に対する前記特定粒子数の比率をαとした場合に、α<0.20であることを特徴とする誘電体組成物。 - 前記誘電体組成物におけるTiの含有量を100モル部として、前記La、Ce、Pr、Nd、Sm、Eu、Gd、Tb、Dy、Ho、Yb、Ba、Ca、MgおよびZnの中から選ばれる少なくとも1種以上の含有量が、0.5モル部以上、15モル部以下である請求項1に記載の誘電体組成物。
- 前記誘電体組成物におけるNaに対するSrのモル比率をβとした場合に、0.20≦β≦0.86である請求項1または2に記載の誘電体組成物。
- 請求項1〜3のいずれかに記載の誘電体組成物を備える誘電体素子。
- 請求項1〜3のいずれかに記載の誘電体組成物からなる誘電体層を備える電子部品。
- 請求項1〜3のいずれかに記載の誘電体組成物からなる誘電体層と内部電極層とを交互に積層されてなる積層部分を有する積層電子部品。
- 請求項1〜5のいずれかに記載の誘電体組成物を含む円板状の誘電体と、一対の電極を有し、
前記電極は前記誘電体の両面に形成されている単層型セラミックコンデンサ。 - 前記電極の材質はCuを含む請求項7に記載の単層型セラミックコンデンサ。
- 請求項1〜5のいずれかに記載の誘電体組成物からなる誘電体層と内部電極層とが交互に積層された構成のコンデンサ素子本体と、
前記コンデンサ素子本体の内部で交互に配置された前記内部電極層と各々導通し、前記コンデンサ素子本体の両端部に形成される一対の端子電極と、を有する積層セラミックコンデンサ。 - 前記内部電極層の材質がCuを含む請求項9に記載の積層セラミックコンデンサ。
- 前記端子電極がその主成分としてCuを含む導電材料を含む請求項9または10に記載の積層セラミックコンデンサ。
- コンデンサの誘電体層となる誘電体組成物を提供する工程と、
前記誘電体組成物の原料を圧力成形して成形体を得る工程と、
前記成形体を焼成することにより誘電体を得る工程と、
前記誘電体の両面に電極を形成する工程と、を有し、
前記誘電体組成物の原料を提供する工程は、
酸化ビスマス(Bi2O3)、炭酸ナトリウム(Na2CO3)、炭酸ストロンチウム(SrCO3)、炭酸バリウム(BaCO3)、炭酸カルシウム(CaCO3)および水酸化ランタン(La(OH)3)の誘電体出発原料を提供する工程と、
前記誘電体出発原料を秤量する工程と、
前記秤量した誘電体出発原料を湿式混合する工程と、
湿式混合により得られた混合物を仮焼することにより、仮焼物を得る工程と、
前記仮焼物を湿式粉砕する工程と、
前記仮焼物を乾燥して仮焼物粉体を得る工程と、
前記仮焼物粉体に結合剤を加える工程と、を有し、
焼成された前記誘電体組成物が、少なくともBi、Na、SrおよびTiを含むペロブスカイト型の結晶構造を含み、
前記誘電体組成物が、La、Ce、Pr、Nd、Sm、Eu、Gd、Tb、Dy、Ho、Yb、Ba、Ca、MgおよびZnから選ばれる少なくとも1種以上を含み、
前記誘電体組成物が、SrTiO3を含むコア部を少なくとも一つ持つコアシェル構造を有する特定粒子を含み、
前記誘電体組成物に含まれる全粒子数に対する前記特定粒子数の比率をαとした場合に、α<0.20であるように前記誘電体出発原料が秤量されるセラミックコンデンサの製造方法。 - 前記電極の材質は、Ag、Au、Cu、PtまたはNiを含む請求項12に記載のセラミックコンデンサの製造方法。
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