JP6562878B2 - 角速度取得装置 - Google Patents
角速度取得装置 Download PDFInfo
- Publication number
- JP6562878B2 JP6562878B2 JP2016130106A JP2016130106A JP6562878B2 JP 6562878 B2 JP6562878 B2 JP 6562878B2 JP 2016130106 A JP2016130106 A JP 2016130106A JP 2016130106 A JP2016130106 A JP 2016130106A JP 6562878 B2 JP6562878 B2 JP 6562878B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode portion
- movable
- movable body
- electrode
- fixed electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
- G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5733—Structural details or topology
- G01C19/5755—Structural details or topology the devices having a single sensing mass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5733—Structural details or topology
- G01C19/5755—Structural details or topology the devices having a single sensing mass
- G01C19/5762—Structural details or topology the devices having a single sensing mass the sensing mass being connected to a driving mass, e.g. driving frames
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
- Pressure Sensors (AREA)
- Micromachines (AREA)
Description
Claims (5)
- 第1方向、およびコリオリ力に基づく第2方向に振動する可動体であって、前記第2方向に延びる可動電極部を有する可動体と、
前記第2方向に延び、ギャップを隔てて前記可動電極部に対向する固定電極部を有するホールド電極と、
前記固定電極部と前記可動電極部との間に配置され、前記固定電極部の前記可動電極部に対向する面よりも前記可動電極部側に位置する端部をもつストッパと、
を備えた角速度取得装置。 - 前記固定電極部の前記第2方向の両端に一対の前記ストッパが配置されている請求項1記載の角速度取得装置。
- 複数の前記可動電極部と複数の前記固定電極部が前記第1方向に交互に並び、前記固定電極部の前記第1方向の両側に前記ストッパが配置されている請求項1または2に記載の角速度取得装置。
- 前記可動電極部の前記第2方向の両端が、前記可動体に固定されている請求項1〜3のいずれか1つに記載の角速度取得装置。
- 前記固定電極部および前記ストッパは、基板上の同じレイヤーに設けられ、
前記固定電極部および前記ストッパは、前記固定電極部および前記ストッパが設けられた前記レイヤーの下方のレイヤーに設けられた配線に接続し、
前記配線は、前記固定電極部に接続された第1配線と、前記ストッパに接続され、前記第1配線に対して分離した第2配線とを有する請求項1〜4のいずれか1つに記載の角速度取得装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016130106A JP6562878B2 (ja) | 2016-06-30 | 2016-06-30 | 角速度取得装置 |
TW106102986A TWI634330B (zh) | 2016-06-30 | 2017-01-25 | Angular velocity acquisition device |
US15/444,272 US10330472B2 (en) | 2016-06-30 | 2017-02-27 | Angular velocity acquisition device |
CN201710120474.3A CN107561304B (zh) | 2016-06-30 | 2017-03-02 | 角速度取得装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016130106A JP6562878B2 (ja) | 2016-06-30 | 2016-06-30 | 角速度取得装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018004383A JP2018004383A (ja) | 2018-01-11 |
JP6562878B2 true JP6562878B2 (ja) | 2019-08-21 |
Family
ID=60806622
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016130106A Active JP6562878B2 (ja) | 2016-06-30 | 2016-06-30 | 角速度取得装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US10330472B2 (ja) |
JP (1) | JP6562878B2 (ja) |
CN (1) | CN107561304B (ja) |
TW (1) | TWI634330B (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6805189B2 (ja) * | 2018-01-26 | 2020-12-23 | 株式会社東芝 | 物理量検出装置 |
JP6759259B2 (ja) * | 2018-02-28 | 2020-09-23 | 株式会社東芝 | 振動装置 |
Family Cites Families (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100327481B1 (ko) * | 1995-12-27 | 2002-06-24 | 윤종용 | 마이크로 자이로스코프 |
JP3409565B2 (ja) * | 1996-03-01 | 2003-05-26 | 日産自動車株式会社 | 角速度センサの自己診断方法 |
KR100363786B1 (ko) * | 1999-05-13 | 2002-12-11 | 삼성전기주식회사 | 마이크로 자이로스코프 |
KR100363785B1 (ko) * | 1999-06-04 | 2002-12-11 | 삼성전기주식회사 | 마이크로 자이로스코프 |
DE19930779B4 (de) * | 1999-07-03 | 2010-05-06 | Robert Bosch Gmbh | Mikromechanisches Bauelement |
JP2002228680A (ja) * | 2001-02-02 | 2002-08-14 | Denso Corp | 容量式力学量センサ |
JP2002286452A (ja) * | 2001-03-26 | 2002-10-03 | Murata Mfg Co Ltd | 振動ジャイロおよびそれを用いた電子装置 |
DE10116931A1 (de) * | 2001-04-05 | 2002-10-17 | Bosch Gmbh Robert | Sensor |
US6928872B2 (en) | 2001-04-27 | 2005-08-16 | Stmicroelectronics S.R.L. | Integrated gyroscope of semiconductor material with at least one sensitive axis in the sensor plane |
US6759591B2 (en) * | 2001-06-13 | 2004-07-06 | Mitsubishi Denki Kabushiki Kaisha | Silicon device |
US6865944B2 (en) * | 2002-12-16 | 2005-03-15 | Honeywell International Inc. | Methods and systems for decelerating proof mass movements within MEMS structures |
JP4654668B2 (ja) * | 2004-03-12 | 2011-03-23 | パナソニック電工株式会社 | ジャイロセンサおよびそれを用いたセンサ装置 |
JP4887034B2 (ja) * | 2005-12-05 | 2012-02-29 | 日立オートモティブシステムズ株式会社 | 慣性センサ |
CN100498340C (zh) * | 2006-02-28 | 2009-06-10 | 株式会社电装 | 角速度传感器及其操作方法 |
JP4310325B2 (ja) * | 2006-05-24 | 2009-08-05 | 日立金属株式会社 | 角速度センサ |
JP4362739B2 (ja) * | 2007-02-26 | 2009-11-11 | 株式会社デンソー | 振動型角速度センサ |
US8011247B2 (en) * | 2008-06-26 | 2011-09-06 | Honeywell International Inc. | Multistage proof-mass movement deceleration within MEMS structures |
DE102009001922A1 (de) * | 2009-03-26 | 2010-09-30 | Sensordynamics Ag | Mikro-Gyroskop zur Ermittlung von Rotationsbewegungen um drei senkrecht aufeinanderstehende Raumachsen x, y und z |
JP5975601B2 (ja) | 2011-02-25 | 2016-08-23 | セイコーエプソン株式会社 | 検出回路、物理量検出装置、角速度検出装置、集積回路装置及び電子機器 |
JP6098780B2 (ja) * | 2012-04-19 | 2017-03-22 | セイコーエプソン株式会社 | ジャイロセンサーおよび電子機器 |
CN104684841A (zh) * | 2012-06-13 | 2015-06-03 | 普渡研究基金会 | 微电子机械系统和使用方法 |
US9194704B2 (en) | 2013-03-13 | 2015-11-24 | Freescale Semiconductor, Inc. | Angular rate sensor having multiple axis sensing capability |
US20140260613A1 (en) * | 2013-03-15 | 2014-09-18 | Invensense, Inc. | Elastic bump stops for mems devices |
JP2016042074A (ja) * | 2014-08-13 | 2016-03-31 | セイコーエプソン株式会社 | 物理量センサー、電子機器および移動体 |
JP6448448B2 (ja) * | 2015-04-10 | 2019-01-09 | 株式会社東芝 | ジャイロセンサの角速度の取得方法及び取得装置 |
CN104931032B (zh) * | 2015-06-26 | 2018-04-10 | 清华大学 | 一种单锚定点四质量块mems谐振式陀螺仪 |
US10190938B2 (en) * | 2015-09-22 | 2019-01-29 | Murata Manufacturing Co., Ltd. | Semi-flexible proof-mass |
-
2016
- 2016-06-30 JP JP2016130106A patent/JP6562878B2/ja active Active
-
2017
- 2017-01-25 TW TW106102986A patent/TWI634330B/zh active
- 2017-02-27 US US15/444,272 patent/US10330472B2/en active Active
- 2017-03-02 CN CN201710120474.3A patent/CN107561304B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
US20180003502A1 (en) | 2018-01-04 |
JP2018004383A (ja) | 2018-01-11 |
TW201802475A (zh) | 2018-01-16 |
US10330472B2 (en) | 2019-06-25 |
TWI634330B (zh) | 2018-09-01 |
CN107561304B (zh) | 2020-02-28 |
CN107561304A (zh) | 2018-01-09 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6067026B2 (ja) | マイクロ電気機械システム(mems) | |
JP6264969B2 (ja) | 音響トランスデューサ | |
US8643927B2 (en) | MEMS device and method of manufacturing MEMS device | |
JP2007139505A (ja) | 容量式力学量センサ | |
KR20060061218A (ko) | 회전방향으로 진동하는 관성체를 구비한 각속도 검출기 | |
JP2007298405A (ja) | 静電容量式センサ | |
KR100316774B1 (ko) | 마이크로 관성 센서의 제작 방법 | |
JP2007298410A (ja) | 静電容量式センサ | |
JP5923970B2 (ja) | 振動型角速度センサ | |
JP5790003B2 (ja) | 加速度センサー | |
JP6400621B2 (ja) | 角速度取得装置及び角速度取得用の電子部品 | |
JP6562878B2 (ja) | 角速度取得装置 | |
JP6503032B2 (ja) | センサ装置 | |
US20040135466A1 (en) | Electrostatic vibration device | |
JP5083635B2 (ja) | 加速度センサ | |
JP2011196966A (ja) | 慣性センサ | |
JP4590976B2 (ja) | 力学量センサ | |
JP2008282889A (ja) | 振動構造体及びその製造方法 | |
JP4367111B2 (ja) | 半導体力学量センサ | |
JP2014077767A (ja) | センサ素子 | |
KR20120131788A (ko) | 관성센서 및 그 제조방법 | |
JP2005345245A (ja) | 容量型力学量センサ及びその製造方法 | |
JP2011049211A (ja) | 静電容量式センサおよびその製造方法 | |
JP6294463B2 (ja) | センサ | |
JP2011038781A (ja) | 半導体装置及び半導体装置の製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A711 | Notification of change in applicant |
Free format text: JAPANESE INTERMEDIATE CODE: A712 Effective date: 20171116 |
|
A711 | Notification of change in applicant |
Free format text: JAPANESE INTERMEDIATE CODE: A711 Effective date: 20171117 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20180830 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20190529 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20190624 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20190723 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6562878 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |