JP6562597B2 - イミノ二酢酸および誘導体を含む無電解金属化のための触媒 - Google Patents
イミノ二酢酸および誘導体を含む無電解金属化のための触媒 Download PDFInfo
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Description
6.2mLアリコートの15g/Lイミノ二酢酸ストック溶液を900mLのDI水で希釈することにより、1リットルの水中に75ppmのパラジウムイオンおよび93ppmのイミノ二酢酸を含む触媒を調製した。208mgのテトラクロロパラジウム酸ナトリウムを最小のDI水に溶解させ、イミノ二酢酸溶液に添加した。その後に混合物を1リットルまで希釈し、室温において30分間、撹拌した。パラジウムイオンに対するイミノ二酢酸のモル比は2:1であった。溶液のpHは3.4であった。
1.各アンクラッドラミネートを50℃において5分間CIRCUPOSIT(商標)コンディショナー 3325溶液に浸漬し、その後に4分間、流れる水道水ですすぎ洗いした。
2.その後に、ラミネートをPREPOSIT(商標)748Etch溶液に室温において1分間浸漬し、その後に4分間、流れる水道水ですすぎ洗いした。
3.各ラミネートをパラジウムイオンおよびイミノ二酢酸触媒またはパラジウムイオンおよびニトリロ三酢酸触媒のいずれかの溶液に40℃において5分間浸漬させ、続いて流れる脱イオン水で1分間、すすぎ洗いした。
4.その後に、ラミネートを0.25Mのホスフィン酸ナトリウム溶液に50℃において1分間浸漬させ、パラジウムイオンを金属パラジウムにまで還元し、その後に流れるDI水で1分間すすぎ洗いした。
5.活性化されたラミネートを40℃および13のpHにおいてCIRCUPOSIT(商標)880 Electroless Copper浴に15分間、浸漬し、ラミネート上に銅をめっきした。
6.銅めっきの後に、ラミネートを流れる水道水で4分間すすぎ洗いした。
銅めっきの性能について各ラミネートを調べた。両方のラミネートは光沢のある均一な銅の堆積物を有するようであった。
硝酸銀からの70ppmの銀イオンおよび86ppmのイミノ二酢酸を含む触媒ならびに硝酸銀からの70ppmの銀イオンおよび124ppmのニトリロ三酢酸を含む触媒を調製する以外は、実施例1の方法を繰り返す。実施例1に記載したのと実質的に同じ方法により触媒を調製する。銀イオンに対する錯体化剤のモル比は1:1である。各触媒溶液のpHは3である。NY−1140アンクラッドラミネートを実施例1に記載した無電解銅めっきのために調製する。めっきの後に、銅の堆積物の質についてラミネートを調べる。両方のラミネートは滑らかかつ光沢のある銅の堆積物を有することが期待される。
触媒溶液が75ppmのパラジウムイオンおよび250ppmのN−(2−ヒドロキシエチル)イミノ二酢酸を含んでいたことを除いて、同じタイプのラミネートを使用して、実施例1の方法を繰り返す。500mgのN−(2−ヒドロキシエチル)イミノ二酢酸を1900mLのDI水に溶解させ、溶液のpHを1M水酸化ナトリウムで10.2に調節する。375mgの硝酸パラジウム水和物を最小のDI水に溶解させ、錯体化剤を含む溶液に添加する。その後に、室温において30分間撹拌しながら、溶液を2リットルまで希釈する。最終溶液のpHは8.5である。パラジウムイオンに対する錯体化剤のモル比は2:1である。めっき後、銅の堆積物の質についてラミネートを調べる。ラミネートは、滑らかかつ光沢のある銅の堆積物を有することが期待される。
触媒溶液が75ppmのパラジウムイオンおよび140ppmのN−(2−カルボキシエチル)イミノ二酢酸を含んでいたことを除いて、実施例1の方法を繰り返す。0.24gのN−(2−カルボキシエチル)イミノ二酢酸を400mLのDI水に溶解させる。1Mの水酸化ナトリウムで溶液を10.5のpHに調節する。375mgの硝酸パラジウム水和物を最小量のDI水に溶解させ、N−(2−カルボキシエチル)イミノ二酢酸溶液に添加する。その後にパラジウムイオンおよびN−(2−カルボキシエチル)イミノ二酢酸の溶液を1gの酒石酸ナトリウムカリウムおよび3.8gの四ホウ酸ナトリウム10水和物を含む1リットルの溶液に添加する。この溶液を室温において30分間撹拌する。パラジウムイオンに対する錯体化剤のモル比は2:1であり、溶液のpHは9である。めっき後、銅の堆積物の質についてラミネートを調べる。ラミネートは、滑らかかつ光沢のある銅の堆積物を有することが期待される。
ラミネートを活性化するために銀イオンおよびN−(2−ヒドロキシ−カルボキシエチル)イミノ二酢酸触媒を使用する以外は、実施例1の方法を繰り返す。触媒には、酢酸銀からの150ppmの銀および460ppmのN−(2−ヒドロキシ−カルボキシエチル)イミノ二酢酸が含まれる。触媒は実施例1に記載したのと実質的に同じ方法により調製する。銀イオンに対する錯体化剤のモル比は1.5:1である。手順およびパラメータは上記の実施例1と実質的に同じである。ラミネートは滑らかかつ光沢のある銅の堆積物を有することが期待される。
金イオンおよびo−ピコリルイミノ二酢酸ならびにプラチナおよびo−ピコリルイミノ二酢酸を使用して触媒を調製する以外は実施例1の方法を繰り返す。金イオンは、金塩化カリウムにより提供され、プラチナイオンはテトラクロロ白金酸カリウムにより提供される。触媒は、実施例1に記載したのと実質的に同じ方法により調製する。金および錯体化触媒は160ppmの金イオンおよび182ppmの錯体化剤を含む。プラチナおよび錯体化剤触媒は、80ppmのプラチナイオンおよび92ppmの錯体化剤を含む。金属イオンに対するo−ピコリルイミノ二酢酸のモル比は1:1である。手順およびパラメータは上記の実施例1と実質的に同じである。ラミネートは滑らかかつ光沢のある銅の堆積物を有することが期待される。
触媒溶液が75ppmのパラジウムイオンおよび366ppmの5−(N,N−ビス(カルボキシメチル)アミノ)−バルビツール酸を含んでいたことを除き、実施例1の方法を繰り返す。0.24gの5−(N,N−ビス(カルボキシメチル)アミノ)−バルビツール酸を400mLのDI水に溶解させる。1Mの水酸化ナトリウムで10.5のpHまで溶液を調節する。375mgの硝酸パラジウム水和物を最小量のDI水に溶解させ、5−(N,N−ビス(カルボキシメチル)アミノ)−バルビツール酸溶液に添加する。その後に、パラジウムイオンおよび錯体化剤の溶液を1gのクエン酸三ナトリウムおよび3.8gの四ホウ酸ナトリウム10水和物を含む1リットルの溶液に添加する。この溶液を室温において30分間撹拌する。パラジウムイオンに対する錯体化剤のモル比は2:1であり、溶液のpHは9である。めっき後、銅の堆積物の質についてラミネートを調べる。ラミネートは滑らかかつ光沢のある銅の堆積物を有することが期待される。
Claims (7)
- a)銀イオン、金イオン、およびプラチナイオンからなる群から選択される1以上の金属イオンと、イミノ二酢酸、ニトリロ三酢酸、N−(2−ヒドロキシエチル)イミノ二酢酸、N−(2−カルボキシエチル)イミノ二酢酸、N−(2−ヒドロキシ−カルボキシエチル)イミノ二酢酸、o−ピコリルイミノ二酢酸、および5−(N,N−ビス(カルボキシメチル)アミノ)−バルビツール酸、ならびにそれらの塩からなる群から選択される1つ以上の化合物またはそれらの塩との錯体を含む触媒を用意するステップ
b)前記触媒を基材に適用するステップ;
c)還元剤を前記触媒に適用するステップ;および
d)前記基材を金属めっき浴に浸漬して、前記基材上に金属を無電解的にめっきするステップ
を含む方法。 - 前記金属イオンに対する前記1つ以上の化合物のモル比が1:1〜4:1である、請求項1に記載の方法。
- 前記金属めっき浴の金属が、銅、銅合金、ニッケル、およびニッケル合金から選択される、請求項1または2に記載の方法。
- 前記1つ以上の化合物が、25ppm〜1000ppmの量である、請求項1から3のいずれか1項に記載の方法。
- 本質的に、銀イオン、金イオン、およびプラチナイオンからなる群から選択される1以上の金属イオンと、イミノ二酢酸、ニトリロ三酢酸、N−(2−ヒドロキシエチル)イミノ二酢酸、N−(2−カルボキシエチル)イミノ二酢酸、N−(2−ヒドロキシ−カルボキシエチル)イミノ二酢酸、o−ピコリルイミノ二酢酸、および5−(N,N−ビス(カルボキシメチル)アミノ)−バルビツール酸、ならびにそれらの塩からなる群から選択される1つ以上の化合物またはそれらの塩との錯体からなる、
無電解金属化のための触媒。 - 前記金属イオンに対する前記1つ以上の化合物またはそれらの塩のモル比が1:1〜4:1である、請求項5に記載の触媒。
- 前記1つ以上の化合物が25ppm〜1000ppmの量である、請求項5または6に記載の触媒。
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DE2116389C3 (de) * | 1971-03-30 | 1980-04-03 | Schering Ag, 1000 Berlin Und 4619 Bergkamen | Lösung zur Aktivierung von Oberflächen für die Metallisierung |
US3962494A (en) * | 1971-07-29 | 1976-06-08 | Photocircuits Division Of Kollmorgan Corporation | Sensitized substrates for chemical metallization |
US4563217A (en) * | 1983-07-25 | 1986-01-07 | Hitachi, Ltd. | Electroless copper plating solution |
JPS6026671A (ja) * | 1983-07-25 | 1985-02-09 | Hitachi Ltd | 化学銅めっき液 |
JPS62124280A (ja) * | 1985-08-21 | 1987-06-05 | Ishihara Yakuhin Kk | 無電解パラジウムメツキ液 |
DE3790128T (ja) * | 1986-03-04 | 1988-03-31 | ||
US5318803A (en) * | 1990-11-13 | 1994-06-07 | International Business Machines Corporation | Conditioning of a substrate for electroless plating thereon |
TW280837B (ja) * | 1992-06-29 | 1996-07-11 | Philips Electronics Nv | |
US5916840A (en) * | 1994-07-01 | 1999-06-29 | Monsanto Company | Process for preparing carboxylic acid salts and catalysts useful in such process |
US20050199587A1 (en) * | 2004-03-12 | 2005-09-15 | Jon Bengston | Non-chrome plating on plastic |
KR20080015936A (ko) * | 2005-07-20 | 2008-02-20 | 닛코킨조쿠 가부시키가이샤 | 무전해 팔라듐 도금액 |
EP2080822B1 (en) * | 2006-11-06 | 2017-03-29 | C. Uyemura & Co., Ltd. | Direct plating method and solution for palladium conductor layer formation |
KR101639084B1 (ko) * | 2008-07-08 | 2016-07-12 | 니혼 고쥰도가가쿠 가부시키가이샤 | 팔라듐 도금용 촉매 부여액 |
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