JP6555680B2 - 顕微鏡用照明装置 - Google Patents
顕微鏡用照明装置 Download PDFInfo
- Publication number
- JP6555680B2 JP6555680B2 JP2015012577A JP2015012577A JP6555680B2 JP 6555680 B2 JP6555680 B2 JP 6555680B2 JP 2015012577 A JP2015012577 A JP 2015012577A JP 2015012577 A JP2015012577 A JP 2015012577A JP 6555680 B2 JP6555680 B2 JP 6555680B2
- Authority
- JP
- Japan
- Prior art keywords
- unit
- dark field
- field illumination
- slider
- light source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000005286 illumination Methods 0.000 title claims description 259
- 230000003287 optical effect Effects 0.000 claims description 89
- 238000001514 detection method Methods 0.000 claims description 79
- 239000004065 semiconductor Substances 0.000 claims description 5
- 230000002093 peripheral effect Effects 0.000 claims description 4
- 230000008859 change Effects 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 23
- 239000000470 constituent Substances 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 4
- 230000006870 function Effects 0.000 description 3
- 238000003384 imaging method Methods 0.000 description 3
- 239000003086 colorant Substances 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 210000001747 pupil Anatomy 0.000 description 2
- 230000008901 benefit Effects 0.000 description 1
- 235000012489 doughnuts Nutrition 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 230000004313 glare Effects 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/06—Means for illuminating specimens
- G02B21/08—Condensers
- G02B21/10—Condensers affording dark-field illumination
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/02—Objectives
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/06—Means for illuminating specimens
- G02B21/08—Condensers
- G02B21/14—Condensers affording illumination for phase-contrast observation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/24—Base structure
- G02B21/248—Base structure objective (or ocular) turrets
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Microscoopes, Condenser (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015012577A JP6555680B2 (ja) | 2015-01-26 | 2015-01-26 | 顕微鏡用照明装置 |
| US15/001,790 US9891419B2 (en) | 2015-01-26 | 2016-01-20 | Microscope illumination apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015012577A JP6555680B2 (ja) | 2015-01-26 | 2015-01-26 | 顕微鏡用照明装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016138939A JP2016138939A (ja) | 2016-08-04 |
| JP2016138939A5 JP2016138939A5 (enExample) | 2018-03-01 |
| JP6555680B2 true JP6555680B2 (ja) | 2019-08-07 |
Family
ID=56434045
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015012577A Active JP6555680B2 (ja) | 2015-01-26 | 2015-01-26 | 顕微鏡用照明装置 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US9891419B2 (enExample) |
| JP (1) | JP6555680B2 (enExample) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6971770B2 (ja) * | 2017-10-18 | 2021-11-24 | 株式会社キーエンス | 拡大観察装置 |
| CN109916918A (zh) * | 2017-12-13 | 2019-06-21 | 武汉中导光电设备有限公司 | 一种检测平板清洁度和平整度的装置及方法 |
| WO2020145946A1 (en) * | 2019-01-08 | 2020-07-16 | Google Llc | Automated microscope objective detector |
| US11294162B2 (en) | 2019-02-07 | 2022-04-05 | Nanotronics Imaging, Inc. | Fluorescence microscopy inspection systems, apparatus and methods with darkfield channel |
| US11762183B2 (en) * | 2020-03-31 | 2023-09-19 | Wdi Wise Device Inc. | Method and apparatus for generating reflective dark field (RDF) illumination for a microscope |
| DE102022129094B4 (de) * | 2022-11-03 | 2024-06-27 | push4impact GmbH | Mikroskopobjektiv sowie Objektivrevolver und Mikroskop umfassend ein solches Mikroskopobjektiv |
| CN120010105A (zh) * | 2025-04-16 | 2025-05-16 | 奥来国信（北京）检测技术有限责任公司 | 一种多模态显微成像装置 |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3442218A1 (de) * | 1984-11-19 | 1986-05-28 | Fa. Carl Zeiss, 7920 Heidenheim | Auflichtbeleuchtungsapparat fuer mikroskope |
| JPS61270720A (ja) * | 1985-05-25 | 1986-12-01 | Nippon Kogaku Kk <Nikon> | 暗視野照明装置 |
| DE8915535U1 (de) * | 1989-03-02 | 1990-10-25 | Carl Zeiss, 89518 Heidenheim | Auflicht-Objektbeleuchtungseinrichtung |
| WO2000033025A1 (fr) * | 1998-11-30 | 2000-06-08 | Olympus Optical Co., Ltd. | Instrument de mesure |
| DE20304412U1 (de) * | 2003-03-19 | 2003-06-12 | Schott Glas, 55122 Mainz | Steuereinheit für Mischlichtbeleuchtungen |
| JP4579554B2 (ja) * | 2004-02-12 | 2010-11-10 | オリンパス株式会社 | 顕微鏡用照明装置 |
| JP2005316036A (ja) * | 2004-04-28 | 2005-11-10 | Olympus Corp | 撮像装置、照明光制御方法および照明光制御プログラム |
| JP2006276193A (ja) * | 2005-03-28 | 2006-10-12 | Nikon Corp | 顕微鏡 |
| JP2007093887A (ja) * | 2005-09-28 | 2007-04-12 | Olympus Corp | 照明装置及び顕微鏡 |
| JP2007293282A (ja) * | 2006-03-29 | 2007-11-08 | Olympus Corp | 顕微鏡 |
| DE102008012585A1 (de) * | 2008-03-05 | 2009-09-24 | Carl Zeiss Microlmaging Gmbh | Objektivwechsler mit Auflichtbeleuchtung für Lichtmikroskope |
| US8289621B2 (en) * | 2008-10-07 | 2012-10-16 | Gemological Institute Of America, Inc. | Reflected dark field method and apparatus |
| SE533017C2 (sv) * | 2009-02-20 | 2010-06-08 | Seco Tools Ab | Skärverktyg och skär med fluidströmningsstrukturer |
| JP2010271549A (ja) * | 2009-05-21 | 2010-12-02 | Olympus Corp | 顕微鏡システム |
| JP2012042669A (ja) * | 2010-08-18 | 2012-03-01 | Sony Corp | 顕微鏡制御装置及び光学的歪み補正方法 |
| NL2008936A (en) * | 2011-07-28 | 2013-01-29 | Asml Netherlands Bv | Illumination source for use in inspection methods and/or lithography inspection and lithographic apparatus and inspection method. |
| DE102011114336A1 (de) * | 2011-09-23 | 2013-03-28 | Carl Zeiss Microscopy Gmbh | Vorrichtung und Verfahren zur Durchlichtbeleuchtung für Lichtmikroskope und Mikroskopsystem |
| JP5875812B2 (ja) * | 2011-09-27 | 2016-03-02 | オリンパス株式会社 | 顕微鏡システムおよび照明強度調整方法 |
| JP6108772B2 (ja) * | 2012-11-05 | 2017-04-05 | オリンパス株式会社 | 顕微鏡及び暗視野対物レンズ |
| US9557551B2 (en) * | 2013-07-18 | 2017-01-31 | University Of Maine System | System and apparatus for illuminating a specimen |
-
2015
- 2015-01-26 JP JP2015012577A patent/JP6555680B2/ja active Active
-
2016
- 2016-01-20 US US15/001,790 patent/US9891419B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| US9891419B2 (en) | 2018-02-13 |
| US20160216500A1 (en) | 2016-07-28 |
| JP2016138939A (ja) | 2016-08-04 |
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