JP6551271B2 - 光増幅装置およびレーザ加工装置 - Google Patents
光増幅装置およびレーザ加工装置 Download PDFInfo
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Description
まず、本発明の実施の形態に係る光増幅装置およびその光増幅装置を含むレーザ加工装置の装置構成について説明する。図1は、本実施の形態に係るレーザ加工装置の構成例を示す図である。
第1のモードでは、レーザパルスの繰り返し周波数の設定、および、レーザパルスのパルス幅を広い範囲で設定できる。
<C.第2のモード>
第2のモードでは、第1のモードに比べて平均パワーを高くすることができるように、繰り返し周波数の設定範囲、およびパルス幅の設定範囲が定められる。
<D.モードの設定>
図8は、本実施の形態に係るレーザ加工装置100の設定処理を説明するためのフローチャートである。このフローチャートに示される処理は、主として制御部20によって実行される。図8を参照して、ステップS1において、制御部20は、レーザ加工装置100のリブート処理が実行されたかどうかを判断する。リブート処理が実行されなかった場合(ステップS1においてNO)、モードは現在のモード(第1のモードまたは第2のモード)に維持される(ステップS2)。一方、リブート処理が実行された場合(ステップS1においてYES)、制御部20は、モードを切り替える(ステップS3)。
ユーザインターフェースに関する以下の説明において、第1のモードおよび第2のモードを、それぞれ「スタンダードモード」および「EEモード」と称する。これらの名称は、本実施の形態を限定することを意図として用いられるものではないことに留意すべきである。
図13〜図16に、本実施の形態に係るレーザ加工装置100を動作させたときのレーザ特性の一例を示す。図13は、本実施の形態に係るレーザ加工装置100を第1のモードおよび第2のモードで動作させたときの出力の平均パワーを示したグラフである。図14は、本実施の形態に係るレーザ加工装置100を第1のモードおよび第2のモードで動作させたときのパルスエネルギを示したグラフである。図15は、本実施の形態に係るレーザ加工装置100を第1のモードおよび第2のモードで動作させたときのピークパワーを示したグラフである。
上記に開示された実施の形態においては、第1のモードと第2のモードとの間の2つのモードでの切り替えが説明される。他の実施の形態において、第1のモードから第2のモードが設定された場合、制御部20は、増幅光の繰り返し周波数fの上限を段階的あるいは連続的に変化させるユーザインターフェースからの入力(ユーザ入力)に応じて、パルス幅を、第1のモードにおけるパルス幅よりも増加させるとともに、励起光のパワーを、第1のモードにおける励起光のパワーよりも増加させてもよい。制御部20は、パルス幅および励起光のパワーを、段階的に増加させてもよく、連続的に増加させてもよい。
Claims (12)
- パルス状のシード光を発生するシード光源と、
励起光を発生する励起光源と、
前記シード光を前記励起光によって増幅して、増幅光を出力する光増幅ファイバと、
前記シード光源および前記励起光源を制御する制御部とを備え、
前記制御部は、前記増幅光のパルス幅の設定値が大きくなるほど、前記パルス幅の最小設定値における前記増幅光のピークエネルギーの閾値以内で前記増幅光のピークエネルギーが増大するように、前記励起光のパワーを制御するモードを有する、光増幅装置。 - 前記モードが設定された場合において、前記制御部は、前記増幅光の繰り返し周波数の上限を、前記パルス幅、前記繰り返し周波数のパラメータ調整に対して前記励起光のパワーが一定のモードである、前記モードとは異なる他のモードにおける前記繰り返し周波数の上限よりも低下させるとともに、前記パルス幅を前記最小設定値よりも大きく設定し、
前記制御部は、前記励起光源が発生する前記励起光のパワーを、前記他のモードにおける前記励起光のパワーよりも増加させる、請求項1に記載の光増幅装置。 - 前記制御部は、前記モードにおける前記増幅光の平均パワーを、前記他のモードにおける前記平均パワーよりも高くする、請求項2に記載の光増幅装置。
- 前記モードにおける前記パルス幅の最大値は、前記他のモードにおける前記パルス幅の最大値よりも大きい、請求項2または請求項3に記載の光増幅装置。
- 前記制御部は、前記パルス幅を大きくする場合には、前記シード光が複数の光パルスを含むパルス列として前記シード光源から出射されるように、前記シード光源を制御する、請求項4に記載の光増幅装置。
- 前記制御部は、前記パルス列を構成する前記光パルスの数を決定するための複数の設定パターンの中から、前記モードおよび前記他のモードの各々を設定するためのパターンをユーザに選択させる処理を実行する、請求項5に記載の光増幅装置。
- 前記制御部は、前記繰り返し周波数を決定するための複数の設定パターンの中から、前記モードおよび前記他のモードの各々を設定するためのパターンをユーザに選択させる処理を実行する、請求項2から請求項6のいずれか1項に記載の光増幅装置。
- 前記制御部は、リブート処理によって前記モードと前記他のモードとを互いに切り替える、請求項2から請求項6のいずれか1項に記載の光増幅装置。
- 前記パルス幅、繰り返し周波数のパラメータ調整に対して前記励起光のパワーが一定のモードである、前記モードとは異なる他のモードから前記モードが設定された場合において、前記制御部は、前記増幅光の前記繰り返し周波数の上限を低下させるためのユーザからの入力に応じて、前記パルス幅を、前記他のモードにおけるパルス幅よりも増加させるとともに、前記励起光のパワーを、前記他のモードにおける前記励起光のパワーよりも増加させる、請求項1に記載の光増幅装置。
- 前記パルス幅、繰り返し周波数のパラメータ調整に対して前記励起光のパワーが一定のモードである、前記モードとは異なる他のモードから前記モードが設定された場合において、前記制御部は、前記パルス幅を増加させるためのユーザからの入力に応じて、前記励起光のパワーを前記他のモードにおける前記励起光のパワーよりも増加させるとともに、前記繰り返し周波数の上限を、前記他のモードにおける前記繰り返し周波数の上限よりも低下させる、請求項1に記載の光増幅装置。
- 前記パルス幅、繰り返し周波数のパラメータ調整に対して前記励起光のパワーが一定のモードである、前記モードとは異なる他のモードから前記モードが設定された場合において、前記制御部は、前記励起光のパワーを増加させるためのユーザからの入力に応じて、前記パルス幅を、前記他のモードにおけるパルス幅よりも増加させるとともに、前記繰り返し周波数の上限を、前記他のモードにおける前記繰り返し周波数の上限よりも低下させる、請求項1に記載の光増幅装置。
- 請求項1から請求項11のいずれか1項に記載の光増幅装置を備える、レーザ加工装置。
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