JP6543646B2 - 高精度のシステムおよび用途におけるモーター駆動コンポーネントのためのバックラッシュ防止メカニズム - Google Patents

高精度のシステムおよび用途におけるモーター駆動コンポーネントのためのバックラッシュ防止メカニズム Download PDF

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Publication number
JP6543646B2
JP6543646B2 JP2016569637A JP2016569637A JP6543646B2 JP 6543646 B2 JP6543646 B2 JP 6543646B2 JP 2016569637 A JP2016569637 A JP 2016569637A JP 2016569637 A JP2016569637 A JP 2016569637A JP 6543646 B2 JP6543646 B2 JP 6543646B2
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Japan
Prior art keywords
nut
piston
motor
pump
backlash
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Active
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JP2016569637A
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Japanese (ja)
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JP2017517696A5 (enExample
JP2017517696A (ja
Inventor
ジェームズ・セドローン
イーラジ・ガシュガイ
ジョージ・エル・ゴネッラ
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Entegris Inc
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Entegris Inc
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • F16H25/2003—Screw mechanisms with arrangements for taking up backlash
    • F16H25/2006—Screw mechanisms with arrangements for taking up backlash with more than one nut or with nuts consisting of more than one bearing part
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B13/00—Pumps specially modified to deliver fixed or variable measured quantities
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B17/00—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
    • F04B17/03—Pumps characterised by combination with, or adaptation to, specific driving engines or motors driven by electric motors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • F04B19/04—Pumps for special use
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B23/00—Pumping installations or systems
    • F04B23/04—Combinations of two or more pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B25/00—Multi-stage pumps
    • F04B25/005—Multi-stage pumps with two cylinders
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/025—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms two or more plate-like pumping members in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/10—Other safety measures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B51/00—Testing machines, pumps, or pumping installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10—Valves; Arrangement of valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/16—Casings; Cylinders; Cylinder liners or heads; Fluid connections
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/20—Filtering
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B9/00—Piston machines or pumps characterised by the driving or driven means to or from their working members
    • F04B9/02—Piston machines or pumps characterised by the driving or driven means to or from their working members the means being mechanical
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2205/00—Fluid parameters
    • F04B2205/02—Pressure in the inlet chamber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2205/00—Fluid parameters
    • F04B2205/50—Presence of foreign matter in the fluid
    • F04B2205/503—Presence of foreign matter in the fluid of gas in a liquid flow, e.g. gas bubbles

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Reciprocating Pumps (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Transmission Devices (AREA)
  • Details Of Reciprocating Pumps (AREA)
JP2016569637A 2014-05-28 2015-05-28 高精度のシステムおよび用途におけるモーター駆動コンポーネントのためのバックラッシュ防止メカニズム Active JP6543646B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201462004117P 2014-05-28 2014-05-28
US62/004,117 2014-05-28
PCT/US2015/032816 WO2015184056A1 (en) 2014-05-28 2015-05-28 Anti-backlash mechanism for motor-driven components in precision systems and applications

Publications (3)

Publication Number Publication Date
JP2017517696A JP2017517696A (ja) 2017-06-29
JP2017517696A5 JP2017517696A5 (enExample) 2018-07-12
JP6543646B2 true JP6543646B2 (ja) 2019-07-10

Family

ID=53433273

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2016569637A Active JP6543646B2 (ja) 2014-05-28 2015-05-28 高精度のシステムおよび用途におけるモーター駆動コンポーネントのためのバックラッシュ防止メカニズム
JP2016569640A Active JP6644712B2 (ja) 2014-05-28 2015-05-28 供給および分注センサー、濾過および分注確認、ならびに濾過器の減圧プライミングを有するポンプの動作のためのシステムおよび方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2016569640A Active JP6644712B2 (ja) 2014-05-28 2015-05-28 供給および分注センサー、濾過および分注確認、ならびに濾過器の減圧プライミングを有するポンプの動作のためのシステムおよび方法

Country Status (8)

Country Link
US (2) US20170114879A1 (enExample)
EP (2) EP3149329B1 (enExample)
JP (2) JP6543646B2 (enExample)
KR (2) KR102141271B1 (enExample)
CN (2) CN106460811A (enExample)
SG (2) SG11201609910XA (enExample)
TW (2) TWI664350B (enExample)
WO (2) WO2015184056A1 (enExample)

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Also Published As

Publication number Publication date
CN106662083A (zh) 2017-05-10
TW201608133A (zh) 2016-03-01
WO2015184057A9 (en) 2016-09-01
WO2015184056A1 (en) 2015-12-03
EP3149328A1 (en) 2017-04-05
TW201608131A (zh) 2016-03-01
EP3149328B1 (en) 2019-03-20
EP3149329B1 (en) 2020-01-29
TWI670417B (zh) 2019-09-01
EP3149329A1 (en) 2017-04-05
WO2015184057A1 (en) 2015-12-03
CN106662083B (zh) 2018-11-27
KR102141271B1 (ko) 2020-08-04
JP2017516944A (ja) 2017-06-22
KR20170013322A (ko) 2017-02-06
US20170107982A1 (en) 2017-04-20
SG10201810172QA (en) 2018-12-28
KR20170012423A (ko) 2017-02-02
JP6644712B2 (ja) 2020-02-12
CN106460811A (zh) 2017-02-22
JP2017517696A (ja) 2017-06-29
TWI664350B (zh) 2019-07-01
SG11201609910XA (en) 2016-12-29
KR102141270B1 (ko) 2020-08-04
US20170114879A1 (en) 2017-04-27

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