JP6531909B2 - 圧電駆動装置、モーター、ロボット及びポンプ - Google Patents
圧電駆動装置、モーター、ロボット及びポンプ Download PDFInfo
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- JP6531909B2 JP6531909B2 JP2015190750A JP2015190750A JP6531909B2 JP 6531909 B2 JP6531909 B2 JP 6531909B2 JP 2015190750 A JP2015190750 A JP 2015190750A JP 2015190750 A JP2015190750 A JP 2015190750A JP 6531909 B2 JP6531909 B2 JP 6531909B2
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- electrode
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- piezoelectric drive
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Images
Landscapes
- Manipulator (AREA)
- Reciprocating Pumps (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015190750A JP6531909B2 (ja) | 2015-09-29 | 2015-09-29 | 圧電駆動装置、モーター、ロボット及びポンプ |
| US15/268,972 US20170092838A1 (en) | 2015-09-29 | 2016-09-19 | Piezoelectric driving apparatus, method of manufacturing the same, motor, robot, and pump |
| CN201610851955.7A CN107017334A (zh) | 2015-09-29 | 2016-09-26 | 压电驱动装置及其制造方法、马达、机器人以及泵 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015190750A JP6531909B2 (ja) | 2015-09-29 | 2015-09-29 | 圧電駆動装置、モーター、ロボット及びポンプ |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017070030A JP2017070030A (ja) | 2017-04-06 |
| JP2017070030A5 JP2017070030A5 (enrdf_load_stackoverflow) | 2018-10-18 |
| JP6531909B2 true JP6531909B2 (ja) | 2019-06-19 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015190750A Active JP6531909B2 (ja) | 2015-09-29 | 2015-09-29 | 圧電駆動装置、モーター、ロボット及びポンプ |
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| Country | Link |
|---|---|
| JP (1) | JP6531909B2 (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6946893B2 (ja) * | 2017-09-22 | 2021-10-13 | セイコーエプソン株式会社 | 圧電駆動装置、圧電モーター、ロボット、電子部品搬送装置、プリンターおよびプロジェクター |
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- 2015-09-29 JP JP2015190750A patent/JP6531909B2/ja active Active
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| Publication number | Publication date |
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| JP2017070030A (ja) | 2017-04-06 |
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