JP6511593B1 - 真空バルブ用開閉プレート - Google Patents

真空バルブ用開閉プレート Download PDF

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Publication number
JP6511593B1
JP6511593B1 JP2019009852A JP2019009852A JP6511593B1 JP 6511593 B1 JP6511593 B1 JP 6511593B1 JP 2019009852 A JP2019009852 A JP 2019009852A JP 2019009852 A JP2019009852 A JP 2019009852A JP 6511593 B1 JP6511593 B1 JP 6511593B1
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JP
Japan
Prior art keywords
sealing plate
pad member
buffer pad
vacuum valve
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2019009852A
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English (en)
Japanese (ja)
Other versions
JP2020008164A (ja
Inventor
ピョン ペク，ジョウン
ピョン ペク，ジョウン
イル キム，ギョン
イル キム，ギョン
ホ イ，チャン
ホ イ，チャン
Original Assignee
イノレス カンパニー リミテッド
イノレス カンパニー リミテッド
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by イノレス カンパニー リミテッド, イノレス カンパニー リミテッド filed Critical イノレス カンパニー リミテッド
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Publication of JP6511593B1 publication Critical patent/JP6511593B1/ja
Publication of JP2020008164A publication Critical patent/JP2020008164A/ja
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/04—Construction of housing; Use of materials therefor of sliding valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F16K3/314—Forms or constructions of slides; Attachment of the slide to the spindle

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Details Of Valves (AREA)
  • Sliding Valves (AREA)
JP2019009852A 2018-07-10 2019-01-24 真空バルブ用開閉プレート Active JP6511593B1 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020180079933A KR101918512B1 (ko) 2018-07-10 2018-07-10 진공밸브용 개폐플레이트
KR10-2018-0079933 2018-07-10

Publications (2)

Publication Number Publication Date
JP6511593B1 true JP6511593B1 (ja) 2019-05-15
JP2020008164A JP2020008164A (ja) 2020-01-16

Family

ID=64363508

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019009852A Active JP6511593B1 (ja) 2018-07-10 2019-01-24 真空バルブ用開閉プレート

Country Status (3)

Country Link
JP (1) JP6511593B1 (zh)
KR (1) KR101918512B1 (zh)
TW (1) TWI677642B (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102499323B1 (ko) * 2021-06-28 2023-02-15 주식회사 씰테크 반도체 진공용 밸브
KR20230059635A (ko) 2021-10-26 2023-05-03 삼성전자주식회사 밸브 구조체 및 이를 포함하는 기판 처리 장치

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6471181B2 (en) * 2001-01-11 2002-10-29 Vat Holding Ag Suspension of a valve plate of a vacuum valve
US7396001B2 (en) * 2005-12-20 2008-07-08 Vat Holding Ag Valve for essentially gastight closing a flow path
WO2007148657A1 (ja) * 2006-06-19 2007-12-27 Nippon Valqua Industries, Ltd. 弁体部及びゲートバルブ装置
DE102008061315B4 (de) * 2008-12-11 2012-11-15 Vat Holding Ag Aufhängung einer Ventilplatte an einer Ventilstange
JP2014111971A (ja) * 2012-12-05 2014-06-19 Kubota Corp 仕切弁

Also Published As

Publication number Publication date
KR101918512B1 (ko) 2018-11-15
TWI677642B (zh) 2019-11-21
TW202006284A (zh) 2020-02-01
JP2020008164A (ja) 2020-01-16

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