JP6510008B2 - レーザパターニングのための一体化された光および熱遮蔽層を有する薄膜構造およびデバイス - Google Patents
レーザパターニングのための一体化された光および熱遮蔽層を有する薄膜構造およびデバイス Download PDFInfo
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- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
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- H01L31/02—Details
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- H01L31/02162—Coatings for devices characterised by at least one potential jump barrier or surface barrier for filtering or shielding light, e.g. multicolour filters for photodetectors
- H01L31/02164—Coatings for devices characterised by at least one potential jump barrier or surface barrier for filtering or shielding light, e.g. multicolour filters for photodetectors for shielding light, e.g. light blocking layers, cold shields for infrared detectors
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- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/042—PV modules or arrays of single PV cells
- H01L31/0445—PV modules or arrays of single PV cells including thin film solar cells, e.g. single thin film a-Si, CIS or CdTe solar cells
- H01L31/046—PV modules composed of a plurality of thin film solar cells deposited on the same substrate
- H01L31/0463—PV modules composed of a plurality of thin film solar cells deposited on the same substrate characterised by special patterning methods to connect the PV cells in a module, e.g. laser cutting of the conductive or active layers
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Description
本出願は、全体として参照により本明細書に組み込まれている、2011年8月8日出願の米国仮特許出願第61/521,212号の利益を主張する。
Claims (20)
- 電気化学デバイスを形成するための装置であって、
基板側から順にカソード電流コレクタ層、熱遮蔽層、光遮蔽層、カソード層、電解質層、アノード層、アノード電流コレクタ層、および保護コーティング層を含むスタックを基板上にブランケット堆積させるための第1のシステムと、
前記スタックを直接レーザパターニングするための第2のシステムであって、前記第2のシステムは、少なくとも1つのレーザを備える、第2のシステムと、を備え、
前記光遮蔽層が、前記光遮蔽層に到達するレーザエネルギーの一部分を吸収または反射する性質により特徴付けられる金属層であり、
前記熱遮蔽層が、レーザービームの進行方向と逆方向で隣接するデバイス層の温度が前記隣接するデバイス層の融解温度Tmを超過するように、レーザ直接パターニング中に前記熱遮蔽層を通る熱流を低減させるのに十分低い熱拡散率Dを有する導電層である、装置。 - 前記第1のシステムが、クラスタツールである、請求項1に記載の装置。
- 前記第1のシステムが、インラインツールである、請求項1に記載の装置。
- 前記第1のシステムが、少なくとも1つの独立型ツールを備える、請求項1の記載の装置。
- 前記第2のシステムが、独立型ツールである、請求項1に記載の装置。
- 前記第2のシステムが、前記第1のシステム内に一体化されている、請求項1に記載の装置。
- 前記電気化学デバイスが、薄膜電池である、請求項1に記載の装置。
- 前記第2のシステムが、複数のレーザである、請求項1に記載の装置。
- 前記第2のシステムが、前記スタックの上方に位置付けされたレーザ、および前記スタックの下方に位置付けされたレーザを備え、前記スタックは、ステージ上に保持され、前記ステージは、前記スタックの下方に配置されたレーザによる前記スタックの直接レーザパターニングに対応するために、前記スタックの下方に開口を有している、請求項1に記載の装置。
- 前記第2のシステムが、紫外−可視レーザを備える、請求項1に記載の装置。
- 前記紫外−可視レーザが、ピコ秒レーザである、請求項10に記載の装置。
- 前記第2のシステムが、赤外レーザを備える、請求項1に記載の装置。
- 前記赤外レーザが、ピコ秒レーザである、請求項12に記載の装置。
- 前記第2のシステムが、可視レーザを備える、請求項1に記載の装置。
- 前記可視レーザが、ピコ秒レーザである、請求項14に記載の装置。
- 前記熱遮蔽層の厚さが、熱拡散距離√(Dτ)より大きく、τが、前記少なくとも1つのレーザのレーザパルスの持続時間である、請求項1に記載の装置。
- 前記熱遮蔽層の熱拡散率が、0.1cm2/sより小さい、請求項1に記載の装置。
- 前記少なくとも1つのレーザが、ナノ秒レーザである、請求項1に記載の装置。
- 前記第2のシステム、前記スタック、および前記基板は、少なくとも1つのビームが前記熱遮蔽層に達する前に前記基板を通過するように構成されている、請求項1に記載の装置。
- 前記光遮蔽層および前記熱遮蔽層が、同じ層である、請求項1に記載の装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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US201161521212P | 2011-08-08 | 2011-08-08 | |
US61/521,212 | 2011-08-08 |
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JP2014525127A Division JP6250540B2 (ja) | 2011-08-08 | 2012-08-08 | レーザパターニングのための一体化された光および熱遮蔽層を有する薄膜構造およびデバイス |
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JP2018073839A JP2018073839A (ja) | 2018-05-10 |
JP6510008B2 true JP6510008B2 (ja) | 2019-05-08 |
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JP2017224223A Active JP6510008B2 (ja) | 2011-08-08 | 2017-11-22 | レーザパターニングのための一体化された光および熱遮蔽層を有する薄膜構造およびデバイス |
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US (4) | US8993443B2 (ja) |
EP (1) | EP2742524A4 (ja) |
JP (2) | JP6250540B2 (ja) |
KR (2) | KR101945260B1 (ja) |
CN (2) | CN103733311B (ja) |
WO (1) | WO2013022992A2 (ja) |
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KR20160141864A (ko) | 2016-12-09 |
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US8993443B2 (en) | 2015-03-31 |
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JP2014523106A (ja) | 2014-09-08 |
EP2742524A2 (en) | 2014-06-18 |
US9252308B2 (en) | 2016-02-02 |
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US20150364629A1 (en) | 2015-12-17 |
WO2013022992A3 (en) | 2013-05-10 |
CN105789680A (zh) | 2016-07-20 |
US20150056744A1 (en) | 2015-02-26 |
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WO2013022992A2 (en) | 2013-02-14 |
US20150364630A1 (en) | 2015-12-17 |
KR101945260B1 (ko) | 2019-02-07 |
US9240508B2 (en) | 2016-01-19 |
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