JP6501700B2 - 電解処理装置及び電解処理方法 - Google Patents
電解処理装置及び電解処理方法 Download PDFInfo
- Publication number
- JP6501700B2 JP6501700B2 JP2015236351A JP2015236351A JP6501700B2 JP 6501700 B2 JP6501700 B2 JP 6501700B2 JP 2015236351 A JP2015236351 A JP 2015236351A JP 2015236351 A JP2015236351 A JP 2015236351A JP 6501700 B2 JP6501700 B2 JP 6501700B2
- Authority
- JP
- Japan
- Prior art keywords
- wiring
- counter electrode
- capacitor
- plating
- ions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000011282 treatment Methods 0.000 title claims description 41
- 238000000034 method Methods 0.000 title claims description 36
- 239000003990 capacitor Substances 0.000 claims description 69
- 150000002500 ions Chemical class 0.000 claims description 36
- 238000012545 processing Methods 0.000 claims description 33
- 230000008569 process Effects 0.000 claims description 28
- 230000005684 electric field Effects 0.000 claims description 16
- 239000007788 liquid Substances 0.000 claims description 15
- 238000007599 discharging Methods 0.000 claims description 5
- 230000001590 oxidative effect Effects 0.000 claims description 3
- 238000007747 plating Methods 0.000 description 87
- JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 description 41
- 229910001431 copper ion Inorganic materials 0.000 description 41
- 239000000243 solution Substances 0.000 description 20
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 16
- 229910052802 copper Inorganic materials 0.000 description 16
- 239000010949 copper Substances 0.000 description 16
- 230000001965 increasing effect Effects 0.000 description 15
- 230000009467 reduction Effects 0.000 description 11
- 230000008859 change Effects 0.000 description 10
- 230000008021 deposition Effects 0.000 description 9
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 7
- 239000002245 particle Substances 0.000 description 7
- 229910021645 metal ion Inorganic materials 0.000 description 6
- 230000005686 electrostatic field Effects 0.000 description 5
- 238000002474 experimental method Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 239000013078 crystal Substances 0.000 description 3
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 2
- 150000001450 anions Chemical class 0.000 description 2
- 229910000365 copper sulfate Inorganic materials 0.000 description 2
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 2
- 238000005868 electrolysis reaction Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000003848 UV Light-Curing Methods 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000033116 oxidation-reduction process Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/007—Current directing devices
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/10—Electrodes, e.g. composition, counter electrode
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D21/00—Processes for servicing or operating cells for electrolytic coating
- C25D21/12—Process control or regulation
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/18—Electroplating using modulated, pulsed or reversing current
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/60—Electroplating characterised by the structure or texture of the layers
- C25D5/615—Microstructure of the layers, e.g. mixed structure
- C25D5/617—Crystalline layers
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/38—Electroplating: Baths therefor from solutions of copper
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02J—CIRCUIT ARRANGEMENTS OR SYSTEMS FOR SUPPLYING OR DISTRIBUTING ELECTRIC POWER; SYSTEMS FOR STORING ELECTRIC ENERGY
- H02J7/00—Circuit arrangements for charging or depolarising batteries or for supplying loads from batteries
- H02J7/34—Parallel operation in networks using both storage and other dc sources, e.g. providing buffering
- H02J7/345—Parallel operation in networks using both storage and other dc sources, e.g. providing buffering using capacitors as storage or buffering devices
Description
本発明はこの例に限らず種々の態様を採りうるものである。
20 共通電極
21 対向電極
30 直流電源
31 第1の配線
32 第2の配線
33 コンデンサ
34 スイッチ
40 制御部
50 銅めっき
100 スイッチ
C 銅イオン
M めっき液
S 硫酸イオン
Claims (8)
- 処理液に含まれる被処理イオンを用いて所定の処理を行う電解処理装置であって、
前記処理液を挟むように配置された共通電極と対向電極を有し、
前記共通電極には第1の配線と第2の配線が接続され、且つ前記第1の配線にはコンデンサが設けられ、
前記電解処理装置には前記所定の処理を制御する制御部が設けられ、
前記所定の処理は、
前記第1の配線と前記第2の配線を接続せずに前記コンデンサの充電を行うことで、前記共通電極は前記処理液に電界を形成し、前記処理液中の被処理イオンを前記対向電極側に移動させ、
前記第1の配線と前記第2の配線を接続して前記コンデンサの放電を行うことで、前記共通電極は前記対向電極との間で電圧を印加し、前記対向電極側に移動した前記被処理イオンを酸化又は還元することを含むことを特徴とする、電解処理装置。
- 前記第1の配線と前記第2の配線の接続又は非接続を切り替えるスイッチをさらに有することを特徴とする、請求項1に記載の電解処理装置。
- 前記第1の配線において、前記コンデンサは並列に複数設けられていることを特徴とする、請求項1又は2に記載の電解処理装置。
- 前記コンデンサは前記処理液の外部に設けられていることを特徴とする、請求項1〜3のいずれか一項に記載の電解処理装置。
- 処理液に含まれる被処理イオンを用いて所定の処理を行う電解処理方法であって、
前記処理液を挟むように共通電極と対向電極を配置すると共に、前記共通電極に第1の配線と第2の配線を接続し、且つ前記第1の配線にコンデンサを設ける第1の工程と、
前記第1の配線と前記第2の配線を接続せずに前記コンデンサの充電を行うことで、前記処理液に電界を形成し、前記処理液中の被処理イオンを前記対向電極側に移動させる第2の工程と、
前記第1の配線と前記第2の配線を接続して前記コンデンサの放電を行うことで、前記共通電極と前記対向電極との間で電圧を印加し、前記対向電極側に移動した前記被処理イオンを酸化又は還元する第3の工程と、を有することを特徴とする、電解処理方法。 - 前記第2の工程における前記第1の配線と前記第2の配線の非接続と、前記第3の工程における前記第1の配線と前記第2の配線の接続との切り替えは、スイッチによって行われることを特徴とする、請求項5に記載の電解処理方法。
- 前記第1の工程において、前記第1の配線に前記コンデンサを並列に複数設けることを特徴とする、請求項5又は6に記載の電解処理方法。
- 前記第1の工程において、前記コンデンサを前記処理液の外部に設けることを特徴とする、請求項5〜7のいずれか一項に記載の電解処理方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015236351A JP6501700B2 (ja) | 2015-12-03 | 2015-12-03 | 電解処理装置及び電解処理方法 |
TW105138227A TWI692550B (zh) | 2015-12-03 | 2016-11-22 | 電解處理裝置及電解處理方法 |
KR1020160156275A KR102523718B1 (ko) | 2015-12-03 | 2016-11-23 | 전해 처리 장치 및 전해 처리 방법 |
US15/362,159 US10392719B2 (en) | 2015-12-03 | 2016-11-28 | Electrolytic treatment apparatus and electrolytic treatment method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015236351A JP6501700B2 (ja) | 2015-12-03 | 2015-12-03 | 電解処理装置及び電解処理方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017101298A JP2017101298A (ja) | 2017-06-08 |
JP6501700B2 true JP6501700B2 (ja) | 2019-04-17 |
Family
ID=58798180
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015236351A Active JP6501700B2 (ja) | 2015-12-03 | 2015-12-03 | 電解処理装置及び電解処理方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US10392719B2 (ja) |
JP (1) | JP6501700B2 (ja) |
KR (1) | KR102523718B1 (ja) |
TW (1) | TWI692550B (ja) |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101300966B1 (ko) | 2012-06-29 | 2013-08-27 | 주식회사 케이씨텍 | 기판도금장치 |
JP6411741B2 (ja) * | 2013-05-20 | 2018-10-24 | 国立大学法人 熊本大学 | 電解処理方法及び電解処理装置 |
WO2015104951A1 (ja) * | 2014-01-08 | 2015-07-16 | 東京エレクトロン株式会社 | 電界処理方法及び電界処理装置 |
-
2015
- 2015-12-03 JP JP2015236351A patent/JP6501700B2/ja active Active
-
2016
- 2016-11-22 TW TW105138227A patent/TWI692550B/zh active
- 2016-11-23 KR KR1020160156275A patent/KR102523718B1/ko active IP Right Grant
- 2016-11-28 US US15/362,159 patent/US10392719B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
TWI692550B (zh) | 2020-05-01 |
TW201739972A (zh) | 2017-11-16 |
US20170159202A1 (en) | 2017-06-08 |
KR20170065443A (ko) | 2017-06-13 |
JP2017101298A (ja) | 2017-06-08 |
US10392719B2 (en) | 2019-08-27 |
KR102523718B1 (ko) | 2023-04-19 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR102217899B1 (ko) | 전해 처리 방법 및 전해 처리 장치 | |
JP6337016B2 (ja) | 電解処理方法及び電解処理装置 | |
JP6594445B2 (ja) | 半導体装置の製造装置及び製造方法 | |
CN110249079B (zh) | 电解处理装置和电解处理方法 | |
JP6501700B2 (ja) | 電解処理装置及び電解処理方法 | |
WO2019102866A1 (ja) | 半導体装置の製造装置、半導体装置の製造方法及びコンピュータ記憶媒体 | |
KR101639564B1 (ko) | 벨트형 전기 주조 장치 | |
JP2015129330A (ja) | 電解処理方法及び電解処理装置 | |
JP6833521B2 (ja) | 配線形成方法及び配線形成装置 | |
JP2023120930A (ja) | 電解処理方法及び電解処理装置 | |
JP6806476B2 (ja) | 電解処理方法及び電解処理装置 | |
WO2019102867A1 (ja) | 半導体装置の製造装置、半導体装置の製造方法及びコンピュータ記憶媒体 | |
JP2017028187A (ja) | 半導体装置の製造方法及び製造装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20171227 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20180827 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20180904 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20181030 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20181120 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20190116 |
|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20190201 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20190219 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20190319 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6501700 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |