JP6500445B2 - 真空バルブ - Google Patents

真空バルブ Download PDF

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Publication number
JP6500445B2
JP6500445B2 JP2015001442A JP2015001442A JP6500445B2 JP 6500445 B2 JP6500445 B2 JP 6500445B2 JP 2015001442 A JP2015001442 A JP 2015001442A JP 2015001442 A JP2015001442 A JP 2015001442A JP 6500445 B2 JP6500445 B2 JP 6500445B2
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JP
Japan
Prior art keywords
opening
valve
edge
wedge
valve plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2015001442A
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English (en)
Japanese (ja)
Other versions
JP2016125618A (ja
JP2016125618A5 (enExample
Inventor
竜大 田口
竜大 田口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP2015001442A priority Critical patent/JP6500445B2/ja
Priority to US14/940,343 priority patent/US9689507B2/en
Priority to CN201510812076.9A priority patent/CN105757272B/zh
Publication of JP2016125618A publication Critical patent/JP2016125618A/ja
Publication of JP2016125618A5 publication Critical patent/JP2016125618A5/ja
Application granted granted Critical
Publication of JP6500445B2 publication Critical patent/JP6500445B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/04—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members
    • F16K3/06—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members in the form of closure plates arranged between supply and discharge passages
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/04—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members
    • F16K3/10—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members with special arrangements for separating the sealing faces or for pressing them together
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/20—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the seats
    • F16K3/207—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the seats by means of hydraulic forces

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sliding Valves (AREA)
  • Details Of Valves (AREA)
  • Lift Valve (AREA)
JP2015001442A 2015-01-07 2015-01-07 真空バルブ Active JP6500445B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2015001442A JP6500445B2 (ja) 2015-01-07 2015-01-07 真空バルブ
US14/940,343 US9689507B2 (en) 2015-01-07 2015-11-13 Vacuum valve
CN201510812076.9A CN105757272B (zh) 2015-01-07 2015-11-20 真空阀

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015001442A JP6500445B2 (ja) 2015-01-07 2015-01-07 真空バルブ

Publications (3)

Publication Number Publication Date
JP2016125618A JP2016125618A (ja) 2016-07-11
JP2016125618A5 JP2016125618A5 (enExample) 2017-10-12
JP6500445B2 true JP6500445B2 (ja) 2019-04-17

Family

ID=56286263

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015001442A Active JP6500445B2 (ja) 2015-01-07 2015-01-07 真空バルブ

Country Status (3)

Country Link
US (1) US9689507B2 (enExample)
JP (1) JP6500445B2 (enExample)
CN (1) CN105757272B (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3306150A1 (en) * 2016-10-04 2018-04-11 Paul Wurth S.A. Gate valve for a chemical plant
EP3318787A1 (de) * 2016-11-03 2018-05-09 VAT Holding AG Vakuumventilsystem zum geregelten betrieb eines vakuumprozesses
TWI765936B (zh) 2016-11-29 2022-06-01 美商東京威力科創Ｆｓｉ股份有限公司 用以對處理腔室中之微電子基板進行處理的平移與旋轉夾頭
WO2018140789A1 (en) 2017-01-27 2018-08-02 Tel Fsi, Inc. Systems and methods for rotating and translating a substrate in a process chamber
EP3372881A1 (de) * 2017-03-07 2018-09-12 VAT Holding AG Optimierte druckregelung für und mit einem vakuumventil
KR102151172B1 (ko) * 2018-02-14 2020-09-02 프리시스 주식회사 팬듈럼 게이트 밸브
US11545387B2 (en) * 2018-07-13 2023-01-03 Tel Manufacturing And Engineering Of America, Inc. Magnetic integrated lift pin system for a chemical processing chamber
JP7434717B2 (ja) * 2019-03-27 2024-02-21 株式会社島津製作所 バルブ制御装置および真空バルブ

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS527145A (en) * 1975-07-02 1977-01-20 Schade Max G Ventilating valve
GB1510156A (en) * 1975-08-23 1978-05-10 Itw Ltd Valves for vehicle heater systems
US4373546A (en) * 1980-11-26 1983-02-15 Rafael Krakovsky Long life valve
JPS6099366U (ja) * 1983-12-14 1985-07-06 三菱重工業株式会社 仕切弁
JPS60156267U (ja) * 1984-03-27 1985-10-17 千代田工業株式会社 絞り調節用仕切弁
US5873562A (en) 1996-01-29 1999-02-23 Vat Holding Ag Control apparatus for controlling gas flow in a molecular region
US6629682B2 (en) * 2001-01-11 2003-10-07 Vat Holding Ag Vacuum valve
US6494434B1 (en) * 2001-07-12 2002-12-17 Vat Holding Ag Butterfly valve
US6994317B2 (en) * 2003-09-19 2006-02-07 Vat Holding Ag Regulating vacuum valve
US7278444B2 (en) * 2005-02-22 2007-10-09 Mks Instruments, Inc. Valve assembly having improved pump-down performance
CN2931962Y (zh) * 2005-11-14 2007-08-08 上海凯日机械制造有限公司 大开门双螺旋锥形混合机卸料阀
JP2008267151A (ja) * 2007-04-16 2008-11-06 Nissan Diesel Motor Co Ltd バルブ構造
TW201124655A (en) * 2009-09-03 2011-07-16 Ulvac Inc Gate valve
JP5357679B2 (ja) * 2009-09-24 2013-12-04 入江工研株式会社 コンダクタンスバルブ及び真空ポンプ
US9267605B2 (en) * 2011-11-07 2016-02-23 Lam Research Corporation Pressure control valve assembly of plasma processing chamber and rapid alternating process
JP2014126183A (ja) * 2012-12-27 2014-07-07 Canon Anelva Corp コンダクタンスバルブ

Also Published As

Publication number Publication date
JP2016125618A (ja) 2016-07-11
CN105757272B (zh) 2018-08-31
US9689507B2 (en) 2017-06-27
CN105757272A (zh) 2016-07-13
US20160195191A1 (en) 2016-07-07

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