JP2016125618A5 - - Google Patents

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Publication number
JP2016125618A5
JP2016125618A5 JP2015001442A JP2015001442A JP2016125618A5 JP 2016125618 A5 JP2016125618 A5 JP 2016125618A5 JP 2015001442 A JP2015001442 A JP 2015001442A JP 2015001442 A JP2015001442 A JP 2015001442A JP 2016125618 A5 JP2016125618 A5 JP 2016125618A5
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JP
Japan
Prior art keywords
wedge
valve
edge
curve
valve opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2015001442A
Other languages
English (en)
Japanese (ja)
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JP2016125618A (ja
JP6500445B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2015001442A priority Critical patent/JP6500445B2/ja
Priority claimed from JP2015001442A external-priority patent/JP6500445B2/ja
Priority to US14/940,343 priority patent/US9689507B2/en
Priority to CN201510812076.9A priority patent/CN105757272B/zh
Publication of JP2016125618A publication Critical patent/JP2016125618A/ja
Publication of JP2016125618A5 publication Critical patent/JP2016125618A5/ja
Application granted granted Critical
Publication of JP6500445B2 publication Critical patent/JP6500445B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2015001442A 2015-01-07 2015-01-07 真空バルブ Active JP6500445B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2015001442A JP6500445B2 (ja) 2015-01-07 2015-01-07 真空バルブ
US14/940,343 US9689507B2 (en) 2015-01-07 2015-11-13 Vacuum valve
CN201510812076.9A CN105757272B (zh) 2015-01-07 2015-11-20 真空阀

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015001442A JP6500445B2 (ja) 2015-01-07 2015-01-07 真空バルブ

Publications (3)

Publication Number Publication Date
JP2016125618A JP2016125618A (ja) 2016-07-11
JP2016125618A5 true JP2016125618A5 (enExample) 2017-10-12
JP6500445B2 JP6500445B2 (ja) 2019-04-17

Family

ID=56286263

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015001442A Active JP6500445B2 (ja) 2015-01-07 2015-01-07 真空バルブ

Country Status (3)

Country Link
US (1) US9689507B2 (enExample)
JP (1) JP6500445B2 (enExample)
CN (1) CN105757272B (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3306150A1 (en) * 2016-10-04 2018-04-11 Paul Wurth S.A. Gate valve for a chemical plant
EP3318787A1 (de) * 2016-11-03 2018-05-09 VAT Holding AG Vakuumventilsystem zum geregelten betrieb eines vakuumprozesses
TWI765936B (zh) 2016-11-29 2022-06-01 美商東京威力科創Ｆｓｉ股份有限公司 用以對處理腔室中之微電子基板進行處理的平移與旋轉夾頭
WO2018140789A1 (en) 2017-01-27 2018-08-02 Tel Fsi, Inc. Systems and methods for rotating and translating a substrate in a process chamber
EP3372881A1 (de) * 2017-03-07 2018-09-12 VAT Holding AG Optimierte druckregelung für und mit einem vakuumventil
KR102151172B1 (ko) * 2018-02-14 2020-09-02 프리시스 주식회사 팬듈럼 게이트 밸브
US11545387B2 (en) * 2018-07-13 2023-01-03 Tel Manufacturing And Engineering Of America, Inc. Magnetic integrated lift pin system for a chemical processing chamber
JP7434717B2 (ja) * 2019-03-27 2024-02-21 株式会社島津製作所 バルブ制御装置および真空バルブ

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS527145A (en) * 1975-07-02 1977-01-20 Schade Max G Ventilating valve
GB1510156A (en) * 1975-08-23 1978-05-10 Itw Ltd Valves for vehicle heater systems
US4373546A (en) * 1980-11-26 1983-02-15 Rafael Krakovsky Long life valve
JPS6099366U (ja) * 1983-12-14 1985-07-06 三菱重工業株式会社 仕切弁
JPS60156267U (ja) * 1984-03-27 1985-10-17 千代田工業株式会社 絞り調節用仕切弁
US5873562A (en) 1996-01-29 1999-02-23 Vat Holding Ag Control apparatus for controlling gas flow in a molecular region
US6629682B2 (en) * 2001-01-11 2003-10-07 Vat Holding Ag Vacuum valve
US6494434B1 (en) * 2001-07-12 2002-12-17 Vat Holding Ag Butterfly valve
US6994317B2 (en) * 2003-09-19 2006-02-07 Vat Holding Ag Regulating vacuum valve
US7278444B2 (en) * 2005-02-22 2007-10-09 Mks Instruments, Inc. Valve assembly having improved pump-down performance
CN2931962Y (zh) * 2005-11-14 2007-08-08 上海凯日机械制造有限公司 大开门双螺旋锥形混合机卸料阀
JP2008267151A (ja) * 2007-04-16 2008-11-06 Nissan Diesel Motor Co Ltd バルブ構造
TW201124655A (en) * 2009-09-03 2011-07-16 Ulvac Inc Gate valve
JP5357679B2 (ja) * 2009-09-24 2013-12-04 入江工研株式会社 コンダクタンスバルブ及び真空ポンプ
US9267605B2 (en) * 2011-11-07 2016-02-23 Lam Research Corporation Pressure control valve assembly of plasma processing chamber and rapid alternating process
JP2014126183A (ja) * 2012-12-27 2014-07-07 Canon Anelva Corp コンダクタンスバルブ

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