JP6474672B2 - はんだめっき銅線の製造方法、及びはんだめっき銅線製造装置 - Google Patents
はんだめっき銅線の製造方法、及びはんだめっき銅線製造装置 Download PDFInfo
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- JP6474672B2 JP6474672B2 JP2015083925A JP2015083925A JP6474672B2 JP 6474672 B2 JP6474672 B2 JP 6474672B2 JP 2015083925 A JP2015083925 A JP 2015083925A JP 2015083925 A JP2015083925 A JP 2015083925A JP 6474672 B2 JP6474672 B2 JP 6474672B2
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title claims description 316
- 238000004519 manufacturing process Methods 0.000 title claims description 54
- 229910000679 solder Inorganic materials 0.000 claims description 331
- 238000007747 plating Methods 0.000 claims description 97
- 238000010438 heat treatment Methods 0.000 claims description 70
- 239000010949 copper Substances 0.000 claims description 49
- 229910052802 copper Inorganic materials 0.000 claims description 36
- 238000007654 immersion Methods 0.000 claims description 28
- 238000001816 cooling Methods 0.000 claims description 25
- 230000006698 induction Effects 0.000 claims description 18
- 239000004020 conductor Substances 0.000 claims description 2
- 238000007598 dipping method Methods 0.000 claims 1
- 229910000765 intermetallic Inorganic materials 0.000 description 61
- 229910017482 Cu 6 Sn 5 Inorganic materials 0.000 description 18
- 229910045601 alloy Inorganic materials 0.000 description 14
- 239000000956 alloy Substances 0.000 description 14
- 230000000052 comparative effect Effects 0.000 description 11
- 238000000034 method Methods 0.000 description 11
- 239000007789 gas Substances 0.000 description 9
- 239000000463 material Substances 0.000 description 9
- 230000007723 transport mechanism Effects 0.000 description 9
- 230000008569 process Effects 0.000 description 7
- 238000012545 processing Methods 0.000 description 7
- 239000003507 refrigerant Substances 0.000 description 7
- 229910052718 tin Inorganic materials 0.000 description 7
- 239000011261 inert gas Substances 0.000 description 5
- 230000009467 reduction Effects 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 230000001276 controlling effect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 4
- 229910017944 Ag—Cu Inorganic materials 0.000 description 3
- 229910020816 Sn Pb Inorganic materials 0.000 description 3
- 229910020922 Sn-Pb Inorganic materials 0.000 description 3
- 229910008783 Sn—Pb Inorganic materials 0.000 description 3
- 238000005452 bending Methods 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 230000005611 electricity Effects 0.000 description 3
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 238000011144 upstream manufacturing Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910020888 Sn-Cu Inorganic materials 0.000 description 2
- 229910019204 Sn—Cu Inorganic materials 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 239000000155 melt Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 238000010301 surface-oxidation reaction Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000008393 encapsulating agent Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 230000008719 thickening Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- C23C2/00—Hot-dipping or immersion processes for applying the coating material in the molten state without affecting the shape; Apparatus therefor
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Description
本発明に係るはんだめっき銅線の製造方法は、銅線の表面にはんだめっき層を備えるはんだめっき銅線の製造方法であって、通電による抵抗加熱又は誘導加熱により、溶融はんだ浴への浸漬直前の温度を650℃〜1020℃に加熱した銅線を、230℃〜330℃の温度の当該溶融はんだ浴中に0.7秒〜4.0秒浸漬し、その後、当該溶融はんだ浴から引き上げるはんだめっき工程を含み、当該溶融はんだ浴内に引き込まれた当該銅線近傍、すなわち、溶融はんだ浴内に引き込んだ650℃〜1020℃に加熱した銅線により温度上昇がおこる温度調整域のはんだ浴温度を230℃〜440℃とすることを特徴とする。
次に、本発明のはんだめっき銅線製造装置について説明する。本発明に係るはんだめっき銅線製造装置は、銅線の表面にはんだめっき層を備えるはんだめっき銅線の製造装置であって、230℃〜330℃の溶融はんだ浴を貯留した溶融はんだ槽と、当該溶融はんだ浴内に前記銅線を引き込んだ後、当該溶融はんだ浴外に引き上げる銅線搬送手段と、当該溶融はんだ浴内に引き込む前記銅線を通電による抵抗加熱又は誘導加熱により加熱する加熱手段と、当該溶融はんだ槽内に配設され、当該溶融はんだ浴内に引き込まれた前記銅線近傍、すなわち、溶融はんだ浴内に引き込んだ加熱した銅線により温度上昇がおこる温度調整域のはんだ浴温度を230℃〜440℃に冷却する温度調整手段とを備えることを特徴とする。以下、本発明のはんだめっき銅線製造装置の具体的な実施の形態について図1の概略構成図を参照して説明する。
次に、本発明のはんだめっき銅線2の形態について説明する。本発明に係るはんだめっき銅線2は、上述のはんだめっき銅線の製造方法又ははんだめっき銅線製造装置1により得られるはんだめっき銅線2であることを特徴とする。本発明のはんだめっき銅線2は、銅線3の表面に形成されるはんだめっき層4と当該銅線3との界面に、Cu3Snの第1金属化合物層5とCu6 Sn 5 の第2金属間化合物層6とからなる2層の金属間化合物層を備え、当該金属間化合物層の合計厚さが0.1μm〜4.0μmである。以下、本発明のはんだめっき銅線2の具体的な実施の形態について図3の概略断面図を参照して説明する。なお、図3に示す各層の厚さは、実際の層の厚さを示すものではないことを念のために述べておく。
上述の各実施例1〜実施例11及び比較例1〜比較例6のはんだめっき銅線について、はんだめっき層の厚さ、金属間化合物層の厚さ、はんだめっき銅線の0.2%耐力を測定した。はんだめっき銅線の0.2%耐力が70MPa以下である各実施例及び比較例について、はんだめっき層の密着性試験を行った。
はんだめっき層の厚さ及び金属間化合物層の厚さの測定は、各実施例のはんだめっき銅線の断面を光学顕微鏡で確認することにより行った。上述の表1に、各実施例及び各比較例の各はんだめっき層及び金属間化合物層の平均厚さを示す。
はんだめっき銅線の0.2%耐力は、JIS Z 2241に準じて測定した。上述の表1に、各実施例及び各比較例のはんだめっき銅線の0.2%耐力を示す。
はんだめっき層の密着性の評価は、各実施例のはんだめっき銅線を用いて180°密着曲げ試験を行い、曲げ部分にはんだめっき層の割れや剥がれの有無を観察することにより行う。表2には、曲げ部分にはんだめっき層の割れや剥がれがない場合には、○と判定し、割れや剥がれがある場合には、×と判定した。表2にはんだめっき層の密着性の評価を示す。
2 はんだめっき銅線
3 銅線
4 はんだめっき層
5 第1金属間化合物層
6 第2金属間化合物層
7 コントロールパネル
8 膜厚計
10 溶融はんだ槽
11 溶融はんだ浴
12 ヒータ
13 温度センサ
20 銅線搬送機構(銅線搬送手段)
21 ターン用搬送ロール
22 送出用搬送ロール(給電ロール)
23 入口用搬送ロール
24 引上用搬送ロール
25 出口用搬送ロール
26 包囲体
30 加熱装置(加熱手段)
31 電源
32 出力制御部
33 滑動子
33A 給電線
34 電極体
34A 給電線
35 銅線用温度センサ
40 温度調整装置(温度調整手段)
41 冷媒回路
42 冷却コイル
43 循環用ポンプ
44 温度センサ
Claims (4)
- 銅線の表面にはんだめっき層を備えるはんだめっき銅線の製造方法であって、
通電による抵抗加熱又は誘導加熱により、溶融はんだ浴への浸漬直前の温度を650℃〜1020℃に加熱した銅線を、230℃〜330℃の温度の当該溶融はんだ浴中に0.7秒〜4.0秒浸漬し、その後、当該溶融はんだ浴から引き上げるはんだめっき工程を含み、
当該溶融はんだ浴内に引き込んだ当該650℃〜1020℃に加熱した銅線により温度上昇がおこる温度調整域のはんだ浴温度を230℃〜440℃とすることを特徴とするはんだめっき銅線の製造方法。 - 銅線の表面にはんだめっき層を備えるはんだめっき銅線の製造装置であって、
230℃〜330℃の溶融はんだ浴を貯留した溶融はんだ槽と、
当該溶融はんだ浴内に前記銅線を引き込んだ後、当該溶融はんだ浴外に引き上げる銅線搬送手段と、
当該溶融はんだ浴内に引き込む前記銅線を通電による抵抗加熱又は誘導加熱により加熱する加熱手段と、
当該溶融はんだ槽内に配設され、当該溶融はんだ浴内に引き込んだ当該加熱した銅線により温度上昇がおこる温度調整域のはんだ浴温度を230℃〜440℃に冷却する温度調整手段とを備えることを特徴とするはんだめっき銅線製造装置。 - 前記温度調整手段は、熱良導性材料からなる冷却コイルである請求項2に記載のはんだめっき銅線製造装置。
- 前記溶融はんだ浴への浸漬直前の前記銅線の温度が650℃〜1020℃で、かつ、当該溶融はんだ浴中の当該銅線の浸漬時間が0.7秒〜4.0秒である請求項2又は請求項3に記載のはんだめっき銅線製造装置。
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