JP6472804B2 - 物理的効果を発生するマイクロ電気機械装置 - Google Patents

物理的効果を発生するマイクロ電気機械装置 Download PDF

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Publication number
JP6472804B2
JP6472804B2 JP2016539686A JP2016539686A JP6472804B2 JP 6472804 B2 JP6472804 B2 JP 6472804B2 JP 2016539686 A JP2016539686 A JP 2016539686A JP 2016539686 A JP2016539686 A JP 2016539686A JP 6472804 B2 JP6472804 B2 JP 6472804B2
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Japan
Prior art keywords
moving
piezoelectric
moving element
piezoelectric member
electric field
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Expired - Fee Related
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JP2016539686A
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Japanese (ja)
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JP2016536155A5 (cg-RX-API-DMAC7.html
JP2016536155A (ja
Inventor
カプラン，シャイ
コーエン，ユヴァール
シモン，メイアー ベン
シモン，メイアー ベン
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Audio Pixels Ltd
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Audio Pixels Ltd
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    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • H04R17/005—Piezoelectric transducers; Electrostrictive transducers using a piezoelectric polymer
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/802—Circuitry or processes for operating piezoelectric or electrostrictive devices not otherwise provided for, e.g. drive circuits
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
    • H04R2201/003—Mems transducers or their use

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Micromachines (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
JP2016539686A 2013-09-09 2014-09-08 物理的効果を発生するマイクロ電気機械装置 Expired - Fee Related JP6472804B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US14/021,152 US9510103B2 (en) 2013-09-09 2013-09-09 Microelectromechanical apparatus for generating a physical effect
US14/021,152 2013-09-09
PCT/IL2014/050798 WO2015033346A1 (en) 2013-09-09 2014-09-08 Microelectromechanical apparatus for generating a physical effect

Publications (3)

Publication Number Publication Date
JP2016536155A JP2016536155A (ja) 2016-11-24
JP2016536155A5 JP2016536155A5 (cg-RX-API-DMAC7.html) 2017-10-26
JP6472804B2 true JP6472804B2 (ja) 2019-02-20

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016539686A Expired - Fee Related JP6472804B2 (ja) 2013-09-09 2014-09-08 物理的効果を発生するマイクロ電気機械装置

Country Status (8)

Country Link
US (2) US9510103B2 (cg-RX-API-DMAC7.html)
EP (1) EP3044970B1 (cg-RX-API-DMAC7.html)
JP (1) JP6472804B2 (cg-RX-API-DMAC7.html)
KR (1) KR102180850B1 (cg-RX-API-DMAC7.html)
CN (1) CN105612764B (cg-RX-API-DMAC7.html)
DK (1) DK3044970T3 (cg-RX-API-DMAC7.html)
IL (1) IL244088B (cg-RX-API-DMAC7.html)
WO (1) WO2015033346A1 (cg-RX-API-DMAC7.html)

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DE102013224718A1 (de) * 2013-12-03 2015-06-03 Robert Bosch Gmbh MEMS-Mikrofonbauelement und Vorrichtung mit einem solchen MEMS-Mikrofonbauelement
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US10567883B2 (en) 2015-07-22 2020-02-18 Audio Pixels Ltd. Piezo-electric actuators
WO2017013665A1 (en) 2015-07-22 2017-01-26 Audio Pixels Ltd. Dsr speaker elements and methods of manufacturing thereof
DE102015114242A1 (de) * 2015-08-27 2017-03-02 USound GmbH MEMS-Lautsprecher mit Positionssensor
DE102015116707A1 (de) * 2015-10-01 2017-04-06 USound GmbH Flexible MEMS-Leiterplatteneinheit sowie Schallwandleranordnung
US10516943B2 (en) * 2016-05-04 2019-12-24 Infineon Technologies Ag Microelectromechanical device, an array of microelectromechanical devices, a method of manufacturing a microelectromechanical device, and a method of operating a microelectromechanical device
US10636936B2 (en) * 2018-03-05 2020-04-28 Sharp Kabushiki Kaisha MEMS array system and method of manipulating objects
EP3432594A1 (en) 2018-03-09 2019-01-23 Oticon A/s Audio device with mems speaker
US11697135B2 (en) * 2018-11-09 2023-07-11 Texas Instruments Incorporated Multi-frequency hybrid piezo actuation and capactive transducer
WO2020136994A1 (ja) 2018-12-27 2020-07-02 株式会社村田製作所 圧電トランスデューサ
IT201900001017A1 (it) * 2019-01-23 2020-07-23 St Microelectronics Srl Trasduttore elettroacustico microelettromeccanico ad attuazione piezoelettrica e relativo procedimento di fabbricazione
TWI803124B (zh) 2021-12-29 2023-05-21 財團法人工業技術研究院 具多重振動部的微機電裝置
IL299527A (en) 2022-12-26 2024-07-01 Audio Pixels Ltd Electro-Mechanical Device Comprising An Electrically Split Array Of Moving Elements, And Methods Of Controlling Thereof
CN116317694B (zh) * 2023-05-18 2023-08-04 南京航空航天大学 一种利用挠曲电效应调控压电器件频率及电势分布的方法
KR102808604B1 (ko) * 2023-09-11 2025-05-20 연세대학교 산학협력단 보호층이 형성된 2차원 압전 물질 기반의 마이크로폰 및 이의 제조 방법

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Also Published As

Publication number Publication date
US10522733B2 (en) 2019-12-31
IL244088B (en) 2020-06-30
DK3044970T3 (en) 2019-03-04
US20170033274A1 (en) 2017-02-02
IL244088A0 (en) 2016-04-21
WO2015033346A1 (en) 2015-03-12
KR102180850B1 (ko) 2020-11-20
EP3044970A1 (en) 2016-07-20
US9510103B2 (en) 2016-11-29
KR20160069517A (ko) 2016-06-16
CN105612764B (zh) 2018-10-09
JP2016536155A (ja) 2016-11-24
EP3044970B1 (en) 2018-11-07
CN105612764A (zh) 2016-05-25
US20150071467A1 (en) 2015-03-12

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