JP6463065B2 - アレイ基板およびこれを備える液晶表示パネルならびにアレイ基板の検査方法 - Google Patents
アレイ基板およびこれを備える液晶表示パネルならびにアレイ基板の検査方法 Download PDFInfo
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- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
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Description
<構成>
図1は、本実施の形態1におけるアレイ基板1の平面図である。なお、図1は、模式的に示すものであり、図示された構成要素の正確な大きさなどを反映するものではない。また、図1では、図面が煩雑とならないように、発明の主要部以外の省略や構成の一部簡略化などを適宜行っている。これらの点は、以下の図においても同様とする。さらに、以下の図においては、既出の図において説明したものと同一の構成要素には同一の符号を付し、その説明を省略する。
本実施の形態1に係るアレイ基板1が用いられたFFSモードの液晶表示パネルを例にして、接続変換部107b(図3)の製造工程について説明する。
本実施の形態1におけるアレイ基板1は、画像を表示する表示領域101と、表示領域101の周囲を囲む額縁領域102と、を備えるアレイ基板1であって、表示領域101において並列して形成され、額縁領域102まで延設された複数の走査線104と、複数の走査線104と交差して表示領域101において並列して形成され、額縁領域102まで延設された複数の信号線103と、複数の走査線104と複数の信号線103とのそれぞれの交点に配置された薄膜トランジスタ106と、額縁領域102に形成された複数の額縁内配線117a,118と、額縁領域102において、走査線104および信号線103と額縁内配線117a,118とを上下に隔てる絶縁層3と、走査線104または信号線103と額縁内配線117a,118とを電気的に接続する、額縁領域102に設けられた複数の接続変換部107a,107bと、を備え、各接続変換部107a,107bには、絶縁層3を貫通する単一のコンタクトホール11が形成されており、単一のコンタクトホール11内の導電膜を介して、走査線104または信号線103と額縁内配線117a,118とが電気的に接続されている。
図5は、本実施の形態2における接続変換部107bの平面図である。また、図6は、図5中の線分B−Bにおける断面図である。
本実施の形態2におけるアレイ基板1において、単一のコンタクトホール11は、単一のコンタクトホール11の第1の底が走査線104または信号線103と接する第1の水平領域11aと、単一のコンタクトホール11の第2の底が額縁内配線117a,118と接する第2の水平領域11bと、を備え、第1の水平領域11aの面積と、第2の水平領域との面積11bとが異なる。
図9は、本実施の形態3における接続変換部107b(又は107a)の断面図である。図9に示すように、接続変換部107bにおいて、額縁内配線118を、半導体層4と導電膜16の積層構造にしてもよい。また、接続変換部107aにおいて、信号線103を、半導体層4と導電膜16の積層構造にしてもよい。
本実施の形態1におけるアレイ基板1において、走査線104または信号線103と額縁内配線118のうち、より上層に形成された配線は、半導体層4と導電膜16とがこの順に積層されてなる。
図10は、本実施の形態4における接続変換部107b(又は107a)の断面図である。
図11は、本実施の形態5における接続変換部107b(又は107a)の断面図である。
本実施の形態3におけるアレイ基板1において、単一のコンタクトホール11内に形成された導電膜は、下部透明導電膜8、導電膜16および上部透明導電膜9がこの順に積層されてなる。
Claims (10)
- 画像を表示する表示領域と、前記表示領域の周囲を囲む額縁領域と、を備えるアレイ基板であって、
前記表示領域において並列して形成され、前記額縁領域まで延設された複数の走査線と、
前記複数の走査線と交差して前記表示領域において並列して形成され、前記額縁領域まで延設された複数の信号線と、
前記複数の走査線と前記複数の信号線とのそれぞれの交点に配置された薄膜トランジスタと、
前記額縁領域に形成された複数の額縁内配線と、
前記額縁領域において、前記走査線および前記信号線と前記額縁内配線とを上下に隔てる絶縁層と、
前記走査線または前記信号線と前記額縁内配線とを電気的に接続する、前記額縁領域に設けられた複数の接続変換部と、
各前記接続変換部内に配置された前記走査線または前記信号線の断線検査用端子と、
を備え、
各前記接続変換部には、前記絶縁層を貫通する単一のコンタクトホールが形成されており、前記単一のコンタクトホール内に配置された前記断線検査用端子である導電膜を介して、前記走査線または前記信号線と前記額縁内配線とが電気的に接続されている、
アレイ基板。 - 前記単一のコンタクトホールは、
前記単一のコンタクトホールの第1の底が前記走査線または前記信号線と接する第1の水平領域と、
前記単一のコンタクトホールの第2の底が前記額縁内配線と接する第2の水平領域と、
を備え、
前記第1の水平領域の面積と、前記第2の水平領域の面積との和が3000μm2以上である、
請求項1に記載のアレイ基板。 - 前記単一のコンタクトホールは、
前記単一のコンタクトホールの第1の底が前記走査線または前記信号線と接する第1の水平領域と、
前記単一のコンタクトホールの第2の底が前記額縁内配線と接する第2の水平領域と、
を備え、
前記第1の水平領域の面積と、前記第2の水平領域との面積とが異なる、
請求項1に記載のアレイ基板。 - 前記第1の水平領域の面積が前記第2の水平領域の面積よりも大きい、
請求項3に記載のアレイ基板。 - 前記額縁領域には、検査用薄膜トランジスタまたはICチップが設けられ、
前記額縁内配線は、前記検査用薄膜トランジスタの電極または前記ICチップの電極に接続された配線である、
請求項1から請求項4のいずれか一項に記載のアレイ基板。 - 前記走査線または前記信号線と前記額縁内配線のうち、より上層に形成された配線は、半導体層と導電膜とがこの順に積層されてなる、
請求項1から請求項5のいずれか一項に記載のアレイ基板。 - 前記走査線または前記信号線と前記額縁内配線のうち、より上層に形成された配線は、透明導電膜で覆われている、
請求項1から請求項5のいずれか一項に記載のアレイ基板。 - 前記単一のコンタクトホール内に形成された前記導電膜は、下部透明導電膜、導電膜および上部透明導電膜がこの順に積層されてなる、
請求項1から請求項7のいずれか一項に記載のアレイ基板。 - 請求項1から請求項8のいずれか一項に記載のアレイ基板と、
前記アレイ基板と対向して配置されたカラーフィルタ基板と、
前記アレイ基板と前記カラーフィルタ基板との間に保持された液晶と、
を備える、
液晶表示パネル。 - 請求項1から請求項8のいずれか一項に記載のアレイ基板の検査方法であって、
検査装置の端子を前記アレイ基板の前記接続変換部に設けられた前記断線検査用端子に接触させることにより、前記検査装置の前記端子を前記走査線または前記信号線と接続させて、前記走査線または前記信号線の断線を検査する、
アレイ基板の検査方法。
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JP2014207730A JP6463065B2 (ja) | 2014-10-09 | 2014-10-09 | アレイ基板およびこれを備える液晶表示パネルならびにアレイ基板の検査方法 |
US14/877,618 US9869915B2 (en) | 2014-10-09 | 2015-10-07 | Array substrate and liquid crystal display panel including the same |
DE102015219357.8A DE102015219357A1 (de) | 2014-10-09 | 2015-10-07 | Array-Substrat und darin enthaltenes Flüssigkristallanzeigefeld |
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JP2018124465A (ja) * | 2017-02-02 | 2018-08-09 | セイコーエプソン株式会社 | 電気光学装置、電子機器、および実装構造体 |
CN106960851B (zh) * | 2017-05-24 | 2020-02-21 | 京东方科技集团股份有限公司 | 阵列基板及其制作方法、显示面板和显示设备 |
CN109270754B (zh) * | 2017-07-17 | 2021-04-27 | 京东方科技集团股份有限公司 | 阵列基板和显示装置 |
CN110095889B (zh) * | 2018-01-30 | 2022-06-17 | 瀚宇彩晶股份有限公司 | 显示面板及其制作方法 |
CN108873524B (zh) * | 2018-07-17 | 2021-01-26 | Tcl华星光电技术有限公司 | 一种显示面板、改善显示面板性能的方法及显示装置 |
CN114067709B (zh) * | 2020-07-31 | 2023-11-28 | 深超光电(深圳)有限公司 | 导电性测试结构、薄膜晶体管阵列基板及显示面板 |
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JP3683463B2 (ja) | 1999-03-11 | 2005-08-17 | シャープ株式会社 | アクティブマトリクス基板、その製造方法、及び、該基板を用いたイメージセンサ |
KR100366768B1 (ko) * | 2000-04-19 | 2003-01-09 | 삼성전자 주식회사 | 배선의 접촉부 및 그의 제조 방법과 이를 포함하는 박막 트랜지스터 기판 및 그 제조 방법 |
JP2002098992A (ja) * | 2000-09-22 | 2002-04-05 | Toshiba Corp | 液晶表示装置 |
JP4689806B2 (ja) * | 2000-09-28 | 2011-05-25 | Nec液晶テクノロジー株式会社 | 液晶表示装置 |
JP4302347B2 (ja) * | 2001-12-18 | 2009-07-22 | シャープ株式会社 | 薄膜トランジスタ基板及びその製造方法 |
JP4050100B2 (ja) * | 2002-06-19 | 2008-02-20 | シャープ株式会社 | アクティブマトリクス基板および表示装置 |
KR100895311B1 (ko) * | 2002-11-19 | 2009-05-07 | 삼성전자주식회사 | 액정 표시 장치 및 그 검사 방법 |
KR101034181B1 (ko) * | 2003-08-21 | 2011-05-12 | 엘지디스플레이 주식회사 | 액정표시장치용 어레이기판 제조방법 |
JP2008233730A (ja) * | 2007-03-23 | 2008-10-02 | Epson Imaging Devices Corp | 液晶表示パネル |
JP4485559B2 (ja) * | 2007-09-26 | 2010-06-23 | 株式会社 日立ディスプレイズ | 液晶表示装置 |
KR101458910B1 (ko) * | 2008-03-28 | 2014-11-10 | 삼성디스플레이 주식회사 | 표시 장치 |
CN104345512A (zh) * | 2009-02-16 | 2015-02-11 | 夏普株式会社 | Tft阵列基板和液晶显示面板 |
JP5302122B2 (ja) * | 2009-07-08 | 2013-10-02 | 株式会社ジャパンディスプレイウェスト | 液晶表示パネル |
RU2510712C2 (ru) * | 2009-07-28 | 2014-04-10 | Шарп Кабушики Каиша | Монтажная плата, способ ее изготовления, дисплейная панель и дисплейное устройство |
KR101377891B1 (ko) * | 2010-01-13 | 2014-03-25 | 샤프 가부시키가이샤 | 어레이 기판 및 액정 표시 패널 |
EP2672317B1 (en) * | 2011-01-31 | 2015-04-29 | Sharp Kabushiki Kaisha | Liquid crystal display panel and production method for same |
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