JP6458566B2 - パーティクル計数装置及びそれを用いたパーティクル計数システム - Google Patents

パーティクル計数装置及びそれを用いたパーティクル計数システム Download PDF

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JP6458566B2
JP6458566B2 JP2015048412A JP2015048412A JP6458566B2 JP 6458566 B2 JP6458566 B2 JP 6458566B2 JP 2015048412 A JP2015048412 A JP 2015048412A JP 2015048412 A JP2015048412 A JP 2015048412A JP 6458566 B2 JP6458566 B2 JP 6458566B2
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connection port
particle
control unit
particle counting
cable
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JP2016169969A5 (enExample
JP2016169969A (ja
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俊光 幣之内
俊光 幣之内
康弘 山蔭
康弘 山蔭
森　隆弘
隆弘 森
統宏 井上
統宏 井上
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Shimadzu Corp
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Shimadzu Corp
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JP2015048412A 2015-03-11 2015-03-11 パーティクル計数装置及びそれを用いたパーティクル計数システム Active JP6458566B2 (ja)

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JP2015048412A JP6458566B2 (ja) 2015-03-11 2015-03-11 パーティクル計数装置及びそれを用いたパーティクル計数システム

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JP2015048412A JP6458566B2 (ja) 2015-03-11 2015-03-11 パーティクル計数装置及びそれを用いたパーティクル計数システム

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JP2016169969A JP2016169969A (ja) 2016-09-23
JP2016169969A5 JP2016169969A5 (enExample) 2017-07-06
JP6458566B2 true JP6458566B2 (ja) 2019-01-30

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Publication number Priority date Publication date Assignee Title
JP6769330B2 (ja) * 2017-02-14 2020-10-14 株式会社島津製作所 パーティクル計数システム

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63309839A (ja) * 1987-06-12 1988-12-16 Oki Electric Ind Co Ltd 光軸調整機構付投受光器
JPH0420842A (ja) * 1990-05-16 1992-01-24 Hitachi Electron Eng Co Ltd 微粒子検出方式および微粒子検出プローブ
US5815264A (en) * 1994-09-21 1998-09-29 Laser Sensor Technology, Inc System for acquiring an image of a multi-phase fluid by measuring backscattered light
US5751423A (en) * 1996-12-06 1998-05-12 United Sciences, Inc. Opacity and forward scattering monitor using beam-steered solid-state light source
JPH11230891A (ja) * 1998-02-13 1999-08-27 Anelva Corp 微粒子検出器
JP4887923B2 (ja) * 2006-06-20 2012-02-29 オムロン株式会社 パーティクル計測装置
TWI600891B (zh) * 2009-05-01 2017-10-01 愛克斯崔里斯科技有限公司 微粒偵測技術（一）

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