JP2016169969A5 - - Google Patents
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- JP2016169969A5 JP2016169969A5 JP2015048412A JP2015048412A JP2016169969A5 JP 2016169969 A5 JP2016169969 A5 JP 2016169969A5 JP 2015048412 A JP2015048412 A JP 2015048412A JP 2015048412 A JP2015048412 A JP 2015048412A JP 2016169969 A5 JP2016169969 A5 JP 2016169969A5
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- JP
- Japan
- Prior art keywords
- connection port
- particle
- cable
- particle counting
- control unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000002245 particle Substances 0.000 claims description 90
- 238000005259 measurement Methods 0.000 claims description 29
- 238000001514 detection method Methods 0.000 claims description 9
- 238000009434 installation Methods 0.000 claims description 8
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 description 40
- 238000004519 manufacturing process Methods 0.000 description 36
- 238000010586 diagram Methods 0.000 description 5
- 230000000149 penetrating effect Effects 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 4
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015048412A JP6458566B2 (ja) | 2015-03-11 | 2015-03-11 | パーティクル計数装置及びそれを用いたパーティクル計数システム |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015048412A JP6458566B2 (ja) | 2015-03-11 | 2015-03-11 | パーティクル計数装置及びそれを用いたパーティクル計数システム |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016169969A JP2016169969A (ja) | 2016-09-23 |
| JP2016169969A5 true JP2016169969A5 (enExample) | 2017-07-06 |
| JP6458566B2 JP6458566B2 (ja) | 2019-01-30 |
Family
ID=56982309
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015048412A Active JP6458566B2 (ja) | 2015-03-11 | 2015-03-11 | パーティクル計数装置及びそれを用いたパーティクル計数システム |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6458566B2 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6769330B2 (ja) * | 2017-02-14 | 2020-10-14 | 株式会社島津製作所 | パーティクル計数システム |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63309839A (ja) * | 1987-06-12 | 1988-12-16 | Oki Electric Ind Co Ltd | 光軸調整機構付投受光器 |
| JPH0420842A (ja) * | 1990-05-16 | 1992-01-24 | Hitachi Electron Eng Co Ltd | 微粒子検出方式および微粒子検出プローブ |
| US5815264A (en) * | 1994-09-21 | 1998-09-29 | Laser Sensor Technology, Inc | System for acquiring an image of a multi-phase fluid by measuring backscattered light |
| US5751423A (en) * | 1996-12-06 | 1998-05-12 | United Sciences, Inc. | Opacity and forward scattering monitor using beam-steered solid-state light source |
| JPH11230891A (ja) * | 1998-02-13 | 1999-08-27 | Anelva Corp | 微粒子検出器 |
| JP4887923B2 (ja) * | 2006-06-20 | 2012-02-29 | オムロン株式会社 | パーティクル計測装置 |
| TWI674402B (zh) * | 2009-05-01 | 2019-10-11 | 巴哈馬商愛克斯崔里斯科技有限公司 | 微粒偵測組件、煙霧偵測器之組件、視覺對準工具及對準煙霧偵測器之組件的方法 |
-
2015
- 2015-03-11 JP JP2015048412A patent/JP6458566B2/ja active Active
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