JP6449145B2 - 感光性、現像液可溶性の底面反射防止膜材料 - Google Patents
感光性、現像液可溶性の底面反射防止膜材料 Download PDFInfo
- Publication number
- JP6449145B2 JP6449145B2 JP2015509064A JP2015509064A JP6449145B2 JP 6449145 B2 JP6449145 B2 JP 6449145B2 JP 2015509064 A JP2015509064 A JP 2015509064A JP 2015509064 A JP2015509064 A JP 2015509064A JP 6449145 B2 JP6449145 B2 JP 6449145B2
- Authority
- JP
- Japan
- Prior art keywords
- bond
- composition
- layer
- antireflective
- epoxy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000463 material Substances 0.000 title description 12
- 239000000203 mixture Substances 0.000 claims description 122
- 239000004593 Epoxy Substances 0.000 claims description 107
- 150000001875 compounds Chemical class 0.000 claims description 84
- 230000003667 anti-reflective effect Effects 0.000 claims description 53
- 239000000758 substrate Substances 0.000 claims description 42
- 238000000034 method Methods 0.000 claims description 40
- 239000002904 solvent Substances 0.000 claims description 37
- 239000002253 acid Substances 0.000 claims description 34
- 229920000642 polymer Polymers 0.000 claims description 30
- 229920002120 photoresistant polymer Polymers 0.000 claims description 23
- QYKIQEUNHZKYBP-UHFFFAOYSA-N Vinyl ether Chemical compound C=COC=C QYKIQEUNHZKYBP-UHFFFAOYSA-N 0.000 claims description 20
- 238000004377 microelectronic Methods 0.000 claims description 20
- 150000002500 ions Chemical class 0.000 claims description 17
- 239000004971 Cross linker Substances 0.000 claims description 15
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 15
- 229910052710 silicon Inorganic materials 0.000 claims description 15
- 239000010703 silicon Substances 0.000 claims description 15
- 239000000178 monomer Substances 0.000 claims description 12
- 239000003054 catalyst Substances 0.000 claims description 11
- 238000004132 cross linking Methods 0.000 claims description 11
- 239000003431 cross linking reagent Substances 0.000 claims description 11
- 125000000217 alkyl group Chemical group 0.000 claims description 9
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 claims description 8
- 239000002243 precursor Substances 0.000 claims description 8
- KXDHJXZQYSOELW-UHFFFAOYSA-M Carbamate Chemical compound NC([O-])=O KXDHJXZQYSOELW-UHFFFAOYSA-M 0.000 claims description 6
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 claims description 6
- 239000004202 carbamide Substances 0.000 claims description 6
- 125000003700 epoxy group Chemical group 0.000 claims description 6
- 150000002148 esters Chemical class 0.000 claims description 6
- OAKJQQAXSVQMHS-UHFFFAOYSA-N hydrazine Substances NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 claims description 6
- 125000004430 oxygen atom Chemical group O* 0.000 claims description 6
- 229940124530 sulfonamide Drugs 0.000 claims description 6
- BDHFUVZGWQCTTF-UHFFFAOYSA-M sulfonate Chemical compound [O-]S(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-M 0.000 claims description 6
- 150000002118 epoxides Chemical group 0.000 claims description 5
- 125000003118 aryl group Chemical group 0.000 claims description 4
- WSFSSNUMVMOOMR-UHFFFAOYSA-N formaldehyde Natural products O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 claims description 4
- 229920001519 homopolymer Polymers 0.000 claims description 4
- 238000005468 ion implantation Methods 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 238000007142 ring opening reaction Methods 0.000 claims description 4
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical group CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 claims description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 3
- 150000007824 aliphatic compounds Chemical class 0.000 claims description 3
- 150000001491 aromatic compounds Chemical class 0.000 claims description 3
- 229910052796 boron Inorganic materials 0.000 claims description 3
- 229930003836 cresol Chemical group 0.000 claims description 3
- 229910052732 germanium Inorganic materials 0.000 claims description 3
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 3
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 claims description 2
- 235000014653 Carica parviflora Nutrition 0.000 claims description 2
- 241000243321 Cnidaria Species 0.000 claims description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 2
- 239000004952 Polyamide Substances 0.000 claims description 2
- 239000004642 Polyimide Substances 0.000 claims description 2
- 239000004721 Polyphenylene oxide Substances 0.000 claims description 2
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 2
- 229910000577 Silicon-germanium Inorganic materials 0.000 claims description 2
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 claims description 2
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 claims description 2
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims description 2
- 229920001577 copolymer Polymers 0.000 claims description 2
- 239000010432 diamond Substances 0.000 claims description 2
- 239000011521 glass Substances 0.000 claims description 2
- 150000004676 glycans Chemical class 0.000 claims description 2
- 229910000449 hafnium oxide Inorganic materials 0.000 claims description 2
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 claims description 2
- 229910052736 halogen Inorganic materials 0.000 claims description 2
- 150000002367 halogens Chemical class 0.000 claims description 2
- 229920003986 novolac Polymers 0.000 claims description 2
- 229920002647 polyamide Polymers 0.000 claims description 2
- 229920000728 polyester Chemical group 0.000 claims description 2
- 229920000570 polyether Polymers 0.000 claims description 2
- 229920001721 polyimide Polymers 0.000 claims description 2
- 229920001282 polysaccharide Polymers 0.000 claims description 2
- 239000005017 polysaccharide Substances 0.000 claims description 2
- 229910052717 sulfur Inorganic materials 0.000 claims description 2
- 239000011593 sulfur Substances 0.000 claims description 2
- 229910052715 tantalum Inorganic materials 0.000 claims description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 2
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 claims description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 2
- 229910052721 tungsten Inorganic materials 0.000 claims description 2
- 239000010937 tungsten Substances 0.000 claims description 2
- WQJQOUPTWCFRMM-UHFFFAOYSA-N tungsten disilicide Chemical compound [Si]#[W]#[Si] WQJQOUPTWCFRMM-UHFFFAOYSA-N 0.000 claims description 2
- 229910021342 tungsten silicide Inorganic materials 0.000 claims description 2
- KFUSXMDYOPXKKT-VIFPVBQESA-N (2s)-2-[(2-methylphenoxy)methyl]oxirane Chemical compound CC1=CC=CC=C1OC[C@H]1OC1 KFUSXMDYOPXKKT-VIFPVBQESA-N 0.000 claims 1
- 125000002947 alkylene group Chemical group 0.000 claims 1
- 125000005529 alkyleneoxy group Chemical group 0.000 claims 1
- 239000003125 aqueous solvent Substances 0.000 claims 1
- 239000003822 epoxy resin Substances 0.000 claims 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 claims 1
- 239000004843 novolac epoxy resin Substances 0.000 claims 1
- 229920000647 polyepoxide Polymers 0.000 claims 1
- 239000010410 layer Substances 0.000 description 74
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 58
- 239000006117 anti-reflective coating Substances 0.000 description 47
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 42
- 229910052757 nitrogen Inorganic materials 0.000 description 29
- 239000011347 resin Substances 0.000 description 25
- 229920005989 resin Polymers 0.000 description 25
- 238000001459 lithography Methods 0.000 description 18
- QMWOUSYSNFCKAZ-UHFFFAOYSA-N 3,7-dihydroxynaphthalene-2-carboxylic acid Chemical compound OC1=CC=C2C=C(O)C(C(=O)O)=CC2=C1 QMWOUSYSNFCKAZ-UHFFFAOYSA-N 0.000 description 17
- 238000006243 chemical reaction Methods 0.000 description 17
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 15
- LZCLXQDLBQLTDK-UHFFFAOYSA-N ethyl 2-hydroxypropanoate Chemical compound CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 description 12
- VOZRXNHHFUQHIL-UHFFFAOYSA-N glycidyl methacrylate Chemical compound CC(=C)C(=O)OCC1CO1 VOZRXNHHFUQHIL-UHFFFAOYSA-N 0.000 description 12
- 239000012452 mother liquor Substances 0.000 description 12
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 12
- 229960000834 vinyl ether Drugs 0.000 description 11
- -1 3-epoxypropyl Chemical group 0.000 description 10
- 101001124867 Homo sapiens Peroxiredoxin-1 Proteins 0.000 description 10
- 102100029139 Peroxiredoxin-1 Human genes 0.000 description 10
- 238000009472 formulation Methods 0.000 description 10
- 238000001914 filtration Methods 0.000 description 9
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 8
- 229920002274 Nalgene Polymers 0.000 description 8
- 238000001816 cooling Methods 0.000 description 8
- 238000011161 development Methods 0.000 description 8
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 description 8
- 238000012360 testing method Methods 0.000 description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 7
- KXHPPCXNWTUNSB-UHFFFAOYSA-M benzyl(trimethyl)azanium;chloride Chemical compound [Cl-].C[N+](C)(C)CC1=CC=CC=C1 KXHPPCXNWTUNSB-UHFFFAOYSA-M 0.000 description 7
- 229910052799 carbon Inorganic materials 0.000 description 7
- 239000007795 chemical reaction product Substances 0.000 description 7
- 238000006116 polymerization reaction Methods 0.000 description 7
- 239000000243 solution Substances 0.000 description 7
- OZAIFHULBGXAKX-UHFFFAOYSA-N 2-(2-cyanopropan-2-yldiazenyl)-2-methylpropanenitrile Chemical compound N#CC(C)(C)N=NC(C)(C)C#N OZAIFHULBGXAKX-UHFFFAOYSA-N 0.000 description 6
- WNAHIZMDSQCWRP-UHFFFAOYSA-N dodecane-1-thiol Chemical compound CCCCCCCCCCCCS WNAHIZMDSQCWRP-UHFFFAOYSA-N 0.000 description 6
- 229940116333 ethyl lactate Drugs 0.000 description 6
- 238000003384 imaging method Methods 0.000 description 6
- 238000012545 processing Methods 0.000 description 6
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical group OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 5
- 238000001035 drying Methods 0.000 description 5
- 239000007788 liquid Substances 0.000 description 5
- 125000004429 atom Chemical group 0.000 description 4
- HTZCNXWZYVXIMZ-UHFFFAOYSA-M benzyl(triethyl)azanium;chloride Chemical compound [Cl-].CC[N+](CC)(CC)CC1=CC=CC=C1 HTZCNXWZYVXIMZ-UHFFFAOYSA-M 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 4
- 238000007654 immersion Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- NWUYHJFMYQTDRP-UHFFFAOYSA-N 1,2-bis(ethenyl)benzene;1-ethenyl-2-ethylbenzene;styrene Chemical compound C=CC1=CC=CC=C1.CCC1=CC=CC=C1C=C.C=CC1=CC=CC=C1C=C NWUYHJFMYQTDRP-UHFFFAOYSA-N 0.000 description 3
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 239000003456 ion exchange resin Substances 0.000 description 3
- 229920003303 ion-exchange polymer Polymers 0.000 description 3
- 239000011541 reaction mixture Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 229920001897 terpolymer Polymers 0.000 description 3
- SJMYWORNLPSJQO-UHFFFAOYSA-N tert-butyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OC(C)(C)C SJMYWORNLPSJQO-UHFFFAOYSA-N 0.000 description 3
- 238000009482 thermal adhesion granulation Methods 0.000 description 3
- 238000012876 topography Methods 0.000 description 3
- VOJUXHHACRXLTD-UHFFFAOYSA-N 1,4-dihydroxy-2-naphthoic acid Chemical compound C1=CC=CC2=C(O)C(C(=O)O)=CC(O)=C21 VOJUXHHACRXLTD-UHFFFAOYSA-N 0.000 description 2
- FENFUOGYJVOCRY-UHFFFAOYSA-N 1-propoxypropan-2-ol Chemical compound CCCOCC(C)O FENFUOGYJVOCRY-UHFFFAOYSA-N 0.000 description 2
- GLDQAMYCGOIJDV-UHFFFAOYSA-N 2,3-dihydroxybenzoic acid Chemical compound OC(=O)C1=CC=CC(O)=C1O GLDQAMYCGOIJDV-UHFFFAOYSA-N 0.000 description 2
- UIAFKZKHHVMJGS-UHFFFAOYSA-N 2,4-dihydroxybenzoic acid Chemical compound OC(=O)C1=CC=C(O)C=C1O UIAFKZKHHVMJGS-UHFFFAOYSA-N 0.000 description 2
- AKEUNCKRJATALU-UHFFFAOYSA-N 2,6-dihydroxybenzoic acid Chemical compound OC(=O)C1=C(O)C=CC=C1O AKEUNCKRJATALU-UHFFFAOYSA-N 0.000 description 2
- YQUVCSBJEUQKSH-UHFFFAOYSA-N 3,4-dihydroxybenzoic acid Chemical compound OC(=O)C1=CC=C(O)C(O)=C1 YQUVCSBJEUQKSH-UHFFFAOYSA-N 0.000 description 2
- UYEMGAFJOZZIFP-UHFFFAOYSA-N 3,5-dihydroxybenzoic acid Chemical compound OC(=O)C1=CC(O)=CC(O)=C1 UYEMGAFJOZZIFP-UHFFFAOYSA-N 0.000 description 2
- FJKROLUGYXJWQN-UHFFFAOYSA-N 4-hydroxybenzoic acid Chemical compound OC(=O)C1=CC=C(O)C=C1 FJKROLUGYXJWQN-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- SOGAXMICEFXMKE-UHFFFAOYSA-N Butylmethacrylate Chemical compound CCCCOC(=O)C(C)=C SOGAXMICEFXMKE-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 150000001412 amines Chemical group 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 2
- 239000008367 deionised water Substances 0.000 description 2
- 229910021641 deionized water Inorganic materials 0.000 description 2
- GYZLOYUZLJXAJU-UHFFFAOYSA-N diglycidyl ether Chemical group C1OC1COCC1CO1 GYZLOYUZLJXAJU-UHFFFAOYSA-N 0.000 description 2
- 238000004090 dissolution Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000011049 filling Methods 0.000 description 2
- LNTHITQWFMADLM-UHFFFAOYSA-N gallic acid Chemical compound OC(=O)C1=CC(O)=C(O)C(O)=C1 LNTHITQWFMADLM-UHFFFAOYSA-N 0.000 description 2
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 2
- 238000000671 immersion lithography Methods 0.000 description 2
- 238000002513 implantation Methods 0.000 description 2
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 229920001467 poly(styrenesulfonates) Polymers 0.000 description 2
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 150000003384 small molecules Chemical class 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- GJWMYLFHBXEWNZ-UHFFFAOYSA-N tert-butyl (4-ethenylphenyl) carbonate Chemical compound CC(C)(C)OC(=O)OC1=CC=C(C=C)C=C1 GJWMYLFHBXEWNZ-UHFFFAOYSA-N 0.000 description 2
- 125000005931 tert-butyloxycarbonyl group Chemical group [H]C([H])([H])C(OC(*)=O)(C([H])([H])[H])C([H])([H])[H] 0.000 description 2
- 239000012815 thermoplastic material Substances 0.000 description 2
- 229920001187 thermosetting polymer Polymers 0.000 description 2
- OUPZKGBUJRBPGC-UHFFFAOYSA-N 1,3,5-tris(oxiran-2-ylmethyl)-1,3,5-triazinane-2,4,6-trione Chemical compound O=C1N(CC2OC2)C(=O)N(CC2OC2)C(=O)N1CC1CO1 OUPZKGBUJRBPGC-UHFFFAOYSA-N 0.000 description 1
- GEWWCWZGHNIUBW-UHFFFAOYSA-N 1-(4-nitrophenyl)propan-2-one Chemical compound CC(=O)CC1=CC=C([N+]([O-])=O)C=C1 GEWWCWZGHNIUBW-UHFFFAOYSA-N 0.000 description 1
- MZVABYGYVXBZDP-UHFFFAOYSA-N 1-adamantyl 2-methylprop-2-enoate Chemical compound C1C(C2)CC3CC2CC1(OC(=O)C(=C)C)C3 MZVABYGYVXBZDP-UHFFFAOYSA-N 0.000 description 1
- CZAVRNDQSIORTH-UHFFFAOYSA-N 1-ethenoxy-2,2-bis(ethenoxymethyl)butane Chemical compound C=COCC(CC)(COC=C)COC=C CZAVRNDQSIORTH-UHFFFAOYSA-N 0.000 description 1
- SJJCQDRGABAVBB-UHFFFAOYSA-N 1-hydroxy-2-naphthoic acid Chemical compound C1=CC=CC2=C(O)C(C(=O)O)=CC=C21 SJJCQDRGABAVBB-UHFFFAOYSA-N 0.000 description 1
- NLZXYHBLSOLTKF-UHFFFAOYSA-N 1-hydroxyanthracene-2-carboxylic acid Chemical compound C1=CC=CC2=CC3=C(O)C(C(=O)O)=CC=C3C=C21 NLZXYHBLSOLTKF-UHFFFAOYSA-N 0.000 description 1
- IVIDDMGBRCPGLJ-UHFFFAOYSA-N 2,3-bis(oxiran-2-ylmethoxy)propan-1-ol Chemical compound C1OC1COC(CO)COCC1CO1 IVIDDMGBRCPGLJ-UHFFFAOYSA-N 0.000 description 1
- 229940082044 2,3-dihydroxybenzoic acid Drugs 0.000 description 1
- WVXLLHWEQSZBLW-UHFFFAOYSA-N 2-(4-acetyl-2-methoxyphenoxy)acetic acid Chemical compound COC1=CC(C(C)=O)=CC=C1OCC(O)=O WVXLLHWEQSZBLW-UHFFFAOYSA-N 0.000 description 1
- SHKUUQIDMUMQQK-UHFFFAOYSA-N 2-[4-(oxiran-2-ylmethoxy)butoxymethyl]oxirane Chemical compound C1OC1COCCCCOCC1CO1 SHKUUQIDMUMQQK-UHFFFAOYSA-N 0.000 description 1
- OFRGWWQFVLNGRP-UHFFFAOYSA-N 2-[[2-(1-adamantyl)-5-(oxiran-2-ylmethoxy)phenoxy]methyl]oxirane Chemical compound C1OC1COC(C=1)=CC=C(C23CC4CC(CC(C4)C2)C3)C=1OCC1CO1 OFRGWWQFVLNGRP-UHFFFAOYSA-N 0.000 description 1
- UCPVZNPDHRPCDP-UHFFFAOYSA-N 2-[[2-[3-[2,4-bis(oxiran-2-ylmethoxy)phenyl]-1-adamantyl]-5-(oxiran-2-ylmethoxy)phenoxy]methyl]oxirane Chemical compound C1OC1COC(C=1)=CC=C(C23CC4CC(CC(C4)(C3)C=3C(=CC(OCC4OC4)=CC=3)OCC3OC3)C2)C=1OCC1CO1 UCPVZNPDHRPCDP-UHFFFAOYSA-N 0.000 description 1
- KYVHCBBLPLWQTB-UHFFFAOYSA-N 2-[[4-[3-[4-(oxiran-2-ylmethoxy)phenyl]-1-adamantyl]phenoxy]methyl]oxirane Chemical compound C1OC1COC(C=C1)=CC=C1C(C1)(C2)CC(C3)CC1CC32C(C=C1)=CC=C1OCC1CO1 KYVHCBBLPLWQTB-UHFFFAOYSA-N 0.000 description 1
- IGZBSJAMZHNHKE-UHFFFAOYSA-N 2-[[4-[bis[4-(oxiran-2-ylmethoxy)phenyl]methyl]phenoxy]methyl]oxirane Chemical compound C1OC1COC(C=C1)=CC=C1C(C=1C=CC(OCC2OC2)=CC=1)C(C=C1)=CC=C1OCC1CO1 IGZBSJAMZHNHKE-UHFFFAOYSA-N 0.000 description 1
- VUIWJRYTWUGOOF-UHFFFAOYSA-N 2-ethenoxyethanol Chemical compound OCCOC=C VUIWJRYTWUGOOF-UHFFFAOYSA-N 0.000 description 1
- UUODQIKUTGWMPT-UHFFFAOYSA-N 2-fluoro-5-(trifluoromethyl)pyridine Chemical compound FC1=CC=C(C(F)(F)F)C=N1 UUODQIKUTGWMPT-UHFFFAOYSA-N 0.000 description 1
- UPHOPMSGKZNELG-UHFFFAOYSA-N 2-hydroxynaphthalene-1-carboxylic acid Chemical compound C1=CC=C2C(C(=O)O)=C(O)C=CC2=C1 UPHOPMSGKZNELG-UHFFFAOYSA-N 0.000 description 1
- KMRRXSZDSGYLCD-UHFFFAOYSA-N 3,5-dihydroxy-4-methylbenzoic acid Chemical compound CC1=C(O)C=C(C(O)=O)C=C1O KMRRXSZDSGYLCD-UHFFFAOYSA-N 0.000 description 1
- YELLAPKUWRTITI-UHFFFAOYSA-N 3,5-dihydroxynaphthalene-2-carboxylic acid Chemical compound C1=CC(O)=C2C=C(O)C(C(=O)O)=CC2=C1 YELLAPKUWRTITI-UHFFFAOYSA-N 0.000 description 1
- ALKYHXVLJMQRLQ-UHFFFAOYSA-N 3-Hydroxy-2-naphthoate Chemical compound C1=CC=C2C=C(O)C(C(=O)O)=CC2=C1 ALKYHXVLJMQRLQ-UHFFFAOYSA-N 0.000 description 1
- PHQKCVOZVPSTAF-UHFFFAOYSA-N 3-hydroxyanthracene-2-carboxylic acid Chemical compound C1=CC=C2C=C(C=C(C(C(=O)O)=C3)O)C3=CC2=C1 PHQKCVOZVPSTAF-UHFFFAOYSA-N 0.000 description 1
- FAUAZXVRLVIARB-UHFFFAOYSA-N 4-[[4-[bis(oxiran-2-ylmethyl)amino]phenyl]methyl]-n,n-bis(oxiran-2-ylmethyl)aniline Chemical compound C1OC1CN(C=1C=CC(CC=2C=CC(=CC=2)N(CC2OC2)CC2OC2)=CC=1)CC1CO1 FAUAZXVRLVIARB-UHFFFAOYSA-N 0.000 description 1
- 229940090248 4-hydroxybenzoic acid Drugs 0.000 description 1
- KAUQJMHLAFIZDU-UHFFFAOYSA-N 6-Hydroxy-2-naphthoic acid Chemical compound C1=C(O)C=CC2=CC(C(=O)O)=CC=C21 KAUQJMHLAFIZDU-UHFFFAOYSA-N 0.000 description 1
- 102100038954 60S ribosomal export protein NMD3 Human genes 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 1
- LCFVJGUPQDGYKZ-UHFFFAOYSA-N Bisphenol A diglycidyl ether Chemical compound C=1C=C(OCC2OC2)C=CC=1C(C)(C)C(C=C1)=CC=C1OCC1CO1 LCFVJGUPQDGYKZ-UHFFFAOYSA-N 0.000 description 1
- YXHKONLOYHBTNS-UHFFFAOYSA-N Diazomethane Chemical class C=[N+]=[N-] YXHKONLOYHBTNS-UHFFFAOYSA-N 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- 101000603190 Homo sapiens 60S ribosomal export protein NMD3 Proteins 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
- 229920000532 Poly[(o-cresyl glycidyl ether)-co-formaldehyde] Polymers 0.000 description 1
- 229920000537 Poly[(phenyl glycidyl ether)-co-formaldehyde] Polymers 0.000 description 1
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 1
- 239000007983 Tris buffer Substances 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- 125000003545 alkoxy group Chemical group 0.000 description 1
- 150000001413 amino acids Chemical class 0.000 description 1
- 150000003863 ammonium salts Chemical class 0.000 description 1
- 229910003481 amorphous carbon Inorganic materials 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052790 beryllium Inorganic materials 0.000 description 1
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 1
- 229940114055 beta-resorcylic acid Drugs 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- XUCHXOAWJMEFLF-UHFFFAOYSA-N bisphenol F diglycidyl ether Chemical compound C1OC1COC(C=C1)=CC=C1CC(C=C1)=CC=C1OCC1CO1 XUCHXOAWJMEFLF-UHFFFAOYSA-N 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 239000006172 buffering agent Substances 0.000 description 1
- MIOPJNTWMNEORI-UHFFFAOYSA-N camphorsulfonic acid Chemical compound C1CC2(CS(O)(=O)=O)C(=O)CC1C2(C)C MIOPJNTWMNEORI-UHFFFAOYSA-N 0.000 description 1
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 1
- 150000001735 carboxylic acids Chemical class 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000003776 cleavage reaction Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 150000001923 cyclic compounds Chemical class 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010511 deprotection reaction Methods 0.000 description 1
- OKZIUSOJQLYFSE-UHFFFAOYSA-N difluoroboron Chemical compound F[B]F OKZIUSOJQLYFSE-UHFFFAOYSA-N 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 238000000572 ellipsometry Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 229940074391 gallic acid Drugs 0.000 description 1
- 235000004515 gallic acid Nutrition 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000007970 homogeneous dispersion Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- XMBWDFGMSWQBCA-UHFFFAOYSA-N hydrogen iodide Chemical class I XMBWDFGMSWQBCA-UHFFFAOYSA-N 0.000 description 1
- 150000003949 imides Chemical class 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- ZFSLODLOARCGLH-UHFFFAOYSA-N isocyanuric acid Chemical compound OC1=NC(O)=NC(O)=N1 ZFSLODLOARCGLH-UHFFFAOYSA-N 0.000 description 1
- 150000002605 large molecules Chemical class 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 229920002521 macromolecule Polymers 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- LGRLWUINFJPLSH-UHFFFAOYSA-N methanide Chemical compound [CH3-] LGRLWUINFJPLSH-UHFFFAOYSA-N 0.000 description 1
- XTAZYLNFDRKIHJ-UHFFFAOYSA-N n,n-dioctyloctan-1-amine Chemical group CCCCCCCCN(CCCCCCCC)CCCCCCCC XTAZYLNFDRKIHJ-UHFFFAOYSA-N 0.000 description 1
- WTLNIWWRURSHGY-UHFFFAOYSA-N oxiran-2-ylmethyl 4-(oxiran-2-ylmethoxy)benzoate Chemical compound C=1C=C(OCC2OC2)C=CC=1C(=O)OCC1CO1 WTLNIWWRURSHGY-UHFFFAOYSA-N 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- WLJNZVDCPSBLRP-UHFFFAOYSA-N pamoic acid Chemical compound C1=CC=C2C(CC=3C4=CC=CC=C4C=C(C=3O)C(=O)O)=C(O)C(C(O)=O)=CC2=C1 WLJNZVDCPSBLRP-UHFFFAOYSA-N 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 150000002989 phenols Chemical class 0.000 description 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- XYFCBTPGUUZFHI-UHFFFAOYSA-O phosphonium Chemical compound [PH4+] XYFCBTPGUUZFHI-UHFFFAOYSA-O 0.000 description 1
- 229920000559 poly(Bisphenol A-co-epichlorohydrin) Polymers 0.000 description 1
- 229920002454 poly(glycidyl methacrylate) polymer Polymers 0.000 description 1
- 229920000058 polyacrylate Polymers 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 150000003242 quaternary ammonium salts Chemical class 0.000 description 1
- 238000009877 rendering Methods 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 238000001878 scanning electron micrograph Methods 0.000 description 1
- 230000007017 scission Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002195 soluble material Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 125000000446 sulfanediyl group Chemical group *S* 0.000 description 1
- 150000003871 sulfonates Chemical class 0.000 description 1
- RWSOTUBLDIXVET-UHFFFAOYSA-O sulfonium Chemical compound [SH3+] RWSOTUBLDIXVET-UHFFFAOYSA-O 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- KKEYFWRCBNTPAC-UHFFFAOYSA-L terephthalate(2-) Chemical compound [O-]C(=O)C1=CC=C(C([O-])=O)C=C1 KKEYFWRCBNTPAC-UHFFFAOYSA-L 0.000 description 1
- XTXNWQHMMMPKKO-UHFFFAOYSA-N tert-butyl 2-phenylethenyl carbonate Chemical compound CC(C)(C)OC(=O)OC=CC1=CC=CC=C1 XTXNWQHMMMPKKO-UHFFFAOYSA-N 0.000 description 1
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- IJTDINJRSNQFSI-UHFFFAOYSA-N tetrakis(oxiran-2-ylmethyl) benzene-1,2,4,5-tetracarboxylate Chemical compound C=1C(C(=O)OCC2OC2)=C(C(=O)OCC2OC2)C=C(C(=O)OCC2OC2)C=1C(=O)OCC1CO1 IJTDINJRSNQFSI-UHFFFAOYSA-N 0.000 description 1
- 150000003568 thioethers Chemical group 0.000 description 1
- 150000003573 thiols Chemical class 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 150000003918 triazines Chemical class 0.000 description 1
- ITMCEJHCFYSIIV-UHFFFAOYSA-M triflate Chemical compound [O-]S(=O)(=O)C(F)(F)F ITMCEJHCFYSIIV-UHFFFAOYSA-M 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D163/00—Coating compositions based on epoxy resins; Coating compositions based on derivatives of epoxy resins
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/091—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers characterised by antireflection means or light filtering or absorbing means, e.g. anti-halation, contrast enhancement
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
- G02B1/111—Anti-reflection coatings using layers comprising organic materials
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/095—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having more than one photosensitive layer
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/30—Imagewise removal using liquid means
- G03F7/32—Liquid compositions therefor, e.g. developers
- G03F7/322—Aqueous alkaline compositions
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/40—Treatment after imagewise removal, e.g. baking
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
- H01L21/266—Bombardment with radiation with high-energy radiation producing ion implantation using masks
Description
本願は2012年4月23日提出の、米国特許仮出願番号第61/636,919号「SMALL MOLECULE,PHOTOSENSITIVE,DEVELOPER−SOLUBLE BOTTOM ANTI−REFLECTIVE COATING MATERIAL(低分子、感光性、現像液可溶性の底面反射防止膜材料)」の優先権の利益を主張するものであり、当該出願を引用として本明細書に含める。
本開示は、新規な反射防止膜の組成、その使用方法、ならびにそれにより形成されるマイクロエレクトロニクス構造に関する。
%剥離率=(剥離量/初期の平均フィルム厚)×100
実施例1の化合物を用いて感光性底面反射防止膜の調合物を作製した。125mLの琥珀色ナルゲンボトルに、3.5587gの実施例1の反応生成物、0.4270gのビニルエーテル架橋剤LIVELink(TM)(Brewer Science,Inc、Rolla、MO州)、0.0053gのトリエタノールアミン(Sigma Aldrich、St.Louis、MO州)、94.56gのPGME(Harcros Chemical、St.Louis、MO州)、および1.4489gのシクロヘキサノンを充填することにより、調合物を調製した。混合物を一晩混転し、次に0.1μmのエンドポイントフィルターを通してろ過し、新しい125mLの琥珀色ナルゲンボトルに入れた。
実施例3のポリマーを用いて感光性底面反射防止膜の調合物を作製した。125mLの琥珀色ナルゲンボトルに、3.5638gの実施例3の反応生成物、0.4277gのビニルエーテル架橋剤LIVELink(TM)、0.0032gのトリエタノールアミン、94.56gのPGME、および1.4489gのシクロヘキサノンを充填することにより、調合物を調製した。混合物を一晩混転し、次に0.1μmのエンドポイントフィルターを通してろ過し、新しい125mLの琥珀色ナルゲンボトルに入れた。
実施例5のポリマーを用いて感光性底面反射防止膜の調合物を作製した。60mLの琥珀色ナルゲンボトルに、2.2956gの実施例5の反応生成物、0.1722gのビニルエーテル架橋剤LIVELink(TM)、0.0172gのTPS−C1(Daychem Laboratories,Inc.、Vandalia、OH州)、0.0017gのトリエタノールアミン、41.5809gのPGME、および0.9324gのシクロヘキサノンを充填することにより、調合物を調製した。混合物を一晩混転し、次に0.1μmのエンドポイントフィルターを通してろ過し、新しい60mLの琥珀色ナルゲンボトルに入れた。
250mLの三口フラスコに、マグネチックスターラーバー、窒素流入口、窒素流出口を備えた冷却器、および温度計を装備した。該フラスコに120gのシクロヘキサノン、17.78gのスチレン、56.64gのグリシジルメタクリレート、1.86gの1‐ドデカンチオール、および3.72gの2,2’‐アゾビス(2‐メチルプロピオニトリル)を充填した。反応は75℃まで加熱し、18時間撹拌した後、周囲条件まで冷却して行われた。冷却後、ポリマー母液を、それ以上の処理を行わずにボトルに入れた。
250mLの三口フラスコに、マグネチックスターラーバー、窒素流入口、窒素流出口を備えた冷却器、および温度計を装備した。該フラスコに120gのシクロヘキサノン、11.52gのスチレン、62.90gのグリシジルメタクリレート、1.86gの1‐ドデカンチオール、および3.72gの2,2’‐アゾビス(2‐メチルプロピオニトリル)を充填した。反応は75℃まで加熱し、18時間撹拌した後、周囲条件まで冷却して行われた。冷却後、ポリマー母液を、それ以上の処理を行わずにボトルに入れた。
実施例11のポリマーを用いて感光性底面反射防止膜の調合物を作製した。60mLの琥珀色ナルゲンボトルに、2.2472gの実施例11の反応生成物、0.1685gのビニルエーテル架橋剤LIVELink(TM)、0.0169gのTPS−C1(Daychem Laboratories,Inc.、Vandalia、OH州)、0.0028gのトリエタノールアミン、46.2950gのPGME、および1.2696gのシクロヘキサノンを充填することにより、調合物を調製した。混合物を一晩混転し、次に0.1μmのエンドポイントフィルターを通してろ過し、新しい60mLの琥珀色ナルゲンボトルに入れた。
Claims (39)
- マイクロエレクトロニクス製作用の、感光性、現像液可溶性の反射防止組成物であって、前記組成物は、溶剤系中に分散または溶解された、ポリマー性の多官能性エポキシ化合物およびビニルエーテル架橋剤を含み、前記ポリマー性の多官能性エポキシ化合物は、それに結合する少なくとも1つの架橋可能な発色団と、閉じたエポキシド環および/または開環したエポキシ基であるエポキシ部分と、を含み、前記架橋可能な発色団は2〜10の架橋可能な基を有することを特徴とする組成物。
- 少なくとも1つの前記架橋可能な発色団は、置換または非置換の芳香族化合物、脂肪族化合物、硫黄含有化合物、ならびにハロゲン含有化合物からなる群から選択される、請求項1に記載の組成物。
- 前記架橋可能な基は、‐OH、Ar‐OH、および‐COOHからなる群から選択される、請求項2に記載の組成物。
- 少なくとも1つの前記架橋可能な発色団は、ポリマー性の多官能性エポキシ化合物に各エポキシ部分を介して結合している、請求項1に記載の組成物。
- 前記ポリマー性の多官能性エポキシ化合物は、下記式のエポキシ部分を少なくとも1つ含む、請求項4に記載の組成物:
- Lがエステル結合であり、Rが、存在する場合には‐O‐である、請求項5に記載の組成物。
- 前記ポリマー性の多官能性エポキシ化合物は、ホモポリマーおよび2種のコモノマーだけのコポリマーからなる群から選択される、請求項1に記載の組成物。
- 前記ポリマー性の多官能性エポキシ化合物は、ポリマーのコアユニットの側鎖に複数のエポキシ部分を有するポリマー性化合物である、請求項1に記載の組成物。
- 前記コアユニットは、アクリル、ポリエステル、クレゾールノボラック型エポキシ樹脂、ポリエーテル、多糖、ポリイミド、およびポリアミドのモノマー繰り返し単位からなる群から選択されるモノマーの繰り返し単位を含む、請求項8に記載の組成物。
- 前記コアユニットは、下記式の繰り返しモノマーを含み、
- 前記コアユニットは、下記式の繰り返しモノマーを含む、請求項8に記載の組成物:
- 前記組成物は、溶剤系に分散または溶解された、前記ポリマー性の多官能性エポキシ化合物と、前記ビニルエーテル架橋剤と、随意的に光酸発生剤とから本質的になる、請求項1に記載の組成物。
- 前記ビニルエーテル架橋剤は、下記式の多官能性ビニルエーテルである、請求項1に記載の組成物:
- マイクロエレクトロニクス構造を形成する方法であって、前記方法は:
(a)表面を有する基板を用意し;
(b)前記表面上に感光性、現像液可溶性の反射防止層を形成し、前記反射防止層は、溶剤系に分散または溶解された、ポリマー性の多官能性エポキシ化合物およびビニルエーテル架橋剤を含む反射防止組成物から形成され、前記ポリマー性の多官能性エポキシ化合物はそれに結合する少なくとも1つの架橋可能な発色団と、閉じたエポキシド環および/または開環したエポキシ基であるエポキシ部分と、を含み、前記架橋可能な発色団は2〜10の架橋可能な基を有し;ならびに
(c)前記反射防止層上に画像形成層を形成することを含む方法。 - 前記方法はさらに、前記形成(b)の後に前記反射防止層を熱的に架橋することを含み、前記架橋によりフォトレジスト溶剤に実質的に不溶である反射防止層が得られる、請求項14に記載の方法。
- 前記架橋は、前記架橋可能な発色団の前記架橋可能な基を通じて起こる、請求項15に記載の方法。
- 前記方法はさらに、
(d)前記画像形成層と前記反射防止層を光に露光して、前記画像形成層と前記反射防止層の露光部分を得て;
(e)前記画像形成層と前記反射防止層をアルカリ性現像液に接触させて、前記基板表面から前記露光部分を除去することを含む、請求項15に記載の方法。 - 前記露光(d)は、前記反射防止層に脱架橋をもたらす、請求項17に記載の方法。
- 前記反射防止層はアルカリ性現像液において初期溶解度を有し、前記露光(d)の後、前記反射防止層の前記露光部分はアルカリ性現像液において最終溶解度を有し、前記最終溶解度は前記初期溶解度よりも大きい、請求項17に記載の方法。
- 前記接触(e)後、反射防止膜厚5nm未満が前記露光部分に残る、請求項17に記載の方法。
- 前記接触(e)後、前記画像形成層と前記反射防止層は、そこに形成された各開口部を有し、前記開口部は、前記基板表面が見えるように実質的に位置合わせされる、請求項17に記載の方法。
- 前記構造にイオンを注いで、少なくともいくらかのイオンが基板内に注入され、基板中にイオン注入領域を形成し、前記イオン注入領域は前記開口部より下に形成されることをさらに含む、請求項21に記載の方法。
- 前記反射防止組成物は、0.01質量%未満の酸発生剤を含み、前記画像形成層は、前記露光(d)の間に酸を発生し、それによって、前記反射防止層の前記露光部分を脱架橋する、請求項17に記載の方法。
- 前記露光(d)は、前記架橋剤と、前記化合物の前記架橋可能な発色団との間に形成された結合を切ることとなる、請求項17に記載の方法。
- 前記露光(d)は、波長193nm〜365nmを有する光に前記画像形成層と前記反射防止を露光することを含む、請求項17に記載の方法。
- マイクロエレクトロニクス構造であって:
表面を有する基板;
前記基板表面に隣接する、硬化した感光性、現像液溶解性の反射防止層、前記反射防止層は、溶剤系に分散または溶解された、ポリマー性の多官能性エポキシ化合物およびビニルエーテル架橋剤を含む反射防止組成物から形成され、前記ポリマー性の多官能性エポキシ化合物はそれに結合する少なくとも1つの架橋可能な発色団と、閉じたエポキシド環および/または開環したエポキシ基であるエポキシ部分と、を含み、前記架橋可能な発色団は2〜10の架橋可能な基を有し;ならびに
前記反射防止層に隣接する画像形成層を含むことを特徴とする構造。 - 前記反射防止層の平均厚さが20nm〜60nmである、請求項26に記載のマイクロエレクトロニクス構造。
- 前記反射防止層は、水性溶媒およびアルカリ性現像液に実質的に不溶である、請求項26に記載のマイクロエレクトロニクス構造。
- 前記反射防止層の、193nm、248nmまたは365nmの波長おけるn値が少なくとも1.3、および193nm、248nmまたは365nmの波長おけるk値が少なくとも0.2である、請求項26に記載のマイクロエレクトロニクス構造。
- 前記基板は、ケイ素、SiGe、SiO2、Si3N4、アルミニウム、タングステン、タングステン珪化物、ガリウム砒化物、ゲルマニウム、タンタル、窒化タンタル、サンゴ、ブラックダイヤ、リンまたはホウ素ドープガラス、イオン注入層、窒化チタン、酸化ハフニウム、酸窒化ケイ素、およびそれらの混合物からなる群から選択されるマイクロエレクトロニクス基板である、請求項26に記載のマイクロエレクトロニクス構造。
- 前記ポリマー性の多官能性エポキシ化合物は、触媒存在下で、発色団前駆体とコアユニット前駆体とを反応させて形成され、
前記反射防止組成物は、組成物の総質量を100質量%とした場合、0.01質量%未満の前記触媒を含む、請求項14に記載の方法。 - 前記ポリマー性の多官能性エポキシ化合物は、ポリマーのコアユニットの側鎖に複数のエポキシ部分を有する、請求項14に記載の方法。
- 前記ポリマーのコアユニットは、下記式の繰り返しモノマーを含み、
- マイクロエレクトロニクス構造を形成する方法であって、前記方法は:
(a)表面を有する基板を用意し;
(b)前記表面上に感光性、現像液可溶性の反射防止層を形成し、前記反射防止層は、溶剤系に分散または溶解された、ポリマー性の多官能性エポキシ化合物およびビニルエーテル架橋剤を含む反射防止組成物から形成され、前記ポリマー性の多官能性エポキシ化合物は、ポリマーのコアユニットの側鎖に複数のエポキシ部分と、前記ポリマー性の多官能エポキシ化合物に結合する少なくとも1つの架橋可能な発色団と、を含み、前記架橋可能な発色団は2〜10の架橋可能な基を有し、前記エポキシ部分は閉じたエポキシド環および/または開環したエポキシ基であり、前記ポリマーのコアユニットは下記式の繰り返しモノマーを含み、
;ならびに
(c)前記反射防止層上に画像形成層を形成することを含む方法。 - 前記クレゾールノボラック型エポキシ樹脂は、ポリ[(o‐クレシルグリシジルエーテル)‐co‐ホルムアルデヒド]である、請求項9に記載の組成物。
- 前記組成物の総質量を100質量%とした場合を基準として、前記組成物が0.01質量%未満の酸発生剤を含む、請求項1に記載の組成物。
- 前記反射防止組成物の総質量を100質量%とした場合を基準として、前記反射防止組成物が0.01質量%未満の酸発生剤を含む、請求項14に記載の方法。
- 前記反射防止組成物の総質量を100質量%とした場合を基準として、前記反射防止組成物が0.01質量%未満の酸発生剤を含む、請求項26に記載のマイクロエレクトロニクス構造。
- 前記反射防止組成物の総質量を100質量%とした場合を基準として、前記反射防止組成物が0.01質量%未満の酸発生剤を含む、請求項34に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201261636919P | 2012-04-23 | 2012-04-23 | |
US61/636,919 | 2012-04-23 | ||
PCT/US2013/037626 WO2013163100A1 (en) | 2012-04-23 | 2013-04-22 | Photosensitive, developer-soluble bottom anti-reflective coating material |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2015517126A JP2015517126A (ja) | 2015-06-18 |
JP2015517126A5 JP2015517126A5 (ja) | 2017-06-15 |
JP6449145B2 true JP6449145B2 (ja) | 2019-01-09 |
Family
ID=49380422
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015509064A Active JP6449145B2 (ja) | 2012-04-23 | 2013-04-22 | 感光性、現像液可溶性の底面反射防止膜材料 |
Country Status (7)
Country | Link |
---|---|
US (1) | US10331032B2 (ja) |
EP (1) | EP2841513B1 (ja) |
JP (1) | JP6449145B2 (ja) |
KR (1) | KR102115442B1 (ja) |
CN (1) | CN104428379B (ja) |
TW (1) | TWI633390B (ja) |
WO (1) | WO2013163100A1 (ja) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2805347B1 (en) * | 2012-01-19 | 2018-03-07 | Brewer Science, Inc. | Nonpolymeric antireflection compositions containing adamantyl groups |
JP6449145B2 (ja) * | 2012-04-23 | 2019-01-09 | ブルーワー サイエンス アイ エヌ シー. | 感光性、現像液可溶性の底面反射防止膜材料 |
US9362120B2 (en) * | 2014-03-31 | 2016-06-07 | Taiwan Semiconductor Manufacturing Company, Ltd. | Lithography process and composition with de-crosslinkable crosslink material |
WO2016209828A1 (en) | 2015-06-22 | 2016-12-29 | Brewer Science Inc. | Superplanarizing spin-on carbon materials |
US20180181001A1 (en) * | 2015-07-02 | 2018-06-28 | Nissan Chemical Industries, Ltd. | Resist underlayer film-forming composition comprising epoxy adduct having long-chain alkyl group |
TWI662370B (zh) * | 2015-11-30 | 2019-06-11 | 南韓商羅門哈斯電子材料韓國公司 | 與外塗佈光致抗蝕劑一起使用之塗料組合物 |
US11262656B2 (en) * | 2016-03-31 | 2022-03-01 | Rohm And Haas Electronic Materials Korea Ltd. | Coating compositions for use with an overcoated photoresist |
WO2018052130A1 (ja) * | 2016-09-16 | 2018-03-22 | 日産化学工業株式会社 | 保護膜形成組成物 |
US10520821B2 (en) * | 2016-11-29 | 2019-12-31 | Taiwan Semiconductor Manufacturing Co., Ltd. | Lithography process with enhanced etch selectivity |
US10649339B2 (en) * | 2016-12-13 | 2020-05-12 | Taiwan Semiconductor Manufacturing Co., Ltd. | Resist material and method for forming semiconductor structure using resist layer |
CN107239002B (zh) * | 2017-07-07 | 2019-12-06 | 深圳市华星光电技术有限公司 | Uv固化粉末光阻组合物及其制作方法、彩膜基板的制作方法 |
WO2020099901A1 (en) * | 2018-11-14 | 2020-05-22 | Essilor International | Composition for coating the edge of an optical lens |
US11782345B2 (en) | 2019-08-05 | 2023-10-10 | Taiwan Semiconductor Manufacturing Co., Ltd. | Bottom antireflective coating materials |
DE102019134535B4 (de) | 2019-08-05 | 2023-09-07 | Taiwan Semiconductor Manufacturing Co., Ltd. | Materialien für unteren antireflexbelag |
KR20220079828A (ko) * | 2019-10-09 | 2022-06-14 | 닛산 가가쿠 가부시키가이샤 | 레지스트 하층막 형성 조성물 |
CN111487808B (zh) * | 2020-05-14 | 2021-07-06 | Tcl华星光电技术有限公司 | 显示面板 |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3776729A (en) | 1971-02-22 | 1973-12-04 | Ibm | Photosensitive dielectric composition and process of using the same |
JP3852889B2 (ja) * | 1998-09-24 | 2006-12-06 | 富士写真フイルム株式会社 | フォトレジスト用反射防止膜材料組成物 |
US6316165B1 (en) | 1999-03-08 | 2001-11-13 | Shipley Company, L.L.C. | Planarizing antireflective coating compositions |
KR101019331B1 (ko) | 2001-04-17 | 2011-03-07 | 브레우어 사이언스 인코포레이션 | 개선된 스핀 보울 상화성을 갖는 반사 방지 코팅 조성물 |
US6670425B2 (en) | 2001-06-05 | 2003-12-30 | Brewer Science, Inc. | Anti-reflective coating of polymer with epoxide rings reacted with light attenuating compound and unreacted epoxide rings |
US6846612B2 (en) * | 2002-02-01 | 2005-01-25 | Brewer Science Inc. | Organic anti-reflective coating compositions for advanced microlithography |
US7323289B2 (en) | 2002-10-08 | 2008-01-29 | Brewer Science Inc. | Bottom anti-reflective coatings derived from small core molecules with multiple epoxy moieties |
US7172849B2 (en) | 2003-08-22 | 2007-02-06 | International Business Machines Corporation | Antireflective hardmask and uses thereof |
US20050214674A1 (en) * | 2004-03-25 | 2005-09-29 | Yu Sui | Positive-working photoimageable bottom antireflective coating |
US20070207406A1 (en) * | 2004-04-29 | 2007-09-06 | Guerrero Douglas J | Anti-reflective coatings using vinyl ether crosslinkers |
US20050255410A1 (en) * | 2004-04-29 | 2005-11-17 | Guerrero Douglas J | Anti-reflective coatings using vinyl ether crosslinkers |
CN102981368B (zh) * | 2004-05-14 | 2015-03-04 | 日产化学工业株式会社 | 含有乙烯基醚化合物的形成防反射膜的组合物 |
US7638262B2 (en) | 2006-08-10 | 2009-12-29 | Az Electronic Materials Usa Corp. | Antireflective composition for photoresists |
US7914974B2 (en) | 2006-08-18 | 2011-03-29 | Brewer Science Inc. | Anti-reflective imaging layer for multiple patterning process |
EP2095189B1 (en) * | 2006-12-13 | 2013-07-10 | Nissan Chemical Industries, Ltd. | Composition for forming resist foundation film containing low molecular weight dissolution accelerator |
JPWO2009038126A1 (ja) * | 2007-09-20 | 2011-01-06 | 日産化学工業株式会社 | 分岐型ポリヒドロキシスチレンを含むレジスト下層膜形成組成物 |
KR101211325B1 (ko) | 2007-10-30 | 2012-12-12 | 브레우어 사이언스 인코포레이션 | 광화상형성가능한 측쇄 폴리머 |
WO2010096615A2 (en) | 2009-02-19 | 2010-08-26 | Brewer Science Inc. | Acid-sensitive, developer-soluble bottom anti-reflective coatings |
US8551686B2 (en) | 2009-10-30 | 2013-10-08 | Az Electronic Materials Usa Corp. | Antireflective composition for photoresists |
EP2805347B1 (en) * | 2012-01-19 | 2018-03-07 | Brewer Science, Inc. | Nonpolymeric antireflection compositions containing adamantyl groups |
JP6449145B2 (ja) * | 2012-04-23 | 2019-01-09 | ブルーワー サイエンス アイ エヌ シー. | 感光性、現像液可溶性の底面反射防止膜材料 |
TWI472507B (zh) | 2012-05-03 | 2015-02-11 | Korea Res Inst Chem Tech | 新穎茀肟酯化合物、含彼之光聚合起始劑及光阻組合物 |
-
2013
- 2013-04-22 JP JP2015509064A patent/JP6449145B2/ja active Active
- 2013-04-22 CN CN201380032928.1A patent/CN104428379B/zh active Active
- 2013-04-22 EP EP13781341.6A patent/EP2841513B1/en active Active
- 2013-04-22 KR KR1020147030814A patent/KR102115442B1/ko active IP Right Grant
- 2013-04-22 WO PCT/US2013/037626 patent/WO2013163100A1/en active Application Filing
- 2013-04-22 US US13/867,815 patent/US10331032B2/en active Active
- 2013-04-23 TW TW102114338A patent/TWI633390B/zh active
Also Published As
Publication number | Publication date |
---|---|
JP2015517126A (ja) | 2015-06-18 |
TW201411287A (zh) | 2014-03-16 |
US10331032B2 (en) | 2019-06-25 |
CN104428379A (zh) | 2015-03-18 |
KR102115442B1 (ko) | 2020-05-28 |
EP2841513B1 (en) | 2018-02-14 |
TWI633390B (zh) | 2018-08-21 |
KR20150013149A (ko) | 2015-02-04 |
EP2841513A1 (en) | 2015-03-04 |
CN104428379B (zh) | 2019-11-01 |
EP2841513A4 (en) | 2016-10-19 |
US20130280656A1 (en) | 2013-10-24 |
WO2013163100A1 (en) | 2013-10-31 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6449145B2 (ja) | 感光性、現像液可溶性の底面反射防止膜材料 | |
JP4509106B2 (ja) | ビニルエーテル化合物を含む反射防止膜形成組成物 | |
EP2399169B1 (en) | Acid-sensitive, developer-soluble bottom anti-reflective coatings | |
JP6050810B2 (ja) | 底面反射防止コーティング組成物及びそれの方法 | |
CN107267039B (zh) | 与外涂光致抗蚀剂一起使用的涂层组合物 | |
US9291909B2 (en) | Composition comprising a polymeric thermal acid generator and processes thereof | |
JP4918162B2 (ja) | 193nmリソグラフィー用の二重層の感光性で現像液に可溶な底面反射防止塗膜 | |
JP4826840B2 (ja) | パターン形成方法 | |
US8257910B1 (en) | Underlayers for EUV lithography | |
TWI509363B (zh) | 用於負型光阻之可顯影之底部抗反射塗佈組成物 | |
JP5708938B2 (ja) | 感光性レジスト下層膜形成組成物及びレジストパターンの形成方法 | |
JP6882244B2 (ja) | フォトレジストと共に使用するための下層コーティング組成物 | |
TWI775797B (zh) | 多觸發光阻劑組合物及方法 | |
JP5534205B2 (ja) | 感光性レジスト下層膜形成組成物及びレジストパターンの形成方法 | |
JP5084149B2 (ja) | 感光性樹脂、それを含むフォトレジスト組成物及びそれを用いたフォトレジストパターン形成方法 | |
JP2019008281A (ja) | オーバーコートされたフォトレジストと共に用いるためのコーティング組成物 | |
TWI721304B (zh) | 與外塗佈光致抗蝕劑一起使用的塗料組合物 | |
TW202116833A (zh) | 包含具有硬化性官能基之化合物之階差基板被覆組成物 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20160331 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20161130 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20161206 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20170303 |
|
A524 | Written submission of copy of amendment under article 19 pct |
Free format text: JAPANESE INTERMEDIATE CODE: A524 Effective date: 20170501 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20170815 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20171114 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20180115 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20180403 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20180615 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20181113 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20181205 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6449145 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |