JP6417416B2 - シリサイド層を保護するための保護方法 - Google Patents
シリサイド層を保護するための保護方法 Download PDFInfo
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- 238000000034 method Methods 0.000 title claims description 61
- 229910021332 silicide Inorganic materials 0.000 title claims description 45
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 title claims description 44
- 239000010410 layer Substances 0.000 claims description 52
- 239000011241 protective layer Substances 0.000 claims description 33
- 238000005530 etching Methods 0.000 claims description 27
- 238000000151 deposition Methods 0.000 claims description 22
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 19
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 19
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 16
- 239000000758 substrate Substances 0.000 claims description 14
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 13
- 229910052799 carbon Inorganic materials 0.000 claims description 13
- 239000010703 silicon Substances 0.000 claims description 13
- 229910052710 silicon Inorganic materials 0.000 claims description 13
- 239000007789 gas Substances 0.000 claims description 12
- 230000008569 process Effects 0.000 claims description 12
- 229910052751 metal Inorganic materials 0.000 claims description 11
- 239000002184 metal Substances 0.000 claims description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 9
- 229910052757 nitrogen Inorganic materials 0.000 claims description 8
- 238000004140 cleaning Methods 0.000 claims description 7
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 7
- 229910019001 CoSi Inorganic materials 0.000 claims description 6
- 229910008484 TiSi Inorganic materials 0.000 claims description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 6
- 239000001301 oxygen Substances 0.000 claims description 6
- 229910052760 oxygen Inorganic materials 0.000 claims description 6
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 claims description 5
- -1 NiPtSi Inorganic materials 0.000 claims description 4
- VLJQDHDVZJXNQL-UHFFFAOYSA-N 4-methyl-n-(oxomethylidene)benzenesulfonamide Chemical compound CC1=CC=C(S(=O)(=O)N=C=O)C=C1 VLJQDHDVZJXNQL-UHFFFAOYSA-N 0.000 claims description 3
- 229910016006 MoSi Inorganic materials 0.000 claims description 3
- 229910005883 NiSi Inorganic materials 0.000 claims description 3
- 229910005881 NiSi 2 Inorganic materials 0.000 claims description 3
- 229910021340 platinum monosilicide Inorganic materials 0.000 claims description 3
- 230000001681 protective effect Effects 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 2
- 229920001296 polysiloxane Polymers 0.000 claims 1
- 230000008021 deposition Effects 0.000 description 18
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 10
- 230000015572 biosynthetic process Effects 0.000 description 6
- 230000010287 polarization Effects 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 239000000376 reactant Substances 0.000 description 5
- 229910003902 SiCl 4 Inorganic materials 0.000 description 3
- 229910052731 fluorine Inorganic materials 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000001465 metallisation Methods 0.000 description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- 239000010937 tungsten Substances 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 239000000460 chlorine Substances 0.000 description 2
- 229910052801 chlorine Inorganic materials 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000004070 electrodeposition Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 238000011065 in-situ storage Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 229910000676 Si alloy Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 239000003575 carbonaceous material Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 238000005211 surface analysis Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02115—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material being carbon, e.g. alpha-C, diamond or hydrogen doped carbon
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
- H01L21/02274—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition in the presence of a plasma [PECVD]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
- H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
- H01L21/28512—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table
- H01L21/28518—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table the conductive layers comprising silicides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31105—Etching inorganic layers
- H01L21/31111—Etching inorganic layers by chemical means
- H01L21/31116—Etching inorganic layers by chemical means by dry-etching
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76802—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics
- H01L21/76814—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics post-treatment or after-treatment, e.g. cleaning or removal of oxides on underlying conductors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76877—Filling of holes, grooves or trenches, e.g. vias, with conductive material
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/10—Applying interconnections to be used for carrying current between separate components within a device
- H01L2221/1005—Formation and after-treatment of dielectrics
- H01L2221/1052—Formation of thin functional dielectric layers
- H01L2221/1057—Formation of thin functional dielectric layers in via holes or trenches
- H01L2221/1063—Sacrificial or temporary thin dielectric films in openings in a dielectric
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- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Plasma & Fusion (AREA)
- General Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Electrodes Of Semiconductors (AREA)
Description
(a)基板と、前記基板上に形成されたシリサイド層と、少なくとも前記シリサイド層を覆うシリコン窒化物層とがこの順になった積層体を準備する工程
(b)所定領域の前記シリコン窒化物層をエッチングし、少なくとも電気的コンタクトを形成するための領域のシリサイド層を露出させる工程
(c)少なくとも工程(b)にて露出させた領域の前記シリサイド層上に、保護層を堆積させる工程
を備え、工程(b)と工程(c)との間について、前記積層体が水分、特に周囲の空気中の水分と接触する工程を避ける。
・CxHy系プラズマの流量を10cm3/分から100cm3/分の間とし、更に窒素又は酸素を50−500cm3/分の流量で含むようにし、10から60秒の間、積層体100を20℃から100℃の間の温度に維持する。
・圧力:10−200mTorr
・ソース電力:100−1000W
・分極力(又はバイアス電力−イオンエネルギー制御):0−200Wとする
この分極力を越えると、炭素プラズマから導かれた元素がシリサイド層2に注入され、損傷を与える可能性がある。
Claims (15)
- 集積回路の電気的コンタクト形成用のシリサイド層を保護するための保護方法において、下記の工程、つまり、
(a)基板と、前記基板上に形成されたシリサイド層と、少なくとも前記シリサイド層を覆うシリコン窒化物層とがこの順に積層された積層体を準備する工程と、
(b)所定領域の前記シリコン窒化物層をエッチングし、少なくとも電気的コンタクトを形成するための領域の前記シリサイド層を露出させる工程と、
(c)少なくとも工程(b)にて露出させた前記シリサイド層の前記領域上に、保護層を堆積する工程と、
を備え、
工程(b)は、CH 3 F系プラズマを用いて行い、
工程(c)は、CxHy系、CxOy系、SixCly系又はSixFy系のプラズマを用いて行い、
前記工程(b)と前記工程(c)との間について、前記積層体が水分と接触する工程を避ける、保護方法。 - 請求項1の保護方法において、
前記工程(b)におけるエッチングは、フッ化物プラズマによるエッチングである、保護方法。 - 請求項1又は2の保護方法において、
前記工程(b)及び前記工程(c)は、反応装置の同じ部屋にて行われる、保護方法。 - 請求項1から3のいずれか1つの保護方法において、
前記工程(c)の後に、前記積層体に対してウェット洗浄を行う工程(d)を更に備える、保護方法。 - 請求項4の保護方法において、
前記工程(d)の後に、前記工程(b)にて露出させた前記シリサイド層の前記領域上に金属層を堆積し、前記電気的コンタクトを形成する工程(e)を更に備える、保護方法。 - 請求項1から5のいずれか1つの保護方法において、
前記工程(c)は、CxOy系プラズマを用いて行うことにより、炭素を含有する前記保護層を形成する、保護方法。 - 請求項1から5のいずれか1つの保護方法において、
前記工程(c)は、CxHy系のプラズマを用いて行うことにより、炭素を含有する前記保護層を形成する、保護方法。 - 請求項6又は7の保護方法において、
前記工程(c)において、炭素含量が30%よりも高い前記保護層を形成する、保護方法。 - 請求項1から5のいずれか1つの保護方法において、
前記工程(c)は、ケイ素を含む気体のプラズマを用いて行うことにより、シリコンを含有する保護層を形成する、保護方法。 - 請求項1から5のいずれか1つの保護方法において、
前記工程(c)は、SixCly系又はSixFy系のプラズマを用いて行うことにより、シリコンを含有する保護層を形成する、保護方法。 - 請求項7から10のいずれか1つの保護方法において、
前記工程(c)は、50から500cm3/分の間の流速で供給され、且つ、酸素及び窒素から選ばれる1つ又は複数の気体を更に用いるプラズマによって行われる、保護方法。 - 請求項1から11のいずれか1つの保護方法において、
シリサイド層の種類は、以下のシリサイド、つまり、PtSi、NiPtSi、NiSi、NiSi2、TiSi2(C54相)、TiSi2(C49相)、Co2Si、CoSi、CoSi2、WSi2、MoSi2、TaSi2から選ばれる、保護方法。 - 請求項1から12のいずれか1つの保護方法において、
前記工程(b)は、
前記シリコン窒化物層におけるエッチングから保護されるべき部分をシリコン酸化物層によって保護することにより、前記シリコン窒化物層のエッチングされるべき前記領域を決定する工程(b1)と、
決定された前記領域をエッチングする工程(b2)とを含む、保護方法。 - 請求項13の保護方法において、
前記工程(b1)におけるエッチングから保護されるべき部分の前記シリコン窒化物層の保護は、エッチングマスクを前記シリコン酸化物上にエッチングマスクを形成することにより行われ、
前記マスクは、前記シリコン窒化物層のエッチングされるように決定された領域と一致する貫通開口を有する、保護方法。 - 請求項1から14のいずれか1つの保護方法において、
前記工程(c)は、プラズマ処理により行われる、保護方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1361393A FR3013502A1 (fr) | 2013-11-20 | 2013-11-20 | Procede de protection d’une couche de siliciure |
FR13/61393 | 2013-11-20 | ||
PCT/FR2014/052964 WO2015075379A1 (fr) | 2013-11-20 | 2014-11-19 | Procédé de protection d'une couche de siliciure |
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JP2016537817A JP2016537817A (ja) | 2016-12-01 |
JP2016537817A5 JP2016537817A5 (ja) | 2018-10-11 |
JP6417416B2 true JP6417416B2 (ja) | 2018-11-07 |
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US (1) | US9607823B2 (ja) |
EP (1) | EP3072148B1 (ja) |
JP (1) | JP6417416B2 (ja) |
FR (1) | FR3013502A1 (ja) |
WO (1) | WO2015075379A1 (ja) |
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KR20010028673A (ko) * | 1999-09-22 | 2001-04-06 | 윤종용 | 반응성 이온 식각을 이용한 반도체 소자의 컨택 홀 형성 방법 |
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JP2010205782A (ja) * | 2009-02-27 | 2010-09-16 | Renesas Electronics Corp | 半導体装置の製造方法 |
JP5326113B2 (ja) * | 2009-06-25 | 2013-10-30 | ルネサスエレクトロニクス株式会社 | 半導体装置の洗浄方法 |
JP2011233713A (ja) * | 2010-04-27 | 2011-11-17 | Tokyo Electron Ltd | プラズマ処理方法及びプラズマ処理装置 |
WO2012122052A2 (en) * | 2011-03-04 | 2012-09-13 | Applied Materials, Inc. | Methods for contact clean |
US8871650B2 (en) * | 2011-10-28 | 2014-10-28 | Applied Materials, Inc. | Post etch treatment (PET) of a low-K dielectric film |
-
2013
- 2013-11-20 FR FR1361393A patent/FR3013502A1/fr not_active Withdrawn
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2014
- 2014-11-19 US US15/029,148 patent/US9607823B2/en active Active
- 2014-11-19 WO PCT/FR2014/052964 patent/WO2015075379A1/fr active Application Filing
- 2014-11-19 EP EP14814931.3A patent/EP3072148B1/fr active Active
- 2014-11-19 JP JP2016532002A patent/JP6417416B2/ja active Active
Also Published As
Publication number | Publication date |
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FR3013502A1 (fr) | 2015-05-22 |
EP3072148B1 (fr) | 2021-07-07 |
EP3072148A1 (fr) | 2016-09-28 |
US9607823B2 (en) | 2017-03-28 |
US20160240371A1 (en) | 2016-08-18 |
JP2016537817A (ja) | 2016-12-01 |
WO2015075379A1 (fr) | 2015-05-28 |
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