JP6414250B2 - 下地積層体とそれを含む積層素子、並びに磁気センサ及びマイクロ波アシスト磁気ヘッド - Google Patents
下地積層体とそれを含む積層素子、並びに磁気センサ及びマイクロ波アシスト磁気ヘッド Download PDFInfo
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- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
- G11B5/3906—Details related to the use of magnetic thin film layers or to their effects
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- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/1278—Structure or manufacture of heads, e.g. inductive specially adapted for magnetisations perpendicular to the surface of the record carrier
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- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/187—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features
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- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
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- G11B5/3133—Disposition of layers including layers not usually being a part of the electromagnetic transducer structure and providing additional features, e.g. for improving heat radiation, reduction of power dissipation, adaptations for measurement or indication of gap depth or other properties of the structure
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
- G11B5/313—Disposition of layers
- G11B5/3133—Disposition of layers including layers not usually being a part of the electromagnetic transducer structure and providing additional features, e.g. for improving heat radiation, reduction of power dissipation, adaptations for measurement or indication of gap depth or other properties of the structure
- G11B5/314—Disposition of layers including layers not usually being a part of the electromagnetic transducer structure and providing additional features, e.g. for improving heat radiation, reduction of power dissipation, adaptations for measurement or indication of gap depth or other properties of the structure where the layers are extra layers normally not provided in the transducing structure, e.g. optical layers
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
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- G11B5/3109—Details
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- G11B5/3146—Disposition of layers including additional layers for improving the electromagnetic transducing properties of the basic structure, e.g. for flux coupling, guiding or shielding magnetic layers
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
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Description
磁気記録媒体は、磁性微粒子が集合した不連続媒体であり、各磁性微粒子は単磁区構造となっている。この磁気記録媒体において、1つの記録ビットは、複数の磁性微粒子によって構成される。そのため、記録密度を高めるためには、磁性微粒子を小さくして、隣接する記録ビットの境界の凹凸を減少させなければならない。しかしながら、磁性微粒子を小さくすると、磁性微粒子の体積の減少に伴い磁性微粒子の磁化の熱安定性が低下するという問題が生じる。
上記発明(発明1)において、前記第1強磁性層がスピン注入層であり、前記第2強磁性層が磁界発生層であってもよい(発明2)。
図1Aに示すように、本実施形態におけるスピントルク発振子10は、本実施形態に係る下地積層体11と、スピン注入層12と、非磁性スペーサ層13と、磁界発生層14と、Ru等からなる厚み0.5〜20nm程度のキャップ層15とがこの順に積層されてなる積層素子である。スピントルク発振子10は、下地積層体11側からキャップ層15側に向けて直流電流を流すことで、磁界発生層14の磁化が歳差運動し、磁界発生層14から高周波磁界(マイクロ波磁界)を発生させることができる。
図2に示すように、本実施形態における磁気抵抗効果素子20は、下地積層体11と、外部磁場に応じて磁化の方向が変化する自由層21と、非磁性スペーサ層22と、磁化の方向が固定された参照層23及びピン層24と、Ru等からなる膜厚0.4〜20nm程度のキャップ層25とを含み、自由層21、非磁性スペーサ層22、参照層23、ピン層24及びキャップ層25が、下地積層体11のバッファー層11b上にこの順で積層されてなる積層素子であって、この積層方向にセンス電流が印加されてなるCPP(Current Perpendicular to Plane)構造を有する。
図3は、本実施形態におけるマイクロ波アシスト磁気ヘッドを搭載した磁気記録装置を概略的に示す斜視図であり、図4は、本実施形態におけるマイクロ波アシスト磁気ヘッドを備えるヘッドジンバルアセンブリ(HGA)を概略的に示す斜視図であり、図5は、本実施形態におけるマイクロ波アシスト磁気ヘッドの全体構成を模式的に示す斜視図である。
次に、図面を参照しつつ、本実施形態におけるマイクロ波アシスト磁気ヘッドについて説明する。図6は、本実施形態におけるマイクロ波アシスト磁気ヘッドの、媒体対向面であるABSと交差する方向に沿った断面図(XZ断面図)である。
シリコンウェハ上に、シード層として膜厚10ÅのTaFe合金層(Ta:Fe=27(at%):73(at%))をスパッタリング法により形成した後、バッファー層として膜厚20ÅのIrCr合金層をスパッタリング法により形成することで、下地積層体(総膜厚30Å)を作製した。当該下地積層体のバッファー層上に、スピン注入層として[CoFe/Ni]20をスパッタリング法により形成し、積層体Le1を作製した。
シード層として膜厚10ÅのTaCo合金層(Ta:Co=27(at%):73(at%))を形成した以外は、実施例1と同様にして下地積層体を作製し、当該下地積層体のバッファー層上に、スピン注入層として[CoFe/Ni]20をスパッタリング法により形成し、積層体Le2を作製した。
シード層として膜厚10ÅのTaNi合金層(Ta:Ni=27(at%):73(at%))を形成した以外は、実施例1と同様にして下地積層体を作製し、当該下地積層体のバッファー層上に、スピン注入層として[CoFe/Ni]20をスパッタリング法により形成し、積層体Le3を作製した。
シード層として膜厚20ÅのTa層を形成し、バッファー層として膜厚20ÅのCu層を形成した以外は、実施例1と同様にして下地積層体(総膜厚40Å)を作製し、当該下地積層体のバッファー層上に、スピン注入層として[CoFe/Ni]20をスパッタリング法により形成し、積層体Lce1を作製した。
シード層として膜厚10ÅのTa層を形成した以外は、実施例1と同様にして下地積層体(総膜厚30Å)を作製し、当該下地積層体のバッファー層上に、スピン注入層として[CoFe/Ni]20をスパッタリング法により形成し、積層体Lce2を作製した。
バッファー層としてのIrCr合金層の膜厚を25Åとした以外は、比較例2と同様にして下地積層体(総膜厚35Å)を作製し、当該下地積層体のバッファー層上に、スピン注入層として[CoFe/Ni]20をスパッタリング法により形成し、積層体Lce3を作製した。
シード層としてのTa層の膜厚を10Åとした以外は、比較例1と同様にして下地積層体(総膜厚30Å)を作製し、当該下地積層体のバッファー層上に、スピン注入層として[CoFe/Ni]20をスパッタリング法により形成し、積層体Lce4を作製した。
バッファー層としてのCu層の膜厚を10Åとした以外は、比較例1と同様にして下地積層体(総膜厚30Å)を作製し、当該下地積層体のバッファー層上に、スピン注入層として[CoFe/Ni]20をスパッタリング法により形成し、積層体Lce5を作製した。
実施例1〜3及び比較例1〜5の積層体Le1〜Le3,Lce1〜Lce5について、磁気トルクメーター(製品名:高感度磁気異方性トルク計 TM−TR1550−HGC,玉川製作所社製)を用いて、スピン注入層の有効垂直磁気異方性エネルギーKeff(erg/cm3)を測定した。さらに、振動試料型磁力計(BH−Vシリーズ,理研電子社製)を用いて飽和磁化Ms(emu/cm3)を算出し、Ku=Keff+2πMs2の関係式から、スピン注入層の垂直磁気異方性エネルギーKu(erg/cm3)を算出した。結果を図10に示す。
実施例1〜3のそれぞれにおいて、シード層11aにおけるFe、Co、Ni(3d遷移金属)の組成比を変動させた積層体を作製し、試験例1と同様にして各積層体におけるスピン注入層の垂直磁気異方性エネルギーKu(erg/cm3)を測定した。結果を図11に示す。
11…下地積層体
11a…シード層
11b…バッファー層
12…スピン注入層
13…非磁性スペーサ層
14…磁界発生層
Claims (9)
- シード層及びバッファー層がこの順で積層されてなる下地積層体と、第1強磁性層と、第2強磁性層と、非磁性スペーサ層とを含み、
前記シード層は、タンタル(Ta)と他の金属の少なくとも1種とを含む非晶質構造又は微結晶構造を有する合金層であり、
前記バッファー層は、[001]面配向六方最密構造を有する、周期表の第6族金属のうちの少なくとも1種と第9族金属のうちの少なくとも1種とを含む合金層であり、
前記第1強磁性層は、膜面に対して垂直方向の磁気異方性を有し、
前記第1強磁性層、前記非磁性スペーサ層及び前記第2強磁性層が、前記バッファー層上にこの順で積層されてなることを特徴とする積層素子。 - 前記第1強磁性層がスピン注入層であり、前記第2強磁性層が磁界発生層であることを特徴とする請求項1に記載の積層素子。
- 前記シード層は、前記タンタル(Ta)と、V、Ti、Cr、Mn、Fe、Co、Ni及びCuからなる群より選択される少なくとも1種の金属とを含む合金層であることを特徴とする請求項1又は2に記載の積層素子。
- 前記シード層は、前記タンタル(Ta)と、Fe、Co又はNiとを含む合金層であることを特徴とする請求項1又は2に記載の積層素子。
- 前記シード層は、前記タンタル(Ta)を60at%以下含む合金層であることを特徴とする請求項1〜4のいずれかに記載の積層素子。
- 前記バッファー層が、前記第6族金属としてのCrと、前記第9族金属としてのRh又はIrとを含む合金層であることを特徴とする請求項1〜5のいずれかに記載の積層素子。
- 前記バッファー層が、前記第6族金属を30at%以上含み、前記第9族金属を30at%以上含むことを特徴とする請求項1〜6のいずれかに記載の積層素子。
- 請求項1〜7のいずれかに記載の積層素子を備えることを特徴とする磁気センサ。
- 磁気記録媒体に対して印加される記録磁界を発生させる主磁極と、
前記主磁極と磁路を形成するトレーリングシールドと、
前記主磁極及び前記トレーリングシールドの間に設けられてなる請求項2に記載の積層素子と
を備えることを特徴とするマイクロ波アシスト磁気ヘッド。
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11443762B2 (en) * | 2020-06-01 | 2022-09-13 | Kabushiki Kaisha Toshiba | Magnetic head and magnetic recording device including a stacked body having a first magnetic member and a second magnetic member |
Families Citing this family (36)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10460752B2 (en) * | 2016-12-08 | 2019-10-29 | Western Digital Technologies, Inc. | Spin-torque oscillator with multilayer seed layer between the write pole and the free layer in a magnetic recording write head |
US10896690B1 (en) | 2017-06-07 | 2021-01-19 | Sandisk Technologies Llc | Magnetic head with current assisted magnetic recording and method of making thereof |
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US10891975B1 (en) | 2018-10-09 | 2021-01-12 | SanDiskTechnologies LLC. | Magnetic head with assisted magnetic recording and method of making thereof |
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US11043232B1 (en) | 2020-02-04 | 2021-06-22 | Headway Technologies, Inc. | Spin torque reversal assisted magnetic recording (STRAMR) device having a width substantially equal to that of a traililng shield |
US11125840B2 (en) * | 2020-02-18 | 2021-09-21 | Western Digital Technologies, Inc. | Ultra-low RA and high TMR magnetic sensor with radiation reflective lead |
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US11257514B2 (en) | 2020-06-25 | 2022-02-22 | Western Digital Technologies, Inc. | Magnetic recording devices having negative polarization layer to enhance spin-transfer torque |
US10937450B1 (en) | 2020-07-13 | 2021-03-02 | Headway Technologies, Inc. | Magnetic flux guiding device with spin torque oscillator (STO) film having one or more negative spin polarization layers in assisted writing application |
US11295768B1 (en) | 2020-09-23 | 2022-04-05 | Headway Technologies, Inc. | Writer with laterally graded spin layer MsT |
US11348605B1 (en) | 2020-11-20 | 2022-05-31 | Headway Technologies, Inc. | Writer with adaptive side gap |
US11289118B1 (en) | 2021-01-04 | 2022-03-29 | Western Digital Technologies, Inc. | Spintronic device having negative interface spin scattering |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001184626A (ja) * | 1999-12-24 | 2001-07-06 | Hitachi Ltd | 磁気記録媒体および磁気記憶装置 |
US6730420B1 (en) * | 2000-10-31 | 2004-05-04 | Komag, Inc. | Magnetic thin film recording media having extremely low noise and high thermal stability |
JP2002171011A (ja) | 2000-12-04 | 2002-06-14 | Ken Takahashi | 磁気抵抗効果素子及びその製造方法並びに磁気抵抗効果センサ |
JP2005353256A (ja) * | 2004-05-13 | 2005-12-22 | Fujitsu Ltd | 垂直磁気記録媒体およびその製造方法、磁気記憶装置 |
JP2008277586A (ja) * | 2007-04-27 | 2008-11-13 | Toshiba Corp | 磁気素子、磁気記録ヘッド及び磁気記録装置 |
JP2008287829A (ja) * | 2007-05-21 | 2008-11-27 | Toshiba Corp | 垂直磁気記録媒体 |
JP4968116B2 (ja) * | 2008-03-04 | 2012-07-04 | 富士電機株式会社 | 垂直磁気記録媒体 |
US8981211B2 (en) * | 2008-03-18 | 2015-03-17 | Zetta Research and Development LLC—AQT Series | Interlayer design for epitaxial growth of semiconductor layers |
JP5616893B2 (ja) * | 2009-08-20 | 2014-10-29 | 昭和電工株式会社 | 熱アシスト磁気記録媒体及び磁気記憶装置 |
US8184411B2 (en) | 2009-10-26 | 2012-05-22 | Headway Technologies, Inc. | MTJ incorporating CoFe/Ni multilayer film with perpendicular magnetic anisotropy for MRAM application |
US8300356B2 (en) * | 2010-05-11 | 2012-10-30 | Headway Technologies, Inc. | CoFe/Ni Multilayer film with perpendicular anistropy for microwave assisted magnetic recording |
US8920947B2 (en) | 2010-05-28 | 2014-12-30 | Headway Technologies, Inc. | Multilayer structure with high perpendicular anisotropy for device applications |
JP5161951B2 (ja) | 2010-11-26 | 2013-03-13 | 株式会社東芝 | スピントルク発振子および磁気記録装置 |
WO2012114931A1 (ja) * | 2011-02-25 | 2012-08-30 | 株式会社村田製作所 | 可変容量素子及びチューナブルフィルタ |
JP5961439B2 (ja) * | 2012-05-01 | 2016-08-02 | 昭和電工株式会社 | 熱アシスト磁気記録媒体及び磁気記録再生装置 |
JP2015088197A (ja) * | 2013-10-28 | 2015-05-07 | 昭和電工株式会社 | 磁気記録媒体および磁気記憶装置 |
US9449979B2 (en) * | 2014-11-02 | 2016-09-20 | Thomas J McKinnon | Ferroelectric memory device and fabrication process thereof, and methods for operation thereof |
US10115892B2 (en) * | 2015-11-23 | 2018-10-30 | Headway Technologies, Inc. | Multilayer structure for reducing film roughness in magnetic devices |
-
2016
- 2016-04-26 US US15/138,347 patent/US9934797B2/en active Active
-
2017
- 2017-02-22 JP JP2017030811A patent/JP6414250B2/ja active Active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11443762B2 (en) * | 2020-06-01 | 2022-09-13 | Kabushiki Kaisha Toshiba | Magnetic head and magnetic recording device including a stacked body having a first magnetic member and a second magnetic member |
US11705152B2 (en) | 2020-06-01 | 2023-07-18 | Kabushiki Kaisha Toshiba | Magnetic head and magnetic recording device including a stacked body having a first magnetic member and a second magnetic member |
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