JP6408830B2 - Cutting equipment - Google Patents

Description

  The present invention relates to a cutting apparatus for cutting a wafer such as a resin substrate with a cutting blade.

  When cutting a wafer made of a soft material such as a resin substrate or unfired ceramic with a cutting blade, the cutting blade may become clogged, or cutting waste may adhere to the cutting blade due to heat generated by the cutting process. Chipping and burrs are likely to occur on the wafer.

  In order to avoid the occurrence of such a problem, in Patent Document 1, a groove extending from the center side of the annular plate-shaped dicing blade toward the outer peripheral edge is provided in the dicing blade, and cutting water is supplied to the center side. Thus, a dicing saw that supplies cutting water to a cutting portion through a groove has been proposed.

Japanese Patent Laid-Open No. 7-24725

  However, the dicing blade described in Patent Document 1 is provided with a groove extending from the inner periphery to the outer periphery of the dicing blade in order to supply cutting water to the cutting portion. There is a problem that the strength of the blade is reduced.

  The present invention has been considered in view of such problems, and an object of the present invention is to effectively cool a cutting portion and prevent generation of chipping and burrs while maintaining the strength of a cutting blade.

A cutting apparatus according to the present invention includes a chuck table for holding a wafer, and a cutting means for cutting the wafer held on the chuck table. The cutting means is formed in an annular shape. A cutting blade that cuts into the wafer while rotating, a flange set that sandwiches both side surfaces of the cutting blade, cutting water supply means that has a nozzle that supplies cutting water to the center of the flange set, and a male screw is formed at the tip. A spindle for rotating the flange set, the cutting blade having a plurality of slits on an outer periphery, the flange set having an axial hole that engages the spindle at a tapered surface and one surface of the cutting blade A first flange that contacts the second flange, a second flange that contacts the other surface of the cutting blade, the first flange, and the second flange In order to sandwich and fix the cutting blade with the flange, a nut formed on the inner periphery of a female screw formed on the front end of the first flange and a male screw formed on the front end of the spindle A flange nut that has a female screw formed on the inner periphery thereof and fixes the first flange to the spindle, and the flange nut receives a cutting water supplied from the nozzle of the cutting water supply means. And a first water guiding portion for introducing the cutting water received by the cutting water receiving portion into the first flange, the first flange opening to the flange nut side, and the first water guiding portion A water receiving portion that receives cutting water from the portion and a second water guiding portion that receives cutting water from the water receiving portion by centrifugal force, and the first flange and the second flange It is facing clamp the said cutting blade One of extending in Oite radially clamping face provided at a position corresponding to the slit of the cutting blade, a plurality circumferentially disposed, comprises a plurality of grooves communicating with the water conduit of the second, The cutting water supplied by the cutting water supply means is supplied to the slit of the cutting blade through the groove of the flange set.

It is preferable that the slit of the cutting blade is configured to communicate with the groove of the flange set.
The flange set preferably includes an annular spacer having an outer diameter smaller than that of the cutting blade and sandwiching the cutting blade, and the groove is provided in the spacer.

  According to the cutting device of the present invention, the cutting water is supplied to the slit of the cutting blade through the groove provided in the flange set, so that the cutting water enters the cutting groove formed in the wafer by cutting. And the cutting portion can be effectively cooled. Thereby, generation | occurrence | production of a chipping and a burr | flash can be prevented. Moreover, it is possible to prevent cutting waste from adhering to the slit. Furthermore, since it is not necessary to provide a groove in the cutting blade, the strength of the cutting blade can be prevented from decreasing.

If the slit of the cutting blade communicates with the groove of the flange set, the cutting water discharged from the groove of the flange set can be reliably supplied to the slit of the cutting blade.
In addition, if the spacer is provided with a groove, it is possible to cope with cutting blades having different numbers of slits by replacing the spacers according to the number of slits of the cutting blade, thereby preventing occurrence of chipping and burrs. be able to.

The perspective view which shows the cutting device. The expansion perspective view which shows the cutting means. The side view exploded sectional view showing a flange set. The front view which shows a cutting blade. The front view which shows a 1st flange. The rear view which shows a 2nd flange. The rear view which shows a flange nut. The front view which shows the relationship between a 1st and 2nd flange and a cutting blade. Side surface sectional drawing which shows a cutting means. The front view which shows another example of the relationship between a 1st and 2nd flange and a cutting blade. Side surface sectional drawing which shows another cutting means. The front view which shows a spacer.

  A cutting apparatus 10 shown in FIG. 1 is an apparatus that cuts a wafer formed of a soft material such as a resin substrate, a glass substrate, or an unfired ceramic substrate, and is held by the chuck table 11 that holds the wafer and the chuck table 11. A cutting means 12 for cutting the wafer, and a cutting feed means 13 and an index feed means 14 for moving the cutting means 12.

  The chuck table 11 has a holding surface 111 parallel to the XY plane, and sucks and holds the wafer placed on the holding surface 111. The chuck table 11 is movable in the ± X directions.

  The cutting feed means 13 is configured such that when the motor 132 rotates the screw shaft 131 oriented in the Z-axis direction, the moving portion 133 engaged with the screw shaft 131 is guided by the guide 134 and moved in the ± Z direction. Yes. The cutting means 12 is fixed to the moving unit 133 and moves in the ± Z direction as the moving unit 133 moves.

  The index feed means 14 is moved in the ± Y direction by the guide 144 having the moving portion 143 engaged with the screw shaft 141 when the motor (not shown) rotates the screw shaft 141 directed in the Y-axis direction. It has a configuration. The cutting feed means 13 is fixed to the moving part 143, and the cutting feed means 13 and the cutting means 12 move in the ± Y direction as the moving part 143 moves.

  As shown in FIG. 2, the cutting means 12 includes a cutting blade 40 that is mounted on the spindle 22 and is rotatable about a rotation axis that is parallel to the ± Y direction. With the cutting blade 40 rotated, the cutting feed means 13 moves the cutting means 12 in the −Z direction, whereby the rotating cutting blade 40 is cut into the wafer held by the chuck table 11, and the chuck table 11 is + X. The wafer is cut by moving in the direction (or -X direction). Further, the indexing feeding means 14 moves the cutting means 12 in the ± Y direction, whereby the cutting blade 40 can be positioned at an arbitrary position in the Y-axis direction of the wafer held on the chuck table 11.

  As shown in FIG. 2, the cutting means 12 includes a housing 21 that rotatably supports the spindle 22, a flange set 23 disposed at the tip of the spindle 22, and a cutting water supply means 24 that supplies cutting water. ing. The flange set 23 sandwiches the annular plate-shaped cutting blade 40 from the + Y direction and the −Y direction, and rotates the flange set 23 when the spindle 22 rotates about a rotation axis parallel to the ± Y direction. . Further, as the flange set 23 rotates, the cutting blade 40 sandwiched by the flange set 23 also rotates.

  The cutting water supply means 24 includes a water supply port 241 connected to a cutting water supply source (not shown), and a nozzle 242 that discharges cutting water supplied from the cutting water supply source to the water supply port 241 in the + Y direction. Yes. The cutting water discharged from the nozzle 242 is supplied to the center (rotating shaft) of the flange set 23.

  As shown in FIG. 3, the flange set 23 includes a first flange 31 that contacts the + Y side surface 41 of the cutting blade 40, a second flange 32 that contacts the −Y side surface 42 of the cutting blade 40, A nut 33 for fixing the two flanges 32 to the first flange 31 and a flange nut 34 for fixing the first flange 31 to the spindle 22 (see FIG. 2) are provided.

  As shown in FIG. 4, the cutting blade 40 includes a circular opening 43 at the center and a plurality of slits 44 on the outer periphery.

  The first flange 31 is formed in an annular shape, and includes a shaft hole 311 that engages with the spindle 22, a water receiving portion 312 that communicates with the shaft hole 311 and opens on the −Y side, and a side surface of the water receiving portion 312. A plurality of water supply ports 313 provided, a clamping surface 317 that contacts the surface on the + Y side of the cutting blade 40, a plurality of grooves 318 provided in the clamping surface 317, and a plurality of water guide portions 314 extending in the ± Y direction And a plurality of water guiding portions 315 and 316 extending in the radial direction of the first flange 31. The water supply port 313 and the groove 318 are communicated with each other through water guiding portions 314 and 315.

  The second flange 32 is formed in an annular shape, and includes a through hole 321 that passes through the center, a clamping surface 327 that abuts on the -Y side surface 42 of the cutting blade 40, and a plurality of clamping surfaces 327. And a groove 328. When the second flange 32 is fixed to the first flange 31, the water supply port 313 and the groove 328 of the first flange 31 communicate with each other via the water guide portions 314 and 316.

  The nut 33 is formed in an annular shape, and includes a through hole 331 passing through the center and a female screw 339 provided on a side surface of the through hole 331. By screwing the female screw 339 into the male screw 319 of the first flange 31, the nut 33 is fixed to the first flange 31, and the second flange 32 is sandwiched between the first flange 31.

  The flange nut 34 is formed in an annular shape, and communicates with the cutting water receiving portion 342 passing through the center, the female screw 349 provided on the side surface of the cutting water receiving portion 342, and the cutting water receiving portion 342 in the radial direction. A plurality of penetrating water guiding portions 344 are provided. The flange nut 34 is fixed to the spindle 22 by clamping the female screw 349 to the male screw provided at the tip of the spindle 22 shown in FIG. When the flange nut 34 is fixed to the spindle 22, the water guiding portion 344 communicates with the water receiving portion 312 of the first flange 31. Thereby, the cutting water receiving part 342 communicates with the groove 318 of the first flange 31 via the water guiding part 344, the water receiving part 312 and the water guiding parts 314 and 315, and the water guiding part 344, the water receiving part 312 and the water guiding part 314 are communicated. , 316 communicates with the groove 328 of the second flange 32.

  As shown in FIG. 4, the slits 44 of the cutting blade 40 are provided at equiangular (equal) intervals, extend from the outer periphery of the cutting blade 40 toward the radial inner side of the cutting blade 40, and reach the opening 43. Absent. Since no groove or slit is provided in the inner portion of the slit 44, the strength of the cutting blade 40 can be prevented from being lowered.

  As shown in FIG. 5, the same number of grooves 318 of the first flange 31 as the number of slits 44 are provided at positions corresponding to the slits 44 of the cutting blade 40. In addition, the water supply port 313 and the water guide portions 314 to 316 are also provided in the same number as the slits 44 corresponding to the grooves 318.

  As shown in FIG. 6, the grooves 328 of the second flange 32 are provided in the positions corresponding to the slits 44 of the cutting blade 40 by the same number as the slits 44, similarly to the grooves 318 of the first flange 31. .

  On the other hand, as shown in FIG. 7, the number of water guide portions 344 of the flange nut 34 need not be the same as the number of slits 44.

  As shown in FIG. 8, the slit 44 of the cutting blade 40 reaches the inner side of the outer periphery of the first flange 31 and the second flange 32. Therefore, the slit 44 communicates with the grooves 318 and 328.

  As shown in FIG. 9, the cutting blade 40 is sandwiched between the first flange 31 and the second flange 32. In this way, both side surfaces of the cutting blade 40 are clamped by the flange set 23, and in a state where the cutting blade 40 and the flange set 23 are rotated by the rotation of the spindle 22, the cutting water discharged from the nozzle 242 is first cut by the flange nut 34. It is supplied to the water receiving part 342, enters the water guiding part 344 from the water supply port 343 and is supplied to the water receiving part 312 of the first flange 31 by centrifugal force. The cutting water further enters the water guide 314 from the water supply port 313 by centrifugal force, and branches into the water guide 315 and the water guide 316 by centrifugal force. The cutting water branched to the water guide portion 315 is released from the groove 318, and the cutting water branched to the water guide portion 316 is released from the groove 328. The cutting water discharged from the grooves 318 and 328 is supplied to the slit 44 communicating with the grooves 318 and 328. Since the grooves 318 and 328 communicate with the slit 44, the cutting water discharged from the grooves 318 and 328 is reliably supplied into the slit 44. Thereby, the quantity of the cutting water supplied from a cutting water supply source can be reduced.

  The cutting water is forcibly supplied through the slit 44 into the cutting groove formed when the cutting blade 40 cuts into the wafer, thereby effectively supplying the cutting water to the cutting portion and cooling it. be able to. Moreover, since the cutting water ishes away the cutting waste, clogging due to the cutting waste can be prevented. Thereby, generation | occurrence | production of a chipping and a burr | flash can be prevented. Furthermore, since the cutting water flows through the slit 44, it is possible to prevent the cutting waste from adhering to the slit 44.

  The number of grooves 318 and grooves 328 that are cutting water discharge ports is preferably the same as the number of slits 44, but water supply ports 313 and water guides that are cutting water supply paths leading to the grooves 318 and 328. The number of the parts 314 to 316 is not necessarily the same as the number of the slits 44. In that case, for example, cutting water is supplied to all the grooves 318 and 328 by providing an annular groove or the like that communicates between the grooves 318 and 328 and the water guide portions 315 and 316.

  The cutting blade 40A shown in FIG. 10 is of a type in which the slit 44 is shorter than the cutting blade 40 described above, and the slit 44 does not reach the outer periphery of the first flange 31 and the second flange 32. Therefore, the slit 44 is not in communication with the grooves 318 and 328. Thus, even when the slit 44 is not in communication with the grooves 318 and 328, the cutting water discharged from the grooves 318 and 328 is directed radially outward of the cutting blade 40, and thus extends in the radial direction. Supplied to the inside of the slit 44. Therefore, as in the case where the slit 44 communicates with the grooves 318 and 328, the cutting portion can be effectively cooled, clogging due to cutting waste can be prevented, and chipping and burr can be prevented.

  The cutting apparatus 10 shown in FIG. 1 may be configured to include the cutting means 12A shown in FIG. 11 instead of the cutting means 12 described above. The cutting means 12A includes a first flange 31A in which the groove 318 is not provided in the clamping surface 317 instead of the first flange 31 described above, and a groove 328 in the clamping surface 327 instead of the second flange 32 described above. Is provided, and further includes a spacer 35a attached to the clamping surface 317 of the first flange 31A and a spacer 35b attached to the clamping surface 327 of the second flange 32A.

  As shown in FIG. 12, the spacer 35 a is formed in an annular plate shape having an outer diameter smaller than that of the cutting blade 40, and includes a clamping surface 357 that contacts the cutting blade 40 and a plurality of clamping surfaces 357. And a groove 358.

  The same number of grooves 358 as the number of slits 44 are provided at positions corresponding to the slits 44 of the cutting blade 40. That is, the groove 358 plays the same role as the groove 318 of the first flange 31 described above. The configuration of the spacer 35b is the same as that of the spacer 35a. The groove 358 of the spacer 35b plays the same role as the groove 328 of the second flange 32 described above.

  Therefore, as in the case where the grooves 318 and 328 are provided in the first flange 31 and the second flange 32, the cutting portion can be effectively cooled, clogging due to cutting waste can be prevented, and chipping and burr can be prevented.

  The spacers 35a and 35b are formed of a material such as metal, ceramic, resin, or the same grindstone as the cutting blade 40, for example. If the spacers 35a and 35b are formed of metal, a grindstone, ceramics, etc., since the clamping surface 357 is flat, it is not necessary to correct the clamping surface 357 when clamping the cutting blade 40. In addition, if the spacers 35a and 35b are formed of resin, the spacers 35a and 35b can be formed at low cost, and the clamping surface 357 is crushed by pressing and fits the cutting blade 40, so that the clamping force is increased and cutting is performed. Even when the load is large, the cutting blade 40 can be firmly held.

  Even if the number of slits 44 differs depending on the type of cutting blade 40, if a spacer provided with the same number of grooves 358 as the number of slits 44 is prepared, the number of slits 44 of the cutting blade 40 can be increased. By exchanging the spacers together, it becomes possible to deal with it, effectively cooling the cutting part, preventing clogging with cutting waste, and preventing chipping and burrs.

10 cutting equipment,
11 chuck table, 111 holding surface,
12 cutting means, 21 case, 22 spindle, 23 flange set,
31, 31A 1st flange, 311 shaft hole, 312 water receiving part,
313, 343 water inlet, 314, 315, 316, 344 water transfer section,
317, 327, 357 clamping surface, 318, 328, 358 groove, 319 male thread,
32, 32A second flange, 321, 331 through hole, 33 nut,
339, 349 female thread, 34 flange nut, 342 cutting water receiver,
35a, 35b spacer,
24 cutting water supply means, 241 water supply port, 242 nozzle,
13 cutting feed means, 131, 141 screw shaft, 132 motor,
133, 143 moving part, 134, 144 guide,
14 Index feeding means,
40 cutting blades, 41 and 42 surfaces, 43 openings, 44 slits

Claims (3)

A chuck table for holding the wafer;
Cutting means for cutting the wafer held on the chuck table;
A cutting device comprising:
The cutting means is
A cutting blade which is formed in an annular shape and cuts into the wafer while rotating;
A flange set for sandwiching both side surfaces of the cutting blade;
Cutting water supply means having a nozzle for supplying cutting water to the center of the flange set;
A spindle that is formed with a male screw at the tip and rotates the flange set;
With
The cutting blade includes a plurality of slits on the outer periphery,
The flange set is
A first flange having a shaft hole engaging with the spindle at a tapered surface and contacting one surface of the cutting blade; a second flange contacting the other surface of the cutting blade; and the first flange; In order to clamp and fix the cutting blade with the second flange, a female screw that engages with a male screw formed at the tip of the first flange is formed at the tip of the spindle. A flange nut that is formed on the inner periphery of a female screw that is screwed to the male screw and fixes the first flange to the spindle, and
The flange nut
A cutting water receiving portion for receiving cutting water supplied from the nozzle of the cutting water supply means;
A first water guiding portion for introducing the cutting water received by the cutting water receiving portion into the first flange;
With
The first flange is
A water receiving portion that opens to the flange nut side and receives a supply of cutting water from the first water guiding portion;
A second water guide section that receives cutting water from the water receiving section by centrifugal force;
With
The first flange and the second flange include
Extends Oite radially into two clamping face facing clamping the said cutting blade, provided at a position corresponding to the slit of the cutting blade, a plurality circumferentially disposed, said second water conduit With a plurality of grooves communicating with
A cutting apparatus in which the cutting water supplied by the cutting water supply means is supplied to the slit of the cutting blade through the groove of the flange set.   The cutting device according to claim 1, wherein the slit of the cutting blade is configured to communicate with the groove of the flange set. The flange set is
The outer diameter is smaller than the cutting blade, comprising an annular spacer for sandwiching the cutting blade,
The cutting apparatus according to claim 1, wherein the groove is provided in the spacer.

Images