JPH10555A - Blade installation mechanism - Google Patents

Abstract

PROBLEM TO BE SOLVED: To eliminate displacement due to diametrical extension and diametrical contraction of a main body flange because of high speed rotation and a biting phenomenon and eliminate inconvenience due to the eccentricity of a blade on the blade to be installed on an air spindle through the main body flange. SOLUTION: It is devised to correct the eccentricity of a blade 4, not to move the blade 4 from an installing position even when a main body flange 11 is extended in diameter at the time of high speed rotation and not to cause a biting phenomenon even when the blade 4 is contracted at the time of stopping high speed rotation by providing a collar part 21 to prevent displacement on a fitting portion of the main body flange 11 on which the blade 4 is installed and an air spindle 5, that is, on a flange installation part 20, providing an air film forming means and forming an air film by high pressure air.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a dicing apparatus for cutting a material such as a semiconductor wafer into a plurality of dies. The dicing apparatus is provided with an air spindle. The present invention relates to a blade mounting mechanism for mounting a washer-type blade via the blade.

[0002]

2. Description of the Related Art As a dicing apparatus equipped with a washer-type blade of this type, for example, a dicing apparatus having a configuration shown in FIG. 5 is known as a conventional example.

In this conventional apparatus, at least the apparatus main body 1 includes a chuck table 3 for dicing a semiconductor wafer 2 and a spindle shaft 5 equipped with a washer-type blade 4. The chuck table 3 is configured to be horizontally movable in a direction perpendicular to the blade 4 via a predetermined moving mechanism. Further, the semiconductor wafer 2 is supplied in a state of being stuck and placed on a predetermined frame 7 through an sticking tape 6.

As shown in FIGS. 6 and 7, a spindle shaft 5 equipped with a washer-type blade 4 has a bearing 1.
0, it is rotatably supported, and its tip is disposed so as to protrude from the bearing 10. The blade 4 is attached to the spindle shaft 5 via a main body flange 11, and the front end side of the spindle shaft 5 is formed in a so-called cone-shaped front end portion 5 a, and the cone-shaped front end portion 5 a is integrated with the main body flange 11. Shaft hole 11 of formed annular tubular portion 11a
b. Therefore, the shaft hole 11b is formed in a shape (taper surface) substantially corresponding to the outer shape of the cone-shaped tip portion 5a by lapping. Note that screw portions 5b and 11c are formed on the free ends of the cone-shaped tip portion 5a and the annular tubular portion 11a, respectively.

The washer-type blade 4 and the holding flange 12 are fitted to the annular cylindrical portion 11a of the main body flange 11, and the holding flange nut 13 is screwed to the threaded portion 11c. The main body flange 11 is attached to the spindle shaft 5 by screwing the main body flange nut 14 into the threaded portion 5b of the cone-shaped tip 5a. As a result, as shown in FIG.
, The blade 4 is attached to the spindle shaft 5.

In the above-mentioned conventional example, the reason why the tip of the spindle shaft 5 is formed at the cone-shaped tip portion 5a is as shown in FIG.
As shown in, when attaching the main body flange 11,
By tightening the main body flange nut 14, the tapered surface of the cone-shaped tip 5a and the tapered surface of the shaft hole 11b in the main body flange 11 are rubbed together, so that precise positioning and the like need not be considered so strictly. This is because the rotation axis of the main body flange 11 can be easily obtained, and mounting can be easily performed only by fitting and tightening the nut.

[0007]

However, in actual use, the spindle shaft 5 rotates at a high speed (for example, 3 rpm).
(000 RPM), the centrifugal force of the high-speed rotation causes the main body flange 11 to expand in diameter, loosening the rubbing connection by the tapered surface, and the main body flange nut 14
, The main body flange 11 moves to the rear end side, and not only the blade 4 can be displaced, but the set precision cutting cannot be performed, but also the main body flange 11 moves to the rear end side. Nut for body flange 1
When the high-speed rotation is not applied after use, the main body flange 11 is reduced in diameter and a biting phenomenon occurs between the main body flange 11 and the cone-shaped tip portion 5a. There is a problem that it cannot be removed.

Therefore, the prior art has problems that must be solved to prevent the movement of the main body flange at the time of high-speed rotation by expanding the diameter and to avoid the biting phenomenon due to the diameter reduction.

[0009]

As a specific means for solving the problems of the prior art, the present invention provides a blade mounting mechanism for mounting a blade on the tip of an air spindle provided in a dicing apparatus or the like. A flange mounting portion for mounting a main body flange for mounting a blade is formed at the tip of the air spindle. The flange mounting portion supports a back portion of the main body flange, and an annular cylinder of the main body flange. An annular tube supporting portion for supporting the portion, wherein an air supply means for supplying air is formed in the annular tube supporting portion. The portion has a cylindrical shape, and the air supply means includes a plurality of air outlets opened in the circumferential direction.

In the present invention, the air film is formed between the annular cylindrical portion of the main body flange and the annular cylindrical support portion of the air spindle by providing the air supply means on the spindle side of the portion where the main body flange is mounted. Since the main body flange is sandwiched between the collar and the main body flange nut, it is not affected by the increase in diameter due to high-speed rotation, and the main body flange is attached and detached via an air film, so that eccentricity may occur. The biting phenomenon does not occur.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described in more detail with reference to the illustrated embodiments. To facilitate understanding, the same parts as those of the conventional example will be denoted by the same reference numerals. First, in FIGS. 1 and 2, a spindle equipped with a washer-type blade 4 is a so-called air spindle mechanism A, and a spindle shaft 5 of the spindle is rotatably supported by a bearing unit 10 and a tip end thereof is a bearing. It is arranged so as to protrude from the part 10.

The washer-type blade 4 is attached to the spindle shaft 5 via a main body flange 11, and the main body flange 11 is formed integrally with an annular cylindrical portion 11a, and has a center portion of the annular cylindrical portion 11a. A shaft hole 11b is provided in the portion along the axis, and an annular cylindrical portion 11a is provided.
Is formed with a threaded portion 11c on the free end side of.

The distal end of the spindle shaft 5 is formed as a flange mounting portion 20. The flange mounting portion 20 has a flange portion 21 for supporting the rear side of the main body flange 11, and an annular shape for supporting the annular cylindrical portion 11a. The annular cylinder support 22 is formed substantially in a columnar shape, and is provided with a plurality of air outlets 23 at predetermined intervals in the circumferential direction. In addition, flange mounting part 2
A screw portion 20a is formed on the free end side of the zero.

An annular tubular portion 11a of the main body flange 11
The shaft hole 11b is formed in a hole shape (circular shape) corresponding to the column shape of the annular cylinder support portion 22 unlike the conventional example. This hole shape is formed, for example, as a hole having substantially the same inner diameter from the start end to the end.

The washer-type blade 4 is fitted to the annular cylindrical portion 11a of the main body flange 11, and then the clamping flange 12 is fitted, and then the clamping flange nut 13 is screwed to the screw portion 11c, as in the conventional example. Thus, the blade 4 is mounted in a state where the blade 4 is held between the main body flange 11 and the holding flange 12. In this case, with respect to the main body flange 11, the screw portion 11c side of the main body flange 11 is set up so that the blade 4 does not become eccentric, and the blade 4 is dropped along the annular tubular portion 11a. , And the holding flange 12 may be screwed.

The main body flange 11 to which the blade 4 is attached in this manner is connected to the flange mounting portion 2 of the spindle shaft 5.
0, the eccentricity is corrected by an air film to be described later, and the main body flange nut 14 is screwed to the screw portion 20a of the flange mounting portion 20 and tightened, so that the main body flange 11 is in an appropriate state on the spindle shaft 5. As a result, the main body flange 11 is sandwiched between the flange portion 21 and the main body flange nut 14, and the blade 4
Is attached to the spindle shaft 5 via the main body flange 11.

The spindle shaft 5 of the air spindle mechanism A
Is configured such that high-pressure air is supplied inside the bearing portion 10 to form an air film over substantially the entire circumference, and the air film allows the spindle shaft 5 to be supported in a low friction state and rotate at high speed. Have been.

Utilizing the high-pressure air supplied to the bearing portion 10, an air passage 15 is formed along the axis of the spindle shaft 5, and the air passage 15 has a substantially middle portion of the spindle at one end. It communicates with a supply port 17 opened in a ring-shaped concave portion 16 formed on the outer peripheral surface in the vicinity, and communicates with an air outlet 23 provided in the flange mounting portion 20 at the other end. Therefore, the air outlet 2
3 is formed substantially radially from the central air passage 15.

On the bearing portion 10 side, a supply path 18 for high-pressure air is provided at a position corresponding to the recess 16.
High-pressure air is supplied from the supply path 18 through the concave portion 16 and the supply port 17, and high-pressure air is blown from the air outlet 23 through the air passage 15.
The air outlet 23 may have an opening formed in a crater shape, and a slit-shaped groove is provided along the circumferential direction at the position where the air outlet 23 is formed, and You may form so that it may communicate.

When high-pressure air is blown out from the air outlet 23 opened in the flange mounting portion 20, a uniform air film is formed in the gap between the annular cylinder support portion 22 and the shaft hole 11b. However, even if the thickness is, for example, about 30 μm, because of the so-called static pressure gas bearing structure, stable coupling to the spindle shaft 5 can be expected in a state where the eccentricity of the main body flange 11 is corrected by the air film. And
If the main body flange nut 14 is screwed into the screw portion 20a in this state, the main body flange 11 and the blade 4 are fixed to the tip of the air spindle 5 without eccentricity. It should be noted that the air jet 23 for jetting high pressure air
Is substantially one example of the air film forming means.

In actual use, the main body flange 11 may be expanded by centrifugal force when it is rotated at a high speed (for example, 30,000 RPM). And the air film is damaged, so that there is no eccentricity or misalignment. Even when the rotation is not applied, the attachment / detachment of the main body flange 11 to / from the spindle shaft 5 requires a predetermined gap (30 μm) where an air film is formed between the annular cylinder support portion 22 and the shaft hole 11a. Therefore, there is no biting phenomenon due to diameter reduction, so-called blade 4
The workability of the replacement becomes remarkably easy.

Therefore, in the present invention, an air film is positively formed at the fitting position of the spindle shaft 5 and the main body flange 11 to eliminate the eccentricity, and at the same time, the diameter is increased or reduced by applying and stopping the high-speed rotation. Even if there is a phenomenon of diameter reduction, it is no longer necessary to strictly demand the dimensional accuracy at the fitting position, so the outer dimensions of the flange mounting portion and the dimensional accuracy of the shaft hole 11b of the main body flange 11 are relatively rough. This makes it easy to manufacture parts and eliminates the occurrence of biting phenomenon, thus facilitating attachment and detachment operations.

As shown in FIGS. 3 and 4, the same head member or cover member 30 as in the conventional example is mounted on the blade mounting structure thus configured. The cover member 30 is attached to the bearing portion 10 so as to cover the upper portion of the blade 4. The cover member 30 includes, for example, a cutting water supply nozzle 31 and a blade monitoring member 32.
Etc. are detachably equipped.

As in the case of a general dicing apparatus, a semiconductor wafer or the like is cut while supplying cutting water. In particular, in the present invention, the blade attached to the tip of the air spindle includes a main body flange. The air film is formed at the fitting portion by the ejection of high pressure air by the air film forming means, and the eccentricity of the main body flange at the fitting and mounting portion is corrected by the air film and the flange portion is formed. Since the air spindle is fastened at a high speed, the cutting performance is not adversely affected without being eccentric or displaced even when the air spindle is rotated at a high speed.

[0025]

As described above, the blade mounting mechanism according to the present invention is a blade mounting mechanism for mounting a blade on the tip of an air spindle provided in a dicing apparatus or the like. A flange mounting portion to which a main body flange for mounting the blade is mounted is formed at the tip, a flange portion supporting the back of the main body flange, and an annular tube supporting portion supporting the annular cylindrical portion of the main body flange. Is formed, and the air supply means for supplying air is formed in the annular cylindrical support portion.When the air spindle rotates at high speed, even if the main body flange is enlarged, the flange portion is used. Since the movement to the rear end side is prevented and there is no displacement of the blade, there is an excellent effect that the cutting operation can be continued in an appropriate state.

In addition, since an air film is formed by high-pressure air at an attachment portion between the air spindle and the main body flange, not only the eccentricity is corrected, but also the biting phenomenon is eliminated, and the dimension of the fitting attachment position is also reduced. Since the accuracy is not so strictly required, various excellent effects such as easy production of parts and easy workability of attachment / detachment can be obtained.

[Brief description of the drawings]

FIG. 1 is an exploded perspective view showing a main part of a blade mounting mechanism according to an embodiment of the present invention.

FIG. 2 is a sectional view showing a main part of the embodiment.

FIG. 3 is a perspective view showing a state in which a cutting water supply nozzle and blade monitoring means are mounted on the blade mounting mechanism of the embodiment.

FIG. 4 is a perspective view showing a state in which a cutting water supply nozzle and blade monitoring means are mounted on the blade mounting mechanism of the embodiment.

FIG. 5 is a perspective view showing a conventional dicing apparatus.

FIG. 6 is a perspective view of the blade mounting mechanism of the conventional example.

FIG. 7 is an exploded perspective view showing the blade mounting mechanism of the conventional example.

FIG. 8 is a sectional view of a main part of the blade mounting mechanism of the conventional example.

[Explanation of symbols]

A: air spindle mechanism, 4: blade, 5
... Spindle shaft, 10 ... Bearing part, 11 ... Main body flange, 11a ... Cyclic cylindrical part, 11b ... Shaft hole,
11c: screw part, 12: clamping flange, 13:
Nut for clamping flange, 14 Nut for main body flange, 15 Air passage, 16 Concave part, 17 Supply port, 18 Supply path, 20 Flange mounting part, 2
1 ... collar, 22 ... annular tubular support, 23 ... air outlet

Claims (3)

[Claims] 1. A blade mounting mechanism for mounting a blade on a tip of an air spindle provided in a dicing apparatus or the like, wherein a flange for mounting a blade is mounted on a tip of the air spindle. A mounting portion is formed, and a flange portion for supporting the back of the main body flange and an annular tube support portion for supporting the annular cylindrical portion of the body flange are formed on the flange mounting portion, and air is supplied to the annular tube support portion. A blade mounting mechanism, wherein an air supply means is formed. 2. The ring-shaped cylindrical support portion is cylindrical.
3. The blade mounting mechanism according to 1. 3. The blade mounting mechanism according to claim 1, wherein the air supply means is an air outlet having a plurality of openings in a circumferential direction.