JPH0217809Y2 - - Google Patents

Description

[Detailed Description of the Invention] The present invention relates to an improved ID blade for slicing hard and brittle semiconductor materials such as silicon.

The ID blade is a donut-shaped thin disk (made of stainless steel) with diamond abrasive grains electrodeposited on the inner periphery.The outer periphery is fixed with a tension ring, and uniform tension is applied to the outside to increase rigidity. It is used in a way that gives a sense of force (so-called drumming).

Centering and tensioning the ID blade is an important task. This is relatively easy for blades with small outer diameters, but becomes more difficult and time consuming as the outer diameter increases. The blade substrate (extremely thin stainless steel plate) is cold-rolled, and the elastic modulus is different in the rolling direction and in the direction perpendicular to it (anisotropic), so even if it is pulled with a uniform force, the inner diameter will be slightly oval. become. If the eccentricity is large, the cutting accuracy will deteriorate due to the occurrence of cracks and stepping, and the life of the blade will be shortened.

The ID blade substrate is very thin (approximately 0.10 to 0.15 mm) and easily scratched or distorted, so handle it with extreme care and keep the eccentricity between the center of rotation of the tension head (spindle axis) and the center of the blade's inner diameter as much as possible. The important thing is to install it in a way that minimizes it.

As shown in FIG. 6, a conventional ID blade has three set pin holes b ₁ to b ₃ and a number of tightening holes c arranged at equal intervals on the outer periphery of the blade a. The blade is set on the set pin fixed to the tension head using the set pin hole, but there is a considerable clearance between the set pin and the set pin hole, and even if the set pin hole is set in the set pin, the center of the inner diameter of the blade and the tension head cannot be connected. The rotation centers of the two do not match. For this reason, centering is generally done by measuring the concentricity and roundness of the blade edge using a microscope and fine-tuning its position each time by hand, that is, by pulling and holding the blade by hand.
This adjustment work required skill and time.

The purpose of this invention is to perform ID blade centering and tensioning work more quickly and accurately.

In this invention, three of the tightening holes provided in the ID blade are used as centering holes, and a taper pin is screwed into the corresponding tightening bolt hole of the mounting tension head. This allows the ID blade to be installed while accurately centering it.

Hereinafter, the present invention will be explained according to the embodiments shown in FIGS. 1 to 5.

As shown in Fig. 1, the outer circumference of the blade 1 is
Three set pin holes 2 and numerous tightening holes 3 with the same diameter as conventional blades spaced at 120° intervals
There is. Three of the tightening holes 3 are provided with centering holes 4 having a smaller diameter than the above two hole diameters at 120° intervals. A diamond layer 5 is electrodeposited on the inner circumference of the blade 1 in a conventional manner. For example, the above ID blade has an outer diameter of 434 mm, an inner diameter of 153 mm, a thickness of 0.13 mm, and the diamond layer 5 on the inner circumference has a width of 2.0 mm.
It is electrodeposited with a thickness of 0.3 mm, and the hole diameter of set pin hole 2 is 7.94 mmφ, and the hole diameter of tightening hole 3 is 7.52 mmφ.
The hole diameter of the centering hole 4 is 4.0 mmφ.

As shown in FIGS. 3 and 4, the tension bed 6 for attaching the blade has a bolt hole 7 corresponding to the tightening hole 3 of the blade, and a set pin hole 2.
A corresponding set pin (not shown) is provided. Further, a taper pin 8 is screwed into the bolt hole 7 corresponding to the centering hole 4. When the diameter of the centering hole 4 is 4 mmφ, the taper pin 8 has a tapered portion 8a with a tip diameter of 3 mmφ and a rear end diameter of 4 mmφ.
It has a threaded portion 8b for screwing into.

As can be seen from Figures 3 and 5, the pitch circle diameter D ₄ (409.075mm) of the centering hole 4 is slightly smaller than the pitch circle diameter D ₃ (409.575mm) of the tightening hole 3 at the position t (0.5mm). Set it up.

Based on the center of the taper pin 8 (diameter is 3.5 mm), the pitch circle D 4 of the 4 mm φ centering hole 4 is the pitch circle D ₄ of the 7.52 φ tightening hole 3, and the pitch circle D 4 of the 7.52 φ tightening hole ₃ (the diameter of the taper pin is _3.5 mm). It is necessary to make it 0.25 mm smaller on one side than the diameter (same diameter as the pitch circle). Adjustment work can be carried out in a short time by mounting the blade 1 having such a centering hole 4 by moving the taper pin 8 of the tension head 6 up and down while measuring the circularity and circularity of the blade edge. Can be done.

That is, when the taper pin 8 is turned little by little and moved upward, the blade 1 is pulled while contacting the outer peripheral surface of the taper pin 8, so that the position of the blade 1 is slightly displaced as the taper pin 8 moves. do.

Then, when the rotation of the taper pin 8 is stopped at a position where the center of the inner diameter of the blade and the center of rotation of the tension head coincide, the inner wall of the centering hole is pressed against the outer circumferential surface of the taper pin 8, and the blade is
It is fixed in that position.

In this way, the blade can be moved and fixed in a predetermined position simply by turning the taper pin 8, so there is no need to manually pull or push the blade to make fine adjustments as in the conventional example.

Therefore, since the centering work is simpler than in the conventional example, the work time can also be shortened.

Unlike conventional manual adjustment, the adjustment work in this case does not require skill; once the position of the taper pin is set, centering can be done from the second time onward by simply fitting the blade into the taper pin.

As described above, not only can the first centering be performed in a short time, but centering is virtually unnecessary from the second time onwards, so the installation work time can be extremely shortened. In addition, since the blade can be centered more accurately than before, it can be used until the diamond layer of the blade is used up, extending the life of the blade. Therefore, it can be said that the present invention is extremely practical.

[Brief explanation of the drawing]

Figure 1 is a plan view of the ID blade of the present invention, and Figure 2 is a plan view of the ID blade of the present invention.
The figures are a cross-sectional view taken along the line -- in Fig. 1, Fig. 3 is an enlarged plan view of the main part of Fig. 1, Fig. 4 is a partial sectional view showing the ID blade of the present invention attached to a tension bed, and Fig. 5 The figure is a plan view showing the relationship between the centering hole and the taper pin of the present invention, and FIG. 6 is a diagram showing a conventional example. 1...Blade, 3...Tightening hole, 4...Centering hole, 5...Diamond layer, 6...
Tension head, 7...bolt hole, 8...taper pin.

Claims (1)

[Scope of utility model registration request] In a donut-shaped ID blade, the outer periphery is divided into three equal parts, with set pin holes provided at each position, and tightening holes arranged at equal intervals all around the circumference, while a diamond layer is provided on the inner periphery.
The position of the tightening holes arranged at the center positions on the concentric circles of adjacent set pins. A blade provided with a centering hole having a hole diameter smaller than the hole diameter of the tightening hole, and a bolt hole corresponding to the centering hole,
It consists of a tension bed for attaching the blade, in which a taper pin whose base end has the same diameter as the centering hole is screwed into the bolt hole so as to be movable up and down.
The ID blade mounting device is further characterized in that a centering hole is provided at a position where, when the taper pin moves up within the centering hole, the center of the inclined surface of the taper pin contacts the inner peripheral surface of the centering hole on the tightening hole side. .