JPH0671563A - High speed rotating type peripheral edge blade dicer - Google Patents

Abstract

PURPOSE:To make a coolant uniformly feedable to the tip of a blade in succession spite the occurrence of wind pressure attending on high speed rotation of the blade. CONSTITUTION:An axial hole 11 and a radial hole 12 both are bored in a spindle shaft 8, while a coolant feeding nozzle 15 is inserted into this axial hole 11 with some space, and a coolant 6 sprayed out of this coolant feeding nozzle 15 flows into each internal space 7 of a pair of disk-form flanges 2 and 3, so it is continuously sprayed at the tip of a blade 1 from a coolant nozzle 14 by dint of centrifugal force of these flanges 2, 3 in high speed rotation.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION The present invention relates to a semiconductor integrated circuit (IC).
And light emitting diode (LED) and laser diode (L
The present invention relates to a high-speed rotating outer peripheral blade blade dicer suitable for cutting semiconductor elements such as D) as chips from a semiconductor substrate, and particularly to a cooling structure for cooling such a high-speed rotating outer peripheral blade blade dicer.

[0002]

2. Description of the Related Art A high speed rotating peripheral blade blade dicer is widely used for cutting an element as a chip from a semiconductor substrate. This high-speed rotating peripheral blade blade dicer rotates at a high speed of tens of thousands of revolutions / minute, so the frictional heat at the processing point is extremely large and if chips are not cooled sufficiently, chipping and chipping will occur. Alternatively, the tip of the blade may be damaged or, in extreme cases, the entire blade may be damaged. Therefore, various cooling methods for cooling the high-speed rotating peripheral blade blade dicer have been proposed so far.

FIG. 9 shows a conventional cooling device for a high-speed rotating outer peripheral blade blade dicer, in which a blade 1 is rotated at a high speed while being sandwiched between a pair of disc-shaped flanges 2 and 3, and a semiconductor substrate. Cut 4. The cooling water supply nozzle 5 sprays the cooling water 6 onto the blade 1 rotating at a high speed from a direction parallel to the plane of the blade 1, or on both side surfaces of the blade 1 as shown in FIG. Further, as shown in FIG. 11, the blade 1 is cooled by flowing a large amount of cooling water 6 onto the surface of the semiconductor substrate 4 during cutting. In practice, such cooling methods are used alone or in appropriate combination.

[0004]

However, as shown in FIG. 9 and FIG.
In the cooling device that jets the cooling water 6 to the blade 1 from the outside as shown in 0, the jetted cooling water 6 is blown off by the wind pressure of the blade 1 and the flanges 2 and 3 which are rotating at high speed, and the cutting point Very little cooling water reaching
There is a problem that sufficient cooling cannot be performed. In order to solve this, when the cooling water 6 is jetted at a high pressure that is not defeated by the wind pressure of the high-speed rotating blade 1, most of the cooling water that collides with the blade 1 and the flanges 2 and 3 bounces off the surroundings. And the blades 1 rotating at high speed fluctuate due to the collision of the high-pressure cooling water, which causes rotational fluctuation.
Other problems occur, which can lead to chipping or chipping and damage to the blade.

Even when a large amount of the cooling water 6 shown in FIG. 11 is flown onto the semiconductor substrate 4, a region where the cooling water does not reach the part 4a near the cutting point due to the wind pressure of the high speed rotating blade 1 causes cooling. There is a problem that it is not done enough. Therefore, an object of the present invention is to provide a high-speed rotation type outer peripheral blade blade dicer capable of continuously and uniformly supplying a cooling liquid to the tip of the blade in spite of generation of wind pressure due to high-speed rotation of the blade. It is in.

[0006]

To achieve this object, the present invention comprises a spindle shaft, a blade, and a high speed disk-shaped flange for clamping the blade and fixing it to the spindle shaft. In a rotary outer peripheral blade blade dicer, an internal space is formed between the pair of disc-shaped flanges, and a cooling liquid injection port that communicates the internal space with the outside is formed in the outer peripheral portion of the flange, and a cooling liquid. Are axially introduced from the outside and a plurality of radial holes, one end of which is in communication with the axial hole and the other end of which is in communication with the internal space, are formed in the spindle shaft. The cooling liquid introduced into the internal space through the holes is caused to flow from the cooling liquid injection port to the blade tip of the blade by centrifugal force. In such a configuration, it is preferable that a cooling liquid supply nozzle having an outer diameter smaller than that of the axial hole is inserted into the axial hole with a gap therebetween.

A porous material is built in the internal space,
The outer peripheral edge of the porous material is interposed between the outer peripheral edges of the pair of disc-shaped flanges and the blade, and the cooling liquid injection port is the outer peripheral edge of the disc-shaped flange where the outer peripheral edge of the porous material is located. And a gap between the blade and the blade. It is preferable that the cooling liquid injection port be a plurality of cooling liquid injection grooves formed on the surface of the outer peripheral portion of the flange that is in contact with the blade. The cooling liquid injection port is a plurality of cooling liquid injection holes perforated in the flange outer peripheral portion,
It is desirable that these injection holes be formed at positions separated from the contact surface of the outer peripheral portion of the flange that is in contact with the blade by a predetermined distance.

[0008]

The cooling liquid is introduced into the axial hole of the spindle shaft, passes through the radial hole, and flows into the inner space of the pair of disc-shaped flanges. The cooling liquid that has flowed into the internal space of the flange flows out of the internal space of the flange into the blade through the cooling liquid injection port by the centrifugal force of the flange during high-speed rotation, and cools the blade tip continuously and uniformly. As described above, the cooling liquid flows out from the inner space of the flange to the blade by the centrifugal force, so that the blade tip can be sufficiently cooled without being affected by the wind pressure of the blade and the flange during high-speed rotation.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a high-speed rotary type outer peripheral blade blade dicer according to the present invention will be described below with reference to FIGS. 1 to 7 in which the same parts as those in FIGS. To do. 1 and 2, the blade 1 has a ring shape, and the pair of disc-shaped flanges 2 and 3 has an internal space 7 between the flanges 2 and 3 when the blade 1 is sandwiched between the outer peripheral portions 2a and 3a. To form. The flanges 2 and 3 in which the blade 1 is thus sandwiched are inserted into the spindle shaft 8 and fixed to the spindle shaft 8 by the wheel mount 9 and the flange nut 10.

The spindle shaft 8 has an axial hole 1
1 and a large number of radial holes 12 are bored, and the axial hole 11 extends from one end surface of the spindle shaft 8 in the axial direction, and the end portion 11a thereof bulges. The radial hole 12 extends in the radial direction from the end portion 11 of the axial hole, and communicates with the internal space 7 via the connection hole 13 of the flanges 2, 3. That is, one end of the radial hole 12 communicates with the end portion 11 of the axial hole, and the other end communicates with the internal space 7 through the connection hole 13.

In the illustrated example, three radial holes 12 are bored in the axial cross section of the spindle shaft 8 and are bored at substantially equal angular intervals in the circumferential direction of the spindle shaft 8. As shown in FIGS. 1 and 2, on the outer peripheral portions 2a and 3a of the flanges 2 and 3, a large number of cooling liquid injection grooves 14 are formed on the surface in contact with the blade 1. These cooling liquid injection grooves 14 are located at substantially equal angular intervals along the circumferential direction and communicate the internal space 7 with the outside. Flange 2
Cooling liquid injection groove 14 and flange 3 cooling liquid injection groove 14
May face each other with the blade 1 interposed therebetween as shown in the drawing, or may be arranged so as to be displaced in the circumferential direction as shown by the chain double-dashed line in FIG.

A coolant supply nozzle 15 is inserted in the axial hole 11 of the spindle shaft 8. The cooling liquid supply nozzle 15 has an outer diameter smaller than the diameter of the axial hole 11 so that it does not contact the spindle shaft 8, that is, a slight gap is formed between the cooling liquid supply nozzle 15 and the axial hole 11. , Is inserted in the axial hole 11. Therefore, the cooling liquid supply nozzle 15 does not come into contact with the rotating spindle shaft 8 and has no adverse effect on the rotation.

The cooling liquid supply nozzle 1 has a cooling liquid supply pipe 1
6 is connected, and the cooling liquid supply pipe 16 is fixed to the flange cover 17. The flange cover 17 surrounds the flanges 2 and 3.

Next, the operation of this embodiment will be described. By the rotation of the spindle shaft 8, the blade 1 and the flanges 2 and 3 fixed to the spindle shaft 8 are rotated at tens of thousands of revolutions / minute, and a semiconductor substrate (not shown) is cut. At this time, the cooling liquid 6 flowing through the cooling liquid supply pipe 16 is ejected from the cooling liquid supply nozzle 15 to the end 11 a of the axial hole 11. The cooling liquid 6 jetted to the terminal end 11a flows into the flange inner space 7 through the radial hole 12 and the connection hole 13 by centrifugal force, and thereafter, similarly through the cooling liquid jet groove 14 by centrifugal force. The blade 1 is continuously jetted toward the tip of the blade 1 to uniformly cool the blade 1.

The cooling liquid is discharged from the entire outer circumferences of the flanges 2 and 3, and the cooling liquid discharged downwardly of the flanges collides with the semiconductor substrate, and the cooling liquid discharged other than downward is flange cover 17. This prevents scattering to the surroundings.
FIG. 3 shows a modification of the first embodiment, in which instead of the cooling liquid injection groove 14, the cooling liquid injection hole 18 has the flanges 2 and 3.
Is perforated on the outer peripheral portion of. These coolant injection holes 18
Are located at a slight distance from the blade 1.

FIG. 4 shows a second embodiment of the present invention, in which a porous material 19 is attached to the inner surface of each of the flanges 2 and 3. A tip 19a of the porous material 19 is interposed between the flange outer peripheral portions 2a and 3a and the blade 1. That is, the flange outer peripheral portions 2a and 3a are the porous material 1
The blade 1 is sandwiched via the tip 19a of the blade 9. Therefore, the cooling liquid 6 that has flowed into the flange inner space 7 from the connection hole 13 of FIG. 1 is continuously jetted toward the blade 1 by the centrifugal force from the tip 19 a of the porous material 19.

The porous material 19 is composed of the flange 2,
It is not necessary to attach it to the entire inner surface of 3, and it is sufficient that it exists at least between the flange outer peripheral portions 2a, 3a and the blade 1.

Next, an experimental example will be described. This experiment was conducted by using the high-speed rotating type outer peripheral blade blade dicers having the respective configurations shown in FIGS.
This is a measurement of the relationship between the blade life and the incidence rate of cracking or chipping of a semiconductor chip after cutting an lAs-based LED element semiconductor substrate.

The dimensions of each member of the high speed rotating outer peripheral blade blade dicer used in the experiment are as follows. That is, the blade 1 has an outer diameter of 50.2 mm and a thickness of 18 μm, and the axial hole 11 of the spindle shaft 8 has a diameter of 4 m.
In m, the diameter of the axial bore end 11a is 8 mm. The diameters of the radial holes 12 and the connection holes 13 are both 1 mm, and the number thereof is 64. Cooling liquid supply nozzle 15 has an outer diameter of 3 m
m, the inner diameter is 2 mm, and the cooling liquid supply nozzle 15
Supplied the cooling liquid at a flow rate of 1 cc / sec. The position of the coolant injection hole 18 in FIG. 3 was separated from the blade 1 by about 2 mm.

FIG. 5 is a graph showing experimental data of the high speed rotating outer peripheral blade blade dicer of FIGS. 1 and 2, and FIG. 6 is a graph showing experimental data of the high speed rotating outer peripheral blade blade dicer of FIG. FIG. 7 is a graph showing experimental data of the high-speed rotating outer peripheral blade blade dicer of FIG. FIG. 8 is a graph showing comparative experimental data of a conventional high-speed rotating outer peripheral blade blade dicer. In each graph, the vertical axis represents the rate of occurrence of cracking or chipping of the semiconductor chip, the horizontal axis represents the number of lines until the blade is at least partially chipped, and the x mark represents the occurrence of chipping in the blade 1. . Comparing the graphs of FIGS. 5 to 7 with the graph of FIG. 8, the high-speed rotary outer peripheral blade blade dicer according to the present invention has a higher rate of occurrence of cracks and chips in the semiconductor chip than the conventional high-speed rotary outer peripheral blade blade dicer. It is found that the blade life is drastically reduced and the blade life is greatly extended by 2 to 5 times.

[0021]

As is apparent from the above description, according to the present invention, an internal space is formed between a pair of disc-shaped flanges, and a cooling liquid jet for communicating the internal space with the outside is formed on the outer peripheral portion of the flange. The spindle shaft is formed with an axial hole through which a cooling liquid is introduced from the outside and a plurality of radial holes having one end communicating with the axial hole and the other end communicating with the inner space. Since the cooling liquid introduced into the internal space through the radial hole from the directional hole is caused to flow from the cooling liquid injection port to the blade edge of the blade by centrifugal force, the cooling liquid is a blade or a flange that is rotating at a high speed. The blade tip can be continuously and uniformly cooled without being affected by the wind pressure. Therefore, it is possible to reduce the occurrence of cracks and chips in the semiconductor chip, and it is possible to significantly extend the life of the blade.

[Brief description of drawings]

FIG. 1 is a sectional view showing a first embodiment of a high-speed rotating outer peripheral blade blade dicer according to the present invention.

FIG. 2 is a front view and a plan view showing a blade and a flange of the first embodiment.

FIG. 3 is a front view and a plan view showing a modified example of the first embodiment.

FIG. 4 is a cross-sectional view showing a second embodiment of a high-speed rotating outer peripheral blade blade dicer according to the present invention.

5 is a graph showing experimental data using the first embodiment shown in FIGS. 1 and 2. FIG.

FIG. 6 is a graph showing experimental data using a modification of the first embodiment shown in FIG.

FIG. 7 is a graph showing experimental data using the second embodiment shown in FIG.

FIG. 8 is a graph showing experimental data using a conventional high-speed rotating outer peripheral blade blade dicer.

9A and 9B are a front view and a plan view showing a cooling method of a conventional high-speed rotating outer peripheral blade blade dicer.

10A and 10B are a front view and a plan view showing a cooling method of a conventional high-speed rotating outer peripheral blade blade dicer.

FIG. 11 is a perspective view showing a cooling method of a conventional high-speed rotating outer peripheral blade blade dicer.

[Explanation of symbols]

 1 Blade 2 Disc-shaped Flange 3 Disc-shaped Flange 6 Coolant 7 Internal Space 8 Spindle Shaft 11 Axial Hole 12 Radial Hole 14 Coolant Injection Groove 18 Coolant Injection Hole

Claims (5)

[Claims] 1. A high-speed rotating peripheral blade blade dicer comprising a spindle shaft, a blade, and a pair of disc-shaped flanges for sandwiching and fixing the blade to the spindle shaft. An internal space is formed between the flanges, and a cooling liquid injection port that communicates the internal space with the outside is formed on the outer peripheral portion of the flange, and an axial hole through which the cooling liquid is introduced from the outside and one end thereof are in the axial direction. A plurality of radial holes, the other ends of which respectively communicate with the internal space, are bored in the spindle shaft, and the cooling liquid introduced into the internal space from the axial holes through the radial holes is centrifuged. A high-speed rotating peripheral blade blade dicer characterized in that it is caused to flow from the cooling liquid injection port to the blade edge of the blade by force. 2. The high speed according to claim 1, wherein a cooling liquid supply nozzle having an outer diameter smaller than that of the axial hole is inserted into the axial hole with a gap therebetween. Rotary type peripheral blade blade dicer. 3. A porous material is built in the internal space,
The outer peripheral edge of the porous material is interposed between the outer peripheral edges of the pair of disc-shaped flanges and the blade, and the cooling liquid injection port is the outer peripheral edge of the disc-shaped flange where the outer peripheral edge of the porous material is located. The high-speed rotating peripheral blade blade dicer according to claim 2, wherein the gap is between the blade and the blade. 4. The high-speed rotary type according to claim 2, wherein the cooling liquid jetting port is a plurality of cooling liquid jetting grooves engraved on a surface of the outer peripheral portion of the flange in contact with the blade. Peripheral blade blade dicer. 5. The cooling liquid injection port is a plurality of cooling liquid injection holes perforated in the flange outer peripheral portion, and these injection holes are separated from the contact surface of the flange outer peripheral portion contacting the blade by a predetermined distance. The high-speed rotating outer peripheral blade blade dicer according to claim 2, wherein the outer peripheral blade blade dicer is perforated at the specified position.