JP2007229843A - Cutting device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a cutting device having a cutting blade replacement function which can replace with a suitable cutting blade in accordance with a kind or a machining condition of an article to be machined, even when the kind or machining condition of the article to be machined is different. <P>SOLUTION: The cutting device includes: a chuck table mechanism 3 which holds the article to be machined; cutting means 6a, 6b which have the cutting blade for cutting the article to be machined held by the chuck table mechanism, and a rotary spindle fitted with the cutting blade; blade racks 71a, 71b which have blade storage means for storing the cutting blade to be replaced; and a blade replacement means 7 which exchanges the cutting blade fitted on the rotary spindle with the cutting blade to be replaced stored in the blade rack, wherein the blade rack has a plurality of blade storage parts for storing the plural kinds of cutting blades to be replaced. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a cutting device for cutting a workpiece such as a semiconductor wafer, and more particularly to a cutting device equipped with a cutting blade replacement mechanism for cutting a workpiece.

  For example, in a semiconductor device manufacturing process, devices such as IC and LSI are formed in a number of regions partitioned by dividing lines called streets formed in a lattice shape on the surface of a semiconductor wafer having a substantially disk shape, Individual devices are manufactured by dividing each region in which the devices are formed along a division line. As a dividing device for dividing a semiconductor wafer, a cutting device as a dicing device is generally used. The cutting apparatus includes a chuck table that holds a workpiece and a cutting unit that includes a cutting blade that cuts the workpiece held on the chuck table.

Since the cutting blade equipped in the above-described cutting apparatus is worn by use, it is necessary to replace the cutting blade periodically. There has been proposed a blade autochanger that automatically performs the replacement of the cutting blade. (For example, refer to Patent Document 1). This blade autochanger is provided at a position separated from a rotary spindle on which a cutting blade of a cutting device is mounted, and a first blade accommodating portion for accommodating a cutting blade before use and a second blade for accommodating a used cutting blade. A blade rack having a housing; fastening nut attaching / detaching means for attaching / detaching a fastening nut for fastening the cutting blade to the tip of the rotating spindle; and blade attaching / detaching means for attaching / detaching the cutting blade to the tip of the rotating spindle. .
Japanese Patent No. 2617876

  When the type and processing conditions of the workpiece to be cut differ depending on the cutting device, it is necessary to use a cutting blade suitable for the type and processing conditions of the workpiece. However, since the blade autochanger described above is configured so that the blade rack that accommodates the cutting blades accommodates one type of cutting blade, the cutting blades that are accommodated in the blade rack each time the type of workpiece and processing conditions differ. The production efficiency is poor.

  The present invention has been made in view of the above-mentioned facts, and the main technical problem is that even when the type and processing conditions of the workpiece are different, they are suitable for the type and processing conditions of the workpiece. An object of the present invention is to provide a cutting device having a cutting blade replacement function capable of replacing a cutting blade.

In order to solve the main technical problem, according to the present invention, a chuck table for holding a workpiece, a cutting blade for cutting the workpiece held on the chuck table, and a rotary spindle equipped with the cutting blade are provided. A cutting means provided; a blade rack for storing a cutting blade to be replaced; a blade replacing means for replacing the cutting blade mounted on the rotary spindle and the cutting blade to be replaced accommodated in the blade rack; In a cutting apparatus comprising:
The blade rack includes a plurality of blade accommodating portions that accommodate a plurality of types of cutting blades to be replaced.
A cutting device is provided.

In the plurality of blade accommodating portions, unused blade accommodating means for accommodating cutting blades to be replaced and used blade accommodating means for accommodating cutting blades mounted on the rotary spindle are arranged.
The blade rack includes a support base including a plurality of blade storage portions, and blade storage portion positioning means for selectively positioning the plurality of blade storage portions provided on the support base in the blade replacement area. is doing.

  In the cutting apparatus according to the present invention, since the blade rack includes a plurality of blade accommodating portions that accommodate cutting blades to be replaced, a plurality of types of cutting blades can be accommodated. Therefore, when the type of workpiece and machining conditions are changed, the cutting blade suitable for the changed workpiece and machining conditions is selected without replacing the cutting blades contained in the blade rack each time. Can be exchanged.

  Hereinafter, a preferred embodiment of a cutting device configured according to the present invention will be described in detail with reference to the accompanying drawings.

FIG. 1 is a perspective view of a main part of a cutting apparatus configured according to the present invention.
The cutting apparatus shown in FIG. 1 includes a stationary base 2. A chuck table mechanism 3 is disposed on the stationary base 2 to hold the workpiece and move it in the cutting feed direction indicated by the arrow X.

  The chuck table mechanism 3 in the illustrated embodiment includes a first guide rail 31 a and a second guide rail 31 b disposed on the upper surface of the stationary base 2. Each of the first guide rail 31a and the second guide rail 31b includes a pair of rail members 311 and 311 and extends in parallel with each other along the cutting feed direction indicated by an arrow X in the drawing. . On the first guide rail 31a and the second guide rail 31b, there are a first support base 32a and a second support base 32b along the first guide rail 31a and the second guide rail 31b, respectively. It is arranged to be movable. That is, guided grooves 321 and 321 are provided in the first support base 32a and the second support base 32b, respectively. The guided grooves 321 and 321 are connected to the first guide rail 31a and the second guide rail 31a. By fitting the pair of rail members 311 and 311 constituting the guide rail 31b, the first support base 32a and the second support base 32b are connected to the first guide rail 31a and the second guide rail 31b. It is configured to be movable along.

  A first cylindrical member 33a and a second cylindrical member 33b are disposed on the first support base 32a and the second support base 32b, respectively. The first cylindrical member 33a and the second cylindrical member are arranged. A first chuck table 34a and a second chuck table 34b are rotatably disposed at the upper end of 33b. The first chuck table 34a and the second chuck table 34b are made of an appropriate porous material such as porous ceramics, and are connected to suction means (not shown). Therefore, the workpieces placed on the placement surfaces 341 and 341 are sucked and held by selectively communicating the first chuck table 34a and the second chuck table 34b to the suction source by suction means (not shown). To do. Further, the first chuck table 34a and the second chuck table 34b are appropriately rotated by a pulse motor (not shown) disposed in the first cylindrical member 33a and the second cylindrical member 33b, respectively. It is like that. Note that the upper ends of the first cylindrical member 33a and the second cylindrical member 33b have holes through which the first chuck table 34a and the second chuck table 34b are inserted, respectively. A first cover member 35a and a second cover member 35b that cover 32a and the second support base 32b are disposed. On the upper surfaces of the first cover member 35a and the second cover member 35b, first blade detection means 36a and second blade detection means 36b for detecting the position of a cutting blade described later are disposed, respectively. ing.

  Continuing the description with reference to FIG. 1, the chuck table mechanism 3 in the illustrated embodiment converts the first chuck table 34a and the second chuck table 34b into a first guide rail 31a and a second guide rail 31b, respectively. 1 is provided with a first cutting feed means 37a and a second cutting feed means 37b for moving in the cutting feed direction indicated by the arrow X in FIG. The first cutting feed means 37a and the second cutting feed means 37b are arranged in parallel between a pair of rail members 311 and 311 constituting the first guide rail 31a and the second guide rail 31b, respectively. The male screw rod 371, a bearing 372 that rotatably supports one end of the male screw rod 371, and a pulse motor 373 that is connected to the other end of the male screw rod 371 and drives the male screw rod 371 to rotate forward or backward. The first cutting feed means 37a and the second cutting feed means 37b configured in this way are internally threaded with male screw rods 371 formed on the first support base 32a and the second support base 32b, respectively. 322 is screwed. Therefore, the first cutting feed means 37a and the second cutting feed means 37b respectively drive the pulse motor 373 to drive the male screw rod 371 in the normal direction or the reverse direction, thereby the first support base 32a and the second cutting feed means 37b. The first chuck table 34a and the second chuck table 34b disposed on the second support base 32b are cut along the first guide rail 31a and the second guide rail 31b, respectively, as indicated by an arrow X in FIG. It can move in the feed direction.

  The cutting apparatus in the illustrated embodiment includes a gate-type support frame 4 disposed across the first guide rail 31a and the second guide rail 31b. The gate-shaped support frame 4 includes a first pillar portion 41 disposed on the side of the first guide rail 31a and a second pillar portion disposed on the side of the second guide rail 31b. 42 and a support portion 43 arranged along an index feed direction indicated by an arrow Y perpendicular to a cutting feed direction indicated by an arrow X by connecting the upper ends of the first pillar portion 41 and the second pillar portion 42. Thus, an opening 44 that allows the movement of the first chuck table 34a and the second chuck table 34b is provided at the center. The upper end portions of the first column portion 41 and the second column portion 42 are formed to be wide, and openings 411 and 421 that allow the movement of the spindle unit of the cutting means to be described later are provided at the upper end portions, respectively. ing. A pair of guide rails 431 and 431 are provided on one surface of the support portion 43 along the index feed direction indicated by the arrow Y, and the other surface is in a direction perpendicular to the paper surface as shown in FIG. In FIG. 1, a pair of guide rails 432 and 432 are provided along (the index feed direction indicated by the arrow Y).

  The cutting apparatus in the illustrated embodiment includes a first alignment means 5a and a second alignment means movably disposed along a pair of guide rails 431 and 431 provided on the support portion 43 of the portal-type support frame 4. The alignment means 5b is provided. The first alignment means 5a and the second alignment means 5b are respectively a moving block 51, moving means 52, 52 for moving the moving block 51 along a pair of guide rails 431, 431, and a moving block 51. Imaging means 53 and 53 mounted on the. The moving blocks 51 and 51 are respectively provided with guided grooves 511 and 511 that are fitted to the pair of guide rails 431 and 431. The guided grooves 511 and 511 are fitted to the pair of guide rails 431 and 431. Thus, the moving blocks 51 and 51 are configured to be movable along the pair of guide rails 431 and 431.

  The moving means 52 and 52 include a male screw rod 521 disposed in parallel between the pair of guide rails 431 and 431, a bearing 522 that rotatably supports one end of the male screw rod 521, and the male screw rod 521. A pulse motor 523 is connected to the end and drives the male screw rod 521 to rotate forward or backward. In the moving means 52 and 52 configured as described above, the male screw rod 521 is screwed into the female screw 512 formed on the moving blocks 51 and 51, respectively. Accordingly, the moving means 52 and 52 drive the pulse motor 523 to drive the male screw rod 521 in the normal direction or the reverse direction, thereby moving the moving blocks 51 and 51 along the pair of guide rails 431 and 431 in FIG. It can move in the index feed direction indicated by Y.

  The image pickup means 53 and 53 mounted on the moving blocks 51 and 51 are respectively provided with image pickup elements (CCD), and send the picked-up image signals to a control means (not shown).

  On the other surface (the surface opposite to the surface on which the first alignment means 5a and the second alignment means 5b are provided) of the support portion 43 constituting the portal-shaped support frame 4 is the first surface. A cutting means 6a and a second cutting means 6b are provided. The 1st cutting means 6a and the 2nd cutting means 6b are demonstrated with reference to FIG. 2 and FIG. The first cutting means 6a and the second cutting means 6b include an indexing movement base 61, a cutting movement base 62, and a spindle unit 63, respectively. The indexing movement base 61 is provided with guided grooves 611 and 611 fitted to a pair of guide rails 432 and 432 provided on the other surface of the support portion 43 on one surface. By fitting 611 and 611 to the pair of guide rails 432 and 432, the indexing movement base 61 is configured to be movable along the pair of guide rails 432 and 432. Further, as shown in FIG. 3, the other surface of the index movement base 61 is provided with a cutting feed direction indicated by an arrow Z (a direction perpendicular to the placement surfaces 341 of the first chuck table 34a and the second chuck table 34b). ) Is provided with a pair of guide rails 612 and 612 (only one guide rail is shown in FIG. 3). In addition, clearance grooves 613 and 613 are provided on one surface of the index movement bases 61 and 61 so as to allow the insertion of a male screw rod of an index feeding means, which will be described later, with a step in the vertical direction.

  The incision moving base 62 includes a supported portion 621 extending in the vertical direction and a mounting portion 622 extending horizontally at right angles from the lower end of the supported portion 621. As shown in FIG. 2, guided grooves 623 and 623 that fit with a pair of guide rails 612 and 612 provided on the other surface of the indexing movement base 61 are provided on the surface of the supported portion 621 on the mounting portion 622 side. (Only one guided groove is shown in FIG. 3), and the notch moving base 62 is provided by fitting the guided grooves 623 and 623 to the pair of guide rails 612 and 612. Is configured to be movable along the pair of guide rails 612 and 612 in the cutting feed direction indicated by the arrow Z. As shown in FIG. 1, the notch moving base 62 attached to the indexing movement base 61 in this way is the other surface of the support frame 4 on which the mounting part 622 is mounted on the indexing movement base 61. The first alignment means 5a and the second alignment means 5b are arranged so as to protrude from the side through the opening 44 to one surface side where the first alignment means 5a and the second alignment means 5b are mounted.

  The spindle unit 63 is mounted on the lower surface of the mounting portion 622 that forms the cutting movement base 62 of the first cutting means 6a and the second cutting means 6b. As shown in FIG. 4, the spindle unit 63 is mounted on a spindle housing 631, a rotating spindle 632 that is rotatably supported by the spindle housing 631 and rotated by a servo motor (not shown), and a tip of the rotating spindle 632. The blade mounting member 633, a fixing nut 634 that is screwed with a male screw (not shown) provided at the tip of the rotary spindle 632 and fixes the blade mounting member 633, and a cutting blade 635 mounted on the blade mounting member 633. , And a fastening nut 638 for clamping and fixing the cutting blade 635 to and from the blade mounting member 633.

  The blade mounting member 633 includes a cylindrical mounting portion 633a and a flange portion 633b provided at one end of the mounting portion 633a, and a male screw 633c is provided at the other end (tip portion) of the mounting portion 633a. Is formed. Note that an engaging recess 632 a is formed on the tip surface of the rotary spindle 632 in the axial center.

  The cutting blade 635 is formed of a metal material such as aluminum and has an annular hub 636 provided with a fitting hole 636a at the center, and abrasive grains are fixed to one side surface of the annular hub 636 by nickel plating. The outer peripheral portion of the hub 636 is removed by etching, and is composed of an electroformed grindstone blade in which a grindstone portion 637 serving as a cutting edge is projected. An annular gripped portion 636b is formed on the side surface of the annular hub 636 so as to protrude. On the outer peripheral surface of the gripped portion 636b, an annular groove 636c that engages a gripping claw of a blade gripping means constituting a cutting blade replacement mechanism described later is formed. The cutting blade 635 configured in this way is The fitting hole 636 a of the annular hub 636 is fitted into the cylindrical mounting portion 633 a of the blade mounting member 633. The cutting nut 638 is screwed into a male screw 633c formed in the cylindrical mounting portion 633a, whereby the cutting blade 635 is sandwiched and fixed by the flange portion 633b of the blade mounting member 633 and the fastening nut 638. Note that, on the side surface of the fastening nut 638, four pin fitting holes 638a into which turning pins of fastening nut attaching / detaching means constituting a cutting blade exchanging mechanism described later are fitted are provided with a phase of 90 degrees. . Further, an annular groove 638b is formed on the outer peripheral surface of the fastening nut 638 to engage with a nut gripping claw of a fastening nut attaching / detaching means constituting a blade replacement mechanism described later.

  The rotary spindle 632 of the first cutting means 6a and the rotary spindle 632 of the second cutting means 6b are arranged along the indexing feed direction indicated by the arrow Y as shown in FIG. The cutting blade 633 attached to the rotary spindle 632 of the first cutting means 6a and the cutting blade 633 attached to the rotary spindle 632 of the second cutting means 6b are arranged to face each other.

  The spindle unit 63 in the illustrated embodiment includes a spindle cover 64 that covers the spindle housing 631 and a blade cover 65 that is attached to the tip of the spindle cover 64 and covers the cutting blade 635, as shown in FIG. Yes. The blade cover 65 includes a first cover member 651 attached to the tip of the spindle cover 64, and a second cover member 652 attached to the front surface of the first cover member 651 and arranged to be movable laterally. The second cover member 652 is positioned at an open position indicated by a solid line in FIG. 5 and a closed position indicated by a two-dot chain line in FIG. 5 by an air piston mechanism (not shown). The second cover member 652 is positioned at a closed position indicated by a two-dot chain line in FIG. 5 during cutting, and is positioned at an open position indicated by a solid line in FIG. 5 when replacing the cutting blade. The first cover member 651 and the second cover member 652 are each provided with a cutting water supply nozzle 66 (the cutting water supply nozzle provided on the second cover member 652 in FIG. 5). Only 66 is shown). The cutting water supply nozzles 66 disposed on the first cover member 651 and the second cover member 652 are connected to cutting water supply means (not shown).

  In the illustrated embodiment, the first cutting means 6a and the second cutting means 6b are arranged so that the index moving bases 61 and 61 are moved along the pair of guide rails 432 and 432 in the index feed direction indicated by the arrow Y in FIG. Indexing feed means 64, 64 for moving are provided. The index feeding means 64 and 64 are formed of a male screw rod 641 disposed in parallel between the pair of guide rails 432 and 432, a bearing 642 that rotatably supports one end of the male screw rod 641, and a male screw rod 641. A pulse motor 643 is connected to the other end and drives the male screw rod 641 to rotate forward or backward. The male screw rods 641 and 641 are disposed at height positions corresponding to the escape grooves 613 and 613 provided in the indexing movement bases 61 and 61, respectively. In the index feeding means 64 and 64 configured as described above, male screw rods 641 and 641 are screwed into female screws 614 and 614 formed on the index moving bases 61 and 61, respectively. Therefore, the index feeding means 64 and 64 drive the pulse motors 643 and 643 to drive the male screw rods 641 and 641 in the normal direction or the reverse direction, respectively, thereby causing the indexing movement bases 61 and 61 to be paired with the guide rails 432 and 432. 1 can be moved in the index feed direction indicated by the arrow Y in FIG. When the index movement bases 61 and 61 move, the male threaded rods 641 and 641 pass through the clearance grooves 613 and 613 provided in the index movement bases 61 and 61, so that the index movement bases 61 and 61 are The movement is allowed.

  Further, the first cutting means 6a and the second cutting means 6b in the illustrated embodiment are configured such that the cutting movement bases 62 and 62 are moved along a pair of guide rails 612 and 612 as shown in FIGS. Cutting feed means 65, 65 for moving in the cutting feed direction indicated by the arrow Z are provided. The incision feeding means 65 and 65 include a male threaded rod 651 disposed in parallel with the pair of guide rails 612 and 612, a bearing 652 that rotatably supports one end of the male threaded rod 651, and the other end of the male threaded rod 651. And a pulse motor 653 for driving the male screw rod 651 in the normal direction or the reverse direction. In the cutting feed means 65 and 65 configured as described above, the male screw rod 651 is screwed into a female screw 622 a formed on the supported portion 621 of the cutting movement base 62. Accordingly, the cutting feed means 65 and 65 drive the pulse motor 653 and drive the male screw rod 651 in the normal direction or the reverse direction, respectively, so that the cutting movement base 62 is moved along the pair of guide rails 622 and 622 in FIG. In FIG. 3, it can move in the cutting feed direction indicated by arrow Z.

  Returning to FIG. 1 and continuing the description, the cutting apparatus in the illustrated embodiment includes a cutting blade replacement mechanism 7 for replacing the cutting blade 635 mounted on the rotary spindle 632. The cutting blade replacement mechanism 7 is disposed behind the portal-type support frame 4 (on the side where the first cutting means 6a and the second cutting means 6b are disposed). The cutting blade replacement mechanism 7 includes a first blade rack 71a and a second blade rack 71b disposed on both rear sides of the portal support frame 4, and the first blade rack 71a and the second blade rack 71b. And a movable substrate 73 (see FIG. 7) that can be moved along the guide means 72.

  The first blade rack 71a and the second blade rack 71b are disposed opposite to each other with the guide means 72 interposed therebetween at positions separated from the rotary spindle 632, respectively. As shown in FIG. 6, the first blade rack 71 a and the second blade rack 71 b include a square-shaped support base 711, a rotary shaft 712 mounted on the lower surface of the support base 711, and the rotary shaft 712. And a pulse motor 713 for rotationally driving the motor. Blade receiving portions 711a, 711b, 711c, and 711d are provided on the four side surfaces of the support base 711, respectively. In the blade accommodating portions 711a, 711b, 711c, and 711d of the support base 711, unused blade accommodating means 714 for accommodating cutting blades to be replaced and used blade accommodating means 715 for accommodating used cutting blades are arranged. It is installed.

  The unused blade accommodating means 714 includes a support shaft 714a having one end attached to the side surface of the support base 711, an annular pressing member 714b fitted into the support shaft 714a, and the pressing member 714b and the support base. 711, and a compression coil spring 714c having a very weak spring force disposed between them. An engaging recess 714d is formed on the other end surface of the support shaft 714a. The support shaft 714a is provided with a restricting means 714e for restricting the position with the cutting blade 635 inserted into the outer peripheral surface of the other end. The restricting means 714e is composed of a ball and a spring that presses the ball radially outward, and the restricting function works until the force acting on the ball reaches a predetermined value. Therefore, the movement of the pressing member 714b toward the other end of the support shaft 714a is restricted by the restricting means 714e. In the unused blade accommodating means 714 configured as described above, several fitting holes 636a provided in the hub 636 of the unused cutting blade 635 are inserted and accommodated in the support shaft 714a. At this time, the pressing member 714b is retracted against the spring force of the compression coil spring 714c. Further, the ball of the restricting means 714e is retracted, and the cutting blade 635 is positioned closer to one end of the support shaft 714a than the restricting means 714e. In this way, the cutting blade 635 inserted into the support shaft 714a is pressed toward the regulating means 714e via the pressing member 714b by the spring force of the compression coil spring 714c. Therefore, the compression coil spring 714c and the pressing member 714b function as a pressing unit that presses the cutting blade 635 toward the regulating unit 714e. In the illustrated embodiment, the unused blade accommodating means 714 disposed in the blade accommodating portion 711a accommodates the cutting blade 635 composed of the above-described electroformed grindstone blade, and is unused in the blade accommodating portion 711b. The blade accommodating means 714 accommodates a cutting blade made of, for example, a resin bond grindstone blade, and the unused blade accommodating means 714 disposed in the blade accommodating portion 711c accommodates a cutting blade made of, for example, a metal bond grindstone blade. For example, a cutting blade for forming a V-groove is accommodated in the unused blade accommodating means 714 disposed in the accommodating portion 711d.

  Similarly to the unused blade accommodating means 714, the used blade accommodating means 715 also has a support shaft 715a having one end attached to the support base 711, and an annular pressing member 715b fitted into the support shaft 715a. And a compression coil spring 715c having a very weak spring force disposed between the pressing member 715b and the support base 711. An engaging recess 715d is formed on the other end surface of the support shaft 715a. The support shaft 715a is provided with restricting means 715e for restricting the position with the cutting blade 635 inserted into the outer peripheral surface of the other end. The restricting means 715e includes a ball and a spring that presses the ball radially outward, and the restricting function is activated until the force acting on the ball reaches a predetermined value. Accordingly, the movement of the pressing member 715b toward the other end of the support shaft 715a is restricted by the restricting means 715e. In the used blade accommodating means 715 configured as described above, several fitting holes 636a provided in the hub 636 of the used cutting blade 635 are inserted into the support shaft 715a and accommodated therein. At this time, the pressing member 715b is retracted against the spring force of the compression coil spring 715c. Further, the ball of the restricting means 715e is retracted, and the cutting blade 635 is positioned closer to one end of the support shaft 715a than the restricting means 715e. In this way, the cutting blade 635 inserted into the support shaft 715a is pressed toward the regulating means 715e via the pressing member 715b by the spring force of the compression coil spring 715c. Therefore, the compression coil spring 715c and the pressing member 715b function as a pressing unit that presses the cutting blade 635 toward the regulating unit 715e.

  The rotating shaft 712 is mounted on the lower surface of the support base 711 and is rotatably supported by bearing means (not shown). In the pulse motor 713, the drive shaft 713a is connected to the rotary shaft 712 by a connecting means (not shown), and the support base 711 is rotated to select the blade accommodating portions 711a, 711b, 711c, 711d as a blade replacement area to be described later. Position. Therefore, the pulse motor 713 functions as a blade accommodating portion positioning means for selectively positioning the blade accommodating portions 711a, 711b, 711c, and 711d of the support base 711 in the blade replacement area.

  As shown in FIG. 7, the guide means 72 includes a rectangular guide plate 721 and a pair of guide rails 722 and 722 provided on both sides of the guide plate 721 and extending in the cutting feed direction indicated by an arrow X. The guide means 72 configured in this way is attached to a fixing member (not shown).

  An L-shaped guided member 74 is attached to one end of the movable substrate 73 as shown in FIG. 8, and a pair that engages with the pair of guide rails 722 and 722 on both sides of the guided member 74. Guided rails 741 and 741 are provided. By engaging the pair of guided rails 741 and 741 with the pair of guide rails 722 and 722, the movable substrate 73 is supported to be movable along the pair of guide rails 722 and 722 via the guided member 74. Is done. A moving block 742 having a female screw 742a is attached to the upper surface of the guided member 74.

  Positioning means 75 for moving the movable substrate 73 along a pair of guide rails 722 and 722 is disposed on the lower surface of the guide plate 721 constituting the guide means 72 as shown in FIG. Has been. The positioning means 75 is disposed in parallel with the pair of guided rails 741 and 741, a male screw rod 751 that is screwed with the female screw 742 a of the moving block 742, and a guide plate 721 connected to one end of the male screw rod 751. And a pulse motor 752 attached to the lower surface of the motor. The other end of the male screw rod 751 is rotatably supported by a bearing 753 attached to the lower surface of the guide plate 721. The positioning means 75 configured in this manner moves the movable substrate 73 along the pair of guide rails 722 and 722 in the direction indicated by the arrow X in FIG. 7 by rotating the pulse motor 752 forward or backward. The positioning means 75 includes a fastening nut attaching / detaching mechanism positioning means for positioning a first fastening nut attaching / detaching mechanism (to be described later) and a second fastening nut attaching / detaching mechanism at a blade attaching / detaching position facing the tip surface of the rotary spindle 632, and to be described later. A blade attachment / detachment position where the cutting blade attachment / detachment mechanism faces the tip surface of the rotary spindle 632, an unused blade receiving position which faces the unused blade accommodation means 714 in the blade exchange region of the first blade rack 71a and the second blade rack 71b, and It functions as a cutting blade attaching / detaching mechanism positioning means positioned at the used blade storage position facing the used blade storage means 715.

  The description will be continued based on FIG. 8. On the upper surface of the movable substrate 73, a first fastening nut attaching / detaching mechanism 8 a and a second fastening nut attaching / detaching mechanism 8 b for attaching / detaching the fastening nut 638 of the spindle unit 63 are provided. A first blade attaching / detaching mechanism 9a and a second blade attaching / detaching mechanism 9b for attaching / detaching the cutting blade 635 to / from the tip of the rotary spindle 632 are provided. The first fastening nut attaching / detaching mechanism 8a, the first blade attaching / detaching mechanism 9a, the second fastening nut attaching / detaching mechanism 8b, and the second blade attaching / detaching mechanism 9b are arranged on the upper surface of the movable substrate 73 in line symmetry. Yes. The first fastening nut attaching / detaching mechanism 8 a and the second fastening nut attaching / detaching mechanism 8 b are disposed on a guide rail 731 provided on the upper surface of the movable substrate 73, and are supported to be movable along the guide rail 731. Yes. Each of the first fastening nut attaching / detaching mechanism 8a and the second fastening nut attaching / detaching mechanism 8b includes a nut rotating means 81, a nut gripping means 82, and a moving means 83, respectively.

The nut rotating means 81 will be described with reference to FIGS.
The nut rotation means 81 in the illustrated embodiment includes a motor case 811 disposed on the guide rail 731, an electric motor 812 disposed in the motor case 811, and a drive shaft 812 a of the electric motor 812. And a rotating member 813 connected to each other. The bottom wall 811a of the motor case 811 is provided with a guided groove 811b that engages with the guide rail 731. By engaging the guided groove 811b with the guide rail 731, the motor case 811 is guided to the guide rail 731. It is supported so that it can move along. In the illustrated embodiment, the electric motor 812 rotates in the direction of loosening the fastening nut 638 when rotated forward, and rotates in the direction of tightening the fastening nut 638 when reversed.

  In FIG. 9 of the rotating member 813, four rotating pins 814 protruding from the right end surface are disposed at the right end portion with a phase of 90 degrees. This rotation pin 814 has a circular engagement portion 814a at the base end (left end in FIG. 9), and this engagement portion 814a is a cylinder hole 813a provided at the right end portion of the rotation member 813 in FIG. Are slidably disposed on the surface. A compression spring 815 is disposed in the cylinder hole 813a, and the rotation pin 814 is urged to move to the right in FIG. 9 by the compression spring 815. In addition, a stopper portion 813b that engages with the engaging portion 814a of the rotation pin 814 and restricts the rightward movement of the rotation pin 814 is provided at the right end of the cylinder hole 813a in FIG. The four rotating pins 814 described above are arranged at positions where they are fitted into the four pin fitting holes 638 a provided in the fastening nut 638.

  The nut gripping means 82 includes four gripping members 821 disposed on the outer periphery of the rotating member 813 with a phase of 90 degrees, and an open position where the four gripping members 821 are indicated by solid lines in FIG. 9 includes an operating ring 822 that operates at a gripping position indicated by a two-dot chain line, and an air cylinder 823 that operates the operating ring 822 at a retracted position indicated by a solid line and an operating position indicated by a two-dot chain line in FIG. The gripping member 821 has a gripping claw 821a at the tip (right end in FIG. 9), and the base end (left end in FIG. 9) is supported by the pivot member 813 so as to be swingable by the support shaft 824. . A compression spring 825 is disposed between the gripping member 821 and the rotating member 813 that are supported in this manner, and the gripping member 821 always has a diameter around the support shaft 824 on the gripping claw 821a side by the compression spring 825. It is biased towards the outside in the direction, i.e. the open position.

  The operating ring 822 includes a guided portion 822a provided at the left end portion in FIG. 9 and an operating portion 822b provided at the right end portion in FIG. 9, and the guided portion 822a moves on the rotating member 813. Supported as possible. The operating portion 822b of the operating ring 822 is in contact with the gripping member 821. The air cylinder 823 is disposed on the upper wall 811 c of the motor case 811, and its piston rod 823 a is connected to the operating ring 822.

  When the nut gripping means 82 configured in this manner operates the air cylinder 823 from the retracted position indicated by the solid line in FIG. 9 to move the operating ring 822 to the operating position indicated by the two-dot chain line, the gripping member 821 is indicated by the solid line. Operate from the open position to the gripping position indicated by the two-dot chain line. Thus, when the gripping member 821 is operated to the gripping position, the gripping claws 821a can engage with the annular groove 638b formed on the outer peripheral surface of the fastening nut 638.

  As shown in FIG. 8, the moving means 83 includes an air cylinder 831 disposed in parallel with the guide rail 731, and a connecting member 832 that connects the piston rod 831 a of the air cylinder 831 and the motor case 811. ing. By operating the air cylinder 831, the motor case 811 is moved along the guide rail 731 via the connecting member 832.

Next, the first blade attaching / detaching mechanism 9a and the second blade attaching / detaching mechanism 9b will be described with reference to FIGS.
The first blade attaching / detaching mechanism 9 a and the second blade attaching / detaching mechanism 9 b in the illustrated embodiment are disposed on a guide rail 732 provided on the upper surface of the movable substrate 73 and are movable along the guide rail 732. It is supported. The first blade attaching / detaching mechanism 9a and the second blade attaching / detaching mechanism 9b respectively include a first blade grasping means 91a and a second blade grasping means 91b, and the first blade grasping means 91a and the second blade grasping means. A support plate 92 on which the means 91b is mounted and a pulse motor 93 (see FIG. 10) for rotating the support plate 92 are provided.

Since the first blade holding means 91a and the second blade holding means 91b have substantially the same configuration, the same members will be described with the same reference numerals.
The first blade gripping means 91a and the second blade gripping means 91b include a plurality of (four in the illustrated embodiment) gripping members 911 for gripping the outer periphery of the hub 636 of the cutting blade 635, and the four A gripping member actuating means 912 that actuates the gripping members 911 and a positioning means 913 that is disposed at the center of the four gripping members 911 and that engages with an engaging recess 632 a formed on the front end surface of the rotary spindle 632. I have.

  The four gripping members 911 are arranged in the circumferential direction with a phase of 90 degrees along the outer periphery of the gripping member actuating means 912, and are provided with gripping claws 911a at the tips. The grip member actuating means 912 is configured to actuate each of the four grip members 911 in the radial direction, and is attached to the support plate 92. The positioning means 913 includes a rod 913a attached to the center of the end face of the gripping member actuating means 912, a positioning member 913b slidably attached to the tip of the rod 913a and having a conical shape at the tip, and the positioning It consists of a compression spring 913c disposed between the member 913b and the end face of the gripping member actuating means 912. A stopper mechanism is provided between the positioning member 913b and the rod 913a to prevent the positioning member 913b from coming out of the rod 913a from the illustrated state.

  As shown in FIG. 10, a rotating shaft 921 is attached to the center of the support plate 92 of the first blade holding means 91a and the second blade holding means 91b. A threaded portion 921a formed on the end surface of the rotating shaft 921 is inserted into a hole provided in the center of the support plate 92, and a nut 922 is screwed into the threaded portion 921a, whereby the rotating shaft 921 is engaged with the support plate 92. Mounted. A rotation restricting mechanism that restricts relative rotation (not shown) is disposed between the rotation shaft 921 and the support plate 92. A driving shaft 93 a of a pulse motor 93 is connected to the rotating shaft 921. The pulse motor 93 is disposed in a motor case 94 disposed on the guide rail 732. The bottom wall 94 a of the motor case 94 is provided with a guided groove 94 b that engages with the guide rail 732. By engaging the guided groove 94 b with the guide rail 732, the motor case 94 is guided to the guide rail 732. It is supported so that it can move along.

  The first blade attaching / detaching means 9a and the second blade attaching / detaching means 9b in the illustrated embodiment include a moving means 95 for moving the motor case 94 along the guide rail 732 as shown in FIG. The moving means 95 includes an air cylinder 951 disposed in parallel with the guide rail 732, and a connecting member 952 that connects the piston rod 951 a of the air cylinder 951 and the motor case 94. By operating the air cylinder 951, the motor case 94 is moved along the guide rail 732 via the connecting member 952.

  The first fastening nut attaching / detaching mechanism 8a, the second fastening nut attaching / detaching mechanism 8b, the first blade attaching / detaching mechanism 9a, and the second blade attaching / detaching mechanism 9b configured as described above are attached to the rotary spindle 632. It functions as a blade exchanging means for exchanging the used cutting blades and the unused cutting blades accommodated in the first blade rack 71a and the second blade rack 71b.

  The cutting apparatus in the illustrated embodiment is configured as described above, and the operation thereof will be described below mainly with reference to FIGS. 1 and 2.

First, cutting of a workpiece will be described.
A workpiece such as a semiconductor wafer is transferred onto the first chuck table 34a by a workpiece transfer means (not shown). At this time, the first chuck table 34a is positioned at the workpiece attaching / detaching position shown in FIG. The workpiece placed on the first chuck table 34a is sucked and held on the first chuck table 34a by operating a suction means (not shown) (first workpiece holding step).

  As described above, the first chuck table 34a that sucks and holds the workpiece is positioned directly below the imaging means 53 of the first alignment means 5a by the operation of the first cutting feed means 37a. If the first chuck table 33a is positioned directly below the imaging means 53, the imaging means 53 images the surface of the workpiece held on the first chuck table 34a and forms it on the surface of the workpiece. A cut area is detected. Then, the index feeding means 64 of the first cutting means 6 a and the index feeding means 64 of the second cutting means 6 b are operated to align the respective cutting blades 635 with the cutting area detected by the imaging means 53. Alignment is performed (first alignment step).

  While the first alignment process is being performed on the workpiece held on the first chuck table 34a, the workpiece is attached to and detached from the workpiece shown in FIG. It is conveyed onto the second chuck table 34b positioned at the position. The workpiece placed on the second chuck table 34b is sucked and held on the second chuck table 34b by operating a suction means (not shown) (second workpiece holding step).

  If the workpiece is sucked and held on the second chuck table 34b, the second chuck table 34b is positioned immediately below the imaging means 53 of the second alignment means 5b by the operation of the second cutting feed means 37b. . And the 2nd alignment process of detecting the area | region which should be cut of the workpiece hold | maintained at the 2nd chuck table 34b by the 2nd alignment means 5b is implemented. The second alignment process is performed in the same manner as the first alignment process described above.

  On the other hand, when the first alignment step is completed, the first chuck table 34a is moved to the cutting area. Then, the cutting blade 635 of the first cutting means 6a and the cutting blade 635 of the second cutting means 6b are positioned in the cutting area of the workpiece held on the first chuck table 34a. Next, the first chuck table 34a is cut and fed while rotating the cutting blade 635 of the first cutting means 6a and the cutting blade 635 of the second cutting means 6b, so that the first chuck table 34a is held. A predetermined cutting process is performed on the workpiece (first cutting process).

  When the first cutting process described above is completed, the second chuck table 34b holding the workpiece on which the second alignment process is performed is moved to the cutting area. Then, after the first cutting step is performed, the workpiece held on the second chuck table 34b by the first cutting means 6a and the second cutting means 6b as in the first cutting step described above is applied to the workpiece. On the other hand, the second cutting step is performed.

  The first chuck table 34a holding the processed workpiece that has been subjected to the first cutting step described above is moved from the cutting region toward the workpiece attaching / detaching position. Here, the suction holding of the processed workpiece held on the first chuck table 34a is released. Then, the processed workpiece is transferred to the next process by a workpiece transfer means (not shown).

  As described above, when the workpiece is conveyed to the next step, the first workpiece holding step for holding the next semiconductor wafer 10 on the first chuck table 34a is performed. Then, the first alignment step and the first cutting step are sequentially performed.

  On the other hand, the second chuck table 34b holding the processed workpiece subjected to the second cutting step described above is moved from the cutting area toward the workpiece attaching / detaching position. Here, the suction holding of the processed workpiece held on the second chuck table 34b is released. Then, the processed workpiece is transferred to the next process by a workpiece transfer means (not shown). When the processed workpiece is conveyed to the next step in this way, the second workpiece holding step for holding the next workpiece on the second chuck table 34b is performed. Then, the second alignment process and the second cutting process are sequentially performed.

  If the above-mentioned cutting process is performed on a predetermined number of workpieces, and the type and processing conditions of the workpiece are changed, it is necessary to replace the cutting blade with a cutting blade suitable for the changed workpiece and processing conditions. There is. Hereinafter, replacement work of the cutting blade 635 will be described with reference to FIGS. 11 to 17.

  For example, a cutting blade 635 made of an electroformed grindstone blade is housed in the blade housing portion 711a of the first blade rack 71a and the second blade rack 71b, and a cutting blade 635 made of a resin bond grindstone blade is housed in the blade housing portion 711b. When replacing the cutting blade 635 made of an electroformed grinding wheel mounted on the rotary spindle with a cutting blade made of a resin bond grinding wheel, the pulse motors of the first blade rack 71a and the second blade rack 71b are used. As shown in FIG. 11, the first and second fastening nut attaching / detaching mechanisms 8a and 8b, the first blade attaching / detaching mechanism 9a and the first accommodating member 711b of the support base 711 are operated. 2 is opposed to the guide means 72 provided with the blade attaching / detaching mechanism 9b. Positioning the blade exchange area. Next, the positioning means 75 (see FIG. 7) is actuated to move the movable substrate 73 along the pair of guide rails 722 and 722, and the first blade attaching / detaching mechanism 9a and the second blade attaching / detaching mechanism 9b. One blade gripping means 91a is positioned at an unused blade receiving position facing the unused blade accommodating means 714 in which unused cutting blades 635 in the first blade rack 71a and the second blade rack 71b are accommodated. Next, the moving means 95 is operated to advance the first blade gripping means 91a toward the unused blade accommodating means 714, and the positioning member 913b is provided on the other end surface of the support shaft 714a of the unused blade accommodating means 714. The engaging recess 714d is engaged. Then, the gripping member actuating means 912 of the first blade gripping means 91a is actuated to actuate the four gripping members 911 radially inward, and the gripping claws 911a provided at the tips of the four gripping members 911 are cut. The blade 635 is engaged with an annular groove 636 c formed in the annular hub 636 of the blade 635. As a result, the unused cutting blade 635 made of the resin bond grindstone blade accommodated in the blade accommodating portion 711b is grasped by the four grasping members 911 (unused cutting blade grasping step).

  When the above-described unused cutting blade gripping process is performed, the moving means 95 is operated to retract the first blade gripping means 91a, and the positioning means 75 is operated to operate the first as shown in FIG. The nut rotating means 81 and the nut gripping means 82 of the fastening nut attaching / detaching mechanism 8 a and the second fastening nut attaching / detaching mechanism 8 b are positioned at the blade attaching / detaching position facing the rotating spindle 632. Then, the moving means 83 is operated to advance the nut rotating means 81 and the nut gripping means 82 toward the rotary spindle 632. As a result, the four rotation pins 814 disposed on the rotation member 813 abut against the end surface of the fastening nut 638 and are retracted against the spring force of the compression spring 815. Further, the air cylinder 823 of the nut gripping means 82 is actuated to move the operating ring 822 to the operating position indicated by the two-dot chain line in FIG. 9, and the gripping member 821 is operated to the gripping position indicated by the two-dot chain line, thereby gripping. The claw 821 a is engaged with an annular groove 638 b formed on the outer peripheral surface of the fastening nut 638. Next, when the electric motor 812 is driven to rotate forward, when the four rotating pins 814 are aligned with the four pin fitting holes 638a formed in the fastening nut 638, they are fitted into the four pin fitting holes 638a. To do. As a result, the forward driving force of the electric motor 812 is transmitted to the fastening nut 638 via the four rotating pins 814, and the fastening nut 638 is loosened and removed from the blade mounting member 633. The fastening nut 638 thus removed from the blade mounting member 633 is gripped by the gripping member 821 of the nut gripping means 82 (fastening nut removing step). When performing the fastening nut removing step, the second cover member 652 of the spindle unit 63 is positioned at the open position indicated by the solid line in FIG.

  When the above-described fastening nut removing step is performed, the moving means 83 is operated to retract the nut rotating means 81 and the nut gripping means 82, and the positioning means 75 is operated to operate the first as shown in FIG. The blade attaching / detaching mechanism 9 a and the second blade holding means 91 b of the second blade attaching / detaching mechanism 9 b are positioned at the blade attaching / detaching position facing the rotary spindle 632. Next, the moving means 95 is operated to advance the second blade gripping means 91 b toward the rotating spindle 632, and the positioning member 913 b is engaged with the engaging recess 632 a formed on the tip surface of the rotating spindle 632. Then, the gripping member actuating means 912 of the second blade gripping means 91b is actuated to actuate the four gripping members 911 radially inward to cut the gripping claws 911a provided at the tips of the four gripping members 911. The blade 635 is engaged with an annular groove 636 c formed in the annular hub 636 of the blade 635. As a result, the cutting blade 635 made of a used electroformed grinding wheel is gripped by the four gripping members 911 (used cutting blade removal step).

  When the above-described used cutting blade removing process is performed, the moving means 95 is operated to retract the second blade gripping means 91b as shown in FIG. 14, and the pulse motor 93 (see FIG. 10) is operated. Then, the support plate 92 is rotated 180 degrees, and the first blade holding means 91a and the second blade holding means 91b are reversed. As a result, the first blade gripping means 91a that grips the unused cutting blade 635 in the above-described unused cutting blade gripping process is positioned on the blade attaching / detaching device facing the rotating spindle 632 (cutting blade gripping means reversing process).

  Next, as shown in FIG. 15, the moving means 95 is operated to advance the first blade gripping means 91 a toward the rotary spindle 632, and the positioning member 913 b is an engagement recess formed on the front end surface of the rotary spindle 632. Engage with 632a. At this time, the unused cutting blade 635 gripped by the four gripping members 911 of the first blade gripping means 91 a has a fitting hole 636 a of the annular hub 636 and a cylindrical mounting portion of the blade mounting member 633. It fits into 633a. Then, the gripping member actuating means 912 of the first blade gripping means 91a is actuated to actuate the four gripping members 911 radially outward to release the gripping of the cutting blade 635 by the four gripping members 911. As a result, the unused cutting blade 635 is mounted on the cylindrical mounting portion 633a of the blade mounting member 633 (unused cutting blade mounting step).

  When the above-described unused cutting blade mounting step is performed, the moving means 95 is operated to retract the first blade gripping means 91a, and the positioning means 75 is operated to perform the first fastening as shown in FIG. The nut turning means 81 of the nut attaching / detaching mechanism 8a and the second fastening nut attaching / detaching mechanism 8b and the nut grasping means 82 grasping the fastening nut 638 in the fastening nut removing step are positioned at the blade attaching / detaching position facing the rotary spindle 632. . Next, the moving means 83 is operated to advance the nut rotating means 81 and the nut gripping means 82 toward the rotary spindle 632. As a result, the fastening nut 638 gripped by the nut gripping means 82 comes into contact with the cylindrical mounting portion 633a of the blade mounting member 633. When the electric motor 812 is driven in reverse, the rotational force is transmitted to the fastening nut 638 via the four turning pins 814 of the nut turning means 81, and the fastening nut 638 is a male screw 633c formed in the mounting portion 633a. Screwed onto and tightened. Then, by operating the air cylinder 823 of the nut gripping means 82 and moving the operating ring 822 from the operating position indicated by the two-dot chain line in FIG. 9 to the retracted position indicated by the solid line, the gripping member 821 is gripped by the two-dot chain line. Operate from the position to the open position indicated by the solid line. As a result, the unused cutting blade 635 is sandwiched and fixed by the flange portion 633b of the blade mounting member 633 and the fastening nut 638 (unused cutting blade fixing step).

  If the above-described unused cutting blade fixing step is performed, the moving means 83 is operated to retract the nut rotating means 81 and the nut gripping means 82, and the positioning means 75 is operated to guide the movable substrate 73 to a pair of guides. The first blade rack 71a moves along the rails 722 and 722, and the second blade holding means 91b (holding the used cutting blade) of the first blade attaching / detaching mechanism 9a and the second blade attaching / detaching mechanism 9b is moved to the first blade rack 71a. The second blade rack 71b is positioned at the used blade storage position facing the used blade storage means 715. At this time, the blade accommodating portion 711a for accommodating the cutting blade 635 composed of the electroformed grindstone blade of the support base 711 by operating the pulse motor 713 of the first blade rack 71a and the second blade rack 71b is shown in FIG. As described above, the blade replacement region facing the guide means 72 in which the first fastening nut attaching / detaching mechanism 8a, the second fastening nut attaching / detaching mechanism 8b, the first blade attaching / detaching mechanism 9a, and the second blade attaching / detaching mechanism 9b are disposed. Position. Next, as shown in FIG. 17, the moving means 95 is operated to advance the second blade gripping means 91b toward the used blade accommodating means 715, and the positioning member 915b is moved to the support shaft 715a of the used blade accommodating means 715. The used cutting blade 635 made of an electroformed grinding wheel blade held by the second blade holding means 91b is engaged with the engaging recess 715d provided on the other end surface of the blade, and the support shaft 715a of the used blade accommodating means 715 is used. Fit into and house. Then, the holding of the used cutting blade 635 by the second blade holding means 91b is released (used cutting blade accommodation step). Next, the moving means 95 is actuated to retract the second blade gripping means 91b, and the state shown in FIG. 8 is restored. In addition, when the used cutting blade 635 replaced as described above has not reached the end of its life, it may be accommodated in the unused blade accommodating means 714.

  As described above, the cutting blade replacement mechanism 7 in the illustrated embodiment includes the support base 711 in which the first blade rack 71a and the second blade rack 71b are provided with a plurality of blade accommodating portions 711a, 711b, 711c, and 711d. Since the unused blade accommodating means 714 for accommodating the cutting blade 635 to be replaced is disposed in the plurality of blade accommodating portions, a plurality of types of cutting blades can be accommodated. Therefore, when the type of workpiece and machining conditions are changed, the cutting blade suitable for the changed workpiece and machining conditions is selected without replacing the cutting blades contained in the blade rack each time. Can be exchanged.

  Although the present invention has been described based on the illustrated embodiment, the present invention is not limited to the embodiment, and various modifications are possible within the scope of the gist of the present invention. For example, in the illustrated embodiment, the first fastening nut attaching / detaching mechanism 8a, the second fastening nut attaching / detaching mechanism 8b, and the first blade attaching / detaching mechanism 9a corresponding to the first cutting means 6a and the second cutting means 6b. In addition, an example in which the second blade attaching / detaching mechanism 9b is provided has been described. However, in the case where the number of cutting means is one, it is sufficient to provide one fastening nut attaching / detaching mechanism and blade attaching / detaching mechanism.

The principal part perspective view of the cutting device comprised according to this invention. The perspective view which shows the cutting means of the cutting device shown in FIG. FIG. 2 is a cross-sectional view taken along line AA in FIG. The disassembled perspective view which shows the attachment structure of the cutting blade in the spindle unit which comprises the cutting means of the cutting device shown in FIG. 1 is a perspective view of a main part of a spindle unit constituting cutting means of the cutting apparatus shown in FIG. The perspective view which shows the blade rack which comprises the cutting blade exchange mechanism with which the cutting apparatus shown in FIG. 1 is equipped. The perspective view which shows the guide means and the positioning means which comprise the cutting blade exchange mechanism with which the cutting apparatus shown in FIG. 1 is equipped. The perspective view which shows the 1st fastening nut attaching / detaching mechanism, the 2nd fastening nut attaching / detaching mechanism, the 1st blade attaching / detaching mechanism, and the 2nd blade attaching / detaching mechanism which comprise the cutting blade replacement mechanism with which the cutting apparatus shown in FIG. 1 is equipped. . Sectional drawing of the fastening nut attachment / detachment mechanism which comprises the cutting blade exchange mechanism with which the cutting apparatus shown in FIG. 1 is equipped. Sectional drawing of the blade attachment / detachment mechanism which comprises the cutting blade exchange mechanism with which the cutting apparatus shown in FIG. 1 is equipped. Explanatory drawing of the pre-use cutting blade holding process in the blade replacement | exchange operation | work by the cutting blade replacement | exchange mechanism with which the cutting apparatus shown in FIG. 1 is equipped. Explanatory drawing of the fastening nut removal process in the blade replacement | exchange operation | work by the cutting blade replacement | exchange mechanism with which the cutting apparatus shown in FIG. 1 is equipped. Explanatory drawing of the used cutting blade removal process in the blade replacement | exchange operation | work by the cutting blade replacement | exchange mechanism with which the cutting apparatus shown in FIG. 1 is equipped. Explanatory drawing of the cutting blade holding means inversion process in the blade replacement | exchange operation | work by the cutting blade replacement | exchange mechanism with which the cutting apparatus shown in FIG. 1 is equipped. Explanatory drawing of the pre-use cutting blade mounting process in the blade replacement | exchange operation | work by the cutting blade replacement | exchange mechanism with which the cutting apparatus shown in FIG. 1 is equipped. Explanatory drawing of the cutting blade fixing process before use in the blade replacement | exchange operation | work by the cutting blade replacement | exchange mechanism with which the cutting apparatus shown in FIG. 1 is equipped. Explanatory drawing of the used cutting blade accommodation process in the blade replacement | exchange operation | work by the cutting blade replacement | exchange mechanism with which the cutting apparatus shown in FIG. 1 is equipped.

Explanation of symbols

2: base 3: chuck table mechanism 31a: first guide rail 31b: second guide rail 32a: first support base 32b: second support base 34a: first chuck table 34b: second Chuck table 36a: first blade detecting means 36b: second blade detecting means 37a: first cutting feed means 37b: second cutting feed means 4: portal support frame 5a: first alignment means 5b : Second alignment means 52: moving means 53: imaging means 6 a: first cutting means 6 b: second cutting means 61: indexing movement base 62: cutting movement base 63: spindle unit 632: rotating spindle 633: Blade mounting member 634: fixed nut 635: cutting blade 638: fastening nut 64: index feed means 65: cutting feed means 7: cutting blade replacement mechanism 71a : First blade rack 71b: second blade rack 711: support bases 711a, 711b, 711c, 711d: blade housing portion 712: rotating shaft 713 pulse motor 714: unused blade housing means 715: used blade housing means 72 : Guide means 722, pair of guide rails 73: movable substrate 75: positioning means 8a: first fastening nut attaching / detaching mechanism 8b: second fastening nut attaching / detaching mechanism 81: nut rotating means 82: nut gripping means 9a: first 1 cutting blade attaching / detaching mechanism 9b: second cutting blade attaching / detaching mechanism 91a: first cutting blade grasping means 91b: second cutting blade grasping means 92: support plate

Claims (3)

A chuck table for holding a workpiece, a cutting blade for cutting the workpiece held on the chuck table, a cutting means having a rotary spindle equipped with the cutting blade, and a blade for storing a cutting blade to be replaced In a cutting apparatus comprising: a rack; and blade changing means for exchanging a cutting blade mounted on the rotary spindle and a cutting blade to be exchanged contained in the blade rack;
The blade rack includes a plurality of blade accommodating portions that accommodate a plurality of types of cutting blades to be replaced.
The cutting device characterized by the above.   In the plurality of blade accommodating portions, unused blade accommodating means for accommodating cutting blades to be replaced and used blade accommodating means for accommodating cutting blades mounted on the rotary spindle are disposed. Item 2. The cutting device according to Item 1.   The blade rack includes a support base including the plurality of blade storage units, and blade storage unit positioning means for selectively positioning the plurality of blade storage units provided on the support base in a blade replacement region. The cutting device according to claim 1 or 2, wherein

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