CN101028729A - Cutting device - Google Patents
Cutting device Download PDFInfo
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- CN101028729A CN101028729A CN 200710084372 CN200710084372A CN101028729A CN 101028729 A CN101028729 A CN 101028729A CN 200710084372 CN200710084372 CN 200710084372 CN 200710084372 A CN200710084372 A CN 200710084372A CN 101028729 A CN101028729 A CN 101028729A
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- cutting
- blade
- cutting tip
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- base station
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- 238000005520 cutting process Methods 0.000 title claims abstract description 235
- 230000007246 mechanism Effects 0.000 claims abstract description 320
- 230000008859 change Effects 0.000 claims description 19
- 238000009434 installation Methods 0.000 description 18
- 230000006835 compression Effects 0.000 description 14
- 238000007906 compression Methods 0.000 description 14
- 239000000758 substrate Substances 0.000 description 12
- 230000009471 action Effects 0.000 description 11
- 229910001651 emery Inorganic materials 0.000 description 10
- 230000020347 spindle assembly Effects 0.000 description 10
- 238000000034 method Methods 0.000 description 9
- 230000008569 process Effects 0.000 description 9
- 230000015572 biosynthetic process Effects 0.000 description 8
- 238000005755 formation reaction Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 238000005323 electroforming Methods 0.000 description 7
- 230000002093 peripheral effect Effects 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- 230000002687 intercalation Effects 0.000 description 6
- 238000009830 intercalation Methods 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- 238000012423 maintenance Methods 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 239000002173 cutting fluid Substances 0.000 description 4
- 238000003754 machining Methods 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 230000003068 static effect Effects 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000003082 abrasive agent Substances 0.000 description 1
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical group [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000008520 organization Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
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- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Dicing (AREA)
Abstract
The present invention provides a cutting having cutting blades replacement functions, which is capable of replacing with corresponding cutting blades according to the species of objects to be processed and processing conditions, even when the species of objects to be processed and processing conditions are different. The cutting device in accordance with the present invention comprises a clamping bench for holding the object to be processed; a cutting mechanism equipped with cutting blades for cutting objects to be processed and held by the clamping bench and a rotary main shaft mounted with the cutting blades; a knife rest for receiving the cutting blades to be replaced; and a knife blade replacement mechanism used for replacement between the cutting blades mounted at the rotary main shaft and the cutting blades received in the knife rest and to be replaced, wherein the knife rest is fitted with a plurality of knife blade receiving parts for receiving a plurality of kinds of cutting blades to be replaced.
Description
Technical field
The present invention relates to a kind of topping machanism that cuts machined object such as semiconductor wafer, in more detail, relate to a kind of topping machanism of more converting mechanism of the cutting tip (Block レ one De) of having equipped the cutting machined object.
Background technology
For example, in semiconductor devices manufacturing process, the a plurality of zones that preset lines is divided of cutting apart of cutting apart (street) by being known as have roughly been formed to clathrate on the surface of the semiconductor wafer of circular plate shape, on these zones, form devices such as IC, LSI, cut apart along cutting apart preset lines by each zone that will form this device, make each device.As the segmenting device of dividing semiconductor wafer, the general use is the topping machanism of cutting (Dicing) device.This topping machanism possesses: keep the Ka Tai of machined object and be furnished with the cutting mechanism of cutting by the cutting tip of the machined object of Ka Tai maintenance.
Be assemblied in the cutting tip on the above-mentioned topping machanism,, therefore be necessary to regularly replace cutting tip because of use is worn and torn.The scheme of proposing to use the blade automatic changer of changing this cutting tip is automatically arranged.(for example, with reference to patent documentation 1).This blade automatic changer has: have take in use before the knife rest of the 1st blade incorporating section and the 2nd blade incorporating section of taking in the cutting tip after the use of cutting tip, this knife rest is arranged on the position away from the rotary main shaft of the cutting tip that topping machanism is installed; Mounting or dismounting are fastened on cutting tip the clamp nut mounting mechanism of the clamp nut of rotary main shaft front end; The blade mounting mechanism that cutting tip is installed and removed at the front end of rotary main shaft.
Patent documentation 1: No. the 2617876th, Japan's special permission
Under the different situation of the kind of the machined object of topping machanism cutting and processing conditions, need use cutting tip matched corresponding to the kind and the processing conditions of machined object with it.Yet, because the knife rest of taking in cutting tip of above-mentioned blade automatic changer constitutes and takes in a kind of cutting tip, therefore when the kind of each machined object and processing conditions not simultaneously, all must change the cutting tip that is accommodated in the knife rest, production efficiency is low.
Summary of the invention
The present invention is in view of true and make as mentioned above, its technical problem underlying that will solve is, a kind of topping machanism that cutting tip is changed function that has is provided, even under the different situation of the kind of machined object and processing conditions, also can change the cutting tip that adapt with it corresponding to the kind and the processing conditions of machined object.
For solving above-mentioned technical problem underlying, according to the present invention, provide a kind of topping machanism, it is characterized in that having: Ka Tai keeps machined object; Cutting mechanism possesses the cutting tip of the machined object that cutting keeps by this Ka Tai and the rotary main shaft of this cutting tip has been installed; Knife rest is taken in the cutting tip that should change; And blade exchange mechanism, the cutting tip that should change that is installed in the cutting tip on this rotary main shaft and be accommodated in this knife rest is changed,
This knife rest has a plurality of blades incorporating section of the cutting tip of taking in a plurality of kinds that should change.
In this a plurality of blades incorporating section, be respectively equipped with: take in not using the blade accommodating mechanism and taking in the blade of the use accommodating mechanism of the cutting tip that once is installed on this rotary main shaft of the cutting tip that to change.
And above-mentioned knife rest possesses: have the support base station of this a plurality of blades incorporating section and will be arranged on the blade incorporating section detent mechanism that this a plurality of blades incorporating section on this support base station is positioned at the blade exchange zone selectively.
According to topping machanism of the present invention,, therefore can take in the cutting tip of a plurality of kinds in advance because knife rest possesses and takes in a plurality of blades incorporating section that should change cutting tip.Thus, under the kind and the altered situation of processing conditions of machined object, the cutting tip that is accommodated on the knife rest be need not all change at every turn, the machined object after being suitable for changing and the cutting tip of processing conditions just can be selected and change.
Description of drawings
Fig. 1 is the oblique view of the major part of the topping machanism of formation according to the present invention.
Fig. 2 is the oblique view of the cutting mechanism of topping machanism shown in Figure 1.
Fig. 3 is the A-A sectional view of Fig. 1.
Fig. 4 constitutes in the spindle assemblies of cutting mechanism of topping machanism shown in Figure 1 the exploded perspective view of the installation constitution of cutting tip.
Fig. 5 is the oblique view of major part of spindle assemblies that constitutes the cutting mechanism of topping machanism shown in Figure 1.
Fig. 6 constitutes the more oblique view of the knife rest of converting mechanism of the cutting tip be equipped on the topping machanism shown in Figure 1.
Fig. 7 constitutes the cutting tip be equipped on the topping machanism shown in Figure 1 more guide of converting mechanism and the oblique view of detent mechanism.
Fig. 8 constitutes the cutting tip be equipped on the topping machanism shown in Figure 1 more the 1st clamp nut mounting mechanism of converting mechanism and the oblique view of the 2nd clamp nut mounting mechanism and the 1st blade mounting mechanism and the 2nd blade mounting mechanism.
Fig. 9 constitutes the more sectional view of the clamp nut mounting mechanism of converting mechanism of the cutting tip be equipped on the topping machanism shown in Figure 1.
Figure 10 constitutes the more sectional view of the blade mounting mechanism of converting mechanism of the cutting tip be equipped on the topping machanism shown in Figure 1.
Figure 11 is by in the cutting tip blade exchange operation that more converting mechanism carries out that is equipped on the topping machanism shown in Figure 1, and blade grasps the key diagram of operation before using.
Figure 12 is that clamp nut unloads the key diagram of operation by in the cutting tip blade exchange operation that more converting mechanism carries out that is equipped on the topping machanism shown in Figure 1.
Figure 13 is by in the cutting tip blade exchange operation that more converting mechanism carries out that is equipped on the topping machanism shown in Figure 1, uses the back blade to unload the key diagram of operation.
Figure 14 is by in the cutting tip blade exchange operation that more converting mechanism carries out that is equipped on the topping machanism shown in Figure 1, the key diagram of cutting tip grasping mechanism counter-rotating operation.
Figure 15 is by in the cutting tip blade exchange operation that more converting mechanism carries out that is equipped on the topping machanism shown in Figure 1, the key diagram of cutting tip installation procedure before using.
Figure 16 is by in the cutting tip blade exchange operation that more converting mechanism carries out that is equipped on the topping machanism shown in Figure 1, uses the fixedly key diagram of operation of preceding cutting tip.
Figure 17 is by in the cutting tip blade exchange operation that more converting mechanism carries out that is equipped on the topping machanism shown in Figure 1, uses the back cutting tip to take in the key diagram of operation.
Symbol description
2: base station
3: Ka Tai mechanism
31a: the 1st guide rail
31b: the 2nd guide rail
32a: the 1st supports base station
32b: the 2nd supports base station
34a: the 1st Ka Tai
34b: the 2nd Ka Tai
36a: the 1st blade testing agency
36b: the 2nd blade testing agency
37a: the 1st cutting feed mechanism
37b: the 2nd cutting feed mechanism
4: door type support
5a: the 1st aligning guide
5b: the 2nd aligning guide
52: travel mechanism
53: image mechanism
6a: the 1st cutting mechanism
6b: the 2nd cutting mechanism
61: calibration moves base station
62: cutting-in moves base station
63: spindle assemblies
632: rotary main shaft
633: the blade installing component
634: hold-down nut
635: cutting tip
638: clamp nut
64: index feed mechanism
65: the cutting-in feed mechanism
7: cutting tip is converting mechanism more
71a: the 1st knife rest
71b: the 2nd knife rest
711: support base station
771a, 711b, 711c, 711d: blade incorporating section
712: rotating shaft
713: impulse motor
714: do not use the blade accommodating mechanism
715: used the blade accommodating mechanism
72: guide
722,722: pair of guide rails
73: movable substrate
75: detent mechanism
8a: the 1st clamp nut mounting mechanism
8b: the 2nd clamp nut mounting mechanism
81: the nut slew gear
82: the nut grasping mechanism
9a: the 1st cutting tip mounting mechanism
9b: the 2nd cutting tip mounting mechanism
91a: the 1st cutting tip grasping mechanism
91b: the 2nd cutting tip grasping mechanism
92: support plate
The specific embodiment
Describe the preferred implementation of the topping machanism that constitutes according to the present invention with reference to the accompanying drawings in detail.
Fig. 1 represents the oblique view of the major part of the topping machanism of formation according to the present invention.
Topping machanism shown in Figure 1 has static base station 2.This static base station 2 is provided with and keeps machined object and make it to Ka Tai mechanism 3 that the cutting direction of feed shown in the arrow X moves.
The 1st supports base station 32a and the 2nd to support to be respectively equipped with the 1st cylinder part 33a and the 2nd cylinder part 33b on the base station 32b, and the upper end of the 1st cylinder part 33a and the 2nd cylinder part 33b rotatably is provided with the 1st card platform 34a and the 2nd card platform 34b respectively.The 1st card platform 34a and the 2nd card platform 34b are made of the such suitable porous material of porous ceramic, and with figure in not the attraction mechanism of expression be connected.Therefore, the 1st card platform 34a and the 2nd card platform 34b are by being communicated to selectively on the attraction source by the attraction mechanism that does not represent among the figure, and attraction is keeping being positioned in the machined object on the mounting surface 341,341.And the 1st card platform 34a and the 2nd card platform 34b form respectively and can suitably turn round by being arranged on the impulse motor (not shown) in the 1st cylinder part 33a and the 2nd cylinder part 33b.In addition, be provided with respectively in the upper end of the 1st cylinder part 33a and the 2nd cylinder part 33b: have the hole of inserting the 1st card platform 34a and the 2nd card platform 34b and hide the above-mentioned the 1st respectively and support base station 32a and the 2nd to support the 1st coating member 35a and the 2nd coating member 35b of base station 32b.The upper surface of the 1st coating member 35a and the 2nd coating member 35b is respectively equipped with and is used to detect 1st blade testing agency 36a and the 2nd blade testing agency 36b of back with the position of the cutting tip of introduction.
Proceed explanation based on Fig. 1, the Ka Tai mechanism 3 in the illustrated embodiment also has: be used for making the 1st card platform 34a and the 2nd card platform 34b to cut feed mechanism 37b along the 1st guide rail 31a and the 2nd guide rail 31b to the 1st cutting feed mechanism 37a and the 2nd that the cutting direction of feed shown in Fig. 1 arrow X moves respectively.The 1st cutting feed mechanism 37a and the 2nd cutting feed mechanism 37b respectively by: be set in parallel in external screw rod 371 between the pair of guide rails parts 311,311 that constitute the 1st guide rail 31a and the 2nd guide rail 31b, rotatably mounted external screw rod 371 a bearing at end 372, and link with external screw rod 371 other ends and forward or reverse drives impulse motor 373 formations of this external screw rod 371.The 1st cutting feed mechanism 37a and the 2nd that constitutes like this cuts feed mechanism 37b, and external screw rod 371 separately and the above-mentioned the 1st supports base station 32a and the 2nd internal thread 322 of supporting base station 32b to go up formation to be screwed.Therefore, the 1st cutting feed mechanism 37a and the 2nd cutting feed mechanism 37b be respectively by driving pulse motor 373 and forward or reverse drives external screw rod 371, is located at the above-mentioned the 1st and supports base station 32a and the 2nd to support that the cutting direction of feed shown in the arrow X in Fig. 1 moves along the 1st guide rail 31a and the 2nd guide rail 31b respectively for the 1st card platform 34a on the base station 32b and the 2nd card platform 34b thereby can make.
Topping machanism in the illustrated embodiment has the door shape support 4 of crossing over above-mentioned the 1st guide rail 31a and the 2nd guide rail 31b setting.This shape support 4 is by the 1st post portion 41 that is arranged on the side of the 1st guide rail 31a; Be arranged on the 2nd post portion 42 of the side of the 2nd guide rail 31b; And the upper end of the 1st post portion 41 of binding and the 2nd post portion 42, and the edge constitutes with the support sector 43 that the index feed direction shown in the arrow Y that cuts the direction of feed quadrature shown in the arrow X is provided with.And the central portion of this shape support 4 is provided with the opening 44 of allowing that above-mentioned the 1st card platform 34a and the 2nd card platform 34b move.The upper end of the 1st post portion 41 and the 2nd post portion 42 width respectively forms with widening, and is provided with the opening 411 and 421 that the spindle assemblies of allowing the aftermentioned cutting mechanism moves respectively in this upper end.Index feed direction shown in the face upper edge arrow Y of above-mentioned support sector 43 is provided with pair of guide rails 431,431, as shown in Figure 3, be provided with pair of guide rails 432,432 on another face along the direction (the index feed direction among Fig. 1 shown in the arrow Y) vertical with paper.
Topping machanism in the illustrated embodiment has, the 1st aligning guide 5a and the 2nd aligning guide 5b that the pair of guide rails 431,431 in the support sector 43 that is located at above-mentioned door shape support 4 is provided with movably.The 1st aligning guide 5a and the 2nd aligning guide 5b respectively by: movable block 51, be used to make this movable block 51 to constitute along travel mechanism 52,52 that pair of guide rails 431,431 moves and the image mechanism 53,53 that is installed on the movable block 51.Be respectively equipped with on the movable block 51,51 with above-mentioned pair of guide rails 431,431 tablings be directed groove 511,511, be directed groove 511,511 and pair of guide rails 431,431 tablings by this, movable block 51,51 constitutes and can move along pair of guide rails 431,431.
Be installed in the image mechanism 53,53 on the above-mentioned movable block 51,51 respectively, have imaging apparatus (CCD) respectively, and shot image signals is sent to controlling organization not shown in the figures.
On the another side (with the opposite face of face that is provided with above-mentioned the 1st aligning guide 5a and the 2nd aligning guide 5b) of the support sector 43 that constitutes above-mentioned door shape support 4, be provided with the 1st cutting mechanism 6a and the 2nd cutting mechanism 6b.With reference to Fig. 2 and Fig. 3 the 1st cutting mechanism 6a and the 2nd cutting mechanism 6b are described.The 1st cutting mechanism 6a and the 2nd cutting mechanism 6b have respectively that calibration moves base station 61 and cutting-in moves base station 62 and spindle assemblies 63.What the face that calibration moves base station 61 was provided with pair of guide rails 432,432 tablings that are provided with on the another side with above-mentioned support sector 43 is directed groove 611,611, to being directed groove 611,611 and pair of guide rails 432,432 tablings, calibration moves base station 61 and constitutes and can move along pair of guide rails 432,432 by this.And, move at calibration on another face of base station 61, as shown in Figure 3, be provided with pair of guide rails 612,612 (Fig. 3 has only represented a guide rail) along the cutting-in direction of feed shown in the arrow Z (direction vertical) with the mounting surface 341 of the 1st card platform 34a and the 2nd card platform 34b.In addition, the face that calibration moves base station 61,61 is provided with the escape 613,613 that the external screw rod of allowing index feed described later mechanism feeds, and the above-below direction of escape 613,613 is provided with step.
Above-mentioned cutting-in moves base station 62 and is made of the portion that is supported 621 of direction extension up and down and the installation portion 622 that extends from this lower end edge right angle horizontal direction that is supported portion 621.As shown in Figure 2, on the face of installation portion 622 1 sides that are supported portion 621, what be provided with and be located at pair of guide rails 612,612 tablings on another face that above-mentioned calibration moves base station 61 is directed a groove 623,623 (Fig. 3 has only represented that is directed a groove), to being directed groove 623,623 and pair of guide rails 612,612 is chimeric, cutting-in moves base station 62 and constitutes and can move along the cutting-in direction of feed of pair of guide rails 612,612 to arrow Z indication by this.Be installed in the cutting-in that calibration moves base station 61 like this and move base station 62, as shown in Figure 1, its installation portion 622 passes opening 44 from another face side that above-mentioned calibration moves base station 61 that is equipped with of the support 4 of door shape, and is side-prominent to the face that above-mentioned the 1st aligning guide 5a and the 2nd aligning guide 5b are installed.
Above-mentioned spindle assemblies 63 is installed in the lower surface of installation portion 622 respectively, and the cutting-in that installation portion 622 forms the 1st cutting mechanism 6a and the 2nd cutting mechanism 6b moves base station 62.This spindle assemblies 63, as shown in Figure 4, have respectively: main shaft housing 631, rotatably support and make the rotary main shaft 632 of its rotation by the servo motor of not representing among the figure by this main shaft housing 631, be installed in the blade installing component 633 of the leading section of this rotary main shaft 632, with among the figure of the leading section that is arranged on rotary main shaft 632 not the external screw thread of expression be screwed and the hold-down nut 634 of fixed blade installing component 633, be installed in the cutting tip 635 on the blade installing component 633, and be used for and blade installing component 633 between grip the clamp nut 638 of this cutting tip 635.
The flange part 633b that blade installing component 633 has installation portion 633a cylindraceous and is arranged on the end of this installation portion 633a is formed with external screw thread 633c in the other end of installation portion 633a (leading section).In addition, on the front end face of rotary main shaft 632, be formed with engaging recessed part 632a in the axle center.
Cutting tip 635 has the ring-type lining 636 of embedded hole 636a by: the central portion that metal materials such as aluminium form and by nickel plating abrasive material is fixed on the side of this ring-type lining 636 and by the peripheral part that ring-type lining 636 is removed in etching the emery wheel 637 outstanding electroforming emery wheel blades that become cutting edge is constituted.In addition, the side of the lining 636 of ring-type be formed with outstanding ring-type by grasping part 636b.This by the outer peripheral face of grasping part 636b on, be formed with constitute the aftermentioned cutting tip more converting mechanism the blade grasping mechanism grasp the endless groove 636c that pawl fastens, the cutting tip 635 of Gou Chenging makes the embedded hole 636a of ring-type lining 636 and the installation portion 633a tabling cylindraceous of blade installing component 633 like this.And, by being gone up the external screw thread 633c that forms with installation portion 633a cylindraceous, clamp nut 638 is screwed, and cutting tip 635 is gripped by the flange part 633b and the clamp nut 638 of blade installing component 633.In addition, in the side of clamp nut 638, be provided with 4 pin embedded hole 638a that keep 90 degree phase places respectively, pin embedded hole 638a and formation aftermentioned cutting tip be the fulcrum post tabling of the clamp nut mounting mechanism of converting mechanism more.And on the outer peripheral face of clamp nut 638, the nut that is formed with the clamp nut mounting mechanism that constitutes aftermentioned blade exchange mechanism grasps the endless groove 638b that pawl fastens.
In addition, the rotary main shaft 632 of the 1st cutting mechanism 6a and the rotary main shaft 632 of the 2nd cutting mechanism 6b as shown in Figure 2, are configured to axis direction along the index feed direction shown in the arrow Y.And, be installed in the cutting tip 633 on cutting tip 633 and the rotary main shaft 632 that is installed in the 2nd cutting mechanism 6b on the rotary main shaft 632 of the 1st cutting mechanism 6a, be provided with opposed to each other.
And the spindle assemblies 63 in the illustrated embodiment has: the main shaft cover 64 of the above-mentioned main shaft housing 631 of covering as shown in Figure 5 and covering are installed in the blade cover 65 of the above-mentioned cutting tip 635 of these main shaft cover 64 front ends.Blade cover 65 is by the 1st cap assembly 651 that is installed in main shaft cover 64 front ends, with be installed in the 1st cap assembly 651 front surfaces and be configured to the 2nd cap assembly 652 that shell moves to the side and constitute, the 2nd cap assembly 652 can by among the figure not the air rammer mechanism of expression be positioned among Fig. 5 on the closed position shown in the double dot dash line in the release position shown in the solid line and Fig. 5.The 2nd cap assembly 652 is positioned in the closed position shown in the double dot dash line among Fig. 5 when cutting, be positioned in the release position shown in the solid line among Fig. 5 when changing cutting tip.In addition, be respectively equipped with cutting fluid supply nozzle 66 (only expressing the cutting fluid supply nozzle 66 that is located on the 2nd cap assembly 652 among Fig. 5) in the 1st cap assembly 651 and the 2nd cap assembly 652.Be arranged on the cutting fluid supply nozzle 66 on the 1st cap assembly 651 and the 2nd cap assembly 652, be connected with the cutting fluid feed mechanism of not representing among the figure.
The 1st cutting mechanism 6a in the illustrated embodiment and the 2nd cutting mechanism 6b have be used for making above-mentioned calibration move base station 61,61 along pair of guide rails 432,432 to index feed mechanism 64,64 that the index feed direction shown in Fig. 2 arrow Y moves.Index feed mechanism 64,64 respectively by: be set in parallel in external screw rod 641 between the pair of guide rails 432,432, rotatably mounted external screw rod 641 a bearing at end 642, and link with the other end of external screw rod 641 and forward or reverse drives impulse motor 643 formations of this external screw rod 641.In addition, external screw rod 641,641 is arranged on respectively and is located at above-mentioned calibration and moves on the position of escape 613, the 613 corresponding height on the base station 61,61.Like this index feed mechanism 64,64 of Gou Chenging separately external screw rod 641,641 and move on the base station 61,61 internal thread 614,614 that forms at above-mentioned calibration and be screwed.Thus, index feed mechanism 64,64, forward or reverse drives external screw rod 641,641 by driving impulse motor 643,643 separately, moves along pair of guide rails 432,432 index feed direction shown in the arrow Y in Fig. 1 thereby can make calibration move base station 61,61.When this calibration moves base station 61,61 and moves, insert calibration by external screw rod 641,641 and move the escape 613,613 that is provided with on the base station 61,61, calibration moves mobile being allowed to of base station 61,61.
And, the 1st cutting mechanism 6a in the illustrated embodiment and the 2nd cutting mechanism 6b, as shown in Figures 2 and 3, have and be used to make above-mentioned cutting-in to move the cutting-in feed mechanism 65,65 that base station 62,62 moves to the cutting-in direction of feed shown in the arrow Z along pair of guide rails 612,612.Cutting-in feed mechanism 65,65 respectively by: the external screw rod 651 that be arranged in parallel with pair of guide rails 612,612, rotatably support external screw rod 651 a bearing at end 652, and link with the other end of external screw rod 651 and forward or reverse drives impulse motor 653 formations of this external screw rod 651.The cutting-in feed mechanism 65,65 of Gou Chenging like this, its external screw rod 651 separately moves the internal thread 622a that forms in the portion that is supported 621 of base station 62 with above-mentioned cutting-in and is screwed.Thus, cutting-in feed mechanism 65,65 comes forward or reverse to drive external screw rod 651 by driving pulse motor 653 respectively, moves along pair of guide rails 622,622 cutting-in direction of feed shown in the arrow Z in Fig. 1 and Fig. 3 thereby can make cutting-in move base station 62.
Refer again to Fig. 1 and go on to say, the topping machanism in the illustrated embodiment has and is used to change the cutting tip converting mechanism 7 more that is installed in the cutting tip 635 on the above-mentioned rotary main shaft 632.Cutting tip more converting mechanism 7 is arranged on the rear (being provided with the side of the 1st cutting mechanism 6a and the 2nd cutting mechanism 6b) of above-mentioned door shape support 4.This cutting tip more converting mechanism 7 has: the 1st knife rest 71a and the 2nd knife rest 71b, the movable substrate 73 (with reference to Fig. 7) that is arranged on the guide 72 between the 1st knife rest 71a and the 2nd knife rest 72b and can moves along this guide 72 of both sides, rear that is arranged on the support 4 of above-mentioned door shape.
The 1st knife rest 71a and the 2nd knife rest 71b are separately positioned on the position away from above-mentioned rotary main shaft 632, and are provided with opposed to each other mutually across above-mentioned guide 72.The 1st knife rest 71a and the 2nd knife rest 71b, as shown in Figure 6, have foursquare support base station 711, be installed in these support base station 711 lower surfaces rotating shaft 712, and rotation drive the impulse motor 713 of this rotating shaft 712.Support 4 sides of base station 711 to be respectively equipped with blade incorporating section 711a, 711b, 711c, 711d.Support to be respectively equipped with among the blade incorporating section 711a, 711b, 711c, 711d of base station 711: take in and to change not using blade accommodating mechanism 714 and taking in the blade of the use accommodating mechanism 715 of the cutting tip that has used of cutting tip.
Do not use blade accommodating mechanism 714 respectively by a: end be installed in the side of supporting base station 711 supporting axis 714a, intercalation is at the ring-type push part 714b on this supporting axis 714a and be arranged on this push part 714b and support the very weak coil compression springs 714c of elastic force between the base station 711 to constitute.In addition, another end face at supporting axis 714a is formed with engaging recessed part 714d.And supporting axis 714a is provided with, and is inserted into the limiting mechanism 714e of the state low limit stop on its another end outer peripheral face at cutting tip 635.This limiting mechanism 714e constitutes by ball and with the spring of this ball to radial outside pushing, and reach the value of regulation in the power that acts on ball before limitation function is worked always.Thus, limit above-mentioned push part 714b another distolateral moving by limiting mechanism 714e to supporting axis 714a.Like this on the not use blade accommodating mechanism 714 of Gou Chenging, be arranged on embedded hole 636a intercalation on the lining 636 of untapped cutting tip 635 to supporting axis 714a, thereby take in a plurality of blades.Make above-mentioned push part 714b overcome the elastic force of coil compression springs 714c and retreat this moment.And, the ball of above-mentioned limiting mechanism 714e is retreated, by limiting mechanism 714e cutting tip 635 is navigated to the distolateral of supporting axis 714a.Like this, be pressed towards limiting part 714e by means of the elastic force of coil compression springs 714c by push part 714b by the cutting tip 635 of intercalation to the supporting axis 714a.Therefore, coil compression springs 714c and push part 714b play the effect of cutting tip 635 to limiting mechanism 714e pushing as dipper crowding gear.In the illustrated embodiment, be arranged on not using on the 711a of blade incorporating section and take in the cutting tip 635 that constitutes by above-mentioned electroforming emery wheel blade in the blade accommodating mechanism 714, be arranged on and take in the cutting tip that for example constitutes in the not use blade accommodating mechanism 714 on the 711b of blade incorporating section by resinoid bond (レ ジ Application ボ Application De) emery wheel blade, be arranged on and take in the cutting tip that for example constitutes in the not use blade accommodating mechanism 714 on the 711c of blade incorporating section, be arranged on not using on the 711d of blade incorporating section and take in for example cutting tip of V groove shaping usefulness in the blade accommodating mechanism 714 by metallic bond (メ Le ボ Application De) emery wheel blade.
And, used blade incorporating section 715 also the same with the above-mentioned blade incorporating section 714 of not using, respectively by a: end be installed in the supporting axis 715a that supports on the base station 711, intercalation is at the ring-type push part 715b on this supporting axis 715 and be arranged on this push part 715 and support the very weak coil compression springs 715c of elastic force between the base station 711 to constitute.On the other end of supporting axis 715a, form engaging recessed part 715d.In addition, supporting axis 715a is provided with, and is inserted into the limiting mechanism 715e of the state low limit stop on the other end outer peripheral face at cutting tip 635.This limiting mechanism 715e constitutes by ball and with the spring that this ball is pressed to radial outside, and reach the value of regulation in the power that acts on ball before limitation function is worked always.Thus, limit above-mentioned push part 715b another distolateral moving by limiting mechanism 715e to supporting axis 715a.Like this on the blade of the use accommodating mechanism 715 of Gou Chenging, be arranged on embedded hole 636a intercalation on the lining 636 of the cutting tip 635 that has used to supporting axis 715a, thereby take in a plurality of blades.At this moment, make above-mentioned push part 715b overcome the elastic force of coil compression springs 715c and retreat.And, the ball of above-mentioned limiting mechanism 715e is retreated, by limiting mechanism 715e cutting tip 635 is positioned at the distolateral of supporting axis 715a.Like this, pushed to limiting part 715e by push part 715b by the elastic force of the cutting tip 635 of intercalation on supporting axis 715a by means of coil compression springs 715c.Therefore, coil compression springs 715c and push part 715b play the effect of cutting tip 635 to limiting mechanism 715e pushing as dipper crowding gear.
Above-mentioned rotating shaft 712 supports that by being installed in the Bearning mechanism of expression is not rotatably mounted among base station 711 lower surfaces, the figure.Above-mentioned impulse motor 713, its driving shaft 713a is attached on the rotating shaft 712 by the connect mechanism transmission of not representing among the figure, make and support base station 711 revolutions, blade incorporating section 711a, 711b, 711c, 711d are positioned in the blade exchange described later zone selectively.Therefore, impulse motor 713 plays as blade incorporating section detent mechanism and makes blade incorporating section 711a, 711b, 711c, 711d be positioned at effect in the blade exchange described later zone selectively.
Above-mentioned guide 72 as shown in Figure 7, has rectangle guided plate 721 and the pair of guide rails 722,722 to the extension of the cutting direction of feed shown in the arrow X that is arranged on these guided plate 721 both sides.The guide 72 of Gou Chenging is mounted on the fixed part of not representing in the drawings like this.
One end of above-mentioned movable substrate 73 as shown in Figure 8, is equipped with the guided member 74 of L font, and the both sides of this guided member 74 are provided with a pair of rail 741,741 that is directed that fastens with above-mentioned pair of guide rails 722,722.A pair ofly be directed rail 741,741 and above-mentioned pair of guide rails 722,722 fastens by this, movable substrate 73 is supported along pair of guide rails 722,722 movably by means of guided member 74.In addition, the upper surface at guided member 74 is installed with the movable block 742 with internal thread 742a.
Lower surface at the guided plate 721 that constitutes above-mentioned guide 72 shown in the part broken away view of Fig. 7, is provided with the detent mechanism 75 that above-mentioned movable substrate 73 is moved along pair of guide rails 722,722.This detent mechanism 75 is made of the impulse motor 752 that links with the above-mentioned a pair of external screw rod 751 that is directed that rail 741,741 is provided with abreast and is screwed with the internal thread 742a of above-mentioned movable block 742 and with an end of this external screw rod 751 and be installed in the lower surface of guided plate 721.And the other end of external screw rod 751 is rotatably mounted by the bearing 753 that is installed in guided plate 721 lower surfaces.The detent mechanism 75 of Gou Chenging like this by making impulse motor 752 forward or reverse, thereby makes movable substrate 73 move along pair of guide rails 722,722 direction shown in the arrow X in Fig. 7.In addition, detent mechanism 75 plays clamp nut mounting mechanism detent mechanism, effect with cutting tip mounting mechanism detent mechanism, wherein, clamp nut mounting mechanism detent mechanism with the 1st clamp nut mounting mechanism described later and the 2nd clamp nut mounting mechanism be positioned at the opposed blade mounting or dismounting of the front end face of above-mentioned rotary main shaft 632 position on, and cutting tip mounting mechanism detent mechanism is positioned at cutting tip mounting mechanism described later and the opposed blade mounting or dismounting of the front end face of rotary main shaft 632 position, in the blade exchange zone of the 1st knife rest 71a and the 2nd knife rest 71b with do not use the blade accommodating mechanism 714 opposed blade receiving positions that do not use, and with use blade accommodating mechanism 715 opposed uses on the blade reception position.
Go on to say based on Fig. 8, be provided with at the upper surface of above-mentioned movable substrate 73: be used to install and remove above-mentioned spindle assemblies 63 clamp nut 638 the 1st clamp nut mounting mechanism 8a and the 2nd clamp nut mounting mechanism 8b and be used for 1st blade mounting mechanism 9a and the 2nd blade mounting mechanism 9b of cutting tip 635 in the front end mounting or dismounting of rotary main shaft 632.And, the 1st clamp nut mounting mechanism 8a and the 1st blade mounting mechanism 9a, be provided with symmetrically at the upper surface line of movable substrate 73 with the 2nd clamp nut mounting mechanism 8b and the 2nd blade mounting mechanism 9b.The 1st clamp nut mounting mechanism 8a and the 2nd clamp nut mounting mechanism 8b are set on the guide rail 731 that movable substrate 73 upper surfaces are provided with, and are being supported movably along guide rail 731.The 1st clamp nut mounting mechanism 8a and the 2nd clamp nut mounting mechanism 8b have nut slew gear 81, nut grasping mechanism 82 and travel mechanism 83 respectively.
With reference to Fig. 8 and Fig. 9 above-mentioned nut slew gear 81 is described.
Right part among Fig. 9 of above-mentioned pivoting part 813 is provided with 4 fulcrum posts 814 of respectively keeping 90 degree phase places outstanding from the right side.The cardinal extremity of this fulcrum post 814 (left end among Fig. 9) has circular holding section 814a, and this holding section 814a is slidably disposed among the cylinder-bore 813a that the right part among Fig. 9 of pivoting part 813 is provided with.In cylinder-bore 813a, be provided with compression spring 815, make its right-hand moving in Fig. 9 by 815 pairs of fulcrum post 814 application of forces of this compression spring.In addition, the right-hand member in Fig. 9 of cylinder-bore 813a is provided with holding section 814a with fulcrum post 814 and fastens and limit right-hand mobile retainer 813b to fulcrum post 814.Above-mentioned 4 fulcrum posts 814 are set on the position of 4 pin embedded hole 638a tablings that are provided with above-mentioned clamp nut 638.
Above-mentioned nut grasping mechanism 82 by: be arranged on 4 holding parts 821 that keep 90 degree phase places respectively on the periphery of above-mentioned pivoting part 813, make release position that these 4 holding parts 821 are represented by solid line in Fig. 9 and by double dot dash line represent grasp the building ring 822 of working on the position and make going-back position that this building ring 822 represented by solid line in Fig. 9 and the active position represented by double dot dash line on the cylinder 823 of working constitute.Holding part 821, its front end (right-hand member among Fig. 9) respectively grasps pawl 821a, and its base end part (left part among Fig. 9) can joltily be supported on the above-mentioned pivoting part 813 by fulcrum 824.Being provided with compression spring 825 between holding part of being supported like this 821 and pivoting part 813, by this compression spring 825, is that the center is the release position application of force to radial outside always to pawl 821a one side that grasps of holding part 821 with fulcrum 824.
The nut grasping mechanism 82 of Gou Chenging like this, when the going-back position of being represented by solid line from Fig. 9 begins to make cylinder 823 work, thereby when moving to building ring 822 on the active position of being represented by double dot dash line, then holding part 821 just begins to move grasping on the position that double dot dash line represents from the release position of being represented by solid line.Like this, move to when grasping the position, just can make to grasp pawl 821a and fasten with the endless groove 638b that on the outer peripheral face of above-mentioned clamp nut 638, forms at holding part 821.
Above-mentioned travel mechanism 83 as shown in Figure 8, constitutes by the cylinder 831 that be arranged in parallel with guide rail 731 with the binding parts 832 that the piston rod 831a and the said motor case 811 of this cylinder 831 is connected.By making cylinder 831 work, motor box 811 is moved along guide rail 731 by means of linking parts 832.
Next, with reference to Fig. 8 and Figure 10 above-mentioned the 1st blade mounting mechanism 9a and the 2nd blade mounting mechanism 9b are described.
The 1st blade mounting mechanism 9a in the illustrated embodiment and the 2nd blade mounting mechanism 9b are arranged on the guide rail 732 of movable substrate 73 upper surfaces setting, and are being supported movably along this guide rail 732.The 1st blade mounting mechanism 9a and the 2nd blade mounting mechanism 9b have respectively: the 1st blade grasping mechanism 91a and the 2nd blade grasping mechanism 91b, the support plate 92 of the 1st blade grasping mechanism 91a and the 2nd blade grasping mechanism 91b is installed and makes this support plate 92 rotating impulse motors 93 (with reference to Figure 10).
Because the 1st blade grasping mechanism 91a and the 2nd blade grasping mechanism 91b come down to same structure, therefore give prosign and describe same parts.
The 1st blade grasping mechanism 91a and the 2nd blade grasping mechanism 91b have: be used for grasping above-mentioned cutting tip 635 lining 636 periphery a plurality of (illustrated embodiment is 4) holding part 911, make these 4 holding parts, 911 actions holding part actuating mechanism 912, and and be arranged on 4 holding parts 911 the center and with the front end face of above-mentioned rotary main shaft 632 on the detent mechanism 913 that fastens of the engaging recessed part 632a that forms.
4 holding parts 911 keep the phase places of 90 degree to be set at week upwards along the periphery of holding part actuating mechanism 912, and its front end has the pawl of grasping 911a.Holding part actuating mechanism 912 constitutes and makes 4 holding parts 911 respectively to radially action, and is installed on the support plate 92.Detent mechanism 913 by: be installed in the bar 913a at the end face center of holding part actuating mechanism 912, the leading section that is slidably mounted within this bar 913a and its front end form conical positioning element 913b and be arranged on this positioning element 913b and the end face of holding part actuating mechanism 912 between compression spring 913c constitute.In addition, between positioning element 913b and bar 913a, be provided with in order to prevent that from illustrated state positioning element 913b breaks away from and the stop mechanism of setting from bar 913a.
Center at the support plate 92 of above-mentioned the 1st blade grasping mechanism 91a and the 2nd blade grasping mechanism 91b is equipped with gyroaxis 921 as shown in figure 10.The bolt that forms on the end face with gyroaxis 921 (ね じ) 921a of portion is inserted in the hole that is located at support plate 92 centers, and by screwing togather of this bolt part 921a and nut 922, gyroaxis 921 is installed on the support plate 92.In addition, between gyroaxis 921 and support plate 92, be provided with the counterrotating rotation limiting mechanism of not representing among the figure of restriction.This gyroaxis 921 links with the driving shaft 93a of impulse motor 93.Impulse motor 93 is set in the motor box 94 that is provided with on the guide rail 732.Be provided with on the diapire 94a of motor box 94 with above-mentioned guide rail 732 fastens and be directed groove 94b, by this being directed groove 94b and guide rail 732 fastens, motor box 94 is supported movably along guide rail 732.
The 1st blade mounting mechanism 9a in the illustrated embodiment and the 2nd blade mounting mechanism 9b have and make said motor case 94 along travel mechanism 95 that guide rail 732 moves as shown in Figure 8.This travel mechanism 95 constitutes by the cylinder 951 that be arranged in parallel with guide rail 732 with the binding parts 952 that the piston rod 951a and the said motor case 94 of this cylinder 951 is connected.By making cylinder 951 work, motor box 94 is moved along guide rail 732 by means of linking parts 952.
As above the 1st clamp nut mounting mechanism 8a of Gou Chenging and the 2nd clamp nut mounting mechanism 8b and the 1st blade mounting mechanism 9a and the 2nd blade mounting mechanism 9b play as blade exchange mechanism and to use cutting tip and the effect of not using cutting tip to change that is incorporated on above-mentioned the 1st knife rest 71a and the 1st knife rest 71b with being installed on the above-mentioned rotary main shaft 632.
Topping machanism in the illustrated embodiment constitutes as mentioned above, mainly with reference to Fig. 1 and Fig. 2 its action is described below.
At first, the machining to machined object describes.
By the machined object carrying mechanism of not representing among the figure machined objects such as semiconductor wafer are transported on the 1st card platform 34a.At this moment the 1st card platform 34a is positioned on the machined object loading position shown in Figure 1.Mounting is passed through the not action of the attraction mechanism of expression among the figure in the 1st machined object that blocks on the platform 34a, is attracted to remain on the 1st card platform 34a upward (the 1st machined object maintenance operation).
Aforesaid attraction has kept the 1st card platform 34a of machined object, by the action of the 1st cutting feed mechanism 37a, be positioned in the 1st aligning guide 5a image mechanism 53 under.The 1st card platform 34a be positioned in image mechanism 53 under after, making a video recording in the surface that is remained on the machined object on the 1st card platform 34a by 53 pairs of image mechanisms, and detects the cutting zone that forms on the surface of machined object.Then, make the index feed mechanism 64 of the 1st cutting mechanism 6a and index feed mechanism 64 work of the 2nd cutting mechanism 6b, implement their cutting tips 635 separately and aim at (the 1st alignment process) of carrying out contraposition by above-mentioned image mechanism 53 detected cutting zones.
To be maintained at machined object on the 1st card platform 34a implement the 1st alignment process during, by among the figure not the machined object carrying mechanism of expression machined object is transported on the 2nd card platform 34b that is positioned at machined object loading position shown in Figure 1.The machined object of mounting on the 2nd card platform 34b by the not action of the attraction mechanism of expression among the figure, is attracted and remains on the 2nd card platform 34b upward (the 2nd machined object maintenance operation).
Machined object be attracted remain on the 2nd card platform 34b after, the action of the 2nd card platform 34b by the 2nd cutting feed mechanism 37b be positioned in the 2nd aligning guide 5b image mechanism 53 under.Then, implement to detect the 2nd alignment process that the 2nd card platform 34b is attracted the zone to be cut of the machined object that keeps by the 2nd aligning guide 5b.In addition, the 2nd alignment process and above-mentioned the 1st alignment process are similarly implemented.
On the other hand, after above-mentioned the 1st alignment process finishes, the 1st card platform 34a is moved to cutting zone.And, the cutting tip 635 of the cutting tip 635 of the 1st cutting mechanism 6a and the 2nd cutting mechanism 6b is positioned at the cutting zone of the machined object that is keeping by the 1st card platform 34a.Then, by in cutting tip 635 rotations of the cutting tip 635 of the 1st cutting mechanism 6a and the 2nd cutting mechanism 6b, the 1st card platform 34a cutting being sent to, thereby the machined object that is kept by the 1st card platform 34a is implemented the machining (the 1st cutting process) of regulation.
After above-mentioned the 1st cutting process finishes, the 2nd card platform 34b that maintains the machined object of having implemented above-mentioned the 2nd alignment process is moved to cutting zone.Then, after having implemented above-mentioned the 1st cutting process, by the 1st cutting mechanism 6a and the 2nd cutting mechanism 6b, with above-mentioned the 1st cutting process similarly, the machined object that is kept by the 2nd card platform 34b is implemented the 2nd cutting process.
Maintain the 1st card platform 34a of the machined object that machines of above-mentioned the 1st cutting process that is through with, move to the machined object loading position from cutting zone.Remove the attraction maintenance that the 1st card platform 34a is gone up the machined object that machines that keeps here.Then, the machined object that machines is transported to subsequent processing by the machined object carrying mechanism of not representing among the figure.
As above, after machined object had been transported to subsequent processing, above-mentioned the 1st machined object that enforcement will descend semiconductor wafer 10 to remain on the 1st card platform 34a kept operation.Then, implement above-mentioned the 1st alignment process, the 1st cutting process successively.
On the other hand, maintain the 2nd card platform 34b of the machined object that machines of having implemented above-mentioned the 2nd cutting process, move to the machined object loading position from cutting zone.Remove the attraction maintenance that blocks the machined object that machines that is keeping on the platform 34b to the 2nd here.Then, the machined object that machines is transported to subsequent processing by the machined object carrying mechanism of not representing among the figure.Like this, after the machined object that will machine has been transported to subsequent processing, implement above-mentioned the 2nd machined object that next machined object remains on the 2nd card platform 34b is kept operation.Then, implement above-mentioned the 2nd alignment process, the 2nd cutting process successively.
Machined object to predetermined piece number is implemented above-mentioned machining, and after the kind of machined object and processing conditions had changed, then cutting tip also needed to be replaced by the machined object after being suitable for changing and the cutting tip of processing conditions.Below with reference to Figure 11 to Figure 17 the replacing operation of cutting tip 635 is described.
For example, taking in the cutting tip 635 that constitutes by electroforming emery wheel blade among the blade incorporating section 711a of the 1st knife rest 71a and the 2nd knife rest 71b, taking in the cutting tip 635 that constitutes by the resin bond wheel blade among the 711b of blade incorporating section, be replaced by under the situation of the cutting tip that constitutes by the resin bond wheel blade at the cutting tip 635 that the electroforming emery wheel blade that will be installed on the above-mentioned rotating shaft constitutes, make impulse motor 713 work of the 1st knife rest 71a and the 2nd knife rest 71b, will support that the blade incorporating section 711b of base station 711 is positioned at: shown in Figure 11 and guide that be provided with above-mentioned the 1st clamp nut mounting mechanism 8a and the 2nd clamp nut mounting mechanism 8b and the 1st blade mounting mechanism 9a and the 2nd blade mounting mechanism 9b 72 opposed blade exchange zones.Then, make detent mechanism 75 (with reference to Fig. 7) work, movable substrate 73 is moved along pair of guide rails 722,722, the 1st blade grasping mechanism 91a of the 1st blade mounting mechanism 9a and the 2nd blade mounting mechanism 9b is positioned at: with not use blade accommodating mechanism 714 opposed the uses on the blade receiving position of taking in untapped cutting tip 635 on the 1st knife rest 71a and the 2nd knife rest 71b.Next, make travel mechanism's 95 work, make the 1st blade grasping mechanism 91a to not using blade accommodating mechanism 714 to advance, and make positioning element 913b and be arranged on engaging recessed part 714d set on the other end of the supporting axis 714a that does not use blade accommodating mechanism 714 and fasten.Then, holding part actuating mechanism 912 work of the 1st blade grasping mechanism 91a, make 4 holding parts 911 to radially inner side action, the pawl 911a that grasps that is located at 4 holding part 911 front ends is fastened with endless groove 636c on the ring-type lining 636 that is formed on cutting tip 635.Its result, the not use cutting tip 635 that is made of the resin bond wheel blade that is accommodated among the 711b of blade incorporating section is grasped (not using cutting tip to grasp operation) by 4 holding parts 911.
Implementing above-mentioned the use after cutting tip grasps operation, make travel mechanism's 95 work, the 1st blade grasping mechanism 91a is retreated, and, make above-mentioned detent mechanism 75 work, as shown in Figure 2, the nut slew gear 81 of the 1st clamp nut mounting mechanism 8a and the 2nd clamp nut mounting mechanism 8b and nut grasping mechanism 82 are positioned at rotary main shaft 632 opposed blades mounting or dismounting positions on.Then, make travel mechanism's 83 work, nut slew gear 81 and nut grasping mechanism 82 are advanced to rotary main shaft 632.Its result is arranged on the end face butt of 4 fulcrum posts 814 and clamp nut 638 on the pivoting part 813, and overcomes the elastic force of compression spring 815 and retreat.And, make cylinder 823 work of nut grasping mechanism 82, building ring 822 is moved to the active position of representing by double dot dash line among Fig. 9, by making holding part 821 effects, the endless groove 638b that grasps pawl 821a and form on the outer peripheral face of clamp nut 638 is fastened to the position of representing by double dot dash line that grasps.Next, drive electro-motor 812, then after 4 fulcrum posts 814 coincide with 4 pin embedded hole 638a that form on clamp nut 638, be fitted among 4 pin embedded hole 638a if just changeing.Its result, the just commentaries on classics driving force of electro-motor 812 is passed to clamp nut 638 by means of 4 fulcrum posts 814, clamp nut 638 is unscrewed and is unloaded from blade installing component 633.The clamp nut 638 that unloads from installing component 633 is grasping (clamp nut unloads operation) by the holding part 821 of nut grasping mechanism 82 like this.In addition, when the enforcement clamp nut unloads operation, illustrate although omit among Figure 12, the 2nd cap assembly 652 of spindle assemblies 63 is positioned on the release position of being represented by solid line among Fig. 5.
Implementing after above-mentioned clamp nut unloads operation, make travel mechanism's 83 work, nut slew gear 81 and nut grasping mechanism 82 are retreated, and, make above-mentioned detent mechanism 75 work, as shown in figure 13, the 2nd blade grasping mechanism 91b with the 1st blade mounting mechanism 9a and the 2nd blade mounting mechanism 9b is positioned at and rotary main shaft 632 opposed blade mounting or dismounting positions.Next, make travel mechanism's 95 work, the 2nd blade grasping mechanism 91b is advanced to rotary main shaft 632, positioning element 913b and the engaging recessed part 632a that forms on the front end face of rotary main shaft 632 are fastened.Then, make holding part actuating mechanism 912 work of the 2nd blade grasping mechanism 91b, make 4 holding parts 911 to the radially inner side action, and the pawl 911a that grasps of the front end that is arranged on 4 holding parts 911 is fastened with the endless groove 636c that forms on the ring-type lining 636 of cutting tip 635.Its result, the cutting tip 635 that is made of electroforming emery wheel blade after the use is grasped (having used cutting tip to unload operation) by 4 holding parts 911.
Having implemented the above-mentioned cutting tip that used unloads after the operation, as shown in figure 14, make travel mechanism that 95 work retreat the 2nd blade grasping mechanism 91b, and, make impulse motor 93 (with reference to Figure 10) work make 92 times turnbacks of support plate, make the 1st blade grasping mechanism 91a and the 2nd blade grasping mechanism 91b counter-rotating.Its result, above-mentioned the 1st blade grasping mechanism 91a that does not use cutting tip to grasp to have grasped in the operation untapped cutting tip 635, be positioned in rotary main shaft 632 opposed blades mounting or dismounting positions on (cutting tip grasping mechanism counter-rotating operation).
Next, as shown in figure 15, make travel mechanism's 95 work, the 1st blade grasping mechanism 91a is advanced to rotary main shaft 632, positioning element 913b and the engaging recessed part 632a that forms on the front end face of rotary main shaft 632 are fastened.At this moment, by the untapped cutting tip 635 that 4 holding parts 911 of the 1st blade grasping mechanism 91a are grasping, the embedded hole 636 of its ring-type lining 636 and the installation portion 633a tabling cylindraceous of blade installing component 633.Then, make holding part actuating mechanism 912 work of the 1st blade grasping mechanism 91a, make 4 holding parts 911 to the radial outside action, grasping of 911 pairs of cutting tips 635 of 4 holding parts is disengaged.Its result, the installation portion 633a cylindraceous that untapped cutting tip 635 is installed in blade installing component 633 goes up (not using the cutting tip installation procedure).
Implemented above-mentioned the use after the cutting tip installation procedure, make travel mechanism's 95 work, the 1st blade grasping mechanism 91a is retreated, and, make detent mechanism 75 work, as shown in figure 16, unload the nut grasping mechanism 82 that has grasped clamp nut 638 in the operation, be positioned at and rotary main shaft 632 opposed blade mounting or dismounting positions with the nut slew gear 81b of the 1st clamp nut mounting mechanism 8a and the 2nd clamp nut mounting mechanism 8b and at above-mentioned clamp nut.Next, make travel mechanism's 83 work, nut slew gear 81 and nut grasping mechanism 82 are advanced to rotary main shaft 632.Its result, the clamp nut 638 that grasps by nut grasping mechanism 82 and the installation portion 633a butt cylindraceous of blade installing component 633.Then, if counter-rotating drives electro-motor 812, then by means of 4 fulcrum posts 814 of nut slew gear 81, revolving force is passed on the clamp nut 638, and clamp nut 638 is screwed togather to be fastened on installation portion 633a and to go up on the external screw thread 633c that forms.Next, make cylinder 823 work of nut grasping mechanism 82, the active position that building ring 822 is represented by double dot dash line from Fig. 9 moves to by the going-back position shown in the solid line, thus, makes holding part 821 grasp the position to the release position action of being represented by solid line from what represented by double dot dash line.Its result, untapped cutting tip 635 is seized fixing (not using fixedly operation of cutting tip) on both sides by the arms by the flange part 633b and the clamp nut 638 of blade installing component 633.
Implemented the above-mentioned cutting tip that do not use fixedly after the operation, make travel mechanism's 83 work, nut slew gear 81 and nut grasping mechanism 82 are retreated, and, make detent mechanism 75 work that movable substrate is moved along pair of guide rails 722,722, with the 2nd blade grasping mechanism 91b (grasping and using cutting tip) of the 1st blade mounting mechanism 9a and the 2nd blade mounting mechanism 9b be positioned at the 1st knife rest 71a and the 1st knife rest 71b on the blade of use accommodating mechanism 715 opposed uses on the blade reception position.At this moment, make impulse motor 713 work of the 1st knife rest 71a and the 2nd knife rest 71b, the blade incorporating section 711a that takes in the cutting tip 635 that constitutes by electroforming emery wheel blade of base station 711 be will support, as shown in figure 17 and guide that be provided with above-mentioned the 1st clamp nut mounting mechanism 8a and the 2nd clamp nut mounting mechanism 8b and the 1st blade mounting mechanism 9a and the 2nd blade mounting mechanism 9b 72 opposed blade exchange zones will be positioned at.Next, as shown in figure 17, make travel mechanism's 95 work, make the 2nd blade grasping mechanism 91b to using blade holding mechanism 715 to advance, positioning element 915b and the engaging recessed part 715d that is provided with on the other end of the supporting axis 715a that uses blade accommodating mechanism 715 are fastened, and, will use cutting tip 635 chimeric being received on the supporting axis 715a that uses blade accommodating mechanism 715 by what electroforming emery wheel blade constituted by what the 2nd blade grasping mechanism 91b grasped.Then, remove the 2nd blade grasping mechanism 91b to using grasp (having used cutting tip to take in operation) of cutting tip 635.Next, make travel mechanism's 95 work, the 2nd blade grasping mechanism 91b is retreated, return to state shown in Figure 8.In addition, do not reach under the situation in life-span, it can be received into yet and not use 714 li of blade accommodating mechanisms at the cutting tip 635 that uses after the aforesaid replacing.
As above, cutting tip in the illustrated embodiment is converting mechanism 7 more, its the 1st knife rest 71a and the 2nd knife rest 71b have the support base station 711 that comprises a plurality of blades incorporating section 711a, 711b, 711c, 711d, owing in this a plurality of blades incorporating section, be provided with and take in the not use blade accommodating mechanism 714 that to change cutting tip 635, therefore can take in the cutting tip of a plurality of kinds in advance.Correspondingly, under the situation that the kind of machined object and processing conditions have changed, do not need all to replace the cutting tip that is incorporated on the knife rest at every turn, just can select and change the machined object that has been fit to change and the cutting tip of processing conditions.
More than, describe the present invention based on illustrated embodiment, but the present invention is not only limited to present embodiment, in the scope of purport of the present invention, also can carry out various deformation.For example, illustrated embodiment shows the example that has the 1st clamp nut mounting mechanism 8a and the 2nd clamp nut mounting mechanism 8b and the 1st blade mounting mechanism 9a and the 2nd blade mounting mechanism 9b with the 1st cutting mechanism 6a and the 2nd cutting mechanism 6b accordingly, yet, be under 1 the situation, to have 1 clamp nut mounting mechanism and blade mounting mechanism and get final product when cutting mechanism.
Claims (3)
1, a kind of topping machanism is characterized in that, has:
Ka Tai keeps machined object;
Cutting mechanism possesses the cutting tip of the machined object that cutting keeps by this Ka Tai and the rotary main shaft of this cutting tip has been installed;
Knife rest is taken in the cutting tip that should change; And
Blade exchange mechanism changes the cutting tip that should change that is installed in the cutting tip on this rotary main shaft and be accommodated in this knife rest,
This knife rest possesses a plurality of blades incorporating section of the cutting tip of taking in a plurality of kinds that should change.
2, topping machanism as claimed in claim 1 is characterized in that,
In this a plurality of blades incorporating section, be respectively equipped with: take in not using the blade accommodating mechanism and taking in the blade of the use accommodating mechanism of the cutting tip that once is installed on this rotary main shaft of the cutting tip that to change.
3, topping machanism as claimed in claim 1 or 2 is characterized in that,
This knife rest possesses: have the support base station of this a plurality of blades incorporating section and will be arranged on the blade incorporating section detent mechanism that this a plurality of blades incorporating section on this support base station is positioned at the blade exchange zone selectively.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006052665A JP2007229843A (en) | 2006-02-28 | 2006-02-28 | Cutting device |
| JP052665/2006 | 2006-02-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101028729A true CN101028729A (en) | 2007-09-05 |
Family
ID=38550949
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200710084372 Pending CN101028729A (en) | 2006-02-28 | 2007-02-28 | Cutting device |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP2007229843A (en) |
| CN (1) | CN101028729A (en) |
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| CN102029657A (en) * | 2009-10-07 | 2011-04-27 | 株式会社迪思科 | Cutter exchange device |
| CN107443135A (en) * | 2017-09-27 | 2017-12-08 | 德清县凌鹰电器有限公司 | A kind of cutter holder device of workpiece flange collar processing |
| CN109465975A (en) * | 2017-09-07 | 2019-03-15 | 株式会社迪思科 | Cutting tool provides device |
| CN109465974A (en) * | 2017-09-07 | 2019-03-15 | 株式会社迪思科 | Cutting tool provides device and cutting tool container |
| CN112092222A (en) * | 2019-06-18 | 2020-12-18 | 株式会社迪思科 | Cutting device and replacement method |
| CN114030094A (en) * | 2021-11-18 | 2022-02-11 | 江苏纳沛斯半导体有限公司 | Silicon wafer scribing system capable of preventing edge breakage during semiconductor wafer preparation |
| CN114102684A (en) * | 2021-11-12 | 2022-03-01 | 浙江百世技术有限公司 | Storage device is disassembled to carton |
| CN115365856A (en) * | 2021-05-19 | 2022-11-22 | 佳陞科技有限公司 | Tool changer and tool changer operation method |
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| EP2759371B1 (en) * | 2013-01-28 | 2017-01-18 | JOT Automation Oy | Method for automatically replacing disc tools |
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|---|---|---|---|---|
| CH657803A5 (en) * | 1982-01-16 | 1986-09-30 | Hauni Werke Koerber & Co Kg | Grinding machine |
| JP2617876B2 (en) * | 1994-02-04 | 1997-06-04 | 株式会社ディスコ | Blade autochanger |
| JPH07276227A (en) * | 1994-04-06 | 1995-10-24 | Disco Abrasive Syst Ltd | Automatic blade changer |
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2006
- 2006-02-28 JP JP2006052665A patent/JP2007229843A/en active Pending
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- 2007-02-28 CN CN 200710084372 patent/CN101028729A/en active Pending
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| CN102029657A (en) * | 2009-10-07 | 2011-04-27 | 株式会社迪思科 | Cutter exchange device |
| TWI757527B (en) * | 2017-09-07 | 2022-03-11 | 日商迪思科股份有限公司 | Cutting blade feeder |
| CN109465975A (en) * | 2017-09-07 | 2019-03-15 | 株式会社迪思科 | Cutting tool provides device |
| CN109465974A (en) * | 2017-09-07 | 2019-03-15 | 株式会社迪思科 | Cutting tool provides device and cutting tool container |
| TWI754090B (en) * | 2017-09-07 | 2022-02-01 | 日商迪思科股份有限公司 | Cutting blade supply device and cutting blade box |
| CN109465974B (en) * | 2017-09-07 | 2022-03-04 | 株式会社迪思科 | Cutting tool supply device and cutting tool container |
| CN109465975B (en) * | 2017-09-07 | 2022-05-17 | 株式会社迪思科 | Cutting tool supply device |
| CN107443135A (en) * | 2017-09-27 | 2017-12-08 | 德清县凌鹰电器有限公司 | A kind of cutter holder device of workpiece flange collar processing |
| CN112092222A (en) * | 2019-06-18 | 2020-12-18 | 株式会社迪思科 | Cutting device and replacement method |
| CN115365856A (en) * | 2021-05-19 | 2022-11-22 | 佳陞科技有限公司 | Tool changer and tool changer operation method |
| CN115365856B (en) * | 2021-05-19 | 2024-04-30 | 佳陞科技有限公司 | Tool changer |
| CN114102684A (en) * | 2021-11-12 | 2022-03-01 | 浙江百世技术有限公司 | Storage device is disassembled to carton |
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| Publication number | Publication date |
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| JP2007229843A (en) | 2007-09-13 |
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Application publication date: 20070905 |