CN1947931A - Apparatus for exchanging a cutting blade - Google Patents
Apparatus for exchanging a cutting blade Download PDFInfo
- Publication number
- CN1947931A CN1947931A CNA2006101318341A CN200610131834A CN1947931A CN 1947931 A CN1947931 A CN 1947931A CN A2006101318341 A CNA2006101318341 A CN A2006101318341A CN 200610131834 A CN200610131834 A CN 200610131834A CN 1947931 A CN1947931 A CN 1947931A
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- cutting tip
- cutting
- main shaft
- handle sturcture
- blade
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- 238000005520 cutting process Methods 0.000 title claims abstract description 331
- 230000007246 mechanism Effects 0.000 claims abstract description 195
- 230000008859 change Effects 0.000 claims description 3
- 238000009434 installation Methods 0.000 description 16
- 230000006835 compression Effects 0.000 description 14
- 238000007906 compression Methods 0.000 description 14
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- 239000000758 substrate Substances 0.000 description 11
- 238000000034 method Methods 0.000 description 9
- 230000008569 process Effects 0.000 description 9
- 238000012545 processing Methods 0.000 description 9
- 230000020347 spindle assembly Effects 0.000 description 9
- 238000010586 diagram Methods 0.000 description 8
- 230000002093 peripheral effect Effects 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 7
- 230000002687 intercalation Effects 0.000 description 6
- 238000009830 intercalation Methods 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 230000003068 static effect Effects 0.000 description 4
- 238000000227 grinding Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 239000013598 vector Substances 0.000 description 2
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005323 electroforming Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000008520 organization Effects 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000007514 turning Methods 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
- B23Q3/155—Arrangements for automatic insertion or removal of tools, e.g. combined with manual handling
- B23Q3/1552—Arrangements for automatic insertion or removal of tools, e.g. combined with manual handling parts of devices for automatically inserting or removing tools
- B23Q3/1554—Transfer mechanisms, e.g. tool gripping arms; Drive mechanisms therefore
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
- B23Q3/155—Arrangements for automatic insertion or removal of tools, e.g. combined with manual handling
- B23Q3/15513—Arrangements for automatic insertion or removal of tools, e.g. combined with manual handling the tool being taken from a storage device and transferred to a tool holder by means of transfer devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B27—WORKING OR PRESERVING WOOD OR SIMILAR MATERIAL; NAILING OR STAPLING MACHINES IN GENERAL
- B27B—SAWS FOR WOOD OR SIMILAR MATERIAL; COMPONENTS OR ACCESSORIES THEREFOR
- B27B5/00—Sawing machines working with circular or cylindrical saw blades; Components or equipment therefor
- B27B5/29—Details; Component parts; Accessories
- B27B5/30—Details; Component parts; Accessories for mounting or securing saw blades or saw spindles
- B27B5/32—Devices for securing circular saw blades to the saw spindle
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
- B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
- B28D5/029—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels with a plurality of cutting blades
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Wood Science & Technology (AREA)
- Forests & Forestry (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Dicing (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Abstract
Provided is a cutting blade exchanging device which can positively align the axis of a cutting blade gripped by a blade gripping means of a blade attachment/detachment means with an axis of a rotating spindle. The cutting blade exchanging device functions to exchange cutting blades. Each of the cutting blade attachment/detachment mechanisms is formed of: the cutting blade gripping means for gripping the periphery of a hub of the cutting blade; a support plate on which the cutting blade gripping means is mounted; a support means supporting the support plate; and a moving means for reciprocatively moving the support means. Each cutting blade gripping means is formed of: a plurality of gripping members arranged at circumferential intervals, for gripping the periphery of the hub of the cutting blade; a gripping member moving means for operating the plurality of gripping members in a radial direction; and a positioning means arranged at the center of the plurality of gripping members, for engaging with an engaging recess formed at the axial center in a front end surface of the rotary spindle.
Description
Technical field
The present invention relates to a kind of more changing device that is equipped on the cutting tip in the topping machanism that cuts machined objects such as semiconductor wafer.
Background technology
For example, in semiconductor devices manufacturing process, on by the surface of roughly discoideus semiconductor wafer, be called as the cutting apart in a plurality of zones that preset lines marks off of Cutting Road (street) by what clathrate formed, form circuit such as IC, LSI, cut apart along cutting apart preset lines by each zone that will form this circuit, make each semiconductor chip.As the segmenting device of dividing semiconductor wafer, the general topping machanism that uses as cutter sweep.This topping machanism has clamping platform that keeps machined object and the cutting mechanism with cutting tip that the machined object that remains on this clamping platform is cut.
Be equipped on the cutting tip in the above-mentioned topping machanism because use can cause abrasion, therefore need after using certain hour, change.A kind of scheme (for example with reference to patent documentation 1) of automatically carrying out the blade automatic changer of this cutting tip replacing has been proposed for this reason.This blade automatic changer has and cutting tip is fastened on clamp nut charging crane that the clamp nut on the front end of rotary main shaft loaded and unloaded and the blade charging crane of loading and unloading cutting tip on the front end of rotary main shaft.And, the clamp nut charging crane is made of cardinal extremity supporting arm that disposes swingably and the nut slew gear that is disposed on this supporting arm front end, and the blade charging crane is made of cardinal extremity supporting arm that disposes swingably and the blade handle sturcture that is arranged on this supporting arm front end.
Patent documentation 1: No. 2617876 communique of Japan Patent
In above-mentioned blade automatic changer, the blade handle sturcture of blade charging crane need make the axle center of the cutting tip of controlling consistent with the axle center of rotary main shaft when cutting tip is changed.Yet when the thermal expansions such as component parts of blade charging crane, the axle center of the cutting tip of controlling on the blade handle sturcture and the axle center of rotary main shaft are inconsistent, and existence can not be carried out the problem that cutting tip is changed automatically.
Summary of the invention
The present invention makes in view of the above fact, its technical problem that mainly will solve is, the more changing device of the consistent reliably cutting tip in a kind of axle center that can make the cutting tip of controlling on the blade handle sturcture of blade charging crane and the axle center of rotary main shaft is provided.
The scheme of technical solution problem
In order to solve above-mentioned major technology problem, according to the present invention, a kind of more changing device of cutting tip is provided, it is set in the topping machanism, be used to change cutting tip, this topping machanism possesses: the clamping platform that keeps machined object, and cutting is maintained at the cutting mechanism of the machined object on this clamping platform, this cutting mechanism has rotary main shaft, be entrenched in the cutting tip of the leading section of this rotary main shaft, and screw thread is combined in the leading section of this rotary main shaft and is used for the clamp nut of fastening this cutting tip, it is characterized in that, the more changing device of this cutting tip possesses: knife rest has and is arranged on away from the position of described rotary main shaft and takes in the 1st blade accommodating mechanism of the cutting tip before using, with the 2nd blade accommodating mechanism of taking in the cutting tip after the use; The clamp nut charging crane loads and unloads described clamp nut; The cutting tip charging crane loads and unloads described cutting tip at the leading section of described rotary main shaft; With cutting tip charging crane detent mechanism, described cutting tip charging crane is positioned at and the opposed blade of the front end face of described rotary main shaft loading position, with blade receiving position before the opposed use of described the 1st blade accommodating mechanism of described knife rest, and with the opposed use of described the 2nd blade accommodating mechanism back blade reception position, described cutting tip charging crane has: the cutting tip handle sturcture of periphery of controlling the lining of cutting tip, the support plate of described cutting tip handle sturcture is installed, support the supporting device of described support plate, and the travel mechanism that makes described supporting device advance and retreat, described cutting tip handle sturcture has: be used to control cutting tip lining periphery and at a plurality of parts of controlling that upwards have the compartment of terrain configuration week, with described a plurality of member driving mechanisms of controlling that parts drive respectively diametrically of controlling, and be configured in described a plurality of center of controlling parts and with the detent mechanism that combines in conjunction with recess that is formed at described rotary main shaft front end face axle center, described supporting device supports described support plate, make it removable on the direction vertical with the axis direction of described rotary main shaft, described travel mechanism advances and retreat described supporting device on the axis direction of described rotary main shaft.
Above-mentioned blade handle sturcture has: the 2nd handle sturcture of the cutting tip after controlling the 1st cutting tip handle sturcture of the cutting tip before using and controlling use, described the 1st cutting tip handle sturcture and the 2nd handle sturcture are installed on the described support plate.
Above-mentioned supporting device comprises the slew gear that above-mentioned support plate is rotated at least 180 degree, and described the 1st cutting tip handle sturcture and described the 2nd handle sturcture are configured in point-symmetric position with respect to the centre of gyration of support plate.
The effect of invention
In the more changing device of cutting tip of the present invention, owing to supporting the supporting device of the support plate that the cutting tip handle sturcture is installed, on the direction vertical, support support plate movably with the axis direction of rotary main shaft, even therefore because the thermal expansions of each component parts etc. are staggered the axle center of rotary main shaft and the axle center of detent mechanism a little, detent mechanism by be formed at rotary main shaft front end face axle center combine the recess combination, can be forcibly consistent with the axle center of rotary main shaft.Thereby, because it is also consistent with the axle center of rotary main shaft to control the axle center of the cutting tip that parts control by cutting tip handle sturcture a plurality of, so can carry out loading and unloading reliably to rotary main shaft.
Description of drawings
Fig. 1 be equipped the cutting tip that constitutes according to the present invention more changing device topping machanism want the portion stereogram.
Fig. 2 is the stereogram of the cutting mechanism of topping machanism shown in Figure 1.
Fig. 3 is the A-A profile among Fig. 1.
Fig. 4 is the exploded perspective view of the mounting structure of the cutting tip in the spindle assemblies of the cutting mechanism of formation topping machanism shown in Figure 1.
Fig. 5 wants portion's stereogram for the spindle assemblies of the cutting mechanism that constitutes topping machanism shown in Figure 1.
Fig. 6 is for constituting the stereogram of the blade holder of the more changing device of the cutting tip of formation according to the present invention.
Fig. 7 is the guide mechanism of formation more changing device of the cutting tip of formation according to the present invention and the stereogram of detent mechanism.
Fig. 8 is the 1st clamp nut charging crane of formation more changing device of the cutting tip of formation according to the present invention and the stereogram of the 2nd clamp nut charging crane and the 1st cutting tip charging crane and the 2nd cutting tip charging crane.
Fig. 9 is for constituting the profile of the clamp nut charging crane of the more changing device of the cutting tip of formation according to the present invention.
Figure 10 is for constituting the profile of the cutting tip charging crane of the more changing device of the cutting tip of formation according to the present invention.
Figure 11 is a B-B cutaway view among Fig. 8.
Figure 12 is the key diagram that the positioning states of the 1st cutting tip charging crane of more changing device of the cutting tip that formation constitutes according to the present invention and the 2nd cutting tip charging crane is shown.
Figure 13 for the use in the blade exchange operation of the more changing device of the cutting tip that constitutes according to the present invention before cutting tip control the key diagram of operation.
Figure 14 unloads the key diagram of operation for the clamp nut in the blade exchange operation of the more changing device of the cutting tip of formation according to the present invention.
Figure 15 for the use in the blade exchange operation of the more changing device of the cutting tip that constitutes according to the present invention after cutting tip unload the key diagram of operation.
Figure 16 is the key diagram of the cutting tip handle sturcture counter-rotating operation in the blade exchange operation of more changing device of the cutting tip that constitutes according to the present invention.
Figure 17 is the key diagram of cutting tip installation procedure before the use in the blade exchange operation of more changing device of the cutting tip that constitutes according to the present invention.
Figure 18 is the fixing key diagram of operation of cutting tip before the use in the blade exchange operation of more changing device of the cutting tip that constitutes according to the present invention.
Figure 19 for the use in the blade exchange operation of the more changing device of the cutting tip that constitutes according to the present invention after cutting tip take in the key diagram of operation.
The specific embodiment
Below, be elaborated with reference to the preferred implementation of accompanying drawing to the more changing device of the cutting tip of formation according to the present invention.
In Fig. 1, show the more changing device that is equipped with according to the present invention the cutting tip that constitutes topping machanism want portion's stereogram.
Topping machanism shown in Figure 1 has static base station 2.On this static base station 2, dispose and keep machined object and make it to clamping platform mechanism 3 that the cutting direction of feed shown in the arrow X moves.
Clamping platform mechanism 3 in the illustrated embodiment has the 1st guide rail 31a and the 2nd guide rail 31b that is disposed at static base station 2 upper surfaces.The 1st guide rail 31a and the 2nd guide rail 31b are made of pair of tracks parts 311,311 respectively, extend setting in parallel to each other along the cutting direction of feed shown in the arrow X in the drawings.On the 1st guide rail 31a and the 2nd guide rail 31b, can dispose the 1st supporting base station 32a and the 2nd supporting base station 32b movably respectively along the 1st guide rail 31a and the 2nd guide rail 31b.Promptly, on the 1st supporting base station 32a and the 2nd supporting base station 32b, be provided with respectively and be guided groove 321,321, be guided groove 321,321 by this and be entrenched in the pair of tracks parts 311,311 that constitute the 1st guide rail 31a and the 2nd guide rail 31, the 1st supporting base station 32a and the 2nd supporting base station 32b constitute and can move along the 1st guide rail 31a and the 2nd guide rail 31b.
On the 1st supporting base station 32a and the 2nd supporting base station 32b, dispose the 1st cylinder part 33a and the 2nd cylinder part 33b respectively, dispose the 1st clamping platform 34a and the 2nd clamping platform 34b in the upper end of the 1st cylinder part 33a and the 2nd cylinder part 33b respectively pivotally.The 1st clamping platform 34a and the 2nd clamping platform 34b are made of the suitable porous material of for example porous ceramic, are connected in the not shown attraction mechanism.Thereby the 1st clamping platform 34a and the 2nd clamping platform 34b attract the machined object that is positioned on the mounting surface 341,341 to keep by being communicated with the attraction source selectively by not shown attraction mechanism.In addition, the 1st clamping platform 34a and the 2nd clamping platform 34b are turned round aptly by the pulse motor (not shown) that is disposed in the 1st cylinder part 33a and the 2nd cylinder part 33b respectively.In addition, on the upper end of the 1st cylinder part 33a and the 2nd cylinder part 33b, dispose to have the hole of inserting the 1st clamping platform 34a and the 2nd clamping platform 34b respectively and cover the above-mentioned the 1st respectively and support the 1st cap assembly 35a and the 2nd cap assembly 35b that base station 32a and the 2nd supports base station 32b.At the upper surface of the 1st cap assembly 35a and the 2nd cap assembly 35b, configuration is used to detect the 1st 36a of blade testing agency and the 2nd 36b of blade testing agency of the position of cutting tip described later respectively.
Proceed explanation according to Fig. 1, the clamping platform mechanism 3 in the illustrated embodiment has and is used for the 1st clamping platform 34a and the 2nd clamping platform 34b are cut feed mechanism 37b along the 1st cutting feed mechanism 37a and the 2nd that the 1st guide rail 31a and the 2nd guide rail 31b move respectively on the cutting direction of feed shown in Fig. 1 arrow X.The 1st cutting feed mechanism 37a and the 2nd cutting feed mechanism 37b are by being disposed at external screw rod 371 between the pair of tracks parts 311,311 that constitute the 1st guide rail 31a and the 2nd guide rail 31b respectively abreast, supporting a bearing at end 372 of external screw rod 371 and be connected on the other end of external screw rod 371 and be used for the pulse motor 373 that this external screw rod 371 forward or reverse drive is constituted pivotally.The 1st cutting feed mechanism 37a that so constitutes and the 2nd cutting feed mechanism 37b, its external screw rod 371 separately respectively be formed at above-mentioned the 1st supporting base station 32a and combine with the 2nd internal thread 322 screw threads that support on the base station 32b.Thereby, the 1st cutting feed mechanism 37a and the 2nd cutting feed mechanism 37b can come forward or reverse to drive external screw rod 371 by driving pulse motor 373 respectively, thus make be disposed at above-mentioned the 1st supporting base station 32a and the 2nd support the 1st clamping platform 34a on the base station 32b and the 2nd clamping platform 34b can be respectively along the 1st guide rail 31a and the 2nd guide rail 31b, move along the cutting direction of feed shown in the arrow X among Fig. 1.
Topping machanism in the illustrated embodiment has the scaffold 4 of the door type of crossing over above-mentioned the 1st guide rail 31a and the 2nd guide rail 31b setting.This type scaffold 4 by the 1st post portion 41 that is disposed at the 1st guide rail 31a side, be disposed at the 2nd post portion 42 of the 2nd guide rail 31b side and connect the 1st post portion 41 and the upper end of the 2nd post portion 42 and constitute along the support 43 of the index feed direction shown in the arrow Y vertical configuration with the cutting direction of feed shown in the arrow X, be provided with the opening 44 that allows above-mentioned the 1st clamping platform 34a and the 2nd clamping platform 34b to move at central portion.The upper end of the 1st post portion 41 and the 2nd post portion 42 width respectively forms with widening, is respectively arranged with the opening 411 and 421 that the spindle assemblies that allows cutting mechanism described later moves on this upper end.On a side's of above-mentioned support 43 face, be provided with pair of guide rails 431,431 along the index feed direction shown in the arrow Y, on the opposing party's face, along the direction (index feed direction in Fig. 1 arrow Y shown in) vertical pair of guide rails 432,432 be set as illustrated in fig. 3 with paper.
The 1st aligning guide 5a and the 2nd aligning guide 5b that the pair of guide rails 431,431 that is configured to be provided with on the support 43 of the scaffold 4 of above-mentioned door type of having topping machanism in the illustrated embodiment moves.The 1st aligning guide 5a and the 2nd aligning guide 5b respectively by movable block 51, be used for making this movable block 51 to constitute along travel mechanism 52,52 that pair of guide rails 431,431 moves and the image mechanism 53,53 that is installed in movable block 51. Movable block 51,51 be provided with respectively with above-mentioned pair of guide rails 431,431 chimeric be guided groove 511,511, be guided groove 511,511 by this and be entrenched on the pair of guide rails 431,431, movable block 51,51 constitutes and can move along pair of guide rails 431,431.
The image mechanism 53,53 that is installed in respectively on the above-mentioned movable block 51,51 has imaging apparatus (CCD) respectively, and the picture signal after the shooting transmits to not shown controlling organization.
On the another side (with the opposite face of face that is provided with above-mentioned the 1st aligning guide 5a and the 2nd aligning guide 5b) of the support 43 that constitutes above-mentioned door type scaffold 4, be provided with the 1st cutting mechanism 6a and the 2nd cutting mechanism 6b.With reference to Fig. 2 and Fig. 3 the 1st cutting mechanism 6a and the 2nd cutting mechanism 6b are described.The 1st cutting mechanism 6a and the 2nd cutting mechanism 6b have calibration respectively and move base station 61 and mobile base station 62 of incision and spindle assemblies 63.The face that calibration moves base station 61 1 sides is provided with and is guided groove 611,611, this be guided groove 611,611 and the pair of guide rails 432,432 that is arranged on the another side of above-mentioned support 43 chimeric, be guided groove 611,611 and pair of guide rails 432,432 is chimeric by this, calibration moves base station 61 and constitutes and can move along pair of guide rails 432,432.In addition, move at calibration on the another side of base station 61, as shown in Figure 3, along being provided with pair of guide rails 612,612 (in Fig. 3, only showing a side guide rail) by the incision direction of feed shown in the arrow Z (with the perpendicular direction of the mounting surface 341 of the 1st clamping platform 34a and the 2nd clamping platform 34b).And, move at calibration on base station 61,61 1 sides' the face, the yielding groove 613,613 of the external screw rod break-through that allows calibration feed mechanism described later is being set at above-below direction with being provided with step.
The mobile base station 62 of above-mentioned incision is by the portion that is supported 621 of extending at above-below direction and be supported the installation portion 622 that at right angles flatly extends portion 621 lower ends from this and constitute.As shown in Figure 2, the face that is supported installation portion 622 sides in the portion 621 is provided with and is guided groove 623,623 (only showing a side the groove that is guided in Fig. 3), this is guided groove 623,623 and above-mentioned calibration, and to move the pair of guide rails 612,612 that is provided with on base station 61 the opposing party's the face chimeric, by this being guided groove 623,623 and pair of guide rails 612,612 is chimeric, becoming the mobile base station 62 of incision can be along pair of guide rails 612,612 at constituting of being moved by the incision direction of feed shown in the arrow Z.So be installed in calibration and move the mobile base station 62 of incision on the base station 61, as shown in Figure 1, the installation portion 622 face side that moves the opposing party of base station 61 from the above-mentioned calibration that a type scaffold 4 is installed is passed opening 44 and is disposed to the side's that above-mentioned the 1st aligning guide 5a and the 2nd aligning guide 5b are housed face side-prominently.
Above-mentioned spindle assemblies 63 is installed in the lower surface of the installation portion 622 of the mobile base station 62 of incision that forms the 1st cutting mechanism 6a and the 2nd cutting mechanism 6b respectively.This spindle assemblies 63 has respectively as shown in Figure 4: main shaft housing 631, but on this main shaft housing 631 and by not shown servomotor, make its rotating rotary main shaft 632 by pivoting support, be installed in the blade installing component 633 on these rotary main shaft 632 leading sections, combine the also hold-down nut 634 of fixed blade installing component 633 with the not shown external screw thread screw thread on the leading section that is arranged at rotary main shaft 632, be installed in the cutting tip 635 on the blade installing component 633, and be used for and blade installing component 633 between clamp nut 638 that this cutting tip 635 is gripped.
Moreover, the rotary main shaft 632 of the 1st cutting mechanism 6a and the rotary main shaft 632 of the 2nd cutting mechanism 6b as illustrated in fig. 2, axis direction is provided with along the index feed direction shown in the arrow Y.And the cutting tip 633 that is installed on the rotary main shaft 632 of the 1st cutting mechanism 6a is provided with opposed to each other with cutting tip 633 on the rotary main shaft 632 that is installed in the 2nd cutting mechanism 6b.
In addition, the spindle assemblies 63 in the illustrated embodiment has the main shaft cover 64 that covers above-mentioned main shaft housing 631, is installed in the front end of this main shaft cover 64 and covers the blade cover 65 of above-mentioned cutting tip 635 as illustrated in fig. 5.Blade cover 65 is by being installed in the 1st cap assembly 651 on main shaft cover 64 front ends and being installed on the front surface of the 1st cap assembly 651 and can constituting to the 2nd cap assembly 652 that the side disposes movably, and the 2nd cap assembly 652 is positioned among Fig. 5 in the release position shown in the solid line and Fig. 5 on the closed position shown in the double dot dash line by not shown air slide mechanism.The 2nd cap assembly 652 time is positioned among Fig. 5 on the closed position shown in the double dot dash line in cutting, is positioned at when cutting tip is changed among Fig. 5 on the release position shown in the solid line.Moreover, on the 1st cap assembly 651 and the 2nd cap assembly 652, dispose cutting water supply nozzle 66 (the cutting water supply nozzle 66 that is configured on the 2nd cap assembly 652 only is shown) respectively in Fig. 5.This cutting water supply nozzle 66 that is disposed on the 1st cap assembly 651 and the 2nd cap assembly 652 is connected with not shown cutting water feed mechanism.
The 1st cutting mechanism 6a of illustrated embodiment and the 2nd cutting mechanism 6b have be used for above-mentioned calibration move base station 61,61 along pair of guide rails 432,432 to index feed mechanism 64,64 that the index feed direction shown in Fig. 2 arrow Y moves. Index feed mechanism 64,64 by be configured in abreast respectively external screw rod 641 between the pair of guide rails 432,432, pivotally support external screw rod 641 a bearing at end 642, be connected the pulse motor 643 that on the other end of external screw rod 641 these external screw rod 641 forward or reverse is driven and constitute.Moreover external screw rod 641,641 is configured in above-mentioned calibration and moves on the base station 61,61 on the corresponding respectively height and position of the yielding groove 613,613 that is provided with.So the external screw rod separately 641,641 of the index feed mechanism 64,64 that constitutes respectively be formed at internal thread 614,614 screw threads that above-mentioned calibration moves on the base station 61,61 and combine.Thereby, index feed mechanism 64,64 is by difference driving pulse motor 643,643, external screw rod 641,641 forward or reverse are driven, can make calibration move base station 61,61 thus and move along pair of guide rails 432,432 index feed direction shown in the arrow Y in Fig. 1.When this calibration moves base station 61,61 and moves, connect at calibration by external screw rod 641,641 and to move in the yielding groove 613,613 that is provided with on the base station 61,61, calibration moves base station 61,61 and allows it to move.
In addition, the 1st cutting mechanism 6a in the illustrated embodiment and the 2nd cutting mechanism 6b have and are used for incision feed mechanism 65,65 that the mobile base station 62,62 of above-mentioned incision is moved to the incision direction of feed shown in the arrow Z along pair of guide rails 612,612 as shown in Figures 2 and 3. Incision feed mechanism 65,65 by the external screw rod 651 that dispose abreast with pair of guide rails 612,612 respectively, pivotally support external screw rod 651 a bearing at end 652, be connected on the other end of external screw rod 651 pulse motor 653 of this external screw rod 651 forward or reverse driving constituted.So the external screw rod separately 651 of the incision feed mechanism 65,65 that constitutes combines with internal thread 622a screw thread in the portion that is supported 621 that is formed at the mobile base station 62 of above-mentioned incision respectively.Thereby incision feed mechanism 65,65 drives external screw rod 651 forward or reverse by difference driving pulse motor 653, and the mobile base station 62 of incision is moved along pair of guide rails 622,622 incision direction of feed shown in the arrow Z in Fig. 1 and Fig. 3.
Return Fig. 1 and proceed explanation, the topping machanism of illustrated embodiment has and is used for more changing device 7 of cutting tip that the cutting tip 635 that is installed on the above-mentioned rotary main shaft 632 is changed.Cutting tip more changing device 7 is configured in the rear (disposing the 1st cutting mechanism 6a and the 2nd cutting mechanism 6b side) of the scaffold 4 of above-mentioned door type.This cutting tip is changing device 7 movable substrate 73 that has the 1st knife rest 71a and the 2nd knife rest 71b in both sides, the rear configuration of the scaffold 4 of above-mentioned door type, be disposed at guide mechanism 72 between the 1st knife rest 71a and the 2nd knife rest 71b, can move along this guide mechanism 72 more.
The 1st knife rest 71a and the 2nd knife rest 71b respectively on away from the position of above-mentioned rotary main shaft 632 with the state configuration opposed to each other mutually of the above-mentioned guide mechanism 72 of clamping.The 1st knife rest 71a and the 1st knife rest 71b have support plate 711 and the 1st blade accommodating mechanism 712 and the 2nd blade accommodating mechanism 713 that are installed on this support plate 711 as illustrated in fig. 6.Support plate 711 is fixed on the supporting base station 710 that is disposed on the above-mentioned static base station 2.The 1st blade accommodating mechanism 712 is made of at the push part 712b of the ring-type on this bolster 712a, the very weak compression helical spring 712c of spring force that is disposed between this push part 712b and the support plate 711 bolster 712a, the intercalation that an end is installed on the support plate 711.Moreover, on the other end of bolster 712a, form in conjunction with recess 712d.In addition, disposing the limiting mechanism 712e that under the state of cutting tip 635 insertion the other end outer peripheral faces, carries out the position restriction on the bolster 712a.This limiting mechanism 712e constitutes to a plurality of springs that radial outside pushes respectively by a plurality of balls that compartment of terrain configuration is set on Zhou Fangxiang with this a plurality of balls, plays the function that the power on each ball of acting on is restricted to certain value.Thereby above-mentioned push part 712b is by limiting mechanism 712e restriction another distolateral moving to bolster 712a.In the 1st blade accommodating mechanism 712 that so constitutes, be arranged at embedded hole 636a intercalation on the lining 636 of the cutting tip 635 before using on bolster 712a and take in a plurality of.At this moment, the spring force that above-mentioned push part 712b overcomes compression helical spring 712c retreats, and the ball radius vector of above-mentioned limiting mechanism 712e inwardly retreats the side, and cutting tip 635 is positioned at the distolateral of bolster 712a by limiting mechanism 712e.Like this, the cutting tip 635 of intercalation on bolster 712a is urged towards limiting mechanism 712e by push part 712b by the spring force of compression helical spring 712c.Thereby compression spring 712c and push part 712b have the function of cutting tip 635 towards the dipper crowding gear of limiting mechanism 712e pushing.
In addition, the 2nd blade accommodating mechanism 713 also with above-mentioned the 1st blade accommodating mechanism 712 similarly, the bolster 713a, the intercalation that are installed on the support plate 711 by an end constitute at the push part 713b of the ring-type on this supporting 713a, the very weak compression helical spring 713c of spring force that is disposed between this push part 713b and the support plate 711.Moreover, on the other end of bolster 713a, form in conjunction with recess 713d.In addition, disposing the limiting mechanism 713e that under the state of cutting tip 635 insertion the other end outer peripheral faces, carries out the position restriction on the bolster 713a.This limiting mechanism 713e constitutes to a plurality of springs that radial outside pushes respectively by a plurality of balls that compartment of terrain configuration is set on Zhou Fangxiang with this a plurality of balls, plays the function that the power on each ball of acting on is restricted to certain value.Thereby above-mentioned push part 713b is by limiting mechanism 713e restriction another distolateral moving to bolster 713a.In the 2nd blade accommodating mechanism 713 that so constitutes, be arranged at embedded hole 636a intercalation on the lining 636 of the cutting tip 635 after the use on bolster 713a and take in a plurality of.At this moment, the spring force that above-mentioned push part 713b overcomes compression helical spring 713c retreats, and a plurality of ball radius vectors of above-mentioned limiting mechanism 713e inwardly retreat the side, cutting tip 635 by limiting mechanism 713e be positioned at bolster 713a one distolateral on.Like this, the cutting tip 635 of intercalation on bolster 713a is urged towards limiting mechanism 713e by push part 713b by the spring force of compression helical spring 12c.Thereby compression spring 713c and push part 713b have the function of cutting tip 635 towards the dipper crowding gear of limiting mechanism 713e pushing.
Above-mentioned guide mechanism 72 has the guide plate 721 of rectangle as illustrated in fig. 7 and is arranged at the pair of guide rails 722,722 that the cutting direction of feed shown in the two side direction arrow X of this guide plate 71 is extended.So the guide mechanism 72 that constitutes is installed on the not shown fixed part.
On an end of above-mentioned movable substrate 73, what L word shape was installed as illustrated in fig. 8 is guided parts 74, disposes a pair of track 741,741 that is guided that combines with above-mentioned pair of guide rails 722,722 on this is guided the both sides of parts 74.Combine with above-mentioned pair of guide rails 722,722 by this a pair of track 741,741 that is guided, movable substrate 73 can be supported along pair of guide rails 722,722 movably by being guided parts 74.Moreover, the movable block 742 with internal thread 742a is installed at the upper surface that is guided parts 74.
At the lower surface of the guide plate 721 that constitutes above-mentioned guide mechanism 72, shown in partly cut-away among Fig. 7, the detent mechanism 75 that above-mentioned movable substrate 73 is moved along pair of guide rails 722,722 disposed.This detent mechanism 75 is by a pair ofly being guided that track 722,722 disposes abreast and being connected with the external screw rod 751 of the internal thread 742a screw thread combination of above-mentioned movable block 742, with an end of this external screw rod 751 and the pulse motor 752 that is installed in the lower surface of guide plate 721 constitutes with above-mentioned.Moreover the other end of external screw rod 751 is supported pivotally by the bearing 753 of the lower surface that is installed in guide plate 721.So the detent mechanism 75 that constitutes can move movable substrate 73 by making pulse motor 752 forward or reverse along pair of guide rails 722,722 direction shown in the arrow X in Fig. 7.Moreover, detent mechanism 75 have with the 1st clamp nut charging crane described later and the 2nd clamp nut charging crane be positioned at the opposed blade of the front end face of above-mentioned rotary main shaft 632 loading position on clamp nut charging crane detent mechanism, and cutting tip charging crane described later is positioned at and the opposed blade of the front end face of rotary main shaft 632 loading position, with blade receiving position before the 1st blade accommodating mechanism 712 opposed uses of above-mentioned the 1st knife rest 71a and the 2nd knife rest 71b, with with the opposed functions of using the cutting tip charging crane on the blade reception positions of back of the 2nd blade accommodating mechanism 713.
Proceed explanation according to Fig. 8, upper surface in above-mentioned movable substrate 73, dispose the 1st clamp nut charging crane 8a and the 2nd clamp nut charging crane 8b of the clamp nut 638 that is used to load and unload above-mentioned spindle assemblies 63, and the 1st cutting tip charging crane 9a and the 2nd cutting tip charging crane 9b that are used for loading and unloading cutting tip 635 on the front end of rotary main shaft 632.Moreover, the 1st clamp nut charging crane 8a and the 1st cutting tip charging crane 9a, and the 2nd clamp nut charging crane 8b and the 2nd cutting tip charging crane 9b line are configured in the upper surface of movable substrate 73 symmetrically.The 1st clamp nut charging crane 8a and the 2nd clamp nut charging crane 8b are configured on the guide rail 731 that is positioned at movable substrate 73 upper surfaces, can be supported movably along this guide rail 731.The 1st clamp nut charging crane 8a and the 2nd clamp nut charging crane 8b have nut rotating mechanism 81 and nut handle sturcture 82 and travel mechanism 83 respectively.
With reference to Fig. 8 and Fig. 9 above-mentioned nut rotating mechanism 81 is described.
The nut rotating mechanism 81 of illustrated embodiment has the electric machine casing 811 that is configured on the above-mentioned guide rail 731, be configured in the motor 812 in this electric machine casing 811 and be connected rotatable parts 813 on the driving shaft 812a of this motor 812.The diapire 811a of electric machine casing 811 be provided with combine with above-mentioned guide rail 731 be guided groove 811b, be guided groove 811b by this and combine with guide rail 731, electric machine casing 811 can be supported movably along guide rail 731.Motor 812 when just changeing, to unclamping the direction revolution, turns round with clamp nut 638 above-mentioned clamp nut 638 when counter-rotating in illustrated embodiment to fastening direction.
Above-mentioned rotatable parts 813 are disposing 4 rotational pins 814 outstanding from the right side in the mode that has 90 degree phase places respectively on the right part in Fig. 9.This rotational pin 814 has the joint portion 814a of toroidal on cardinal extremity (left end among Fig. 9), this joint portion 814a is configured in the cylinder bore 813a that is provided with on the right part among Fig. 9 of rotatable parts 813 slidably.Dispose compression spring 815 in cylinder bore 813a, by this compression spring 815, rotational pin 814 will right be applied in power movably in Fig. 9.Moreover, at the right-hand member in Fig. 9 of cylinder bore 813a, be provided with the joint portion 814a of rotational pin 814 and combine and limit rotational pin 814 to right-hand mobile stopper portions 813b.Above-mentioned 4 rotational pins 814 be configured in 4 be arranged on the chimeric position of pin embedded hole 638a on the above-mentioned clamp nut 638.
Above-mentioned nut handle sturcture 82 is controlled parts 821, is controlled parts 821 controlling driving ring 822 that the position drives, the cylinder 823 of this driving ring 822 active position driving shown in the going-back position shown in the solid line and the double dot dash line in Fig. 9 is constituted shown in the release position shown in the solid line and the double dot dash line in Fig. 9 with these 4 by having on the periphery that 90 degree phase places ground are configured in above-mentioned rotatable parts 813 4 respectively.Control parts 821 and have the pawl of controlling 821a on front end (right-hand member among Fig. 9), base end part (left part among Fig. 9) is bearing on the above-mentioned rotatable parts 813 swingably by bolster 824.Dispose compression spring 825 between parts 821 and the rotatable parts 813 controlling of so being supported, by this compression spring 825 will control parts 821 control pawl 8 sides with bolster 824 be under the normality of center towards radial outside, be that the release position applies power.
Driving ring 822 has the 822a of the portion that is guided that is arranged at left part among Fig. 9, drive division 822b, the portion 822a of being guided that is arranged at right part among Fig. 9 and can be supported movably on rotatable parts 813.Thereby the drive division 822b of driving ring 822 becomes and above-mentioned state of controlling parts 821 butts.Above-mentioned cylinder 823 is arranged on the upper wall 811c of above-mentioned electric machine casing 811, and its piston rod 823a is connected with driving ring 822.
The nut handle sturcture 82 that so constitutes drives if will drive cylinder 823 going-back position shown in the solid line from Fig. 9, and driving ring 822 moved to the active position shown in the double dot dash line, then will make and control parts 821 and drive from the release position shown in the solid line to the position of controlling shown in the double dot dash line.Like this, be driven to when controlling the position controlling parts 821, controlling pawl 821a can combine with the endless groove 638b that forms on the outer peripheral face of above-mentioned clamp nut 638.
Above-mentioned travel mechanism 83 is made of with the attaching parts 822 that above-mentioned electric machine casing 811 is connected with piston rod 831a with this cylinder 831 shown in Figure 8 and the cylinder 831 of guide rail 731 configured in parallel.By driving cylinder 831, electric machine casing 811 is moved along guide rail 731 through attaching parts 832.
Below, with reference to Fig. 8, Figure 10 and Figure 11 above-mentioned the 1st cutting tip charging crane 9a and the 2nd cutting tip charging crane 9b are described.
The 1st cutting tip charging crane 9a of illustrated embodiment and the 2nd cutting tip charging crane 9b are configured on the guide rail 732 that is positioned at movable substrate 73 upper surfaces, can be supported movably along this guide rail 732.The travel mechanism 94 that the 1st cutting tip charging crane 9a and the 2nd cutting tip charging crane 9b such as Fig. 8 and ground shown in Figure 10 have the 1st cutting tip handle sturcture 91a and the 2nd cutting tip handle sturcture 91b respectively, the support plate 92 of the 1st cutting tip handle sturcture 91a and the 2nd cutting tip handle sturcture 91b are installed, supported the supporting device 93 of this support plate 92 and this supporting device 93 is advanced and retreat.
Because the 1st cutting tip handle sturcture 91a and the 2nd cutting tip handle sturcture 91b are essentially identical formation, therefore the same parts notes are described with same-sign.
The 1st cutting tip handle sturcture 91a and the 2nd cutting tip handle sturcture 91b are configured in the both ends of support plate 92 as shown in Fig. 8 and Figure 10, promptly on the point-symmetric position of the centre of gyration described later with respect to support plate 92.The 1st cutting tip handle sturcture 91a and the 2nd cutting tip handle sturcture 91b have a plurality of (in the illustrated embodiment being 4) that the periphery of the lining 636 of controlling above-mentioned cutting tip 635 uses control parts 911, drive these 4 control parts 911 control member driving mechanism 912, be disposed at 4 control parts 911 in the heart and with the front end face that is formed at above-mentioned rotary main shaft 632 on the detent mechanism 913 that combines recess 632a combination.
Below, with reference to Figure 10 and Figure 11 above-mentioned support plate 92 and supporting device 93 are described.
Supporting device 93 has gyroaxis 931, sliding panel 932 and attaching parts 933 in the illustrated embodiment.Gyroaxis 931 with above-mentioned rotary main shaft 632 opposed state configuration in same horizontal plane.The external diameter of this gyroaxis 931 forms about than the little 2mm of internal diameter that is arranged on the insert opening 921 on the above-mentioned support plate 92, at its front end face, forms internal thread hole 931a in the axle center.Sliding panel 932 forms rectangle, is formed centrally bolt through hole 932a therein.In Figure 11 of this sliding panel 932, on the face on right side, be provided with 4 in conjunction with recess 932b.Above-mentioned gyroaxis 931 runs through by gyroaxis 931 in the insert opening 921 that is provided with on the above-mentioned support plate 92 with sliding panel 932, bolt 934 run through among the bolt through hole 932a that is provided with on the sliding panel 932 and be formed on gyroaxis 931 on internal thread hole 931a screw thread in conjunction with and be connected.
Above-mentioned attaching parts 933 form rectangular-shaped, form the 1st recess 933a that takes in above-mentioned sliding panel 932 on a side side, form the 2nd recess 933b on the central portion of the 1st recess 933a again.The outside at the 1st recess 932a of the attaching parts 933 that so form forms connecting portion 933c, is forming on this connecting portion 933c and 4 bolt through holes, 923 corresponding 4 internal thread holes 933 that are arranged on the above-mentioned support plate 92.In addition, 4 ball bearings, 922 corresponding 4 ball bearings 935 that on the bottom surface of the 2nd recess 933b of attaching parts 933, disposing and on above-mentioned support plate 92, be provided with.The attaching parts 933 that form like this connect in 4 bolt through holes 923 that are provided with on above-mentioned support plate 92 respectively by bolt 936 and this bolt 936 combines with 4 internal thread hole 933d screw threads that form connecting portion 933c respectively, thereby are connected with support plate 92.Moreover, the bottom surface of the 2nd recess 933b in the attaching parts 933 be provided with above-mentioned sliding panel 932 on be provided with 4 combine recess 932b corresponding 4 in conjunction with recess 933e, these 4 in conjunction with recess 933e be arranged on sliding panel 932 on 4 combine between the recess 932b, dispose helical spring 937 respectively.
More than the gyroaxis 931 of the supporting device 93 of Gou Chenging is connected with sliding panel 932, and support plate 92 is connected with attaching parts 933.Thereby, support plate 92 and attaching parts 933 gyroaxis 931 radially, promptly be supported movably on the direction vertical with the axis direction of above-mentioned rotary main shaft 632.Moving of this support plate 92 and attaching parts 933 because sliding panel 932 by ball bearing 922 and 935 clampings, therefore can carry out swimmingly.
In addition, the supporting device 93 of illustrated embodiment has as illustrated in fig. 11 as the pulse motor 938 that above-mentioned gyroaxis 931 is returned at least the slew gear that turnback uses.The driving shaft 938a of this pulse motor 938 is connected with gyroaxis 931.Moreover pulse motor 938 is configured in the electric machine casing 939, and electric machine casing 939 can configuration movably on above-mentioned guide rail 732.That is, form as illustrated in fig. 10 on the diapire of electric machine casing 939 and be guided groove 939a, be guided groove 939a by this and combine with guide rail 732, electric machine casing 939 can be supported movably along guide rail 732.
The 1st cutting tip charging crane 9a of illustrated embodiment and the 2nd cutting tip charging crane 9b have makes above-mentioned electric machine casing 939 along travel mechanism 94 that guide rail 732 moves as illustrated in fig. 8.This travel mechanism 94 is by the cylinder 941 that be arranged in parallel with guide rail 732, constitute the piston rod 941a of this cylinder 941 with the attaching parts 942 that above-mentioned electric machine casing 939 is connected.By driving cylinder 941, can motor cover 939 be moved along guide rail 732 by attaching parts 942.
More than the 1st cutting tip charging crane 9a of Gou Chenging and the 2nd cutting tip charging crane 9b are as shown in figure 12, with the 1st cutting tip handle sturcture 91a and the 2nd cutting tip handle sturcture 91b be positioned at the opposed blade of the front end face of rotary main shaft 632 loading position on, and drive travel mechanism 94 and make the 1st cutting tip handle sturcture 91a and the 2nd cutting tip handle sturcture 91b when rotary main shaft 632 advances, the positioning element 913b of detent mechanism 913 combines with the recess 632a in the axle center that is arranged on rotary main shaft 632.At this moment, even because the thermal expansions of each component parts etc. are staggered the axle center of rotary main shaft 632 and the axle center of positioning element 913b a little, because being installed as described above, the support plate 92 of the 1st cutting tip handle sturcture 91a and the 2nd cutting tip handle sturcture 91b can on the direction vertical, be supported movably, so being forced to property of positioning element 913b ground is consistent with the axle center of rotary main shaft 632 with the axis direction of rotary main shaft 632.Its result, 4 axle center of controlling parts 911 are still consistent with the axle center of rotary main shaft 632.Thereby, can load and unload reliably by 4 and control the cutting tip 635 that parts 911 are controlled.
The cutting tip of the having equipped illustrated embodiment more topping machanism of changing device constitutes as described above, below mainly with reference to Fig. 1 and Fig. 2 its action is described.
At first, the machining for machined object describes.
By not shown machined object conveyer machined objects such as semiconductor wafer are transported on the 1st clamping platform 34a.This moment, the 1st clamping platform 34a was positioned on the machined object loading position shown in Figure 1.The machined object that is positioned on the 1st clamping platform 34a is attracted and remains on the 1st clamping platform 34a and go up (the 1st machined object keeps operation) by driving not shown attraction mechanism.
Attract to have kept the driving of the 1st clamping platform 34a of machined object as described above by the 1st cutting feed mechanism 37a, be positioned at the 1st aligning guide 5a image mechanism 53 under.After the 1st clamping platform 34a is positioned at the positive upper/lower positions of image mechanism 53, take the surface that remains on the machined object on the 1st clamping platform 34a by image mechanism 53, detect the cutting zone that forms on the surface of machined object.And, drive the index feed mechanism 64 of the 1st cutting mechanism 6a and the index feed mechanism 64 of the 2nd cutting mechanism 6b, make separately cutting tip 635 respectively with aim at (the 1st alignment process) by above-mentioned image mechanism 53 detected cutting zone contrapositions.
To remaining on during machined object on the 1st clamping platform 34a carries out the 1st alignment process, machined object is transported on the 2nd clamping platform 34b that is positioned machined object loading position shown in Figure 1 by not shown machined object conveyer.The machined object that is positioned on the 2nd clamping platform 34b passes through to drive not shown attraction mechanism, is attracted to remain on the 2nd clamping platform 34b upward (the 2nd machined object maintenance operation).
After machined object attracts to remain on the 2nd clamping platform 34, the action of the 2nd clamping platform 34b by the 2nd cutting feed mechanism 37b be positioned in the 2nd aligning guide 5b image mechanism 53 under.And, detect the 2nd alignment process in the zone that will cut of the machined object that on the 2nd clamping platform 34b, keeps by the 2nd aligning guide 5b.In addition, the 2nd alignment process and above-mentioned the 1st alignment process are similarly carried out.
On the other hand, after above-mentioned the 1st alignment process finished, the 1st clamping platform 34a moved to cutting zone.Then, the cutting tip 635 of the 1st cutting mechanism 6a and the cutting tip 635 of the 2nd cutting mechanism 6b are positioned on the cutting zone of the last machined object that keeps of the 1st clamping platform 34a.Then, by with the 635 rotating whiles of cutting tip of the cutting tip 635 of the 1st cutting mechanism 6a and the 2nd cutting mechanism 6b, with the 1st clamping platform 34a cutting feeding, the machining (the 1st cutting process) that the machined object that remains on the 1st clamping platform 34a is stipulated.
After above-mentioned the 1st cutting process finishes, move to cutting zone maintaining the 2nd clamping platform 34b that has carried out the machined object after above-mentioned the 2nd alignment process.Then, after carrying out above-mentioned the 1st cutting process by the 1st cutting mechanism 6a and the 2nd cutting mechanism 6b and above-mentioned the 1st cutting process similarly, the machined object that remains on the 2nd clamping platform 34b is carried out the 2nd cutting process.
Maintain the 1st clamping platform 34a of the machined object after the processing of the 1st above-mentioned cutting process that is through with, move towards the machined object loading and unloading area from cutting zone.At this, the attraction that remains on the machined object after the processing on the 1st clamping platform 34a keeps being disengaged.Then, the machined object after the processing is transported to next operation by not shown machined object conveyer.
As mentioned above, after machined object was transported to subsequent processing, the 1st clamping platform 34a kept above-mentioned the 1st machined object of next semiconductor wafer 10 to keep operation.Then, carry out the 1st above-mentioned alignment process, the 1st cutting process successively.
On the other hand, the 2nd clamping platform 34b that maintains the machined object after the processing of having carried out above-mentioned the 2nd cutting process moves towards the machined object loading position from cutting zone.At this, the attraction that remains on the machined object after the processing on the 2nd clamping platform 34b keeps being disengaged.Then, the machined object after the processing is transported to next operation by not shown machined object conveyer.Like this, after the machined object after the processing is transported to subsequent processing, carry out above-mentioned the 2nd machined object that next machined object remains on the 2nd clamping platform 34b is kept operation.Then, carry out the 2nd above-mentioned alignment process, the 2nd cutting process successively.
Carry out the 1st cutting process and the 2nd cutting process as described above, the grinding wheel 637 of the cutting tip 635 of the 1st cutting mechanism 6a and the 2nd cutting mechanism 6b wears away.Because cutting precision can not be kept when these abrasion reached a certain amount of, so cutting tip 635 needs to be replaced by new cutting tip after using certain hour.Below, with reference to Figure 13 to Figure 19 the replacing operation of cutting tip 635 is described.
At first, as shown in figure 13, drive the detent mechanism 75 (with reference to Fig. 7) of blade exchange device 7, movable substrate 73 is moved along pair of guide rails 722,722, the 1st cutting tip handle sturcture 91a of the 1st cutting tip charging crane 9a and the 2nd cutting tip charging crane 9b is located before use on the blade receiving position, and taking among blade receiving position and the 1st knife rest 71a and the 2nd knife rest 71b uses the 1st blade accommodating mechanism 712 of preceding cutting tip 635 mutually opposed before this use.Then, drive travel mechanism 94, the 1st cutting tip handle sturcture 91a is advanced towards the 1st blade accommodating mechanism 712, make be provided with on the other end of positioning element 913b and the bolster 712a of the 1st blade accommodating mechanism 712 combine recess 712d combination, make the axle center of bolster 712 consistent with the axle center of the positioning element 913b of the 1st cutting tip handle sturcture 91a.Then, what drive the 1st cutting tip handle sturcture 91a controls member driving mechanism 912, control parts 911 with 4 and drive, the endless groove 636c on the lining 636 of controlling pawl 911a and the ring-type that is formed at cutting tip 635 that is arranged at 4 front ends of controlling parts 911 is combined to radially inner side.Its result, the cutting tip 635 before using is controlled parts 911 by 4 and is controlled (cutting tip is controlled operation before using).
Carried out after cutting tip is controlled operation before the above-mentioned use, driving travel mechanism 94 retreats the 1st cutting tip handle sturcture 91a, and, drive detent mechanism 75, as illustrated in fig. 14 with nut rotating mechanism 81 and the nut handle sturcture 82 of the 1st clamp nut charging crane 8a and the 2nd clamp nut charging crane 8b, be positioned at rotary main shaft 632 opposed blade loading positions on.Then, drive travel mechanism 83, nut rotating mechanism 81 and nut handle sturcture 82 are advanced towards rotary main shaft 632.Its result is configured in the end face butt of 4 rotational pins 814 and clamp nut 638 on the rotatable parts 813, and the spring force that overcomes compression spring 815 retreats.In addition, the cylinder 823 of drive nut handle sturcture 82, driving ring 822 active position shown in the double dot dash line in Fig. 9 is moved, be driven into the position of controlling shown in the double dot dash line by controlling parts 821, control pawl 821a and combine with endless groove 638b on the outer peripheral face that is formed at clamp nut 638.Then, when 4 pin embedded hole 638a on just changeing 812,4 rotational pins 814 of drive motors and being formed at clamp nut 638 are consistent, chimeric with 4 pin embedded hole 638a.Its result, the just commentaries on classics driving force of motor 812 is delivered to clamp nut 638 by 4 rotational pins 814, and clamp nut 638 is released, takes off from blade installing component 633.So the clamp nut 638 that takes off from blade installing component 633 is controlled (clamp nut taking-up operation) by the parts 821 of controlling of nut handle sturcture 82.Moreover, carrying out clamp nut when taking out operation, the 2nd cap assembly 652 of the spindle assemblies 63 that has omitted among Figure 14 is positioned in the release position shown in the solid line among Fig. 5.
After carrying out above-mentioned clamp nut taking-up operation, drive travel mechanism 83, nut rotating mechanism 81 and nut handle sturcture 82 are retreated, and, drive detent mechanism 75, with the 2nd cutting tip handle sturcture 91b of the 1st cutting tip charging crane 9a and the 2nd cutting tip charging crane 9b, be positioned at and rotary main shaft 632 opposed blade loading positions as illustrated in fig. 15.Then, drive travel mechanism 94, the 2nd cutting tip handle sturcture 91b advanced towards rotary main shaft 632, the positioning element 913b that makes detent mechanism 913 be formed at rotary main shaft 632 front end faces on combine recess 632a combination.At this moment, even because the thermal expansions of each component parts etc. are staggered the axle center of rotary main shaft 632 and the axle center of positioning element 913b a little, because being installed as described above, the support plate 92 of the 1st cutting tip handle sturcture 91a and the 2nd cutting tip handle sturcture 91b can on the direction vertical, be supported movably, so being forced to property of positioning element 913b ground is consistent with the axle center of rotary main shaft 632 with the axis direction of rotary main shaft 632.Then, what drive the 2nd cutting tip handle sturcture 91b controls member driving mechanism 912, control parts 911 with 4 and drive, make to be arranged at 4 endless groove 636c on the lining 636 of controlling pawl 911a and the ring-type that is formed at cutting tip 635 of controlling parts 911 front ends and to combine to radially inner side.Its result, the cutting tip 635 after the use is controlled parts 911 by 4 and is controlled (using the back cutting tip to take out operation).
Carried out after cutting tip takes out operation after the above-mentioned use, drive travel mechanism 94 as illustrated in fig. 16, the 2nd cutting tip handle sturcture 91b is retreated, and, driving pulse motor 93, make support plate 92 rotate 180 degree, with the 1st cutting tip handle sturcture 91a and the 2nd cutting tip handle sturcture 91b counter-rotating.Its result will control the 1st cutting tip handle sturcture 91a that has controlled the cutting tip 635 before using in the operation by cutting tip before above-mentioned use, be positioned at and rotary main shaft 632 opposed blade replacement positions (cutting tip handle sturcture counter-rotating operation).
Then, drive travel mechanism 84 as illustrated in fig. 17, the 1st cutting tip handle sturcture 91a advanced towards rotary main shaft 632, make positioning element 913b be formed at rotary main shaft 632 front end faces combine recess 632a combination.At this moment, even because the thermal expansions of each component parts etc. are staggered the axle center of rotary main shaft 632 and the axle center of positioning element 913b a little, because being installed as described above, the support plate 92 of the 1st cutting tip handle sturcture 91a and the 2nd cutting tip handle sturcture 91b can on the direction vertical, be supported movably, so being forced to property of positioning element 913b ground is consistent with the axle center of rotary main shaft 632 with the axis direction of rotary main shaft 632.Thereby, because controlled the axle center of the cutting tip 635 before the use that parts 911 are controlling by 4 of the 1st cutting tip handle sturcture 91a also consistent with the axle center of rotary main shaft 632, so the embedded hole 636a of ring-type lining 636 can be entrenched among the installation portion 633a cylindraceous of blade installing component 633 reliably.Then, what drive the 1st cutting tip handle sturcture 91a controls member driving mechanism 912, controls parts 911 with 4 and drives to radial outside, removes 4 and controls controlling of 911 pairs of cutting tips 635 of parts.Its result, the cutting tip 635 before using is installed among the installation portion 633a cylindraceous of cutting tip installing component 633 (cutting tip installation procedure before using).
Before having carried out above-mentioned use behind the cutting tip installation procedure, driving travel mechanism 94 retreats the 1st cutting tip handle sturcture 91a, and, drive detent mechanism 75, take out the nut handle sturcture 82 of controlling clamp nut 638 in the operation with the nut rotating mechanism 81 of the 1st clamp nut charging crane 8a and the 2nd clamp nut charging crane 8b and at above-mentioned clamp nut as illustrated in fig. 18, be positioned at and rotary main shaft 632 opposed blade loading positions.Then, drive travel mechanism 83, just nut rotating mechanism 81 and nut handle sturcture 82 advance towards rotary main shaft 632.Its result is the installation portion 633a butt cylindraceous that is held in clamp nut 638 and blade installing component 633 on the nut handle sturcture 82.Then, when motor 812 counter-rotating was driven, turning power was transmitted to clamp nut 638 by 4 rotational pins 814 of rotating mechanism 81, among the external screw thread 633c that clamp nut 638 is formed on installation portion 633a by screw threads for fastening.Then, the cylinder 823 of drive nut handle sturcture 82, by the active position shown in the double dot dash line of driving ring 822 from Fig. 9 is moved to the going-back position shown in the solid line, be driven into the release position shown in the solid line from the position of controlling shown in the double dot dash line thereby will control parts 821.Its result, the cutting tip 635 before using grips (using fixedly operation of preceding cutting tip) by the flange part 633b and the clamp nut 638 of blade installing component 633.
Cutting tip is fixedly after the operation before having carried out above-mentioned use, driving travel mechanism 84 retreats nut rotating mechanism 81 and nut handle sturcture 82, and, driving detent mechanism 75 makes movable substrate 73 move along pair of guide rails 722,722, with the 2nd cutting tip handle sturcture 91b of the 1st cutting tip charging crane 9a and the 2nd cutting tip charging crane 9b (controlling and using the back cutting tip), be positioned at the 1st knife rest 71a and the 2nd knife rest 71b in the back blade reception positions of the 2nd blade accommodating mechanism 713 opposed use.Then, drive travel mechanism 94 as illustrated in fig. 19, the 2nd cutting tip handle sturcture 91b is advanced towards the 2nd blade accommodating mechanism 713, what be provided with on the positioning element 913b that makes detent mechanism 913 and the other end of the bolster 713a of the 2nd blade accommodating mechanism 713 combines recess 713d combination, and, will be cutting tip after the use that is held among the 2nd cutting tip handle sturcture 91b 636 chimeric and be accommodated on the bolster 713a of the 2nd cutting tip accommodating mechanism 713.At this moment, even because the thermal expansions of each component parts etc. are staggered the axle center of bolster 713a and the axle center of positioning element 913b a little, be supported movably because the support plate 92 of the 1st cutting tip handle sturcture 91a and the 2nd cutting tip handle sturcture 91b is installed as described above, so being forced to property of positioning element 913b ground is consistent with the axle center of bolster 713a.Thereby the embedded hole 636a that is controlled the ring-type lining 636 of the cutting tip 635 after the use that parts 911 are controlling by 4 of the 2nd cutting tip handle sturcture 91b is entrenched on the bolster 713a of the 2nd blade accommodating mechanism 713 reliably.Then, remove the 2nd cutting tip handle sturcture 91b to using control (the using the back cutting tip to take in operation) of back cutting tip 635.Then, drive travel mechanism 95, the 2nd cutting tip handle sturcture 91b is retreated, return state shown in Figure 8.
More than, describe the present invention according to illustrated embodiment, but the present invention also only is not limited to this embodiment, in aim scope of the present invention various distortion can be arranged.For example in illustrated embodiment, show the example that has the 1st clamp nut charging crane 8a and the 2nd clamp nut charging crane 8b and the 1st cutting tip charging crane 9a and the 2nd cutting tip charging crane 9b with the 1st cutting mechanism 6a and the 2nd cutting mechanism 6b accordingly, but be under 1 the situation, also can possess 1 clamp nut charging crane and cutting tip charging crane at cutting mechanism.
Moreover, preferably, by at the above-mentioned cutting tip movable baffle plate of configuration between changing device 7 and the 1st cutting mechanism 6a and the 2nd cutting mechanism 6b more, when cutting operation, cover by baffle plate, be attached to the more component parts of changing device 7 of cutting tip with the cutting water that prevents to disperse.
Claims (3)
1, a kind of more changing device of cutting tip, it is set in the topping machanism, be used to change cutting tip, this topping machanism possesses: keep the clamping platform of machined object and the cutting mechanism that cutting is maintained at the machined object on this clamping platform, this cutting mechanism has rotary main shaft, is entrenched in cutting tip and the leading section that screw thread is combined in this rotary main shaft and the clamp nut that is used for fastening this cutting tip of the leading section of this rotary main shaft, it is characterized in that:
The more changing device of this cutting tip possesses:
Knife rest has and is arranged on away from the position of described rotary main shaft and the 2nd blade accommodating mechanism of the cutting tip after taking in the 1st blade accommodating mechanism of the cutting tip before using and taking in use;
The clamp nut charging crane loads and unloads described clamp nut;
The cutting tip charging crane loads and unloads described cutting tip at the leading section of described rotary main shaft; With
Cutting tip charging crane detent mechanism, with described cutting tip charging crane be positioned at the opposed blade of the front end face of described rotary main shaft loading position, with the opposed use of described the 1st blade accommodating mechanism of described knife rest before the blade receiving position and with the back blade reception position of opposed uses of described the 2nd blade accommodating mechanism
Described cutting tip charging crane has: cutting tip handle sturcture, the support plate that described cutting tip handle sturcture is installed, the supporting device of the described support plate of supporting and the travel mechanism that makes described supporting device advance and retreat of periphery of controlling the lining of cutting tip
Described cutting tip handle sturcture has: be used to control cutting tip lining periphery and upwards have the compartment of terrain configuration week a plurality of control parts, will be described a plurality of control parts respectively driving diametrically control member driving mechanism and be configured in described a plurality of center of controlling parts and with the detent mechanism that combines in conjunction with recess that is formed at described rotary main shaft front end face axle center
Described supporting device supports described support plate, makes it removable on the direction vertical with the axis direction of described rotary main shaft,
Described travel mechanism advances and retreat described supporting device on the axis direction of described rotary main shaft.
2, according to the more changing device of the described cutting tip of claim 1, it is characterized in that:
Described cutting tip handle sturcture has: the 2nd handle sturcture of the cutting tip after controlling the 1st cutting tip handle sturcture of the cutting tip before using and controlling use, described the 1st cutting tip handle sturcture and described the 2nd handle sturcture are installed on the described support plate.
3, according to the more changing device of the described cutting tip of claim 2, it is characterized in that:
Described supporting device comprises the slew gear that described support plate is rotated at least 180 degree, and described the 1st cutting tip handle sturcture and described the 2nd handle sturcture are configured in point-symmetric position with respect to the centre of gyration of described support plate.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005298856A JP4837973B2 (en) | 2005-10-13 | 2005-10-13 | Cutting blade changer |
| JP298856/2005 | 2005-10-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1947931A true CN1947931A (en) | 2007-04-18 |
| CN100537129C CN100537129C (en) | 2009-09-09 |
Family
ID=38017611
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2006101318341A Active CN100537129C (en) | 2005-10-13 | 2006-10-12 | Apparatus for exchanging a cutting blade |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4837973B2 (en) |
| KR (1) | KR101265706B1 (en) |
| CN (1) | CN100537129C (en) |
| TW (1) | TW200722211A (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102029657A (en) * | 2009-10-07 | 2011-04-27 | 株式会社迪思科 | Cutter exchange device |
| WO2016058294A1 (en) * | 2014-10-14 | 2016-04-21 | 山东新安凯科控科技有限公司 | Multifunctional machine tool |
| WO2019006838A1 (en) * | 2017-07-03 | 2019-01-10 | 广州蓝圣智能科技有限公司 | Mechanism for automatically replacing grinding wheel piece for electric sander |
| CN109216233A (en) * | 2017-07-04 | 2019-01-15 | 株式会社迪思科 | Cutter loading-unloading jig, cutter loading-unloading method, pulling-out of cutter method and cutting apparatus |
| CN109465975A (en) * | 2017-09-07 | 2019-03-15 | 株式会社迪思科 | Cutting tool provides device |
| CN109866063A (en) * | 2019-04-23 | 2019-06-11 | 杭州红凌服饰有限公司 | A kind of numerically-controlled machine tool tool changing device |
| CN110098106A (en) * | 2018-01-30 | 2019-08-06 | 东和株式会社 | Flange replaces the method that mechanism, disconnecting device, flange replacement and cutting product manufacture |
| CN110281407A (en) * | 2018-03-19 | 2019-09-27 | 株式会社迪思科 | Cutting apparatus |
| CN114473632A (en) * | 2022-01-27 | 2022-05-13 | 东莞宝钢钢材部件有限公司 | Device for rapidly confirming deflection angle of pendulum shear |
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| CN101310902B (en) | 2007-05-24 | 2011-01-26 | 鸿准精密模具（昆山）有限公司 | Clamping device and use method thereof |
| JP5014892B2 (en) * | 2007-06-25 | 2012-08-29 | 株式会社ディスコ | Blade replacement tool |
| JP5101979B2 (en) * | 2007-10-15 | 2012-12-19 | 株式会社ディスコ | Blade case |
| JP5199777B2 (en) * | 2008-08-04 | 2013-05-15 | 株式会社ディスコ | Cutting equipment |
| CN102194731B (en) * | 2010-03-12 | 2013-03-27 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Position calibration system and plasma processing device |
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| JP5216075B2 (en) * | 2010-12-22 | 2013-06-19 | Ｔｏｗａ株式会社 | Blade attachment / detachment device |
| JP2014091208A (en) * | 2012-11-06 | 2014-05-19 | Disco Abrasive Syst Ltd | Tool attachment and detachment jig |
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| JP2021013968A (en) * | 2019-07-10 | 2021-02-12 | 株式会社ディスコ | Processing device |
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| JP2617876B2 (en) * | 1994-02-04 | 1997-06-04 | 株式会社ディスコ | Blade autochanger |
| JPH07276227A (en) * | 1994-04-06 | 1995-10-24 | Disco Abrasive Syst Ltd | Automatic blade changer |
| JP4481667B2 (en) | 2004-02-02 | 2010-06-16 | 株式会社ディスコ | Cutting method |
-
2005
- 2005-10-13 JP JP2005298856A patent/JP4837973B2/en active Active
-
2006
- 2006-09-21 TW TW095134964A patent/TW200722211A/en unknown
- 2006-10-12 CN CNB2006101318341A patent/CN100537129C/en active Active
- 2006-10-13 KR KR1020060099756A patent/KR101265706B1/en active IP Right Grant
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102029657A (en) * | 2009-10-07 | 2011-04-27 | 株式会社迪思科 | Cutter exchange device |
| WO2016058294A1 (en) * | 2014-10-14 | 2016-04-21 | 山东新安凯科控科技有限公司 | Multifunctional machine tool |
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| CN109216233A (en) * | 2017-07-04 | 2019-01-15 | 株式会社迪思科 | Cutter loading-unloading jig, cutter loading-unloading method, pulling-out of cutter method and cutting apparatus |
| JP2019013988A (en) * | 2017-07-04 | 2019-01-31 | 株式会社ディスコ | Blade attachment/detachment jig, blade attachment/detachment method, blade removing method, and cutting device |
| CN109216233B (en) * | 2017-07-04 | 2023-08-15 | 株式会社迪思科 | Tool attaching/detaching jig, tool attaching/detaching method, tool removing method, and cutting device |
| TWI757527B (en) * | 2017-09-07 | 2022-03-11 | 日商迪思科股份有限公司 | Cutting blade feeder |
| CN109465975B (en) * | 2017-09-07 | 2022-05-17 | 株式会社迪思科 | Cutting tool supply device |
| CN109465975A (en) * | 2017-09-07 | 2019-03-15 | 株式会社迪思科 | Cutting tool provides device |
| CN110098106A (en) * | 2018-01-30 | 2019-08-06 | 东和株式会社 | Flange replaces the method that mechanism, disconnecting device, flange replacement and cutting product manufacture |
| CN110098106B (en) * | 2018-01-30 | 2023-04-07 | 东和株式会社 | Flange replacing mechanism, cutting device, flange replacing method and method for manufacturing cut product |
| CN110281407A (en) * | 2018-03-19 | 2019-09-27 | 株式会社迪思科 | Cutting apparatus |
| CN109866063A (en) * | 2019-04-23 | 2019-06-11 | 杭州红凌服饰有限公司 | A kind of numerically-controlled machine tool tool changing device |
| CN114473632A (en) * | 2022-01-27 | 2022-05-13 | 东莞宝钢钢材部件有限公司 | Device for rapidly confirming deflection angle of pendulum shear |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4837973B2 (en) | 2011-12-14 |
| TWI367138B (en) | 2012-07-01 |
| CN100537129C (en) | 2009-09-09 |
| JP2007105829A (en) | 2007-04-26 |
| KR20070041384A (en) | 2007-04-18 |
| KR101265706B1 (en) | 2013-05-21 |
| TW200722211A (en) | 2007-06-16 |
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