CN1943981A - Apparatus for exchanging cutting blade - Google Patents
Apparatus for exchanging cutting blade Download PDFInfo
- Publication number
- CN1943981A CN1943981A CNA2006101415498A CN200610141549A CN1943981A CN 1943981 A CN1943981 A CN 1943981A CN A2006101415498 A CNA2006101415498 A CN A2006101415498A CN 200610141549 A CN200610141549 A CN 200610141549A CN 1943981 A CN1943981 A CN 1943981A
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- China
- Prior art keywords
- cutting tip
- cutting
- charging crane
- blade
- clamp nut
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
- B23Q3/155—Arrangements for automatic insertion or removal of tools, e.g. combined with manual handling
- B23Q3/1552—Arrangements for automatic insertion or removal of tools, e.g. combined with manual handling parts of devices for automatically inserting or removing tools
- B23Q3/1554—Transfer mechanisms, e.g. tool gripping arms; Drive mechanisms therefore
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
- B23Q3/155—Arrangements for automatic insertion or removal of tools, e.g. combined with manual handling
- B23Q3/15513—Arrangements for automatic insertion or removal of tools, e.g. combined with manual handling the tool being taken from a storage device and transferred to a tool holder by means of transfer devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B27—WORKING OR PRESERVING WOOD OR SIMILAR MATERIAL; NAILING OR STAPLING MACHINES IN GENERAL
- B27B—SAWS FOR WOOD OR SIMILAR MATERIAL; COMPONENTS OR ACCESSORIES THEREFOR
- B27B5/00—Sawing machines working with circular or cylindrical saw blades; Components or equipment therefor
- B27B5/29—Details; Component parts; Accessories
- B27B5/30—Details; Component parts; Accessories for mounting or securing saw blades or saw spindles
- B27B5/32—Devices for securing circular saw blades to the saw spindle
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
- B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
- B28D5/029—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels with a plurality of cutting blades
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Wood Science & Technology (AREA)
- Forests & Forestry (AREA)
- Dicing (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Harvester Elements (AREA)
Abstract
Provided is a replacing device of cutting blade capable of surely matching an axial center of a rotary spindle with axial centers of fastening nut and cutting blade. This replacing device of cutting blade is arranged in a cutting device for replacing cutting blade, the cutting device is provided with: a clamping platform; a cutting mechanism of the cutting blade for cutting object on the clamping platform, the cutting mechanism is provided with the rotary spindle and the fastening nut screwed to a distal end part of the rotary spindle to fasten the cutting blade. The device is characterized in that it is provided with: a blade rack provided with a first storage means arranged at a position isolated from the rotary spindle to store the cutting blade before use and a second storage means to store the used cutting blade; a fastening nut attaching/detaching mechanism for attaching/detaching the fastening nut; a cutting blade attaching/detaching mechanism for attaching/detaching the cutting blade at a distal end of the rotary spindle; a movable substrate for supporting the fastening nut attaching/detaching mechanism and cutting blade attaching/detaching mechanism; and a positioning means for moving the movable substrate along a guide rail to be positioned at a prescribed position.
Description
Technical field
The present invention relates to a kind of more changing device that is equipped on the cutting tip in the topping machanism that cuts machined objects such as semiconductor wafer.
Background technology
For example, in semiconductor devices manufacturing process, on by the surface of roughly discoideus semiconductor wafer, be called as the cutting apart in a plurality of zones that preset lines marks off of Cutting Road (street) by what clathrate formed, form circuit such as IC, LSI, cut apart along cutting apart preset lines by each zone that will form this circuit, make each semiconductor chip.As the segmenting device of dividing semiconductor wafer, the general topping machanism that uses as cutter sweep.This topping machanism has clamping platform that keeps machined object and the cutting mechanism with cutting tip that the machined object that remains on this clamping platform is cut.
Be equipped on the cutting tip in the above-mentioned topping machanism because use can cause abrasion, therefore need after using certain hour, change.A kind of scheme (for example with reference to patent documentation 1) of automatically carrying out the blade automatic changer of this cutting tip replacing has been proposed for this reason.This blade automatic changer has cutting tip is fastened on the clamp nut charging crane that the clamp nut on the front end of rotary main shaft is loaded and unloaded, and on the front end of rotary main shaft the blade charging crane of loading and unloading cutting tip.And, the clamp nut charging crane is made of cardinal extremity supporting arm that disposes swingably and the nut slew gear that is disposed on this supporting arm front end, and the blade charging crane is made of cardinal extremity supporting arm that disposes swingably and the blade handle sturcture that is arranged on this supporting arm front end.
Patent documentation 1: No. 2617876 communique of Japan Patent
Yet, because nut slew gear in the above-mentioned automatic blade exchange device and the blade handle sturcture in the clamp nut charging crane are and are disposed at cardinal extremity and can swing structure on the supporting arm of setting, therefore exist because the small angular deviation of supporting arm, the axle center of rotary main shaft and the axle center of clamp nut and cutting tip are misfitted, can not carry out the problem that cutting tip is changed automatically.
Summary of the invention
The present invention makes in view of the above fact, and the technical problem underlying that it will solve provides the more changing device of the consistent reliably cutting tip in a kind of axle center that can make rotary main shaft and the axle center of clamp nut and cutting tip.
In order to solve above-mentioned major technology problem, the present invention is a kind of more changing device of cutting tip, is arranged in the topping machanism, is used to change cutting tip, and this topping machanism possesses: the clamping platform that keeps machined object; And has a cutting mechanism of cutting tip that cutting is maintained at the machined object on the described clamping platform, this cutting mechanism has the clamp nut that rotary main shaft and screw thread are combined in the leading section of this rotary main shaft and are used for fastening this cutting tip, it is characterized in that
The more changing device of this cutting tip possesses: knife rest has and is arranged at away from the position of described rotary main shaft and the 2nd blade accommodating mechanism of the cutting tip after taking in the 1st blade accommodating mechanism of the cutting tip before using and taking in use; The clamp nut charging crane is used to load and unload described clamp nut; The cutting tip charging crane is used for loading and unloading described cutting tip at the front end of described rotary main shaft; Movable substrate supports described clamp nut charging crane and cutting tip charging crane; And detent mechanism, make described movable substrate move and be positioned at along guide rail on the position of regulation,
The described clamp nut charging crane that described detent mechanism will be configured on the described movable base station is positioned at and the opposed blade of the front end face of described rotary main shaft loading position, with described cutting tip charging crane be positioned at described blade loading position and with the opposed use of described the 1st blade accommodating mechanism of described knife rest before the blade receiving position and with the opposed use of described the 2nd blade accommodating mechanism back blade reception position.
Preferably, above-mentioned cutting tip charging crane has: the 2nd handle sturcture of the cutting tip after controlling the 1st cutting tip handle sturcture of the cutting tip before using and controlling use.
In addition, above-mentioned cutting mechanism has the 1st cutting mechanism and the 2nd cutting mechanism, is installed in the cutting tip configuration opposed to each other mutually on cutting tip and the rotary main shaft that is installed in the 2nd cutting mechanism on the rotary main shaft of the 1st cutting mechanism;
Above-mentioned knife rest, clamp nut charging crane and cutting tip charging crane and the 1st cutting mechanism and the 2nd cutting mechanism have the 1st knife rest and the 2nd knife rest, the 1st clamp nut charging crane and the 2nd clamp nut charging crane and the 1st cutting tip charging crane and the 2nd cutting tip charging crane respectively accordingly.
The effect of invention
In the more changing device of cutting tip of the present invention, because clamp nut charging crane and cutting tip charging crane are configured on the movable substrate that moves along guide rail, and by detent mechanism be positioned at the blade loading position respectively, use before blade receiving position and using on the blade reception position of back, therefore can not have angular deviation ground, with clamp nut charging crane and cutting tip charging crane be positioned at accurately with opposed position, the axle center of rotary main shaft on.
Description of drawings
Fig. 1 be equipped the cutting tip that constitutes according to the present invention more changing device topping machanism want the portion stereogram.
Fig. 2 is the stereogram of the cutting mechanism of topping machanism shown in Figure 1
Fig. 3 is the A-A profile among Fig. 1.
Fig. 4 is the exploded perspective view of the mounting structure of the cutting tip in the spindle assemblies of the cutting mechanism of formation topping machanism shown in Figure 1.
Fig. 5 wants portion's stereogram for the spindle assemblies of the cutting mechanism that constitutes topping machanism shown in Figure 1.
Fig. 6 is for constituting the stereogram of the knife rest of the more changing device of the cutting tip of formation according to the present invention.
Fig. 7 is the guide mechanism of formation more changing device of the cutting tip of formation according to the present invention and the stereogram of detent mechanism.
Fig. 8 is the 1st clamp nut charging crane of formation more changing device of the cutting tip of formation according to the present invention and the stereogram of the 2nd clamp nut charging crane and the 1st cutting tip charging crane and the 2nd cutting tip charging crane.
Fig. 9 is for constituting the profile of the clamp nut charging crane of the more changing device of the cutting tip of formation according to the present invention.
Figure 10 is for constituting the profile of the cutting tip charging crane of the more changing device of the cutting tip of formation according to the present invention.
Figure 11 for the use in the blade exchange operation of the more changing device of the cutting tip that constitutes according to the present invention before cutting tip control the key diagram of operation.
Figure 12 unloads the key diagram of operation for the clamp nut in the blade exchange operation of the more changing device of the cutting tip of formation according to the present invention.
Figure 13 for the use in the blade exchange operation of the more changing device of the cutting tip that constitutes according to the present invention after cutting tip unload the key diagram of operation.
Figure 14 is the key diagram of the cutting tip handle sturcture counter-rotating operation in the blade exchange operation of more changing device of the cutting tip that constitutes according to the present invention.
Figure 15 is the key diagram of cutting tip installation procedure before the use in the blade exchange operation of more changing device of the cutting tip that constitutes according to the present invention.
Figure 16 is the fixing key diagram of operation of cutting tip before the use in the blade exchange operation of more changing device of the cutting tip that constitutes according to the present invention.
Figure 17 for the use in the blade exchange operation of the more changing device of the cutting tip that constitutes according to the present invention after cutting tip take in the key diagram of operation.
The specific embodiment
Below, be described in detail with reference to the better embodiment of accompanying drawing the more changing device of the cutting tip of formation according to the present invention.
In Fig. 1, show the more changing device that is equipped with according to the present invention the cutting tip that constitutes topping machanism want portion's stereogram.
Topping machanism shown in Figure 1 has static base station 2.On this static base station 2, dispose and keep machined object and make it to clamping platform mechanism 3 that the cutting direction of feed shown in the arrow X moves.
On the 1st supporting base station 32a and the 2nd supporting base station 32b, dispose the 1st cylinder part 33a and the 2nd cylinder part 33b respectively, dispose the 1st clamping platform 34a and the 2nd clamping platform 34b in the upper end of the 1st cylinder part 33a and the 2nd cylinder part 33b respectively pivotally.The 1st clamping platform 34a and the 2nd clamping platform 34b are made of the suitable porous material of for example porous ceramic, are connected in the not shown attraction mechanism.Thereby the 1st clamping platform 34a and the 2nd clamping platform 34b attract the machined object that is positioned on the mounting surface 341,341 to keep by being communicated with the attraction source selectively by not shown attraction mechanism.In addition, the 1st clamping platform 34a and the 2nd clamping platform 34b are turned round aptly by the pulse motor (not shown) that is disposed in the 1st cylinder part 33a and the 2nd cylinder part respectively.In addition, on the upper end of the 1st cylinder part 33a and the 2nd cylinder part 33b, dispose to have the hole of inserting the 1st clamping platform 34a and the 2nd clamping platform 34b respectively and cover the above-mentioned the 1st respectively and support the 1st cap assembly 35a and the 2nd cap assembly 35b that base station 32a and the 2nd supports base station 32b.At the upper surface of the 1st cap assembly 35a and the 2nd cap assembly 35b, configuration is used to detect the 1st 36a of blade testing agency and the 2nd 36b of blade testing agency of the position of cutting tip described later respectively.
Proceed explanation according to Fig. 1, the clamping platform mechanism 3 in the illustrated embodiment has and is used for the 1st clamping platform 34a and the 2nd clamping platform 34b are cut feed mechanism 37b along the 1st cutting feed mechanism 37a and the 2nd that the 1st guide rail 31a and the 2nd guide rail 31b move respectively on the cutting direction of feed shown in Fig. 1 arrow X.The 1st cutting feed mechanism 37a and the 2nd cutting feed mechanism 37b be by being disposed at external screw rod 371 between the pair of tracks parts 311,311 that constitute the 1st guide rail 31a and the 2nd guide rail 31b respectively abreast, supporting a bearing at end 372 of external screw rod 371 pivotally, and be connected the pulse motor 373 that is used for this external screw rod 371 forward or reverse are driven on the other end of external screw rod 371 and constitute.The 1st cutting feed mechanism 37a that so constitutes and the 2nd cutting feed mechanism 37b, its external screw rod 371 separately respectively be formed at above-mentioned the 1st supporting base station 32a and the 2nd support base station 32b on internal thread 322 screw threads combine.Thereby, the 1st cutting feed mechanism 37a and the 2nd cutting feed mechanism 37b driving pulse motor 373 respectively come forward or reverse to drive external screw rod 371, thus make be disposed at above-mentioned the 1st supporting base station 32a and the 2nd support the 1st clamping platform 34a on the base station 32b and the 2nd clamping platform 34b can be respectively along the 1st guide rail 31a and the 2nd guide rail 31b, move along the cutting direction of feed shown in the arrow X among Fig. 1.
Topping machanism in the illustrated embodiment has the scaffold 4 of the door type of crossing over above-mentioned the 1st guide rail 31a and the 2nd guide rail 31b setting.This type scaffold 4 by the 1st post portion 41 that is disposed at the 1st guide rail 31a side, be disposed at the 2nd post portion 42 of the 2nd guide rail 31b side and connect the 1st post portion 41 and the 2nd post portion 42 and constitute along the support 43 of the configuration of the index feed direction shown in the arrow Y vertical with the cutting direction of feed shown in the arrow X, central portion is provided with the opening 44 that allows above-mentioned the 1st clamping platform 34a and the 2nd clamping platform 34b to move.The upper end of the 1st post portion 41 and the 2nd post portion 42 width respectively forms with widening, is respectively arranged with the opening 411 and 421 that the spindle assemblies that allows cutting mechanism described later moves on this upper end.On a side's of above-mentioned support 43 face, be provided with pair of guide rails 431,431 along the index feed direction shown in the arrow Y, on the opposing party's face, along the direction (index feed direction in Fig. 1 arrow Y shown in) vertical pair of guide rails 432,432 be set as illustrated in fig. 3 with paper.
The 1st aligning guide 5a and the 2nd aligning guide 5b that the pair of guide rails 431,431 that is configured to be provided with on the support 43 of the scaffold 4 of above-mentioned door type of having topping machanism in the illustrated embodiment moves.The 1st aligning guide 5a and the 2nd aligning guide 5b respectively by movable block 51, be used for making this movable block 51 to constitute along travel mechanism 52,52 that pair of guide rails 431,431 moves and the image mechanism 53,53 that is installed in movable block 51. Movable block 51,51 be provided with respectively with above-mentioned pair of guide rails 431,431 chimeric be guided groove 511,511, be guided groove 511,511 by this and be entrenched on the pair of guide rails 431,431, movable block 51,51 constitutes and can move along pair of guide rails 431,431.
The image mechanism 53,53 that is installed in respectively on the above-mentioned movable block 51,51 has imaging apparatus (CCD) respectively, and the picture signal after the shooting transmits to not shown controlling organization.
On the another side (with the opposite face of face that is provided with above-mentioned the 1st aligning guide 5a and the 2nd aligning guide 5b) of the support 43 that constitutes above-mentioned door type scaffold 4, be provided with the 1st cutting mechanism 6a and the 2nd cutting mechanism 6b.With reference to Fig. 2 and Fig. 3 the 1st cutting mechanism 6a and the 2nd cutting mechanism 6b are described.The 1st cutting mechanism 6a and the 2nd cutting mechanism 6b have calibration respectively and move base station 61 and mobile base station 62 of incision and spindle assemblies 63.The face that calibration moves base station 61 1 sides is provided with and is guided groove 611,611, this be guided groove 611,611 and the pair of guide rails 432,432 that is arranged on the another side of above-mentioned support 43 chimeric, be guided groove 611,611 and pair of guide rails 432,432 is chimeric by this, calibration moves base station 61 and can constitute movably along pair of guide rails 432,432.In addition, move at calibration on the another side of base station 61, as shown in Figure 3, along being provided with pair of guide rails 612,612 (in Fig. 3, only showing a side guide rail) by the incision direction of feed shown in the arrow Z (with the perpendicular direction of the mounting surface 341 of the 1st clamping platform 34a and the 2nd clamping platform 34b).And, move at calibration on base station 61,61 1 sides' the face, the escape 613,613 of the external screw rod break-through that allows calibration feed mechanism described later is being set at above-below direction with being provided with step.
The mobile base station 62 of above-mentioned incision is supported installation portion 622 formations of at right angles flatly extending portion 621 lower ends by the portion that is supported 621 of extending at above-below direction with from this.As shown in Figure 2, the face that is supported installation portion 622 sides in the portion 621 is provided with and is guided groove 623,623 (only showing a side the groove that is guided in Fig. 3), this is guided groove 623,623 and above-mentioned calibration, and to move the pair of guide rails 612,612 that is provided with on base station 61 the opposing party's the face chimeric, by this being guided groove and pair of guide rails 612,612 is chimeric, becoming the mobile base station 62 of incision can be along pair of guide rails 612,612 at constituting of being moved by the incision direction of feed shown in the arrow Z.So be installed in calibration and move the mobile base station 62 of incision on the base station 61, as shown in Figure 1, installation portion 622 passes opening 44 from the side that the above-mentioned calibration that a type scaffold 4 is installed moves the opposing party of base station 61 and disposes highlightedly to the side's that above-mentioned the 1st aligning guide 5a and the 2nd aligning guide 5b are housed side.
Above-mentioned spindle assemblies 63 is installed in the lower surface of the installation portion 622 of the mobile base station 62 of incision that forms the 1st cutting mechanism 6a and the 2nd cutting mechanism 6b respectively.This spindle assemblies 63 has main shaft housing 631 respectively as shown in Figure 4, but on this main shaft housing 631 and by not shown servomotor, make its rotating rotary main shaft 632 by pivoting support, be installed in the blade installing component 633 on these rotary main shaft 632 leading sections, combine the also hold-down nut 634 of fixed blade installing component 633 with the not shown external screw thread screw thread on the leading section that is arranged at rotary main shaft 632, be installed in the cutting tip 635 on the blade installing component 633, and be used for and blade installing component 633 between clamp nut 638 that this cutting tip 635 is gripped.
Moreover, the rotary main shaft 632 of the 1st cutting mechanism 6a and the rotary main shaft 632 of the 2nd cutting mechanism 6b as illustrated in fig. 2, axis direction is provided with along the index feed direction shown in the arrow Y.And the cutting tip 633 that is installed on the rotary main shaft 632 of the 1st cutting mechanism 6a is provided with opposed to each other with cutting tip 633 on the rotary main shaft 632 that is installed in the 2nd cutting mechanism 6b.
In addition, the spindle assemblies 63 in the illustrated embodiment has the main shaft cover 64 that covers above-mentioned main shaft housing 631, is installed in the front end of this main shaft cover 64 and covers the blade cover 65 of above-mentioned cutting tip 635 as illustrated in fig. 5.Blade cover 65 is by the 1st cap assembly 651 that is installed in main shaft cover 64 front ends and be installed in the front surface of the 1st cap assembly 651 and can constitute to the 2nd cap assembly 652 that the side disposes movably, and the 2nd cap assembly 652 is positioned among Fig. 5 in the release position shown in the solid line and Fig. 5 on the closed position shown in the double dot dash line by not shown air slide mechanism.The 2nd cap assembly 652 time is positioned among Fig. 5 on the closed position shown in the double dot dash line in cutting, is positioned at when cutting tip is changed among Fig. 5 on the release position shown in the solid line.Moreover, on the 1st cap assembly 651 and the 2nd cap assembly 652, dispose cutting water supply nozzle 66 (in Fig. 5, only not going out to be configured in the cutting water supply nozzle 66 on the 2nd cap assembly 652) respectively.This cutting water supply nozzle 66 that is disposed on the 1st cap assembly 651 and the 2nd cap assembly 652 is connected with not shown cutting water feed mechanism.
The 1st cutting mechanism 6a of illustrated embodiment and the 2nd cutting mechanism 6b have be used for above-mentioned calibration move base station 61,61 along pair of guide rails 432,432 to index feed mechanism 64,64 that the index feed direction shown in Fig. 2 arrow Y moves. Index feed mechanism 64,64 by be configured in abreast respectively external screw rod 641 between the pair of guide rails 432,432, pivotally support external screw rod 641 a bearing at end 642, be connected the pulse motor 643 that on the other end of external screw rod 641 these external screw rod 641 forward or reverse is driven and constitute.Moreover external screw rod 641,641 is configured in above-mentioned calibration and moves the corresponding respectively height and position of escape 613,613 that is provided with on the base station 61,61.So the external screw rod separately 641,641 of the index feed mechanism 64,64 that constitutes respectively be formed at internal thread 614,614 screw threads that above-mentioned calibration moves on the base station 61,61 and combine.Thereby, index feed mechanism 64,64 is by difference driving pulse motor 643,643, external screw rod 641,641 forward or reverse are driven, can make calibration move base station 61,61 thus and move along pair of guide rails 432,432 index feed direction shown in the arrow Y in Fig. 1.When this calibration moves base station 61,61 and moves, connect at calibration by external screw rod 641,641 and to move the escape 613,613 that is provided with on the base station 61,61, calibration moves base station and allows it to move.
In addition, the 1st cutting mechanism 6a in the illustrated embodiment and the 2nd cutting mechanism 6b have and are used for incision feed mechanism 65,65 that the mobile base station 62,62 of above-mentioned incision is moved to the incision direction of feed shown in the arrow Z along pair of guide rails 612,612 as shown in Figures 2 and 3. Incision feed mechanism 65,65 by the external screw rod 651 that dispose abreast with pair of guide rails 612,612 respectively, pivotally support external screw rod 651 a bearing at end 652, be connected on the other end of external screw rod 651 pulse motor 653 of this external screw rod 651 forward or reverse driving constituted.So the external screw rod separately 651 of the incision feed mechanism 65,65 that constitutes combines with the internal thread 622a screw thread of the portion that is supported 621 that is formed at the mobile base station 62 of above-mentioned incision respectively.Thereby incision feed mechanism 65,65 drives external screw rod 651 forward or reverse by difference driving pulse motor 653, and the mobile base station 62 of incision is moved along pair of guide rails 622,622 incision direction of feed shown in the arrow Z in Fig. 1 and Fig. 3.
Return Fig. 1 and proceed explanation, the topping machanism of illustrated embodiment has and is used for more changing device 7 of cutting tip that the cutting tip 635 that is installed on the above-mentioned rotary main shaft 632 is changed.Cutting tip more changing device 7 is configured in the rear (disposing the 1st cutting mechanism 6a and the 2nd cutting mechanism 6b side) of the scaffold 4 of above-mentioned door type.This cutting tip is changing device 7 movable substrate 73 that has the 1st knife rest 71a and the 2nd knife rest 71b in both sides, the rear configuration of the scaffold 4 of above-mentioned door type, be disposed at guide mechanism 72 between the 1st knife rest 71a and the 2nd knife rest 71b, can move along this guide mechanism 72 more.
The 1st knife rest 71a and the 2nd knife rest 71b respectively on away from the position of above-mentioned rotary main shaft 632 state with the above-mentioned guide mechanism 72 of clamping dispose opposed to each other.The 1st knife rest 71a and the 1st knife rest 71b have support plate 711 and the 1st blade accommodating mechanism 712 and the 2nd blade accommodating mechanism 713 that are installed on this support plate 711 as illustrated in fig. 6.Support plate 711 is fixed on the supporting base station 710 that is disposed on the above-mentioned static base station 2.The 1st blade accommodating mechanism 712 is made of at the push part 712b of the ring-type on this bolster 712a, the very weak compression helical spring 712c of spring force that is disposed between this push part 712b and the support plate 711 bolster 712a, the intercalation that an end is installed on the support plate 711.Moreover, on the other end of bolster 712a, form in conjunction with recess 712d.In addition, disposing the limiting mechanism 712e that under the state of cutting tip 635 insertion the other end outer peripheral faces, carries out the position restriction on the bolster 712a.This limiting mechanism 712e constitutes by ball with the spring of this ball to the radial outside pushing, and the power that acts on the ball is brought into play limitation function till the value of regulation.Thereby above-mentioned push part 712b is by limiting mechanism 712e restriction another distolateral moving to bolster 712a.In the 1st blade accommodating mechanism 712 that so constitutes, be arranged at embedded hole 636a intercalation on the lining 636 of the cutting tip 635 before using on bolster 712a and take in a plurality of.At this moment, the above-mentioned push part 712b spring force that overcomes compression helical spring 712c retreats.Then, the ball of above-mentioned limiting mechanism 712e retreats, and cutting tip 635 is positioned at the distolateral of bolster 712a by limiting mechanism 712e.Like this, the cutting tip 635 of intercalation on bolster 712a is urged towards limiting mechanism 712e by push part 712b by the spring force of compression helical spring 712c.Thereby compression helical spring 712c and push part 712b have conduct with the function of cutting tip 635 towards the dipper crowding gear of limiting mechanism 712e pushing.
In addition, the 2nd blade accommodating mechanism 713 also with above-mentioned the 1st blade accommodating mechanism 712 similarly, the bolster 713a, the intercalation that are installed on the support plate 711 by an end constitute at the push part 713b of the ring-type on this supporting 713a, the very weak compression helical spring 713c of spring force that is disposed between this push part 713b and the support plate 711.Moreover, on the other end of bolster 713a, form in conjunction with recess 713d.In addition, disposing the limiting mechanism 713e that under the state that cutting tip 635 inserts on the outer peripheral face of the other end, carries out the position restriction on the bolster 713a.This limiting mechanism 713e constitutes by ball with the spring of this ball to the radial outside pushing, and the power that acts on the ball is brought into play limitation function till the value of regulation.Thereby above-mentioned push part 713b is by limiting mechanism 713e restriction another distolateral moving to bolster 713a.In the 2nd blade accommodating mechanism 713 that so constitutes, be arranged at embedded hole 636a intercalation on the lining 636 of the cutting tip 635 after the use on bolster 713a and take in a plurality of.At this moment, the above-mentioned push part 713b spring force that overcomes compression helical spring 713c retreats.Then, the ball of above-mentioned limiting mechanism 713e retreats, cutting tip 635 by limiting mechanism 713e be positioned at bolster 713a one distolateral on.Like this, the cutting tip 635 of intercalation on bolster 713a is urged towards limiting mechanism 713e by push part 713b by the spring force of compression helical spring 713c.Thereby compression helical spring 713c and push part 713b have conduct with the function of cutting tip 635 towards the dipper crowding gear of limiting mechanism 713e pushing.
Above-mentioned guide mechanism 72 has the guide plate 721 of rectangle as illustrated in fig. 7 and is arranged at the both sides of this guide plate 71 and the pair of guide rails 722,722 of extending to the cutting direction of feed shown in the arrow X.So the guide mechanism 72 that constitutes is installed on the not shown fixed part.
At an end of above-mentioned movable substrate 73, what L word shape was installed as illustrated in fig. 8 is guided parts 74, disposes a pair of track 741,741 that is directed that combines with above-mentioned pair of guide rails 722,722 in these both sides that are guided parts 74.Combine with above-mentioned pair of guide rails 722,722 by this a pair of track 741,741 that is directed, movable substrate 73 can be supported along pair of guide rails 722,722 movably by being guided parts 74.Moreover, the movable block 742 with internal thread 72 is installed at the upper surface that is guided parts 74.
Lower surface at the guide plate 721 that constitutes above-mentioned guide mechanism 72 shown in the partial cutaway of Fig. 7 is turned up the soil, disposes the detent mechanism 75 that above-mentioned movable substrate 73 is moved along pair of guide rails 722,722.This detent mechanism 75 is by a pair ofly being directed that track 722,722 disposes abreast and being connected with the external screw rod 751 of the internal thread 742a screw thread combination of above-mentioned movable block 742, with an end of this external screw rod 751 and the pulse motor 752 that is installed in the lower surface of guide plate 721 constitutes with above-mentioned.Moreover the other end of external screw rod 751 is supported pivotally by the bearing 753 of the lower surface that is installed in guide plate 721.So the detent mechanism 75 that constitutes can move movable substrate 73 by making pulse motor 752 forward or reverse along pair of guide rails 722,722 direction shown in the arrow X in Fig. 7.Moreover, detent mechanism 75 has the 1st clamp nut charging crane described later and the 2nd clamp nut charging crane is positioned at effect with the clamp nut dress off line structure detent mechanism of the opposed blade of the front end face of above-mentioned rotary main shaft 632 loading position, and cutting tip charging crane described later is positioned at and the opposed blade of the front end face of rotary main shaft 632 loading position, with blade receiving position before the 1st blade accommodating mechanism 712 opposed uses of the 1st knife rest 71a and the 2nd knife rest 71b, with with the opposed functions of using the cutting tip charging crane detent mechanism of back blade reception positions of the 2nd blade accommodating mechanism 713.
Proceed explanation according to Fig. 8, upper surface in above-mentioned movable substrate 73, dispose the 1st clamp nut charging crane 8a and the 2nd clamp nut charging crane 8b of the clamp nut 638 that is used to load and unload above-mentioned spindle assemblies 63, and the 1st cutting tip charging crane 9a and the 2nd cutting tip charging crane 9b that are used for loading and unloading cutting tip 635 on the front end of rotary main shaft 632.Moreover, the 1st clamp nut charging crane 8a and the 1st cutting tip charging crane 9a, and the 2nd clamp nut charging crane 8b and the 2nd cutting tip charging crane 9b line are configured in the upper surface of movable substrate 73 symmetrically.The 1st clamp nut charging crane 8a and the 2nd clamp nut charging crane 8b are configured on the guide rail 731 that is positioned at movable substrate 73 upper surfaces, can be supported movably along this guide rail 731.The 1st clamp nut charging crane 8a and the 2nd clamp nut charging crane 8b have nut rotating mechanism 81 and nut handle sturcture 82 and travel mechanism 83 respectively.
With reference to Fig. 8 and Fig. 9 above-mentioned nut rotating mechanism 81 is described.
The nut rotating mechanism 81 of illustrated embodiment has the electric machine casing 811 that is configured on the above-mentioned guide rail 731, be configured in the motor 812 in this electric machine casing 811 and be connected rotatable parts 813 on the driving shaft 812a of this motor 812.The diapire 811a of electric machine casing 811 be provided with combine with above-mentioned guide rail 731 be guided groove 811b, be guided groove 811b by this and combine with guide rail 731, electric machine casing 811 can be supported movably along guide rail 731.Motor 812 when just changeing, turns round above-mentioned clamp nut 638 in illustrated embodiment to lax direction, when counter-rotating clamp nut 638 is turned round to fastening direction.
Above-mentioned rotatable parts 813 are disposing 4 rotational pins 814 outstanding from the right side with having 90 degree phase places on the right part respectively in Fig. 9.This rotational pin 814 has the joint portion 814a of toroidal on cardinal extremity (left end among Fig. 9), this joint portion 814a is configured in the cylinder bore 813a that is provided with on the right part among Fig. 9 of rotatable parts 813 slidably.Dispose compression spring 815 in cylinder bore 813a, by this compression spring 815, rotational pin 814 is applied power movably by right in Fig. 9.Moreover, at the right-hand member in Fig. 9 of cylinder bore 813a, be provided with the joint portion 814a of rotational pin 814 and combine and limit rotational pin 814 to right-hand mobile stopper portions 813b.Above-mentioned 4 rotational pins 814 be configured in 4 be arranged on the chimeric position of pin embedded hole 638a on the above-mentioned clamp nut 638.
Above-mentioned nut handle sturcture 82 is controlled parts 821, is controlled parts 821 controlling driving ring 822 that the position drives, the cylinder 823 of this driving ring 822 active position driving shown in the going-back position shown in the solid line and the double dot dash line in Fig. 9 is constituted shown in the release position shown in the solid line and the double dot dash line in Fig. 9 with these 4 by having on the periphery that 90 degree phase places ground are configured in above-mentioned rotatable parts 813 4 respectively.Control parts 821 and on front end (right-hand member among Fig. 9), have the pawl of controlling 821a, be bearing in swingably on the above-mentioned rotatable parts 813 by bolster 824 by base end part (left part among Fig. 9).Dispose compression spring 825 between parts 821 and the rotatable parts 813 controlling of so being supported, by this compression spring 825 will control parts 821 control pawl 821a side with bolster 824 be under the normality of center towards radial outside, be that the release position applies power.
Driving ring 822 has the 822a of the portion that is guided that is arranged at left part among Fig. 9, the drive division 822b that is arranged at right part among Fig. 9, and the portion 822a of being guided can be supported on rotatable parts 813 movably.Thereby the drive division 822b of driving ring 822 becomes and above-mentioned state of controlling parts 821 butts.Above-mentioned cylinder 823 is arranged on the upper wall 811c of above-mentioned electric machine casing 811, and its piston rod 823a is connected with driving ring 822.
The nut handle sturcture 82 that so constitutes drives if will drive cylinder 823 going-back position shown in the solid line from Fig. 9, and driving ring 822 moved to the active position shown in the double dot dash line, then will make and control parts 821 and drive from the release position shown in the solid line to the position of controlling shown in the double dot dash line.Like this, be driven to when controlling the position controlling parts 821, controlling pawl 821a can combine with the endless groove 638b that forms on the outer peripheral face of above-mentioned clamp nut 638.
Above-mentioned travel mechanism 83 is made of with the attaching parts 822 that above-mentioned electric machine casing 811 is connected with piston rod 831a with this cylinder 831 shown in Figure 8 and the cylinder 831 of guide rail 731 configured in parallel.By driving cylinder 831, electric machine casing 811 is moved along guide rail 731 through attaching parts 832.
Below, with reference to Fig. 8 and Figure 10 above-mentioned the 1st cutting tip charging crane 9a and the 2nd cutting tip charging crane 9b are described.
The 1st cutting tip charging crane 9a of illustrated embodiment and the 2nd cutting tip charging crane 9b are configured on the guide rail 732 that is positioned at movable substrate 73 upper surfaces, can be supported movably along this guide rail 732.The 1st cutting tip charging crane 9a and the 2nd cutting tip charging crane 9b have the 1st cutting tip handle sturcture 91a and the 2nd cutting tip handle sturcture 91b respectively, the support plate 92 of the 1st cutting tip handle sturcture 91a and the 2nd cutting tip handle sturcture 91b is installed and turn round the pulse motor 93 (with reference to Figure 10) of this support plate 92.
Because the 1st cutting tip handle sturcture 91a and the 2nd cutting tip handle sturcture 91b are essentially identical formation, therefore the same parts notes are described with same-sign.
The 1st cutting tip handle sturcture 91a and the 2nd cutting tip handle sturcture 91b have a plurality of (in the illustrated embodiment being 4) that the periphery of the lining 636 of controlling above-mentioned cutting tip 635 uses control parts 911, drive these 4 control parts 911 control member driving mechanism 912 and be disposed at 4 centers of controlling parts 911 and with the detent mechanism 913 that combines recess 632a combination of the front end face that is formed at above-mentioned rotary main shaft 632.
Center at the support plate 92 of the 1st above-mentioned cutting tip handle sturcture 91a and the 2nd cutting tip handle sturcture 91b is equipped with turning cylinder 921 as illustrated in fig. 10.Be formed at threaded portion 921a on turning cylinder 921 end faces and run through in the hole that the center of support plate 92 is provided with,, turning cylinder 921 is installed on the support plate 92 by nut 922 screw threads are combined on the 921a of this threaded portion.Moreover, between turning cylinder 921 and support plate 92, dispose the relative rotating revolution limiting mechanism of not shown restriction.The driving shaft 93a of pulse motor 93 is connected to this turning cylinder 921.Pulse motor 93 is configured in the electric machine casing 94 that is provided with on the guide rail 732.The diapire 94a of electric machine casing 94 be provided with combine with above-mentioned guide rail 732 be guided groove 94b, be guided groove 94b by this and combine with guide rail 732, motor cover 94 can be supported movably along guide rail 732.
The 1st cutting tip charging crane 9a of illustrated embodiment and the 2nd cutting tip charging crane 9b have makes above-mentioned electric machine casing 94 along travel mechanism 95 that guide rail 732 moves as illustrated in fig. 8.This travel mechanism 95 is made of with the attaching parts 952 that above-mentioned electric machine casing 94 is connected with piston rod 951a with this cylinder 951 cylinder 951 that is provided with abreast with guide rail 732.By driving cylinder 951, can electric machine casing 94 be moved along guide rail 732 by attaching parts 952.
The topping machanism of more changing device of having equipped the cutting tip of illustrated embodiment constitutes as described above, below mainly with reference to Fig. 1 and Fig. 2 its work is described.
At first, the machining for machined object describes.
By not shown machined object conveyer machined objects such as semiconductor wafer are transported on the 1st clamping platform 34a.This moment, the 1st clamping platform 34a was positioned on the machined object loading position shown in Figure 1.The machined object that is positioned on the 1st clamping platform 34a is attracted and remains on the 1st clamping platform 34a and go up (the 1st machined object keeps operation) by driving not shown attraction mechanism.
Attract to have kept the driving of the 1st clamping platform 34a of machined object as described above by the 1st cutting feed mechanism 37a, be positioned at the 1st aligning guide 5a image mechanism 53 under.After the 1st clamping platform 34a is positioned at the positive upper/lower positions of image mechanism 53, take the surface that remains on the machined object on the 1st clamping platform 34a by image mechanism 53, detect the cutting zone that forms on the surface of machined object.And, drive the index feed mechanism 64 of the 1st cutting mechanism 6a and the index feed mechanism 64 of the 2nd cutting mechanism 6b, make separately cutting tip 635 respectively with aim at (the 1st alignment process) by above-mentioned image mechanism 53 detected cutting zone contrapositions.
To remaining on during machined object on the 1st clamping platform 34a carries out the 1st alignment process, machined object is transported on the 2nd clamping platform 34b that is positioned machined object loading position shown in Figure 1 by not shown machined object conveyer.Be positioned in machined object on the 2nd clamping platform 34b by not shown attraction mechanism action, be attracted and remain on the 2nd clamping platform 34b and go up (the 2nd machined object keeps operation).
After machined object attracts to remain on the 2nd clamping platform 34, the action of the 2nd clamping platform 34b by the 2nd cutting feed mechanism 37b be positioned in the 2nd aligning guide 5b image mechanism 53 under.And, detect the 2nd alignment process in the zone that will cut of the machined object that on the 2nd clamping platform 34b, keeps by the 2nd aligning guide 5b.In addition, the 2nd alignment process and above-mentioned the 1st alignment process are similarly carried out.
On the other hand, after above-mentioned the 1st alignment process finished, the 1st clamping platform 34a moved to cutting zone.Then, the cutting tip 635 of the 1st cutting mechanism 6a and the cutting tip 635 of the 2nd cutting mechanism 6b are positioned on the cutting zone of the last machined object that keeps of the 1st clamping platform 34a.Then, by with the 635 rotating whiles of cutting tip of the cutting tip 635 of the 1st cutting mechanism 6a and the 2nd cutting mechanism 6b, with the 1st clamping platform 34a cutting feeding, the machining (the 1st cutting process) that the machined object that remains on the 1st clamping platform 34a is stipulated.
After above-mentioned the 1st cutting process finishes, move to cutting zone maintaining the 2nd clamping platform 34b that has carried out the machined object after above-mentioned the 2nd alignment process.Then, after carrying out above-mentioned the 1st cutting process by the 1st cutting mechanism 6a and the 2nd cutting mechanism 6b and above-mentioned the 1st cutting process similarly, the machined object that remains on the 2nd clamping platform 34 is carried out the 2nd cutting process.
Maintain the 1st clamping platform 34a of the machined object after the processing of the 1st above-mentioned cutting process that is through with, move towards the machined object loading and unloading area from cutting zone.At this, the attraction that remains on the machined object after the processing on the 1st clamping platform 34a keeps being disengaged.Then, the machined object after the processing is transported to next operation by not shown machined object conveyer.
As above, after machined object was transported to subsequent processing, the 1st clamping platform 34a kept above-mentioned the 1st machined object of next semiconductor wafer 10 to keep operation.Then, carry out the 1st above-mentioned alignment process, the 1st cutting process successively.
On the other hand, the 2nd clamping platform 34b that maintains the machined object after the processing of having carried out above-mentioned the 2nd cutting process moves towards the machined object loading position from cutting zone.At this, the attraction that remains on the machined object after the processing on the 2nd clamping platform 34b keeps being disengaged.Then, the machined object after the processing is transported to next operation by not shown machined object conveyer.Like this, after the machined object after the processing is transported to subsequent processing, carry out above-mentioned the 2nd machined object that next machined object remains on the 2nd clamping platform 34b is kept operation.Then, carry out the 2nd above-mentioned alignment process, the 2nd cutting process successively.
Carry out the 1st cutting process and the 2nd cutting process as described above, the grinding wheel 637 of the cutting tip 635 of the 1st cutting mechanism 6a and the 2nd cutting mechanism 6b wears away.Since these abrasion when reaching a certain amount of cutting precision can not keep, so cutting tip 635 needs the cutting tip that more renews after using certain hour.Below, with reference to Figure 11 to Figure 17 the replacing operation of cutting tip 635 is described.
At first, as shown in figure 11, drive the detent mechanism 75 (with reference to Fig. 7) of blade exchange device 7, movable substrate 73 is moved along pair of guide rails 722,722, the 1st cutting tip handle sturcture 91a of the 1st cutting tip charging crane 9a and the 2nd cutting tip charging crane 9b is located before use on the blade receiving position, and taking among blade receiving position and the 1st knife rest 71a and the 2nd knife rest 71b uses the 1st blade accommodating mechanism 712 of preceding cutting tip 635 mutually opposed before this use.Then, drive travel mechanism 95, the 1st cutting tip handle sturcture 91a advanced towards the 1st blade accommodating mechanism 712, make be provided with on the other end of positioning element 913b and the bolster 712a of the 1st blade accommodating mechanism 712 combine recess 712d combination.Then, what drive the 1st cutting tip handle sturcture 91a controls member driving mechanism 912, control parts 911 with 4 and drive, make to be arranged at 4 endless groove 636c on the lining 636 of controlling pawl 911 and the ring-type that is formed at cutting tip 635 of controlling on parts 911 front ends and to combine to radially inner side.Its result, the cutting tip 635 before using is controlled parts 911 by 4 and is controlled (cutting tip is controlled operation before using).
Carried out after cutting tip is controlled operation before the above-mentioned use, driving travel mechanism 95 retreats the 1st cutting tip handle sturcture 91a, and, drive above-mentioned detent mechanism 75, as illustrated in fig. 12 with nut rotating mechanism 81 and the nut handle sturcture 82 of the 1st clamp nut charging crane 8a and the 2nd clamp nut charging crane 8b, be positioned at rotary main shaft 632 opposed blade loading positions on.Then, drive travel mechanism 83, make nut rotating mechanism 81 and nut handle sturcture 82 advance its result towards rotary main shaft 632, be configured in the end face butt of 4 rotational pins 814 and clamp nut 638 on the rotatable parts 813, the spring force that overcomes compression spring 815 retreats.In addition, the cylinder 823 of drive nut handle sturcture 82, driving ring 822 active position shown in the double dot dash line in Fig. 9 is moved, be driven into the position of controlling shown in the double dot dash line by controlling parts 821, control pawl 821a and combine with endless groove 638b on the outer peripheral face that is formed at clamp nut 638.Then, when 4 pin embedded hole 638a on just changeing 821,4 rotational pins 814 of drive motors and being formed at clamp nut 638 were consistent, 638a was chimeric with the pin embedded hole.Its result, the just commentaries on classics driving force of motor 812 is delivered on the clamp nut 638 by 4 rotational pins 814, and clamp nut 638 is released, takes off from blade installing component 633.So the clamp nut 638 that takes off from blade installing component 633 is controlled (clamp nut taking-up operation) by the handle part 821 of nut handle sturcture 82.Moreover, carrying out clamp nut when taking out operation, the 2nd cap assembly 652 of the spindle assemblies 63 that has omitted among Figure 12 is positioned in the release position shown in the solid line among Fig. 5.
After carrying out above-mentioned clamp nut taking-up operation, drive travel mechanism 83, nut rotating mechanism 81 and nut handle sturcture 82 are retreated, and, drive above-mentioned detent mechanism 75, as illustrated in fig. 13 the 2nd cutting tip handle sturcture 91b of the 1st cutting tip charging crane 9a and the 2nd cutting tip charging crane 9b is positioned at rotary main shaft 632 opposed blade loading positions on.Then, drive travel mechanism 95, the 2nd cutting tip handle sturcture 91b advanced towards rotary main shaft 632, make positioning element 913b be formed at rotary main shaft 632 front end faces combine recess 632a combination.Then, what drive the 2nd cutting tip handle sturcture 91b controls member driving mechanism 912, control parts 911 with 4 and drive, make to be arranged at 4 endless groove 636c on the lining 636 of controlling pawl 911a and the ring-type that is formed at cutting tip 635 of controlling parts 911 front ends and to combine to radially inner side.Its result, the cutting tip 635 after the use is controlled parts 911 by 4 and is controlled (using the back cutting tip to take out operation).
Carried out after cutting tip takes out operation after the above-mentioned use, drive travel mechanism 95 as illustrated in fig. 14, the 2nd cutting tip handle sturcture 91b is retreated, and, driving pulse motor 93 (with reference to Figure 10), make support plate 92 rotate 180 degree, with the 1st cutting tip handle sturcture 91a and the 2nd cutting tip handle sturcture 91b counter-rotating.Its result, will be before above-mentioned use cutting tip control the 1st cutting tip handle sturcture 91a that has controlled the cutting tip 635 before using in the operation be positioned at rotary main shaft 632 opposed blade replacement positions on (cutting tip handle sturcture counter-rotating operation).
Then, drive travel mechanism 95 as illustrated in fig. 15, the 1st cutting tip handle sturcture 91a advanced towards rotary main shaft 632, make positioning element 913b be formed at rotary main shaft 632 front end faces combine recess 632a combination.At this moment, control cutting tip 635 before the use that parts 911 are controlling by 4 of the 1st cutting tip handle sturcture 91a, the installation portion 633a cylindraceous of the embedded hole 636a of its ring-type lining 636 and cutting tip installing component 633 is chimeric.Then, what drive the 1st cutting tip handle sturcture 91a controls member driving mechanism 912, controls parts 911 with 4 and drives to radial outside, removes 4 and controls controlling of 911 pairs of cutting tips 635 of parts.Its result, the cutting tip 635 before using is installed among the installation portion 633a cylindraceous of cutting tip installing component 633 (cutting tip installation procedure before using).
Before having carried out above-mentioned use behind the cutting tip installation procedure, driving travel mechanism 95 retreats the 1st cutting tip handle sturcture 91a, and, drive detent mechanism 75, take out the nut handle sturcture 82 of controlling clamp nut 638 in the operation with the nut rotating mechanism 81 of the 1st clamp nut charging crane 8a and the 2nd clamp nut charging crane 8b and at above-mentioned clamp nut as illustrated in fig. 16, be positioned at rotary main shaft 632 opposed blade loading positions on.Then, drive travel mechanism 83, nut rotating mechanism 81 and nut handle sturcture 82 are advanced towards rotary main shaft 632.Its result is the installation portion 633a butt cylindraceous that is held in clamp nut 638 and blade installing component 633 on the nut handle sturcture 82.Then, when motor 812 counter-rotating was driven, turning power was transmitted to clamp nut 638 by 4 rotational pins 814 of rotating mechanism 81, clamp nut 638 by screw threads for fastening on the external screw thread 633c that forms on the installation portion 633a.Then, the cylinder 823 of drive nut handle sturcture 82, by the position of controlling shown in the double dot dash line of driving ring 822 from Fig. 9 is moved to the going-back position shown in the solid line, be driven into the release position shown in the solid line from the position of controlling shown in the double dot dash line thereby will control parts 821.Its result, the cutting tip 635 before using grips (using fixedly operation of preceding cutting tip) by the flange part 633b and the clamp nut 638 of blade installing component 633.
Cutting tip is fixedly after the operation before having carried out above-mentioned use, driving travel mechanism 83 retreats nut rotating mechanism 81 and nut handle sturcture 82, and, drive detent mechanism 75 movable substrate 73 moved along pair of guide rails 722,722, with the 2nd cutting tip handle sturcture 91b (using the back cutting tip) of the 1st cutting tip charging crane 9a and the 2nd cutting tip charging crane 9b holding be positioned at the 1st knife rest 71a and the 2nd knife rest 71b in the 2nd blade accommodating mechanism 713 opposed use afterwards on the blade reception positions.Then, drive travel mechanism 95 as illustrated in fig. 17, the 2nd cutting tip handle sturcture 91b is advanced towards the 2nd blade accommodating mechanism 713, make be provided with on the other end of positioning element 913b and the bolster 713a of the 2nd blade accommodating mechanism 713 combine recess 713d combination, and, will be cutting tip after the use that is held on the 2nd cutting tip handle sturcture 91b 636 chimeric and be accommodated on the bolster 713a of the 2nd cutting tip handle sturcture 713.Then, remove the 2nd cutting tip handle sturcture 91b to using control (the using the back cutting tip to take in operation) of back cutting tip 636.Then, drive travel mechanism 95, the 2nd cutting tip handle sturcture 91b is retreated, return state shown in Figure 8.
As mentioned above, because the cutting tip in the illustrated embodiment more changing device is, can be along pair of guide rails 722, configuration the 1st clamp nut charging crane 8a and the 2nd clamp nut charging crane 8b and the 1st cutting tip charging crane 9a and the 2nd cutting tip charging crane 9b on 722 movable substrate that move 73, and be positioned at the blade loading position respectively by detent mechanism 75, on blade receiving position and the use back blade reception position, therefore can there be angular deviation ground before using, with the 1st clamp nut charging crane 8a and the 2nd clamp nut charging crane 8b and the 1st cutting tip charging crane 9a and the 2nd cutting tip charging crane 9b be positioned at accurately with opposed position, the axle center of rotary main shaft 632 on.
More than, describe the present invention according to illustrated embodiment, but the present invention is not limited in embodiment, in aim scope of the present invention, various deformation can be arranged.For example in illustrated embodiment, show the example that has the 1st clamp nut charging crane 8a and the 2nd clamp nut charging crane 8b and the 1st cutting tip charging crane 9a and the 2nd cutting tip charging crane 9b with the 1st cutting mechanism 6a and the 2nd cutting mechanism 6b accordingly, but be under 1 the situation, also can possess 1 clamp nut charging crane and cutting tip charging crane at cutting mechanism.
Moreover, preferably by at the above-mentioned cutting tip movable baffle plate of configuration between changing device 7 and the 1st cutting mechanism 6a and the 2nd cutting mechanism 6b more, when cutting operation, cover, be attached to the more component parts of changing device 7 of cutting tip with the cutting water that prevents to disperse by baffle plate.
Claims (3)
1, a kind of more changing device of cutting tip, it is set in the topping machanism, be used to change cutting tip, this topping machanism possesses: keep the clamping platform of machined object and have the cutting mechanism that cutting is maintained at the cutting tip of the machined object on the described clamping platform, this cutting mechanism has the clamp nut that rotary main shaft and screw thread are combined in the leading section of this rotary main shaft and are used for fastening this cutting tip, it is characterized in that:
The more changing device of this cutting tip possesses:
Knife rest has and is arranged at away from the position of described rotary main shaft and the 2nd blade accommodating mechanism of the cutting tip after taking in the 1st blade accommodating mechanism of the cutting tip before using and taking in use;
The clamp nut charging crane is used to load and unload described clamp nut;
The cutting tip charging crane is used for loading and unloading described cutting tip at the front end of described rotary main shaft;
Movable substrate supports described clamp nut charging crane and cutting tip charging crane; And
Detent mechanism makes described movable substrate move and be positioned on the preposition along guide rail,
The described clamp nut charging crane that described detent mechanism will be configured on the described movable base station is positioned at and the opposed blade of the front end face of described rotary main shaft loading position, with described cutting tip charging crane be positioned at described blade loading position and with the opposed use of described the 1st blade accommodating mechanism of described knife rest before the blade receiving position and with the opposed use of described the 2nd blade accommodating mechanism back blade reception position.
2, according to the more changing device of the described cutting tip of claim 1, it is characterized in that,
Described cutting tip charging crane has: the 2nd handle sturcture of the cutting tip after controlling the 1st cutting tip handle sturcture of the cutting tip before using and controlling use.
3, according to the more changing device of claim 1 or 2 described cutting tips, it is characterized in that,
Described cutting mechanism has the 1st cutting mechanism and the 2nd cutting mechanism, is installed in the cutting tip configuration opposed to each other mutually on cutting tip and the rotary main shaft that is installed in the 2nd cutting mechanism on the rotary main shaft of the 1st cutting mechanism;
Described knife rest, described clamp nut charging crane and described cutting tip charging crane, with described the 1st cutting mechanism and the 2nd cutting mechanism accordingly, have the 1st knife rest and the 2nd knife rest, the 1st clamp nut charging crane and the 2nd clamp nut charging crane and the 1st cutting tip charging crane and the 2nd cutting tip charging crane respectively.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005293972A JP4837970B2 (en) | 2005-10-06 | 2005-10-06 | Cutting blade changer |
| JP293972/2005 | 2005-10-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1943981A true CN1943981A (en) | 2007-04-11 |
| CN100569439C CN100569439C (en) | 2009-12-16 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2006101415498A Active CN100569439C (en) | 2005-10-06 | 2006-09-29 | The more changing device of cutting tip |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4837970B2 (en) |
| KR (1) | KR101272806B1 (en) |
| CN (1) | CN100569439C (en) |
| TW (1) | TW200718490A (en) |
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| CN104002172A (en) * | 2013-02-27 | 2014-08-27 | 兄弟工业株式会社 | Machine tool and tool replacing method |
| CN104002172B (en) * | 2013-02-27 | 2017-05-10 | 兄弟工业株式会社 | Machine tool and tool replacing method |
| CN106182476A (en) * | 2015-06-01 | 2016-12-07 | 株式会社迪思科 | Blade with base station |
| CN108687979A (en) * | 2017-04-05 | 2018-10-23 | 株式会社迪思科 | Cutting apparatus |
| CN109465975A (en) * | 2017-09-07 | 2019-03-15 | 株式会社迪思科 | Cutting tool provides device |
| CN109465975B (en) * | 2017-09-07 | 2022-05-17 | 株式会社迪思科 | Cutting tool supply device |
| US11267155B2 (en) | 2019-05-13 | 2022-03-08 | Disco Corporation | Cutting apparatus |
| CN115365856A (en) * | 2021-05-19 | 2022-11-22 | 佳陞科技有限公司 | Tool changer and tool changer operation method |
| CN115365856B (en) * | 2021-05-19 | 2024-04-30 | 佳陞科技有限公司 | Tool changer |
| CN114147871A (en) * | 2021-11-30 | 2022-03-08 | 湖北省华建石材股份有限公司 | Reloading device for tower type circular saw and working method |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4837970B2 (en) | 2011-12-14 |
| TWI359709B (en) | 2012-03-11 |
| CN100569439C (en) | 2009-12-16 |
| KR20070038895A (en) | 2007-04-11 |
| TW200718490A (en) | 2007-05-16 |
| KR101272806B1 (en) | 2013-06-10 |
| JP2007098536A (en) | 2007-04-19 |
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