JP2024019804A - Automatic changer - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an automatic changer that can improve the rate of operation.

SOLUTION: An automatic changer 2 includes: cutting blade storage means 4 for storing a plurality of cutting blades 36; carry-in/out means 6 for conveying a cutting blade 36 carried out from the cutting blade storage means 4 to cutting means of a cutting device and carrying in a cutting blade 36 separated from the cutting means of the cutting device; control means 7; and moving means 8 for movement to the cutting device.

SELECTED DRAWING: Figure 1

COPYRIGHT: (C)2024,JPO&INPIT

Description

The present invention relates to an automatic changing device connectable to a cutting device.

The wafer, on which multiple devices such as ICs and LSIs are divided by dividing lines and formed on the surface, is divided into individual device chips by a cutting machine, and each divided device chip is used for electrical equipment such as mobile phones and personal computers. used.

The cutting device includes a chuck table with a holding surface for holding a wafer, a cutting means equipped with a fixing nut with a cutting blade for cutting the wafer held on the chuck table, and an Axial feed means, Y-axis feed means for indexing and feeding the cutting means in the Y-axis direction perpendicular to the X-axis direction, and Z-axis feed for cutting and feeding the cutting means in the Z-axis direction perpendicular to the X-axis direction and the Y-axis direction. means, the holding surface is defined in the X-axis direction and the Y-axis direction, and the wafer can be divided into individual device chips with high precision.

The applicant has also proposed an automatic exchange device that can automatically exchange a cutting blade attached to a cutting means (for example, see Patent Document 1).

Japanese Patent Application Publication No. 2022-103852

However, automatic replacement devices have a problem in that when a cutting blade of a cutting device is replaced, the operation is stopped until the next replacement, resulting in a low operating rate.

An object of the present invention is to provide an automatic switching device that can improve the operating rate.

According to the present invention, the following automatic exchange device that solves the above problems is provided. That is,
A chuck table with a holding surface that holds a workpiece, a cutting means equipped with a fixing nut with a cutting blade that cuts the workpiece held on the chuck table, and a cutting device that processes the chuck table in the X-axis direction. An X-axis feeding means for feeding, a Y-axis feeding means for indexing and feeding the cutting means in a Y-axis direction perpendicular to the X-axis direction, and a Y-axis feeding means for indexing and feeding the cutting means in a Z-axis direction perpendicular to the X-axis direction and the Y-axis direction. and a Z-axis feeding means for feeding, the holding surface being connectable to a cutting device defined in the X-axis direction and the Y-axis direction, the automatic exchange device comprising:
A cutting blade storage means for storing a plurality of cutting blades, a carrying-in/out means for transporting the cutting blades carried out from the cutting blade storage means to the cutting means and carrying in the cutting blades detached from the cutting means, and a control means. , and a means for moving the cutting device to the cutting device.

Preferably, the control means includes a receiving section that receives signals transmitted from the plurality of cutting devices, a location recording section that records the locations of the plurality of cutting devices, and a signal received by the receiving section and the location recording section. a location identification unit that identifies the location of the cutting device by comparing the location of the cutting device; an actuation unit that operates the moving means; a blade recognition unit that recognizes the type of cutting blade requested by the transmitted signal; a selection section for selecting a type of cutting blade recognized by the section from the cutting blade storage means;
The moving means includes a moving part that moves to a specified location, and a connecting part that connects to the cutting device.

a Y-axis moving means for positioning the carrying-in/out means in an operating position and a retreat position in the Y-axis direction with respect to the cutting blade storage means; a Z-axis moving means for moving the carrying-in/out means in the Z-axis direction; X-axis moving means for moving the input means in the X-axis direction and positioning the input means in an operating position where it acts on a cutting blade attached to a spindle of the cutting means,
The loading/unloading means includes a Z rotating shaft extending in the Z-axis direction, a blade holding section that is radially connected to the Z rotating shaft and holds the cutting blade by suction, and a male thread formed at the tip of the spindle to connect the fixing nut. It is preferable to include a fixing nut holder that is screwed onto and unscrewed from the holder.

The loading/unloading means is disposed on the frame via the bending arm of the X-axis moving means, and the frame is slidably supported by a guide rail extending in the Y-axis direction disposed on the lifting table, Preferably, the Y-axis moving means positions the cutting blade at the operating position and the retracted position in the Y-axis direction with respect to the cutting blade storage means.

The automatic exchange device of the present invention includes:
A chuck table with a holding surface for holding a workpiece, a cutting means equipped with a fixing nut with a cutting blade for cutting the workpiece held on the chuck table, and a processing feed for the chuck table in the X-axis direction. an X-axis feeding means for indexing and feeding the cutting means in a Y-axis direction perpendicular to the X-axis direction; and a Y-axis feeding means for indexing and feeding the cutting means in a Z-axis direction perpendicular to the X-axis direction and the Y-axis direction. and a Z-axis feeding means, the holding surface being connectable to a cutting device defined in the X-axis direction and the Y-axis direction,
A cutting blade storage means for storing a plurality of cutting blades, a carrying-in/out means for transporting the cutting blades carried out from the cutting blade storage means to the cutting means and carrying in the cutting blades detached from the cutting means, and a control means. , and a moving means for moving to the cutting device, it is possible to exchange cutting blades for a plurality of cutting devices with one automatic exchange device, and the operating rate of the automatic exchange device can be improved. can.

FIG. 1 is a perspective view of an automatic exchange device constructed in accordance with the present invention. FIG. 2 is an exploded perspective view of the cutting blade storage means shown in FIG. 1; FIG. 3 is a perspective view of the blade support shaft shown in FIG. 2; 3 is a sectional view of the blade support shaft shown in FIG. 2. FIG. FIG. 2 is a perspective view of the loading/unloading means shown in FIG. 1; FIG. 2 is an exploded perspective view of the frame, elevating table, and base mount shown in FIG. 1; FIG. 2 is an exploded perspective view of the frame shown in FIG. 1; FIG. 2 is a block diagram showing control means shown in FIG. 1; 2 is a schematic plan view showing an example in which a plurality of cutting devices are arranged around the automatic exchange device shown in FIG. 1. FIG. FIG. 2 is an exploded perspective view of the moving means shown in FIG. 1; FIG. 2 is a perspective view of a cutting device to which the automatic exchange device shown in FIG. 1 can be connected. FIG. 12 is a perspective view of the chuck table shown in FIG. 11. FIG. 12 is a perspective view of the cutting means shown in FIG. 11; FIG. 14 is a perspective view of the cutting means in a state where the blade cover shown in FIG. 13 is opened; FIG. 12 is an exploded perspective view of the cutting means shown in FIG. 11; FIG. 12 is a perspective view showing a cutting edge detection sensor of the cutting means shown in FIG. 11; FIG. 12 is a perspective view showing a state in which the automatic exchange device shown in FIG. 1 is connected to the cutting device shown in FIG. 11; FIG. 2 is a perspective view showing a state in which a cutting blade storage means and a carry-in/out means of the automatic exchange device shown in FIG. 1 face each other. FIG. 19 is a perspective view showing a state in which the frame body has moved forward toward the cutting blade storage means from the state shown in FIG. 18; FIG. 20 is a perspective view showing a state in which the frame is retreated from the state shown in FIG. 19 and the elevating table is raised; FIG. 21 is a perspective view showing a state in which the loading/unloading means has moved forward toward the cutting device from the state shown in FIG. 20;

DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of an automatic switching device constructed according to the present invention will be described below with reference to the drawings.

(Automatic exchange device 2)
To explain with reference to FIG. 1, the automatic exchange device, which is generally designated by the reference numeral 2, includes a cutting blade storage means 4 for storing a plurality of cutting blades, and a cutting means for transferring the cutting blades carried out from the cutting blade storage means 4 to the cutting means of the cutting device. It includes a carry-in/out means 6 for transporting the cutting blade that has been separated from the cutting means of the cutting device, a control means 7, and a moving means 8 for moving it to the cutting device.

Further, the automatic exchange device 2 of the illustrated embodiment includes a Y-axis moving means 9 for positioning the carrying-in/out means 6 at an operating position and a retracted position in the Y-axis direction with respect to the cutting blade storage means 4; A Z-axis moving means 10 that moves in the Z-axis direction, and an X-axis moving means that moves the loading/unloading means 6 in the X-axis direction and positions it in an operating position where it acts on a cutting blade attached to a spindle of a cutting means of a cutting device. 12.

The X-axis direction is the direction shown by arrow X in FIG. 1, and the Y-axis direction is the direction shown by arrow Y in FIG. 1 and is perpendicular to the X-axis direction. Further, the Z-axis direction is a direction shown by an arrow Z in FIG. 1, and is a vertical direction perpendicular to the X-axis direction and the Y-axis direction. The plane defined by the X-axis direction and the Y-axis direction is substantially horizontal.

(Cutting blade storage means 4)
As shown in FIG. 2, the cutting blade storage means 4 includes a drive gear 16 having a rotation shaft 14 extending in the Y-axis direction, and a driven gear 16 having a rotation shaft 18 spaced apart from the drive gear 16 in the Z-axis direction and extending in the Y-axis direction. 20, an endless track 22 wound around the driving gear 16 and the driven gear 20, and an endless track 22 that is disposed at a predetermined interval on the endless track 22, inserted into the central opening of the cutting blade, and supporting the cutting blade in the Y-axis direction. and an extending blade support shaft 24 .

(Drive gear 16)
1 and 2, the cutting blade storage means 4 of the illustrated embodiment includes a rectangular common base plate 26 (see FIG. 1) and a support wall extending upward from the upper surface of the common base plate 26. 28 and a motor 30 secured to one side of the support wall 28. As shown in FIG. 2, the rotation shaft 14 of the drive gear 16 is connected to the motor 30, and the motor 30 rotates the drive gear 16 with the Y-axis direction as the axis.

(driven gear 20)
As shown in FIG. 2, the driven gear 20 is disposed above the drive gear 16, and the rotating shaft 18 of the driven gear 20 is supported on a support wall 28 so as to be rotatable around the Y-axis direction and to be movable up and down in the Z-axis direction. has been done. The support wall 28 is provided with an elevating means (not shown) for elevating the driven gear 20 in the Z-axis direction. The elevating means may include a ball screw connected to the rotating shaft 18 of the driven gear 20 and extending in the Z-axis direction, and a motor that rotates the ball screw.

(Endless track 22)
The endless track 22 is composed of a large number of interconnected link pieces (numerals omitted), and is wound around the drive gear 16 and the driven gear 20. The endless track 22 is configured to rotate in accordance with the rotation of the drive gear 16 by the motor 30.

In the cutting blade storage means 4 of the illustrated embodiment, the distance between the drive gear 16 and the driven gear 20 in the Z-axis direction can be adjusted by changing the position of the driven gear 20 in the Z-axis direction using the lifting means. ing. Further, in the cutting blade storage means 4, the length of the endless track 22 can be adjusted by appropriately increasing or decreasing the number of link pieces of the endless track 22.

(Blade support shaft 24)
As shown in FIG. 2, a plurality of blade support shafts 24 are arranged on the endless track 22 at predetermined intervals. Further, as understood by referring to FIG. 3 together with FIG. 2, the blade support shaft 24 includes a cylindrical base 32 connected to the endless track 22, and a cylindrical base 32 extending in the Y-axis direction from the end surface of the base 32. It has a shaft portion 34. The diameter of the shaft portion 34 is smaller than the diameter of the base portion 32.

(Cutting blade 36)
Also shown in FIG. 3 is a cutting blade 36 stored in the cutting blade storage means 4. The cutting blade 36 has an annular base 38 and an annular cutting blade 40 disposed around the outer periphery of the base 38. Base 38 may be formed from any suitable metal material such as an aluminum alloy. A circular central opening 38a is provided in the center of the base 38. The cutting blade 40 is formed of abrasive grains such as diamond and a binding material such as metal or resin to a predetermined thickness (for example, about 10 to 30 μm), and protrudes radially outward from the outer peripheral edge of the base 38. There is.

The shaft portion 34 of the blade support shaft 24 in the illustrated embodiment has an outer diameter corresponding to the inner diameter of the central opening 38a of the cutting blade 36. A shaft portion 34 is inserted into the shaft portion 34, and a plurality of (for example, five) cutting blades 36 are supported by the shaft portion 34. Although cutting blades 36 of the same type are inserted into the same blade support shaft 24, the cutting blade storage means 4 as a whole can store a plurality of types of cutting blades 36 having different materials and shapes.

In the illustrated embodiment, as understood by referring to FIG. 2, cutting blades 36 are supported by half of the plurality of blade support shafts 24. Further, as shown in FIG. 3, a plurality of ball plungers 42 are installed at intervals in the circumferential direction on the tip side of the shaft portion 34 to prevent the cutting blade 36 supported by the shaft portion 34 from flying out. There is.

As shown in FIG. 4, a flow path 32a is formed inside each base 32 of the blade support shaft 24, and a plurality of flow paths 22a communicating with one end of each flow path 32a are formed in the endless track 22. There is. As shown in FIG. 3, the other end of each flow path 32a is open at an end surface of the base 32 on the outer side in the radial direction than the shaft 34.

Further, as shown in FIG. 2, the support wall 28 is provided with an air nozzle 44 that protrudes in the Y-axis direction below the drive gear 16, and the air nozzle 44 is connected to a high-pressure air supply means (not shown). )It is connected to the. In the illustrated embodiment, the blade support shaft 24 located at the lowest end in the trajectory of the blade support shaft 24 as the endless track 22 rotates and the tip of the air nozzle 44 face each other.

When the cutting blade 36 located at the tip end side of the shaft portion 34 is carried out, the flow from the air nozzle 44 to the base 32 of the blade support shaft 24 located at the lowermost end via the flow path 22a of the endless track 22. By supplying high-pressure air to the passage 32a, the cutting blade 36 remaining on the shaft portion 34 can be pushed out toward the tip side of the shaft portion 34. However, the cutting blade 36 does not fall from the shaft portion 34 due to the action of the ball plunger 42.

(Carry-in/out means 6)
The loading/unloading means 6 will be explained with reference to FIG. The loading/unloading means 6 includes a Z rotating shaft 46 extending in the Z-axis direction, a blade holding section 48 that is radially connected to the Z rotating shaft 46 and holds the cutting blade 36 under suction, and a fixing nut formed at the tip of the spindle of the cutting device. At least a fixing nut holding part 50 that is screwed onto and unscrewed from the male screw is provided.

As shown in FIG. 5, the loading/unloading means 6 of the illustrated embodiment further includes a casing 52, which includes a regular hexagonal top plate 54 and six rectangular plates hanging from the periphery of the top plate 54. It has a side wall 56. The Z rotation shaft 46 protrudes from the upper surface of the top plate 54. A motor (not shown) connected to the Z rotation shaft 46 is housed inside the casing 52 .

In the illustrated embodiment, of the six side walls 56 of the casing 52, blade holding parts 48 are attached to four side walls 56, fixing nut holding parts 50 are attached to two side walls 56, The two fixing nut holding parts 50 are provided on a pair of opposing side walls 56.

(Blade holding part 48)
The blade holding part 48 is formed in a cylindrical shape, and the end face 58 of the blade holding part 48 has a circular central opening 60 that can receive the shaft part 34 of the blade support shaft 24 and the tip of the spindle of the cutting device. A plurality of suction holes 61 are provided around the central opening 60 at equal intervals in the circumferential direction. Each suction hole 61 is connected to suction means (not shown).

The blade holder 48 is sucked into the suction hole 61 by the suction means in a state where the end surface 58 of the blade holder 48 is in contact with the base 38 of the cutting blade 36 stored in the cutting blade storage means 4. The cutting blade 36 is attracted and held by generating a force.

(Fixed nut holding part 50)
Continuing the description with reference to FIG. 5, the fixed nut holding section 50 includes a cylindrical housing 64 fixed to the side wall 56 of the casing 52, and an annular rotating body 66 rotatably housed inside the housing 64. and a motor (not shown) that rotates the rotating body 66.

The rotating body 66 has a central opening 68 that can receive the tip of a spindle of a cutting device. A plurality of suction holes 70 and a plurality of pins 72 are alternately provided at intervals in the circumferential direction on the end surface 66a of the rotating body 66.

Each suction hole 70 is connected to suction means (not shown). The pin 72 is positioned at a position protruding from the end surface 66a of the rotary body 66 (the position shown in FIG. 5) by a spring (not shown) built into the rotary body 66, and is positioned inside the rotary body 66. When pushed towards, the spring contracts and is housed inside the rotating body 66. Moreover, the pin 72 is arranged corresponding to the position of a pin hole formed in the fixing nut.

In the fixed nut holding section 50, the suction means generates suction force in each suction hole 70 to suction and hold the fixed nut, and when the pin 72 is inserted into the pin hole formed in the fixed nut, it is rotated by the motor. By rotating the body 66, a fixing nut for fixing the cutting blade 36 to the spindle of the cutting device can be screwed into and unscrewed from a male thread formed at the tip of the spindle.

Note that when unscrewing (removing) the fixing nut from the spindle, even if the position of the pin 72 of the fixing nut holding part 50 and the position of the pin hole of the fixing nut are misaligned, the fixing nut attached to the spindle may After positioning the end face 66a of the rotating body 66 on the end face of the nut and housing the pin 72 inside the rotating body 66, when the rotating body 66 is rotated by the motor, the position of the pin 72 is aligned with the position of the pin hole. The pin 72 is pushed out by the spring and inserted into the pin hole.

In the illustrated embodiment, the loading/unloading means 6, which can be constructed as described above, is arranged inside the frame 74, as shown in FIG. The frame 74 is supported by a lift table 76 so as to be movable in the Y-axis direction, and the lift table 76 is supported by a base mount 78 so as to be movable in the Z-axis direction.

(frame body 74)
Referring to FIGS. 6 and 7, the frame 74 includes a rectangular plate-shaped bottom 80, four pillars 82 extending upward from the four corners of the top surface of the bottom 80, and a frame 74 fixed to the upper end of each pillar 82. A plate-shaped ceiling portion 84 (see FIG. 7) is included. A pair of guided members 86 in which grooves 86a extending in the Y-axis direction are formed are provided on the lower surface of the bottom portion 80 at intervals in the X-axis direction.

(Elevating table 76)
As shown in FIG. 6, the elevating table 76 includes a rectangular plate-shaped top plate 88 and four cylindrical legs 90 extending downward from the four corners of the lower surface of the top plate 88. A pair of guide rails 92 are provided on the top surface of the top plate 88 and extend in the Y-axis direction at intervals in the X-axis direction. It is slidably fitted into the groove 86a.

(Y-axis moving means 9)
Further, on the upper surface of the top plate 88 of the lifting table 76, a Y-axis moving means 9 is provided. The Y-axis moving means 9 includes a ball screw 94 that extends in the Y-axis direction between a pair of guide rails 92, and a motor 96 that rotates the ball screw 94. A nut portion (not shown) of the ball screw 94 is fixed to the lower surface of the bottom portion 80 of the frame body 74.

In the Y-axis moving means 9, a ball screw 94 converts the rotational motion of the motor 96 into a linear motion and transmits the linear motion to the frame 74, so that the frame 74 is moved in the Y-axis direction along the pair of guide rails 92. In this way, the frame body 74 on which the loading/unloading means 6 is arranged is slidably supported by the guide rail 92 extending in the Y-axis direction arranged on the lifting table 76, and the cutting blade is moved by the Y-axis moving means 9. It can be positioned at an active position and a retracted position in the Y-axis direction with respect to the storage means 4.

The operating position is a position where the blade holding section 48 of the loading/unloading means 6 approaches the cutting blade storage means 4, and the cutting blade 36 supported by the cutting blade storage means 4 can be held by suction by the blade holding section 48. It is a perfect position. Further, the retracted position is a position where the blade holding portion 48 of the carry-in/out means 6 is further away from the cutting blade storage means 4 than the working position.

(Base mount 78)
As shown in FIG. 6, the base mount 78 includes a frame 98 fixed to the common base plate 26, and a rectangular top plate 100 fixed to the upper part of the frame 98. Four circular holes 102 are formed at the four corners of the top plate 100, into which the legs 90 of the lifting table 76 are slidably inserted. Furthermore, a female thread 104 is formed in the center of the top plate 100.

(Z-axis moving means 10)
Continuing the description with reference to FIG. 6, the Z-axis moving means 10 is connected to the lifting table 76 and the base mount 78. The Z-axis moving means 10 includes a ball screw 106 extending in the Z-axis direction, a motor 108 that rotates the ball screw 106, and a connecting plate 110 fixed to the upper end of the motor 108. The ball screw 106 is screwed into the female thread 104 of the top plate 100. The connecting plate 110 is fixed to the lower surface of the top plate 88 of the lifting table 76 by suitable connecting means such as bolts (not shown).

In the Z-axis moving means 10, the rotational motion of the motor 108 is converted into linear motion by the ball screw 106, and the lifting table 76 is moved up and down with respect to the base mount 78, thereby moving the frame body on which the loading/unloading means 6 is arranged. 74 in the Z-axis direction.

(X-axis moving means 12)
Referring to FIG. 7, the X-axis moving means 12 includes a bending arm 112 mounted on a frame 74, and a first motor 114 and a second motor 115 that operate the bending arm 112. The bending arm 112 is swingably connected to a first arm piece 118 that is swingably connected to the lower surface of the ceiling portion 84 of the frame body 74 via a spacer 116, and to the lower surface of the first arm piece 118. and a second arm piece 120.

The spacer 116 is arranged at one end of the first arm piece 118. The first arm piece 118 is connected to the ceiling portion 84 with the spacer 116 side as the center of swing. Further, a spacer 122 is also provided on the upper surface of the other end of the first arm piece 118. The second arm piece 120 is connected to the first arm piece 118 with the spacer 122 side as the center of swing.

A circular hole (not shown) is provided at the tip of the second arm piece 120 (the end opposite to the spacer 122). The Z rotation shaft 46 of the loading/unloading means 6 is inserted into this circular hole, and the Z rotation shaft 46 is fixed to the second arm piece 120 in a non-rotatable manner. When the motor of the loading/unloading means 6 connected to the Z rotation shaft 46 is driven, the casing 52 of the loading/unloading means 6 rotates with respect to the second arm piece 120, and the blade holding part 48 and the fixed nut holding part 50 are rotated. Can be positioned in any direction. In this way, the loading/unloading means 6 is connected to the bending arm 112 of the X-axis moving means 12, and is disposed on the frame 74 via the bending arm 112.

In the X-axis moving means 12, the first motor 114 swings the first arm piece 118 with the spacer 116 side as the swing center, and the second motor 115 swings the first arm piece 118 with the spacer 122 side as the swing center. By swinging the second arm piece 120, the bending arm 112 is bent or extended, and the loading/unloading means 6 is moved in the X-axis direction.

(Control means 7)
As shown in FIG. 1, the control means 7 for controlling the operation of the automatic exchange device 2 can be mounted on the upper surface of the common base plate 26. The control means 7 includes a casing 124 and a computer (not shown) having a processor and a memory, and the computer is housed inside the casing 124.

To explain with reference to FIG. 8, the control means 7 includes a receiving section 126 that receives signals transmitted from a plurality of cutting devices, a location recording section 128 that records the locations of the plurality of cutting devices, and a receiving section 126. a location specifying section 130 that identifies the location of the cutting device by comparing the received signal with the location recording section 128; an actuating section 132 that operates the moving means 8; and the type of cutting blade 36 requested by the transmitted signal. The blade recognition unit 134 includes a blade recognition unit 134 that recognizes the type of cutting blade 36 recognized by the blade recognition unit 134, and a selection unit 136 that selects the type of cutting blade 36 recognized by the blade recognition unit 134 from the cutting blade storage means 4.

(Receiving unit 126)
As shown in FIG. 1, the receiving section 126 extends upward from the top surface of the casing 124. The receiving unit 126 receives signals transmitted from a plurality of cutting devices, such as a signal for identifying each cutting device (cutting device identification signal) and a type of cutting blade 36 that the cutting device has requested to be replaced. Receive a signal (cutting blade identification signal).

(Location recording unit 128)
The location recording unit 128 records the locations of a plurality of cutting devices input in advance by the operator. For example, FIG. 9 shows an example in which the locations of six cutting devices are recorded in the location recording section 128. In this example, three cutting devices A1, A2, and A3 are arranged in the A row, and three cutting devices B1, B2, and B3 are also arranged in the B row. The location recording unit 128 is configured to record the location of the cutting device for each of the cutting devices A1 to A3 and B1 to B3. Note that the number and arrangement of cutting devices recorded by the location recording unit 128 are not limited to the example shown in FIG. 9 .

(Location identification unit 130)
The location specifying unit 130 identifies the cutting device that transmitted the signal based on the signal received by the receiving unit 126 (cutting device identification signal), and also identifies the cutting device that transmitted the signal, and also identifies the information recorded in the location recording unit 128 (cutting device location information). ), the location of the identified cutting equipment is determined. For example, when the cutting device A1 transmits a signal, the location identification unit 130 identifies the cutting device A1 based on the received signal, and then uses the location information recorded in the location recording unit 128 to identify the cutting device A1. Locate cutting equipment.

(Operating part 132)
The operating section 132 operates the moving means 8 to move the automatic exchange device 2 to the location of the cutting device specified by the location specifying section 130. Specifically, the identified cutting device and the automatic exchange device 2 are connected, and the cutting blade 36 attached to the cutting device is automatically replaced with a new cutting blade 36 stored in the cutting blade storage means 4. The operating unit 132 operates the moving means 8 so as to move the automatic exchange device 2 to a position where it can be exchanged by the exchange device 2.

(Blade recognition unit 134)
The blade recognition unit 134 recognizes the type of the requested cutting blade 36 based on the signal (cutting blade identification signal) transmitted from the cutting device. In addition, if the cutting device is equipped with a pair of cutting blades 36, the number of cutting blades 36 to be replaced (one or two), and which cutting blade 36 to replace when only one blade needs to be replaced. The cutting blade identification signal includes information such as whether the cutting blade should be cut or not, and the blade recognition unit 134 is configured to be able to recognize the above information as well.

(Selection section 136)
In the selection section 136, the types of cutting blades 36 stored in the cutting blade storage means 4 are registered for each blade support shaft 24. Then, the selection unit 136 selects the type of cutting blade 36 recognized by the blade recognition unit 134 from among the cutting blades 36 stored in the cutting blade storage unit 4. Further, the selection unit 136 operates the endless track 22 of the cutting blade storage means 4 to position the selected cutting blade 36 to a position where it can be carried out by the carry-in/out means 6.

(Transportation means 8)
The moving means 8 will be explained with reference to FIGS. 1 and 10. The moving means 8 includes a moving part 138 that moves to the specified location, and a connecting part 140 (see FIG. 1) that connects with the cutting device.

(Moving unit 138)
As shown in FIG. 10, the moving unit 138 of the illustrated embodiment includes an X-axis moving unit 142 that moves the automatic exchange device 2 in the X-axis direction, and a Y-axis moving unit 144 that moves the automatic exchange device 2 in the Y-axis direction. and has.

(X-axis moving unit 142)
The X-axis moving unit 142 includes a pair of housings 146 fixed to the lower surface of the common base plate 26 at intervals in the Y-axis direction. A driving wheel 148 and a driven wheel 150, which are spaced apart from each other in the X-axis direction, are rotatably attached to each of the pair of housings 146, and a motor (not shown) for rotating the driving wheel 148 is attached to each of the pair of housings 146. .) is provided. Further, a crawler belt 152 is wound around the driving wheel 148 and the driven wheel 150. In the X-axis moving unit 142, the motor rotates the crawler belt 152 via the drive wheel 148, thereby moving the automatic exchange device 2 in the X-axis direction.

(Y-axis moving unit 144)
The Y-axis moving unit 144 includes a housing 154 and an elevating piece 156 disposed between the upper surface of the housing 154 and the lower surface of the common base plate 26. The elevating piece 156 is attached to the housing 154 so as to be movable up and down, and is fixed to the lower surface of the common base plate 26. Further, the housing 154 is provided with an elevating means for elevating and lowering the elevating piece 156. The lifting means may be, for example, an air-driven actuator.

The housing 154 includes a pair of drive wheels 158 (only one side is shown) arranged at intervals in the X-axis direction, and a motor (not shown) that rotates the pair of drive wheels 158. A pair of driven wheels 160 (only one side is shown) arranged at intervals in the Y-axis direction from each drive wheel 158, and a pair of crawler belts 162 wrapped around the drive wheels 158 and the driven wheels 160. Be prepared.

In the Y-axis moving section 144, the elevating piece 156 is raised and lowered by the elevating means to bring either the crawler belt 152 of the X-axis moving section 142 or the crawler belt 162 of the Y-axis moving section 144 into contact with the floor.

For example, when the elevating piece 156 is raised (extended) relative to the housing 154, the distance between the housing 154 and the common base plate 26 increases, the crawler track 162 of the Y-axis moving section 144 comes into contact with the floor, and the X-axis moving section 142's crawler track 152 will be separated from the floor. Then, while the crawler belt 162 of the Y-axis moving unit 144 is in contact with the floor, the Y-axis moving unit 144 rotates the crawler belt 162 via the drive wheel 158 by the motor, thereby moving the automatic exchange device 2 in the Y-axis direction. move it.

On the other hand, when the elevating piece 156 is lowered (reduced) with respect to the housing 154, the distance between the housing 154 and the common base plate 26 is narrowed, the crawler track 162 of the Y-axis moving section 144 comes off the floor, and the X-axis moving section 142 moves away from the floor. Crawler track 152 contacts the floor. Then, the automatic exchange device 2 can be moved in the X-axis direction by the X-axis moving section 142.

In the illustrated embodiment, an example has been described in which the X-axis moving section 142 moves the automatic exchange device 2 in the X-axis direction, and the Y-axis moving section 144 moves the automatic exchange device 2 in the Y-axis direction. In the section 142, the rotational speed or rotational direction of the pair of crawler tracks 152 is controlled to perform a pivot turn or a spin turn, thereby changing the direction of the automatic exchange device 2. Similarly, in the Y-axis moving section 144, the direction of the automatic exchange device 2 can be changed by controlling the rotational speed or rotational direction of the pair of crawler belts 162 to perform a pivot turn or a spin turn. Note that the moving unit 138 is not limited to the above-mentioned crawler type, but may be a wheel type.

(Connection part 140)
As shown in FIG. 1, the connecting portion 140 includes a plurality of (four in the illustrated embodiment) substrates 164 arranged on the upper surface of the common base plate 26, and a truncated cone-shaped protrusion protruding from the side surface of each substrate 164. 166. The protrusion 166 protrudes toward the outside of the automatic exchange device 2, and has a diameter that gradually decreases toward the tip (a tapered shape).

Then, when the automatic exchange device 2 is moved by the moving unit 138 and reaches a position where the cutting blade 36 of the cutting device can be replaced with a new cutting blade 36 by the automatic exchange device 2, the hole formed in the side of the cutting device is opened. The protrusion 166 fits into the (connected part), and the automatic exchange device 2 and the cutting device are connected. Note that, contrary to the illustrated embodiment, the connecting portion 140 may have a hole, and the connected portion of the cutting device may have a protrusion.

Next, a cutting device 170 to which the automatic exchange device 2 described above can be connected will be described with reference to FIGS. 11 to 15.

(Cutting device 170)
As shown in FIG. 11, the cutting device 170 includes a chuck table 172 equipped with a holding surface for holding a workpiece, and a cutting blade 36 for cutting the workpiece held on the chuck table 172, which is attached with a fixing nut. means 174; It includes a Z-axis feeding means 180 that feeds the cutting means 174 in the Z-axis direction perpendicular to the Y-axis direction.

(Chuck table 172)
To explain with reference to FIGS. 11 and 12, the cutting device 170 includes an It includes a column 186 fixed to the upper surface and a cover plate 188 fixed to the upper end of the column 186. A circular opening 188a is formed in the cover plate 188. The chuck table 172 is rotatably mounted on the upper end of the support column 186 and extends upward through a circular opening 188a in the cover plate 188. The chuck table 172 is rotated about the Z-axis direction by a motor (not shown) built into the support column 186.

As shown in FIG. 12, a porous circular suction chuck 190 connected to suction means (not shown) is disposed at the upper end portion of the chuck table 172. The chuck table 172 is designed to suction and hold the workpiece placed on the top surface of the suction chuck 190 by generating a suction force on the top surface of the suction chuck 190 using suction means.

In this way, in the chuck table 172, the upper surface of the suction chuck 190 serves as a holding surface that holds the workpiece, and the holding surface is positioned on the XY plane defined by the X-axis direction and the Y-axis direction. . Furthermore, a plurality of clamps 192 are arranged on the periphery of the chuck table 172 at intervals in the circumferential direction.

(X-axis feeding means 176)
As shown in FIG. 12, the X-axis feeding means 176 includes a ball screw 198 that is connected to the X-axis movable plate 184 and extends in the X-axis direction, and a motor 200 that rotates the ball screw 198. The X-axis sending means 176 converts the rotational motion of the motor 200 into a linear motion using a ball screw 198, transmits the linear motion to the X-axis movable plate 184, and moves the X-axis movable plate 184 along the guide rail 182a of the base 182. At the same time, the chuck table 172 is processed and fed in the X-axis direction.

As shown in FIG. 11, the cutting device 170 includes a gate-shaped frame 202 disposed straddling the chuck table 172. The frame 202 includes a pair of columns 204 extending upward from the top surface of the base 182 at intervals in the Y-axis direction, and a beam 206 spanning between the upper ends of the pair of columns 204 and extending in the Y-axis direction.

(Cutting means 174)
A pair of cutting means 174 are provided on one side of the beam 206 (the side on the back side in FIG. 11) at intervals in the Y-axis direction. In the cutting device 170 of the illustrated embodiment, a pair of cutting means 174 are provided so that the cutting blades 36 face each other, and the workpiece held on the chuck table 172 is simultaneously cut by the pair of cutting blades 36. It is now possible to apply Note that the number of cutting means 174 may be one.

As shown in FIG. 13, each cutting means 174 includes a rectangular Y-axis movable member 208 supported on one side of the beam 206 so as to be movable in the Y-axis direction, and a rectangular Y-axis movable member 208 that moves up and down in the Z-axis direction. It includes a freely supported Z-axis movable member 210 having an L-shaped cross section, and a spindle housing 212 fixed to the lower end of the Z-axis movable member 210.

A pair of guided grooves 208a extending in the Y-axis direction at intervals in the Z-axis direction are formed on one side surface (the side surface on the near side in FIG. 13) of the Y-axis movable member 208. The beam 206 is slidably connected to a pair of guide rails (not shown) extending in the Y-axis direction with an interval in the vertical direction on one side surface of the beam 206 .

(Y-axis feeding means 178)
The Y-axis feeding means 178 includes a ball screw 214 extending in the Y-axis direction on one side of the beam 206, and a motor 216 that rotates the ball screw 214. Ball screw 214 is connected to Y-axis movable member 208. The Y-axis feeding means 178 converts the rotational motion of the motor 216 into a linear motion using a ball screw 214 and transmits the linear motion to the Y-axis movable member 208, and the Y-axis movable member 208 moves along the Y-axis along a guide rail attached to one side of the beam 206. The member 208 is indexed and fed in the Y-axis direction.

A pair of guide rails (not shown) extending in the Z-axis direction at intervals in the Y-axis direction are formed on the other side surface of the Y-axis movable member 208 (the side surface on the back side in FIG. 13). The Z-axis movable member 210 has a pair of guided grooves (not shown) that are slidably connected to the pair of guide rails of the Y-axis movable member 208.

(Z-axis feeding means 180)
The Z-axis feeding means 180 includes a ball screw (not shown) connected to the Z-axis movable member 210 and extending in the Z-axis direction, and a motor 218 that rotates the ball screw. The Z-axis feeding means 180 converts the rotational motion of the motor 218 into linear motion using a ball screw, transmits the linear motion to the Z-axis movable member 210, and moves the Z-axis movable member 210 along the guide rail of the Y-axis movable member 208 along the Z-axis. Cut and feed in the direction.

Referring to FIG. 14, the spindle housing 212 supports a cylindrical spindle 220 rotatably about the Y-axis direction, and a motor (not shown) that rotates the spindle 220. is accommodated. A cutting blade 36 for cutting a workpiece is removably fixed to the tip of the spindle 220 by a fixing nut 222.

A blade cover 224 that covers the cutting blade 36 is attached to the tip of the spindle housing 212. The blade cover 224 includes a first cover member 224a fixed to the tip of the spindle housing 212, and a second cover member 224b movably attached to the tip of the first cover member 224a. The second cover member 224b is moved in the X-axis direction by an appropriate actuator (not shown) such as an air cylinder, and is positioned at the open position shown in FIG. 14 when the cutting blade 36 is replaced. and is positioned at the closed position shown in FIG. 13 during cutting.

As shown in FIG. 15, an annular fixing flange 226 that protrudes radially outward is provided on the outer circumferential surface of the tip end side of the spindle 220. An annular recess 226a is formed in the radially inner portion of the distal end surface of the fixed flange 226, and an annular support end surface 226b protrudes in the axial direction on the outer peripheral side of the distal end surface of the fixed flange 226. . Further, a male screw 228 is formed on the outer circumferential surface of the spindle 220 on the distal end side of the fixed flange 226 .

Then, the central opening 38a of the cutting blade 36 fits into the tip of the spindle 220, and the male screw 228 of the spindle 220 and the fixing nut 222 are screwed (fastened), thereby supporting the supporting end surface 226b of the fixing flange 226. The cutting blade 36 is sandwiched between the and fixing nut 222 and is detachably fixed to the tip of the spindle 220. Further, on the side surface of the fixing nut 222, a plurality of pin holes 222a into which the pins 72 of the fixing nut holder 50 of the carrying-in/out means 6 are inserted are formed at equal intervals in the circumferential direction.

As shown in FIG. 14, a cutting edge detection sensor 229 that detects the state of the cutting edge 40 of the cutting blade 36 is provided on the upper part of the first cover member 224a of the blade cover 224. Referring to FIG. 16, the cutting edge detection sensor 229 includes a light emitting element 229a and a light receiving element 229b, which are arranged at opposite positions with the cutting blade 36 in between.

During normal operation, when the cutting blade 40 of the cutting blade 36 is not worn or chipped, part of the light from the light emitting element 229a is blocked by the cutting blade 40. On the other hand, when the cutting blade 40 is worn out or chipped, the amount of light received by the light receiving element 229b increases compared to the normal state. For this reason, the cutting edge detection sensor 229 detects the damaged state of the cutting edge 40 of the cutting blade 36 based on the amount of light received by the light receiving element 229b. Note that the cutting edge detection sensor 229 is raised and lowered by a lifting means (not shown), and its vertical position is adjusted.

As shown in FIG. 11, on the other side of the beam 206 of the frame 202 (the side on the near side in FIG. 11), a pair of imaging means 230 for taking an image of the workpiece held on the chuck table 172 is installed in the Y-axis direction. A pair of moving mechanisms 232 for moving the imaging means 230 in the Y-axis direction are also mounted.

The moving mechanism 232 includes a ball screw 234 extending in the Y-axis direction on the other side surface of the beam 206, and a motor 236 that rotates the ball screw 234. Ball screw 234 is coupled to imaging means 230. Then, the moving mechanism 232 converts the rotational motion of the motor 236 into a linear motion and transmits it to the imaging means 230, and moves the imaging means 230 in the Y-axis direction along the guide rail 206a attached to the other side surface of the beam 206. move it to Note that the number of imaging means 230 may be one.

(cutting)
When cutting a workpiece such as a wafer using the cutting device 170, the workpiece is first attracted to the chuck table 172. Next, the chuck table 172 is moved below the imaging means 230 by the X-axis feeding means 176, and the position of the imaging means 230 in the Y-axis direction is adjusted by the moving mechanism 232. Next, the image capturing means 230 images the workpiece from above to detect the cutting area of the workpiece.

Next, based on the cutting area of the workpiece detected by the imaging means 230, the chuck table 172 is rotated to adjust the orientation of the cutting area of the workpiece with respect to the cutting blade 36 of the cutting means 174. Next, the chuck table 172 is moved in the X-axis direction by the X-axis feeding means 176, and the spindle housing 212 is moved in the Y-axis direction by the Y-axis feeding means 178, so that a pair of cutting blades is placed above the cutting area of the workpiece. Position 36.

Next, the spindle housing 212 is lowered by the Z-axis feeding means 180, and the cutting blade 40 of the cutting blade 36 rotated at high speed is made to cut into the cutting region of the workpiece, and the cutting blade 40 of the cutting blade 36 is made to cut. By processing and feeding the chuck table 172 in the X-axis direction while supplying cutting water to the part, a predetermined cutting process is performed on the cutting area of the workpiece. While the spindle housing 212 is indexed and fed in the Y-axis direction by the Y-axis feeding means 178, the above-mentioned cutting process is repeated as appropriate to perform the cutting process on the entire cutting area of the workpiece. After the cutting process has been completed, the cut workpiece is transported to the next process.

(Replacement of cutting blade 36)
If the cutting process is repeated, the cutting blade 36 will wear out, and when the wear of the cutting blade 36 reaches a predetermined amount, cutting accuracy will no longer be maintained, so the cutting blade 36 attached to the spindle 220 is replaced with a new cutting blade 36. There is a need to. The cutting edge detection sensor 229 detects that the replacement time has come due to damage.

Furthermore, even if the wear of the cutting blade 36 attached to the spindle 220 has not reached a predetermined level, when cutting a workpiece made of a material different from that of the workpiece that was previously cut, , it may be necessary to replace the cutting blade 36 with a cutting blade 36 that is appropriate for the material of the workpiece.

Hereinafter, when a plurality of cutting devices 170 are installed around one automatic exchange device 2, two cutting blades 36 of the same type attached to the cutting device 170 are replaced by the automatic exchange device 2. Explain how.

(Transmission of signal from cutting device 170)
The control means (not shown) of the cutting device 170 requests the automatic changing device 2 to replace the cutting blade 36 when the cutting blade 36 needs to be replaced. That is, a signal for identifying the cutting device 170 (cutting device identification signal) and a signal indicating the type of cutting blade 36 that the cutting device 170 requests to be replaced are transmitted from the transmitting unit 238 (see FIG. 11) of the cutting device 170. (cutting blade identification signal) to the automatic exchange device 2.

(Signal received at automatic exchange device 2)
When a signal is transmitted from the cutting device 170, in the automatic exchange device 2, the signal (cutting device identification signal or cutting blade identification signal) transmitted from the cutting device 170 is received by the receiving unit 126 of the control means 7.

(Identification of the location of the cutting device 170)
When the receiving section 126 receives the signal, the location specifying section 130 of the control means 7 identifies the cutting device 170 that transmitted the signal based on the signal (cutting device identification signal) received by the receiving section 126, and records the location. The location of the identified cutting device 170 is specified in reference to the information recorded in the section 128 (location information of the cutting device 170).

(Recognition of type of cutting blade 36)
Further, the blade recognition unit 134 recognizes the type of the requested cutting blade 36 based on the signal (cutting blade identification signal) transmitted from the cutting device 170. When the cutting device 170 includes a pair of cutting blades 36 as in the illustrated embodiment, the number of cutting blades 36 to be replaced (one or two) and when only one blade needs to be replaced are determined. Additionally, information regarding which cutting blade 36 should be replaced is also recognized by the blade recognition unit 134.

(Move to the specified location of the cutting device 170)
After specifying the location of the cutting device 170, the operating section 132 of the control means 7 operates the moving section 8 to move the automatic exchange device 2 to the location of the cutting device 170 specified by the location specifying section 130. Then, the protrusion 166 of the connecting portion 140 is fitted into the hole of the cutting device 170 to connect the automatic exchange device 2 and the cutting device 170. As a result, the cutting blade 36 mounted on the cutting device 170 can be replaced with a new cutting blade 36 stored in the cutting blade storage means 4 of the automatic exchange device 2.

In the illustrated embodiment, as shown in FIG. 17, the automatic exchange device 2 is connected to the back side of the cutting device 170 in the X-axis direction. When the automatic exchange device 2 and the cutting device 170 are connected, the endless track 22 of the cutting blade storage means 4 is rotated, and a new cutting blade 36 (the cutting blade 36 recognized by the blade recognition unit 134) to be carried into the cutting device 170 is transferred. The blade support shaft 24 supporting the blade support shaft 24 is positioned at a predetermined position (eg, the lowest position in the trajectory of the blade support shaft 24).

Next, as shown in FIG. 18, the casing 52 is rotated by a motor connected to the Z rotation shaft 46 of the loading/unloading means 6, and the side wall 56 of the casing 52 on which the blade holding part 48 is attached is moved along the X-axis direction. Then, the blade holding portion 48 is made to face the cutting blade storage means 4.

Furthermore, by operating the X-axis moving means 12 and the Z-axis moving means 10, the shaft portion 34 of the blade support shaft 24 at the predetermined position can be inserted into the central opening 60 (see FIG. 5) of the blade holding portion 48. Adjust the position of the blade holding portion 48 in the X-axis direction and the Z-axis direction.

Next, as shown in FIG. 19, the frame body 74 is moved in the Y-axis direction by the Y-axis moving means 9, and the cutting blade 36 supported by the blade support shaft 24 is carried out to an operating position where it can be held by the blade holding part 48. Position the input means 6. As a result, the shaft portion 34 of the blade support shaft 24 at the predetermined position is inserted into the central opening 60 of the blade holding portion 48, and the blade holding portion 48 is inserted into the end surface of the cutting blade 36 located on the tip side of the shaft portion 34. The end surfaces 58 are brought into contact. Next, a suction force is generated in the suction hole 61 of the blade holding part 48, and the cutting blade 36 located on the tip side of the shaft part 34 is held by the blade holding part 48 by suction.

Next, the Y-axis moving means 9 is operated to move the carry-in/out means 6 away from the cutting blade storage means 4 in the Y-axis direction and position it at the retracted position. Next, the casing 52 of the carry-in/out means 6 is rotated 180 degrees, and the blade holding part 48 on the opposite side of the blade holding part 48 holding the cutting blade 36 under suction is made to face the cutting blade storage means 4.

Next, the Y-axis moving means 9 is operated to position the loading/unloading means 6 to an operating position where the cutting blade 36 of the blade support shaft 24 can be held by the blade holding section 48 on the opposite side. Next, a suction force is generated in the suction hole 61 of the blade holding part 48 on the opposite side, and the cutting blade 36 located on the tip side of the shaft part 34 is held by the blade holding part 48 by suction. As a result, a new cutting blade 36 is suction-held by a pair of opposing blade holding parts 48 among the four blade holding parts 48.

Next, as shown in FIG. 20, the frame body 74 is moved in the Y-axis direction by the Y-axis moving means 9, and the lifting table 76 is moved in the Z-axis direction by the Z-axis moving means 10. As a result, the carry-in/out means 6 is separated from the cutting blade storage means 4 and positioned at the retreat position, and the Y-axis and Z-axis positions of the carry-in/out means 6 with respect to the cutting device 170 are adjusted. The Y-axis direction position of the carry-in/out means 6 after position adjustment is between the pair of cutting means 174 of the cutting device 170, and the Z-axis direction position of the carry-in/out means 6 after position adjustment is between the holding surface of the chuck table 172. It is above.

Next, as shown in FIG. 21, the carry-in/out means 6 is moved in the X-axis direction by the X-axis moving means 12, and the position of the carry-in/out means 6 in the X-axis direction with respect to the pair of cutting means 174 is adjusted. Specifically, the positions in the X-axis direction of the centers of the new pair of cutting blades 36 that are suction-held by the pair of blade holding parts 48 of the loading/unloading means 6, and the positions of the centers of the pair of cutting blades 36 attached to the pair of cutting means 174 are determined. The position of the center of the cutting blade 36 in the X-axis direction is aligned.

In addition, the Z-axis moving means 10 of the automatic exchanger 2 or the Z-axis feeding means 180 of the cutting device 170 is operated, and the Z-axis direction position of the center of the cutting blade 36 of the blade holding part 48 and the cutting blade 36 of the cutting means 174 are controlled. and the Z-axis direction position of the center.

Next, the casing 52 of the loading/unloading means 6 is rotated by 60 degrees, and the pair of fixed nut holding parts 50 are made to face the cutting blades 36 of the pair of cutting means 174. Incidentally, the casing 52 may be rotated by 60 degrees before the carrying-in/out means 6 is advanced.

Next, the second cover member 224b of each blade cover 224 of the pair of cutting means 174 is positioned in the open position (see FIG. 14). Next, the cutting means 174 is moved in the Y-axis direction by the Y-axis feeding means 178 of the cutting device 170, and the fixing nut 222 fixing the cutting blade 36 to the spindle 220 is moved to the end surface 66a of the rotating body 66 of the fixing nut holder 50. contact with. Then, the pin 72 of the fixed nut holder 50 is pushed by the fixed nut 222 and accommodated inside the rotating body 66, and the tip of the spindle 220 is accommodated in the central opening 68 of the rotating body 66.

Next, when the rotating body 66 is rotated by the motor of the fixed nut holding part 50, when each pin 72 matches the pin hole 222a of the fixed nut 222, each pin 72 is fitted into the pin hole 222a, and the rotating body 66 is rotated. The rotational movement of is transmitted to the fixing nut 222 via each pin 72, and the fixing nut 222 is loosened. Thereby, the fixing nut 222 can be unscrewed (removed) from the male thread 228 of the spindle 220 of the cutting means 174. Further, a suction force is generated in each suction hole 70 of the fixed nut holding section 50, and the removed fixed nut 222 is held by suction in the fixed nut holding section 50.

Next, the cutting means 174 is separated from the loading/unloading means 6 by the Y-axis feeding means 178, and the casing 52 of the loading/unloading means 6 is rotated by 60 degrees to remove the empty blade holding section 48 which is not holding the cutting blade 36 by suction. It is made to face the cutting blade 36 of the cutting means 174.

Next, the cutting means 174 is brought close to the loading/unloading means 6 by the Y-axis feeding means 178, the spindle 220 of the cutting means 174 is inserted into the central opening 60 of the blade holding part 48, and the end face of the cutting blade 36 of the cutting means 174 is inserted. The end surface 58 of the empty blade holding portion 48 is brought into contact with the blade holding portion 48 . Next, a suction force is generated in the suction hole 61 of the blade holding part 48, and the cutting blade 36 of the cutting means 174 is held by the blade holding part 48 by suction.

Next, the cutting means 174 is separated from the carrying-in/out means 6 by the Y-axis feeding means 178, and the casing 52 of the carrying-in/out means 6 is rotated by 60 degrees, and the blade holding part 48, which holds the new cutting blade 36 by suction, is moved. It faces the spindle 220 of the cutting means 174.

Next, the cutting means 174 is brought close to the loading/unloading means 6 by the Y-axis feeding means 178, the spindle 220 is inserted into the central opening 38a of the new cutting blade 36, and the supporting end surface 226b of the fixed flange 226 of the spindle 220 is cut. The end surfaces of the blades 36 are brought into contact. Next, the suction force of the blade holder 48 is released, and a new cutting blade 36 is transferred from the blade holder 48 to the spindle 220.

Next, the cutting means 174 is separated from the carrying-in/out means 6 by the Y-axis feeding means 178, and the casing 52 of the carrying-in/out means 6 is rotated by 60 degrees, and the fixed nut holding part 50 which holds the removed fixed nut 222 by suction is moved. faces the spindle 220 of the cutting means 174.

Next, the cutting means 174 is brought close to the loading/unloading means 6 by the Y-axis feeding means 178, and the fixed nut 222 held under suction by the fixed nut holder 50 is fitted to the tip of the spindle 220. Next, the motor of the fixing nut holder 50 is operated in the opposite direction to when the fixing nut 222 was removed to rotate the fixing nut 222, and the fixing nut 222 is screwed onto the male screw 228 of the spindle 220 (fastened).

Thereby, a new cutting blade 36 to be attached to the cutting means 174 can be fixed to the spindle 220 by being sandwiched between the supporting end surface 226b of the fixed flange 226 of the spindle 220 and the fixing nut 222.

Next, after releasing the suction force of the fixed nut holder 50, the second cover member 224b of the blade cover 224 of the cutting means 174 is positioned at the closed position. Note that the fixing nut 222 and the cutting blade 36 may be removed and attached to the pair of cutting means 174 simultaneously or separately as described above.

Next, the carry-in/out means 6 is moved backward, and the casing 52 of the carry-in/out means 6 is rotated by 60 degrees, so that one of the pair of removed cutting blades 36 is made to face the cutting blade storage means 4. Further, the endless track 22 of the cutting blade storage means 4 is rotated, and the empty blade support shaft 24 that does not support the cutting blade 36 is positioned at a predetermined position (for example, the lowest position in the trajectory of the blade support shaft 24).

Next, the X-axis moving means 12 and the Z-axis moving means 10 are operated to move the shaft portion 34 of the blade support shaft 24 at the predetermined position to the central opening 38a of one of the cutting blades 36 that is being held under suction by the blade holding portion 48. The X-axis and Z-axis positions of the blade holding section 48 are adjusted so that the blade holding section 48 can be inserted.

Next, the frame body 74 is moved in the Y-axis direction by the Y-axis moving means 9, and the axis of the blade support shaft 24 at the predetermined position is inserted into the central opening 38a of one of the cutting blades 36, which is held under suction by the blade holder 48. While inserting the section 34, the end surface of one cutting blade 36 is brought into contact with the end surface of the base section 32 of the blade support shaft 24. Next, the suction force of the blade holding part 48 is released, and one of the pair of removed cutting blades 36 is transferred to the blade support shaft 24.

Further, the Y-axis moving means 9 moves the carry-in/out means 6 away from the cutting blade storage means 4, rotates the casing 52 of the carry-in/out means 6 by 180 degrees, and holds the other of the pair of removed cutting blades 36 by suction. The blade holder 48 on the opposite side faces the cutting blade storage means 4.

Next, the frame body 74 is moved in the Y-axis direction by the Y-axis moving means 9, and the blade support shaft at the predetermined position is inserted into the central opening 38a of the other cutting blade 36, which is suction-held by the blade holder 48 on the opposite side. 24 of the shaft portions 34 are inserted, and the end surface of the other cutting blade 36 is brought into contact with the end surface of the cutting blade 36 supported by the blade support shaft 24. Next, the suction force of the blade holding part 48 is released, and the other of the pair of removed cutting blades 36 is transferred to the blade support shaft 24.

In this manner, in the automatic exchange device 2 of the illustrated embodiment, when the cutting device 170 transmits a signal requesting replacement of the cutting blade 36, the cutting device 170 that transmitted the signal is changed based on the transmitted signal. The location can be determined, the type of cutting blade 36 requested can be recognized, and the cutting device 170 that sent the signal can be moved to the location and the cutting blade 36 can be replaced. Therefore, since the cutting blades 36 can be exchanged for a plurality of cutting devices 170 using one automatic exchange device 2, the operating rate of the automatic exchange device 2 can be improved.

In the illustrated embodiment, the cutting blade 36 is a hub blade having an annular base 38 and an annular cutting blade 40 disposed on the outer periphery of the base 38. In the device 2, the cutting blade that is replaceable and capable of managing inventory and reminding of replenishment is not limited to the above-mentioned hub blade, but may also be a washer blade (a blade without a base) composed of an annular cutting blade. . In this case, the blade holding portion 48 is provided with a suction hole for sucking and holding the washer blade.

2: Automatic exchange device 4: Cutting blade storage means 6: Carrying in/out means 7: Control means 8: Movement means 9: Y-axis movement means 10: Z-axis movement means 12: X-axis movement means 36: Cutting blade 46: Z rotation Axis 48: Blade holding part 50: Fixed nut holding part 74: Frame 76: Lifting table 92: Guide rail (lifting table)
112: Flexible arm 126: Receiving section
128: Location recording section 130: Location specifying section 132: Operating section 134: Blade recognition section 136: Selection section 138: Moving section 140: Connecting section 170: Cutting device 172: Chuck table 174: Cutting means 176: X-axis feeding means 178 : Y-axis feeding means 180: Z-axis feeding means 220: Spindle 222: Fixing nut

Claims (4)

A chuck table with a holding surface for holding a workpiece, a cutting means equipped with a fixing nut with a cutting blade for cutting the workpiece held on the chuck table, and a processing feed for the chuck table in the X-axis direction. an X-axis feeding means for indexing and feeding the cutting means in a Y-axis direction perpendicular to the X-axis direction; and a Y-axis feeding means for indexing and feeding the cutting means in a Z-axis direction perpendicular to the X-axis direction and the Y-axis direction. and a Z-axis feeding means, the holding surface being connectable to a cutting device defined in the X-axis direction and the Y-axis direction,
A cutting blade storage means for storing a plurality of cutting blades, a carrying-in/out means for transporting the cutting blades carried out from the cutting blade storage means to the cutting means and carrying in the cutting blades detached from the cutting means, and a control means. , a moving means for moving to the cutting device; and an automatic changing device. The control means includes a receiving section that receives signals transmitted from the plurality of cutting devices, a location recording section that records the locations of the plurality of cutting devices, and a comparison between the signals received by the receiving section and the location recording section. a location identification unit that identifies the location of the cutting device; an actuation unit that operates the moving means; a blade recognition unit that recognizes the type of cutting blade requested by the transmitted signal; a selection unit for selecting the type of cutting blade from the cutting blade storage means;
2. The automatic exchange device according to claim 1, wherein the moving means includes a moving section that moves to a specified location, and a connecting section that connects to the cutting device. a Y-axis moving means for positioning the carrying-in/out means in an operating position and a retreat position in the Y-axis direction with respect to the cutting blade storage means; a Z-axis moving means for moving the carrying-in/out means in the Z-axis direction; X-axis moving means for moving the input means in the X-axis direction and positioning the input means in an operating position where it acts on a cutting blade attached to a spindle of the cutting means,
The loading/unloading means includes a Z rotating shaft extending in the Z-axis direction, a blade holding section that is radially connected to the Z rotating shaft and holds the cutting blade by suction, and a male thread formed at the tip of the spindle to connect the fixing nut. 2. The automatic exchange device according to claim 1, further comprising a fixing nut holder that is screwed onto and unscrewed from the fixing nut holder. The loading/unloading means is disposed on the frame via the bending arm of the X-axis moving means, and the frame is slidably supported by a guide rail extending in the Y-axis direction disposed on the lifting table, 4. The automatic exchange device according to claim 3, wherein the Y-axis moving means positions the cutting blade storage means at the working position and the retreating position in the Y-axis direction.

Images