TW202322974A - Machining apparatus capable of properly tightening a cutting blade - Google Patents

Abstract

A machining apparatus capable of properly tightening a cutting blade is provided. A machining apparatus 2 is configured to positively rotate a nut holding portion 116 to screw a nut 64 to the male screw thread 58a of a hub portion 58, and to take a position where the torque reaches a threshold of tightening completion as a reference position. When the nut holding part 116 is rotated reversely and rotated positively, the torque reaches the threshold value at the reference position. Under the foregoing circumstance, it is determined that the cutting blade 54 has been properly tightened. Otherwise, it is determined that the cutting blade 54 is not properly tightened.

Description

Processing device

The present invention relates to a processing device, which includes: holding means, which holds a workpiece; cutting means, which is equipped with a cutting blade, and the cutting blade cuts the workpiece held by the holding means; means, which installs the cutting blade on the cutting means.

A wafer with multiple components such as ICs and LSIs formed on the front side, which is divided by the dividing line, is divided into individual component wafers by a processing device equipped with a dicing blade, and the divided component wafers are used in Mobile phones, personal computers and other electronic equipment.

The applicant of this application has already proposed a processing device having a cutting blade installation means for automatically replacing the cutting blade (for example, refer to Patent Document 1).

The cutting means of this processing device includes: a rotating shaft; a fixed flange disposed at the front end of the rotating shaft and supporting the back of the cutting blade; The opening part of the part fits; and the male thread is formed at the front end of the hub part.

In addition, the cutting blade installation means is equipped with a nut holding part, which can automatically install the cutting blade on the cutting means, and the nut holding part holds the nut freely, and the nut and the fixed flange clamp the inserted wheel hub. Part of the cutting blade. [Prior art literature] [Patent Document]

[Patent Document 1] Japanese Patent Laid-Open No. 2007-98536

[Problems to be Solved by the Invention] However, if the nut is not properly screwed into the male thread of the hub, if there is debris between the nut and the male thread, if the thread is worn, etc., a load will be applied to the nut, and it is difficult to properly lock the cutting blade. The torque (load current value) of the nut holding part reaches a predetermined threshold before the fixing flange and the locking operation is completed.

[Technical means to solve the problem] The object of the present invention is to provide a processing device that can properly lock the cutting blade.

According to the present invention, there is provided a processing apparatus that solves the above-mentioned problems and the following. That is, there is provided: "A processing device comprising: a holding means, which holds a workpiece; a cutting means, which is equipped with a cutting blade, and the cutting blade cuts the workpiece held by the holding means; and a cutting means. blade attachment means for attaching a cutting blade to the cutting means, The cutting means includes: a rotating shaft; a fixed flange disposed at the front end of the rotating shaft and supporting the back of the cutting blade; The opening of the fitting; and the male thread, which is formed at the front end of the hub, The cutting blade mounting means is provided with a nut holding portion which detachably holds a nut, and the nut and the fixing flange sandwich the cutting blade inserted into the hub portion, Taking the position where the nut is screwed into the male thread of the hub portion by forward rotation of the nut holder and the torque reaches the locking completion threshold as a reference position, after the nut holder is reversely rotated, the If the nut holder is rotating and the torque reaches the threshold at the reference position, it is judged that the cutting blade has been properly locked, otherwise it is judged that the cutting blade is not properly locked.

[Efficacy of the invention] Processing device of the present invention comprises: holding means, which holds the workpiece; cutting means, which is equipped with a cutting blade that cuts the workpiece held by the holding means; and cutting blade mounting means, which mounts the cutting blade on the means of cutting, The cutting means includes: a rotating shaft; a fixed flange disposed at the front end of the rotating shaft and supporting the back of the cutting blade; The opening of the fitting; and the male thread, which is formed at the front end of the hub, The cutting blade mounting means is provided with a nut holding portion which detachably holds a nut, and the nut and the fixing flange sandwich the cutting blade inserted into the hub portion, Taking the position where the nut is screwed into the male thread of the hub portion by forward rotation of the nut holder and the torque reaches the locking completion threshold as a reference position, after the nut holder is reversely rotated, the If the nut holding part is rotating and the torque reaches the threshold at the reference position, it is judged that the cutting blade has been properly locked, otherwise it is judged that the cutting blade is not properly locked, so the cutting blade can be properly locked. blade.

Hereinafter, preferred embodiments of the processing apparatus configured according to the present invention will be described with reference to the drawings.

(processing unit 2) As shown in FIG. 1 , the overall processing device represented by symbol 2 includes: holding means 4, which holds the workpiece; a processed object; and a cutting blade attachment means 8 for attaching a cutting blade to the cutting means 6 .

(keep means 4) 2 and 3, the holding means 4 includes: an X-axis movable plate 12, which is set to move freely in the X-axis direction on the upper surface of the base 10 (see FIG. 2); The upper surface of the movable plate 12 on the X axis; and the cover plate 16 fixed on the upper end of the pillar 14 . A circular opening 16 a is formed in the cover plate 16 , and a chuck table 18 extending upward through the circular opening 16 a is rotatably attached to the upper end of the pillar 14 .

In addition, the X-axis direction is the direction indicated by arrow X in FIG. 1 . Moreover, the Y-axis direction shown by arrow Y in FIG. 1 is the direction perpendicular to the X-axis direction, and the Z-axis direction shown by arrow Z in FIG. 1 is the up-down direction perpendicular to the X-axis direction and the Y-axis direction. . The XY plane defined by the X-axis direction and the Y-axis direction is substantially horizontal.

A porous circular adsorption chuck 20 connected to a suction means (not shown) is disposed on the upper end portion of the chuck table 18 . On the periphery of the chuck table 18, a plurality of chucks 22 are provided at intervals in the circumferential direction.

Then, in the holding means 4 , the workpiece placed on the upper surface of the adsorption chuck 20 is sucked and held by generating an attractive force on the upper surface of the adsorption chuck 20 by the suction means. In this way, the upper surface of the suction chuck 20 becomes a holding surface for holding the workpiece, and the holding surface is positioned on the XY plane.

In addition, the chuck table 18 of the holding means 4 is rotated around the Z-axis direction by a chuck table motor (not shown) built in the support 14, and is moved by the X-axis feed means 24. The machining feed is performed in the X axis direction.

The X-axis feeding means 24 has a ball screw 26 that is connected to the X-axis movable plate 12 and extends in the X-axis direction, and a motor 28 that rotates the ball screw 26 . The X-axis feed means 24 converts the rotary motion of the motor 28 into a linear motion through the ball screw 26 and transmits it to the X-axis movable plate 12, so that the X-axis movable plate 12 moves along the guide rail 10a on the base 10 in the X-axis. direction, and the chuck table 18 is processed and fed in the direction of the X axis.

As shown in FIG. 2 , the processing device 2 includes a gate-shaped frame 30 disposed across the holding means 4 . The frame 30 has: a pair of pillars 32 extending upward from the upper surface of the base 10 at intervals in the Y-axis direction; extend.

(cutting means 6) A pair of cutting means 6 are provided on one side of the beam 34 (the side on the rear side in FIG. 2 ) at intervals in the Y-axis direction. In the illustrated embodiment, a pair of cutting means 6 is provided so that the cutting blades face each other, and the workpiece held by the holding means 4 can be cut simultaneously by the pair of cutting blades. In addition, one cutting means 6 may also be used.

As shown in FIG. 4 , the cutting means 6 includes: a rectangular Y-axis movable member 36 which is supported on one side of the beam 34 to move freely in the Y-axis direction; and a Y-axis feed means 38 which moves the Y-axis The movable member 36 is indexed and fed in the Y-axis direction; the Z-axis movable member 40 with an L-shaped cross-section is supported on the Y-axis movable member 36 so as to be able to move up and down in the Z-axis direction; the Z-axis feed means 42, which will The Z-axis movable member 40 performs cutting feed in the Z-axis direction; and the housing 44 is fixed to the lower end of the Z-axis movable member 40 .

On one side of the Y-axis movable member 36 (the front side in FIG. 4 ), a pair of guided grooves 36 a extending in the Y-axis direction with an interval therebetween is formed in the Z-axis direction, and the guided grooves 36 a are slidable. It is connected to a pair of guide rails (not shown) that extend in the Y-axis direction at intervals in the Z-axis direction and are attached to one side surface of the beam 34 .

The Y-axis feeding means 38 has a ball screw 46 that is connected to the Y-axis movable member 36 and extends in the Y-axis direction, and a motor 48 that rotates the ball screw 46 . The Y-axis feed means 38 converts the rotational motion of the motor 48 into a linear motion through the ball screw 46 and transmits it to the Y-axis movable member 36 , and moves the Y-axis movable member 36 along one side of the beam 34 . The guide rail is used for indexing feed in the Y-axis direction.

A pair of guide rails (not shown) extending in the Z-axis direction at intervals in the Y-axis direction is formed on the other side of the Y-axis movable member 36 (the side on the back side in FIG. 4 ). 40 has a pair of guided grooves (not shown) that are slidably connected to a pair of guide rails of the Y-axis movable member 36 .

The Z-axis feeding means 42 has a ball screw (not shown) that is connected to the Z-axis movable member 40 and extends in the Z-axis direction, and a motor 50 that rotates the ball screw. The Z-axis feed means 42 converts the rotational motion of the motor 50 into a linear motion by a ball screw and transmits it to the Z-axis movable member 40, and moves the Z-axis movable member 40 along the guide rail of the Y-axis movable member 36 in the Z-axis Direction for plunging feed.

If described with reference to Fig. 5 and Fig. 6, then cutting means 6 further comprises: rotating shaft 52; Fixed flange 56, it is arranged on the front end of rotating shaft 52 and supports the back of cutting blade 54 (refer to Fig. 6); 58, which protrudes from the central portion of the fixing flange 56 and fits with the opening 54a formed in the central portion of the cutting blade 54 (refer to FIG. 6); 6).

(rotation axis 52) The rotating shaft 52 is rotatably supported by the casing 44 with the Y-axis direction as an axis. Furthermore, a motor (not shown) that rotates the rotating shaft 52 is housed in the housing 44 .

(cutting blade 54) As shown in FIG. 6 , the cutting blade 54 has: an annular base 60 ; and an annular cutting blade 62 fixed to the outer peripheral portion of the base 60 . The base 60 can be formed of an appropriate metal material such as aluminum alloy. The opening 54 a of the cutting blade 54 is circular and located at the center of the base 60 . The cutting edge 62 is formed of abrasive grains such as diamond and a bonding material such as metal or resin to a predetermined thickness (for example, about 10 to 30 μm), and protrudes radially outward from the outer peripheral edge of the base 60 .

(fixing flange 56) The fixing flange 56 protrudes in a ring shape radially outward from the outer peripheral surface of the rotating shaft 52 . An annular recess 56 a is formed at a radially inner portion of the front end surface of the fixing flange 56 . The outer peripheral portion of the front end surface of the fixing flange 56 forms an annular support portion 56b protruding in the axial direction.

If the description continues with reference to FIG. 6 , by inserting the opening 54a of the cutting blade 54 into the hub portion 58, and installing the nut 64 on the male thread 58a of the hub portion 58, the cutting blade 54 is clamped on the fixing flange 56. Between the support part 56b and the nut 64, it is detachably fixed to the hub part 58. In addition, a plurality of pin holes 64 a into which pins 138 of the nut holding portion 116 described later are inserted are formed at equal intervals in the circumferential direction on the side surface of the nut 64 .

As shown in FIG. 5 , a blade cover 66 covering the cutting blade 54 is installed at the front end of the housing 44 . The blade cover 66 has: a first cover member 66a fixed to the front end of the housing 44; and a second cover member 66b movably attached to the front end of the first cover member 66a. The second cover member 66b is moved in the X-axis direction by an appropriate actuator (not shown) such as a cylinder, and is positioned at the open position shown in FIG. Positioned in the occluded position shown in Figure 4.

And, as shown in FIG. 2 , a pair of imaging means for photographing the workpiece held by the holding means 4 is provided on the other side of the beam 34 (the front side in FIG. 2 ) to move freely in the Y-axis direction. 68, and a pair of moving means 70 for moving the imaging means 68 in the Y-axis direction is installed.

The moving means 70 has a ball screw 72 that is connected to the imaging means 68 and extends in the Y-axis direction, and a motor 74 that rotates the ball screw 72 . The moving means 70 converts the rotational motion of the motor 74 into a linear motion and transmits it to the imaging means 68, so that the imaging means 68 moves in the Y-axis direction along the guide rail 34a attached to the other side of the beam 34. In addition, the imaging means 68 may be one.

(cutting blade mounting means 8) As shown in FIG. 7, the cutting blade installation means 8 has: a cutting blade storage means 76 for storing a plurality of cutting blades 54; Direction positioning means 80, which will carry out and carry in means 78 relative to cutting blade storage means 76 and be positioned at the action position and withdrawal position in the Y-axis direction; Z-axis moving means 82, which will carry out and carry in means 78 in the Z-axis direction; And the X-axis moving means 84 moves the carrying-in/out means 78 in the X-axis direction, and acts on the cutting blade 54 installed on the rotating shaft 52 of the cutting means 6 .

(cutting blade storage means 76) 8, the cutting blade storage means 76 includes: a driving gear 88, which has a rotating shaft 86 extending in the Y-axis direction; a driven gear 92, which is separated from the driving gear 88 in the Z-axis direction and has The rotary shaft 90 extending in the axial direction; the crawler belt 94 wound around the driving gear 88 and the driven gear 92; The opening 54a of the cutting blade 54 is fitted to support the cutting blade 54 .

As shown in FIGS. 7 and 8 , the cutting blade storage means 76 of the illustrated embodiment includes: a base plate 98 (see FIG. 7 ); a support wall 100 extending upward from the upper surface of the base plate 98 ; and The motor 102 is fixed on one side of the supporting wall 100 . As shown in FIG. 8 , the rotation shaft 86 of the drive gear 88 is connected to the motor 102 , and the motor 102 rotates the drive gear 88 around the Y-axis direction as an axis.

The driven gear 92 is arranged above the driving gear 88 , and the rotating shaft 90 of the driven gear 92 is rotatable about the Y-axis direction as an axis, and is supported by the supporting wall 100 so as to be able to move up and down in the Z-axis direction. The supporting wall 100 is provided with lifting means (not shown) for lifting and lowering the driven gear 92 in the Z-axis direction. The raising and lowering means may include a ball screw that is connected to the rotation shaft 90 of the driven gear 92 and extends in the Z-axis direction, and a motor that rotates the ball screw.

The crawler belt 94 is composed of a plurality of link pieces (symbols omitted) connected to each other, and is wound around the driving gear 88 and the driven gear 92 . The track 94 rotates in response to the rotation of the drive gear 88 by the motor 102 .

A plurality of support shafts 96 are arranged on the crawler belt 94 at predetermined intervals. As understood by referring to FIGS. 8 and 9 together, the support shaft 96 has a cylindrical base 104 coupled to the track 94 , and a cylindrical shaft 106 extending from the end surface of the base 104 in the Y-axis direction.

In the support shaft 96 , the opening 54 a of the cutting blade 54 is fitted into the shaft portion 106 , and a plurality of (for example, five) cutting blades 54 are supported by the shaft portion 106 . In the illustrated embodiment, as understood by referring to FIG. 8 , half of the support shafts 96 among the plurality of support shafts 96 support the cutting blades 54 . Furthermore, as shown in FIG. 9 , on the front end side of the shaft portion 106 , a plurality of ball plungers 108 are installed at intervals in the circumferential direction, and the ball plungers 108 are used to prevent the shaft portion 106 from The jumping out of the cutting blade 54 of the support.

As shown in FIG. 10 , a flow path 104 a is formed inside each base portion 104 of the support shaft 96 , and a plurality of flow paths 94 a communicating with one end of each flow path 104 a are formed on the crawler belt 94 . The other end portion of each flow path 104a is opened at the end surface of the base portion 104 radially outward from the shaft portion 106 as shown in FIG. 9 .

In addition, as shown in FIG. 8 , an air nozzle 110 protruding in the Y-axis direction below the drive gear 88 is provided on the support wall 100 . The air nozzle 110 is connected to high-pressure air supply means (not shown). In the illustrated embodiment, the support shaft 96 located at the lowest end in the track of the support shaft 96 along with the rotation of the crawler belt 94 faces the front end of the air nozzle 110 .

Then, in the case of carrying out the cutting blade 54 positioned at the front end side of the shaft portion 106, high-pressure air is supplied to the flow of the base portion 104 of the support shaft 96 positioned at the lowermost end by passing through the flow path 94a of the crawler belt 94 from the air nozzle 110. The cutting blade 54 remaining on the shaft portion 106 can be pushed out to the front end side of the shaft portion 106 through the passage 104a. However, due to the action of the ball plunger 108 , the cutting blade 54 does not fall off the shaft portion 106 .

(Move-out and import means 78) 11, the carrying-in means 78 includes: a Z rotation shaft 112 extending in the Z-axis direction; a blade holder 114 radially connected to the Z rotation shaft 112, and attracting and holding the cutting blade 54; The nut holding portion 116 detachably holds the nut 64 holding the cutting blade 54 fitted into the hub portion 58 of the cutting means 6 between the nut 64 and the fixing flange 56 .

The carrying-in/out means 78 of the illustrated embodiment further includes a housing 118 . The casing 118 has: a top plate 120 in the shape of a regular hexagon; and six side walls 122 in the shape of a rectangular plate hanging down from the periphery of the top plate 120 . The Z rotation shaft 112 protrudes from the upper surface of the top plate 120 . A motor (not shown) connected to the Z rotation shaft 112 is accommodated inside the casing 118 .

In the illustrated embodiment, among the six side walls 122 of the casing 118 , four side walls 122 are provided with blade holders 114 , and two side walls 122 are provided with nut holders 116 . The two nut holders 116 are disposed on a pair of opposite side walls 122 . In this manner, the carrying-in/out means 78 includes two blade holding portions 114 for one nut holding portion 116 .

(blade holder 114) The blade holding portion 114 is formed in a cylindrical shape, and an end face 124 of the blade holding portion 114 is provided with: a circular central opening 126, which can receive the shaft portion 106 of the support shaft 96 and the hub portion 58 of the cutting means 6; And a plurality of suction holes 128 are arranged at equal intervals in the circumferential direction around the central opening 126 . The suction hole 128 is connected to a suction means (not shown).

Then, the blade holding portion 114 is positioned at a position where the end face 124 of the blade holding portion 114 is in contact with the base 60 of the cutting blade 54 stored by the cutting blade storage means 76, and is drawn into the suction hole 128 by suction means. An attractive force is generated which holds the cutting blade 54 .

(Nut holder 116) 11 and 12, the nut holding part 116 includes: a cylindrical shell 130, which is fixed to the side wall 122 of the housing 118 (see FIG. 11); an annular rotating body 132, which can rotate freely. The ground is housed inside the housing 130 (see FIG. 11 ); and the motor 133 that rotates the rotating body 132 (see FIG. 12 ).

A central opening 134 capable of receiving the hub portion 58 of the cutting means 6 is formed in the rotating body 132 . A plurality of suction holes 136 and a plurality of pins 138 are alternately provided at intervals in the circumferential direction on the end surface 132a of the rotating body 132 . The suction hole 136 is connected to a suction means (not shown). The pin 138 is positioned at a position protruding from the end surface 132a of the rotating body 132 (the position shown in FIG. , the spring shrinks and is accommodated inside the rotating body 132 . And the pin 138 is arrange|positioned corresponding to the position of the pin hole 64a formed in the nut 64. As shown in FIG.

As shown in FIG. 12 , in the nut holder 116 , the nut 64 is sucked and held by the suction means in the suction hole 136 , and the pin 138 is inserted into the pin hole 64 a of the nut 64 . 133 to rotate the rotating body 132, whereby the nut 64 can be locked on the male thread 58a of the hub portion 58 and removed, and the nut 64 is used to fix the cutting blade 54 to the hub portion 58 of the cutting means 6.

In addition, when detaching the nut 64 from the hub portion 58, even if the position of the pin 138 of the nut holding portion 116 deviates from the position of the pin hole 64a of the nut 64, when the end surface 132a of the rotating body 132 is brought close to Installed on the end surface of the nut 64 of the hub portion 58 and accommodate the pin 138 inside the rotating body 132, when the rotating body 132 is rotated by the motor 133, the position of the pin 138 and the position of the pin hole 64a When coincident, the pin 138 is pushed out by the spring, and the pin 138 is inserted into the pin hole 64a.

In the illustrated embodiment, as shown in FIG. 7 , the loading/unloading means 78 configured as described above is arranged inside the housing 140 . The frame body 140 is supported by the elevating table 142 so as to be movable in the Y-axis direction, and the elevating table 142 is supported by the base stand 144 so as to be able to move freely in the Z-axis direction.

7 and 13, the frame body 140 includes: a rectangular plate-shaped bottom 146; four pillars 148 extending upward from the four corners of the upper surface of the bottom 146; and a plate-shaped ceiling. 150, which is fixed on the upper end of each pillar 148 (refer to FIG. 7). On the lower surface of the bottom portion 146, a pair of guided members 152 having grooves 152a extending in the Y-axis direction are formed at intervals in the X-axis direction.

As shown in FIG. 13 , the lifting platform 142 includes: a rectangular top plate 154 ; and four cylindrical feet 156 extending downward from four corners of the lower surface of the top plate 154 . On the upper surface of the top plate 154, a pair of guide rails 158 extending in the Y-axis direction are provided at intervals in the X-axis direction, and the pair of guide rails 158 are slidably connected to the grooves 152a of the pair of guided members 152 of the frame body 140. Chimeric.

(Y-axis direction positioning means 80) A Y-axis direction positioning means 80 is provided on the upper surface of the top plate 154 of the elevating table 142 . The Y-axis direction positioning means 80 has a ball screw 160 extending in the Y-axis direction between a pair of guide rails 158 , and a motor 162 that rotates the ball screw 160 . A nut portion (not shown) of the ball screw 160 is fixed to the lower surface of the bottom 146 of the housing 140 .

The positioning means 80 in the Y-axis direction converts the rotational motion of the motor 162 into a linear motion through the ball screw 160 and transmits it to the frame body 140 , so that the frame body 140 moves along the pair of guide rails 158 in the Y-axis direction. Like this, the frame body 140 that is equipped with carrying in and out means 78 is slidably supported on the guide rail 158 that is arranged on the lifting table 142 and extends in the Y-axis direction, and is positioned relative to the cutting blade by the Y-axis direction positioning means 80. The storage means 76 is positioned at the active position and the withdrawn position in the Y-axis direction.

The above-mentioned action position is the position where the blade holding part 114 of the carrying in and out means 78 is close to the cutting blade storage means 76, and is a position where the cutting blade 54 supported on the cutting blade storage means 76 can be sucked and held by the blade holding part 114. In addition, the above-mentioned evacuation position is a position where the blade holding part 114 of the carrying-in/out means 78 is farther away from the cutting blade storage means 76 than the above-mentioned active position.

As shown in FIG. 13 , the base stand 144 includes: a frame 164 ; and a rectangular base plate 166 fixed to the upper portion of the frame 164 . Four circular holes 168 into which the legs 156 of the lifting platform 142 are slidably inserted are formed at four corners of the base plate 166 . Furthermore, a female thread 170 is formed at the center of the base plate 166 .

(Z-axis moving means 82) If the description is continued with reference to FIG. 13 , the Z-axis moving means 82 is connected to the elevating table 142 and the base stand 144 . The Z-axis moving means 82 includes: a ball screw 172 extending in the Z-axis direction; a motor 174 that rotates the ball screw 172 ; and a connecting plate 176 fixed to the upper end of the motor 174 . The ball screw 172 is screwed with the female thread 170 of the base plate 166 . The connection plate 176 is fixed to the lower surface of the top plate 154 of the lift table 142 by appropriate connection means such as bolts (not shown).

The Z-axis moving means 82 converts the rotary motion of the motor 174 into a linear motion by means of the ball screw 172, so that the lifting table 142 is raised and lowered relative to the base stand 144, thereby making the frame body 140 equipped with the carrying-in and out means 78 in the Move in the Z-axis direction.

If described with reference to FIG. 14 , the carrying-out means 78 is disposed on the first moving body 178 disposed inside the frame body 140, and the first moving body 178 is slidably supported on the second moving body in a suspended state. The first guide rail 182 extending in the X-axis direction is arranged on the lower part of the body 180, and the second moving body 180 is slidably supported on the X-axis arranged on the ceiling part 150 of the frame body 140 in a suspended state. The second guide rail 184 extending in the axial direction.

The first moving body 178 has a rectangular plate-shaped body 186 . A circular hole 188 is formed in a central portion of the body 186 . The Z rotation shaft 112 of the carrying-in/out means 78 is inserted into the circular hole 188 , and the Z rotation shaft 112 is fixed to the main body 186 so as not to rotate. If the motor of the carrying-out means 78 connected to the Z rotation shaft 112 is driven, the housing 118 of the carrying-out means 78 rotates relative to the first moving body 178, and the blade holding part 114 and the nut holding part 116 are positioned on the any orientation.

On the upper surface of the main body 186 of the first mobile body 178, a pair of guided members 190 are provided at intervals in the Y-axis direction, and a block body 192 is fixed. The extending groove 190a, the block body 192 is formed with a through hole 192a extending in the X-axis direction.

The second moving body 180 has a rectangular plate-shaped main body 194 , and a pair of first guide rails 182 are provided on the lower surface of the main body 194 at intervals in the Y-axis direction. The first guide rail 182 is slidably fitted into the grooves 190a of the pair of guided members 190 of the first moving body 178, and the first moving body 178 is slidably supported by the second moving body 180 in a suspended state. The first guide rail 182 provided.

(X-axis movement means 84) A first X-axis moving means for moving the first moving body 178 in the X-axis direction relative to the second moving body 180 is provided below the main body 194 of the second moving body 180 . The first X-axis moving means in the illustrated embodiment is constituted by an air cylinder 196 . The cylinder barrel 196 a of the air cylinder 196 is fixed on the lower surface of the main body 194 and extends in the X-axis direction between the pair of first guide rails 182 . The front end of the piston rod 196 b of the air cylinder 196 is fitted and connected to the through hole 192 a of the block body 192 of the first moving body 178 .

The air cylinder 196 as the first X-axis moving means moves the first moving body 178 in the X-axis direction along the first guide rail 182 relative to the second moving body 180 by advancing and retreating the piston rod 196 b.

On the upper surface of the main body 194 of the second moving body 180, a pair of guided members 198 are provided at intervals in the Y-axis direction, and the block body 200 is fixed. An extending groove 198a, the block 200 is formed with a female thread 200a extending in the X-axis direction.

On the lower surface of the ceiling portion 150 of the housing 140, a pair of second guide rails 184 are provided at intervals in the Y-axis direction. The second guide rail 184 is slidably fitted into the grooves 198a of a pair of guided members 198 of the second mobile body 180, and the second mobile body 180 is slidably supported on the ceiling of the frame body 140 in a suspended state. The second guide rail 184 provided on the part 150.

A second X-axis moving means 202 for moving the second moving body 180 in the X-axis direction relative to the ceiling part 150 is provided below the ceiling part 150 of the housing 140 . The second X-axis moving means 202 of the illustrated embodiment has a ball screw 204 extending in the X-axis direction between a pair of second guide rails 184 , and a motor 206 that rotates the ball screw 204 . The ball screw 204 is screwed with the female thread 200 a of the block body 200 of the second moving body 180 . The motor 206 is fixed on the lower surface of the ceiling part 150 .

The second X-axis moving means 202 converts the rotational motion of the motor 206 into a linear motion through the ball screw 204 and transmits it to the second moving body 180 , so that the second moving body 180 moves along the second guide rail 184 relative to the ceiling portion 150 Move in the X-axis direction.

The X-axis moving means 84 of the illustrated embodiment includes: an air cylinder 196 as a first X-axis moving means; and a second X-axis moving means 202 including a ball screw 204 and a motor 206 . In the illustrated embodiment, by moving the first moving body 178 with the air cylinder 196 as the first X-axis moving means, the carrying-in/out means 78 can be rapidly advanced in the X-axis direction, and by moving the first moving body 178 with the second X-axis moving means The X-axis moving means 202 moves the second movable body 180 to easily and finely adjust the position in the X-axis direction of the carrying-in/out means 78 . In this way, the carrying-in/out means 78 is configured to be freely moved in and out in the X-axis direction by the first moving body 178 and the second moving body 180 .

As shown in FIG. 1 , the processing device 2 has a control means 208 for controlling the operation of the processing device 2 . The control means 208 is composed of a computer, and the computer has: a central processing unit (CPU), which performs calculation processing according to the control program; a read-only memory (ROM), which stores the control program, etc.; and a random memory that can be read and written. Access memory (RAM), which stores calculation results, etc.

(cutting processing) When performing dicing processing on a workpiece such as a wafer using the processing device 2 , first, the workpiece is attracted to the chuck table 18 . Next, the chuck table 18 is moved below the imaging means 68 by the X-axis feed means 24 , and the Y-axis direction position of the imaging means 68 is adjusted by the moving means 70 . Next, the workpiece is photographed from above by the imaging means 68, and the cutting area of the workpiece is detected.

Next, based on the cut region of the workpiece detected by the imaging means 68 , the chuck table 18 is rotated to adjust the orientation of the cut region of the workpiece with respect to the cutting blade 54 of the cutting means 6 . Then, the chuck table 18 is moved in the X-axis direction with the X-axis feeding means 24, and the cutting means 6 is moved in the Y-axis direction with the Y-axis feeding means 38, and the pair of cutting blades 54 are positioned on the workpiece. above the cutting area.

Then, the cutting means 6 is lowered by the Z-axis feeding means 42, and the cutting edge 62 of the cutting blade 54 rotating at a high speed is cut into the cutting area of the workpiece, and the cutting water is supplied to the cutting edge 62 of the cutting blade 54 while cutting into it. For the part, while feeding the chuck table 18 in the X-axis direction, a predetermined cutting process is performed on the cutting area of the workpiece. While indexing the cutting means 6 in the Y-axis direction by the Y-axis feeding means 38, the above-mentioned cutting process is repeated appropriately, and the cutting process is performed on all the cut regions of the workpiece. The cut and processed workpiece after the cutting step is completed is transferred to the next step.

(Replacement of cutting blade 54) If the cutting step is repeatedly implemented, the cutting blade 54 will wear out, and if the wear of the cutting blade 54 reaches a predetermined amount, then it becomes impossible to maintain the cutting accuracy, so it is necessary to replace the cutting blade 54 installed in the cutting means 6 with a new one. Cutting blade 54. In addition, even if the wear of the cutting blade 54 installed in the cutting means 6 does not reach a predetermined amount, when cutting a material different from the material of the previously-cut workpiece, there may be a problem. Sometimes it will also need to be replaced with a cutting blade 54 corresponding to the material of the processed object.

When replacing the cutting blade 54 installed in the cutting means 6, first, the crawler belt 94 of the cutting blade storage means 76 is rotated, and the supporting shaft 96 supporting the new cutting blade 54 to be carried into the cutting means 6 is positioned at a predetermined position. (For example, the position of the lowest end in the track of the support shaft 96).

Next, as shown in FIG. 15 , the housing 118 is rotated by a motor connected to the Z rotation shaft 112 of the carrying-in/out means 78, so that the side wall 122 of the housing 118 on which the blade holder 114 is mounted is aligned along the X-axis direction. , and make the blade holding portion 114 face the cutting blade storage means 76 . And, the X-axis moving means 84 and the Z-axis moving means 82 are operated, so that the shaft portion 106 of the support shaft 96 at the above-mentioned predetermined position can be inserted into the central opening 126 of the blade holding portion 114, and the X axis of the blade holding portion 114 is adjusted. Axis position and Z-axis position.

Next, as shown in FIG. 16 , the frame body 140 is moved in the Y-axis direction by the Y-axis direction positioning means 80, and the carrying-out and carrying-in means 78 are positioned at the cutting edge supported by the support shaft 96 by the blade holding part 114. The action position of the blade 54. Thereby, the shaft portion 106 of the support shaft 96 at the predetermined position is inserted into the central opening 126 of the blade holding portion 114, and the end face 124 of the blade holding portion 114 is brought into contact with the end face of the cutting blade 54 positioned at the front end side of the shaft portion 106. . Next, a suction force is generated in the suction hole 128 of the blade holding portion 114 , and the cutting blade 54 located at the front end side of the shaft portion 106 is sucked and held by the blade holding portion 114 .

Next, the Y-axis direction positioning means 80 is operated, and the carrying-in/out means 78 is separated from the cutter blade storage means 76 in the Y-axis direction and positioned at the evacuation position. Then, the housing 118 of the carrying-in/out means 78 is rotated by 180° so that the blade holding portion 114 on the opposite side of the blade holding portion 114 that has sucked and held the cutting blade 54 faces the cutting blade storage means 76 .

Next, the Y-axis direction positioning means 80 is operated, and the carrying-in/out means 78 is positioned at the working position of the cutting blade 54 capable of holding the support shaft 96 by the blade holding part 114 on the opposite side. Next, suction is generated in the suction hole 128 of the blade holding portion 114 on the opposite side, and the cutting blade 54 positioned at the front end side of the shaft portion 106 is sucked and held by the blade holding portion 114 . Thereby, a new cutting blade 54 is sucked and held by one of the four blade holding parts 114 facing each other.

Next, as shown in FIG. 17 , the housing 140 is moved in the Y-axis direction by the Y-axis direction positioning means 80 , and the lifting table 142 is moved in the Z-axis direction by the Z-axis moving means 82 . Thereby, the carrying-out means 78 is separated from the cutting blade storage means 76 and positioned at the evacuated position, and the Y-axis direction position and the Z-axis direction position of the carrying-out means 78 relative to the cutting means 6 are adjusted. The position in the Y-axis direction of the adjusted loading/unloading means 78 is between the pair of cutting means 6 , and the adjusted Z-axis position of the loading/unloading means 78 is above the holding surface of the chuck table 18 .

Next, as shown in FIG. 18 , the first moving body 178 is moved in the X-axis direction by the air cylinder 196 as the first X-axis moving means, and the carrying-in/out means 78 are advanced toward between the pair of cutting means 6 . Next, as shown in FIG. 19 , the second moving body 180 is moved in the X-axis direction by the second X-axis moving means 202 to adjust the X-axis direction position of the carrying-out means 78 relative to the pair of cutting means 6 .

Specifically, the X-axis position of the center of the new pair of cutting blades 54 sucked and held by the pair of blade holding parts 114 of the carrying-in/out means 78 is compared with the position of the pair of cutting blades 54 mounted on the pair of cutting means 6 . The positions in the X-axis direction of the center are the same. And, the Z-axis moving means 82 of the cutting blade installation means 8 or the Z-axis feeding means 42 of the cutting means 6 are operated, and the Z-axis direction position of the center of the cutting blade 54 of the blade holding part 114 is aligned with the position of the cutting means 6. The Z-axis direction positions of the centers of the cutting blades 54 coincide.

Next, the casing 118 of the loading/unloading means 78 is rotated by 60° so that the pair of nut holding parts 116 and the cutting blades 54 of the pair of cutting means 6 face each other. In addition, before the first/second moving bodies 178 and 180 are advanced, the casing 118 may be rotated by 60° in advance.

Next, the second cover member 66 b of the blade cover 66 of each pair of cutting means 6 is positioned at the open position (see FIG. 5 ). Then, the cutting means 6 is moved in the Y-axis direction with the Y-axis feeding means 38, so that the nut 64, which fixes the cutting blade 54 to the hub portion 58, contacts the end surface 132a of the rotating body 132 of the nut holding portion 116 (see FIG. 12). In this way, the pin 138 of the nut holder 116 is pushed to the nut 64 and accommodated inside the rotating body 132 , and the hub portion 58 is accommodated in the central opening 134 of the rotating body 132 .

Next, if the motor 133 of the nut holder 116 rotates the rotating body 132, when the pin 138 coincides with the pin hole 64a of the nut 64, the pin 138 fits into the pin hole 64a, and the rotating motion of the rotating body 132 is transmitted through the pin hole 64a. 138 is delivered to the nut 64, and the nut 64 is loosened. Thereby, the nut 64 can be detached from the male thread 58a of the hub part 58 of the cutting means 6. As shown in FIG. Then, a suction force is generated in the suction hole 136 of the nut holding portion 116 , and the removed nut 64 is sucked and held by the nut holding portion 116 .

Then, the cutting means 6 is separated from the carrying-in means 78 by the Y-axis feeding means 38, and the casing 118 of the carrying-in means 78 is rotated by 60°, so that the empty blade holding part that does not suck and hold the cutting blade 54 114 faces the cutting blade 54 of the cutting means 6 .

Next, the cutting means 6 is brought close to the carrying in and out means 78 by the Y-axis feeding means 38, the hub part 58 of the cutting means 6 is inserted into the central opening 126 of the blade holding part 114, and the end surface of the empty blade holding part 114 is 124 is in contact with the end face of the cutting blade 54 of the cutting means 6 . Next, a suction force is generated in the suction hole 128 of the blade holding portion 114 , and the cutting blade 54 of the cutting means 6 is sucked and held by the blade holding portion 114 .

Then, the cutting means 6 is separated from the carrying-in means 78 by the Y-axis feeding means 38, and the housing 118 of the carrying-in means 78 is rotated by 60°, so that the blade holding part 114 that sucks and holds a new cutting blade 54 It faces the hub portion 58 of the cutting means 6 .

Next, the cutting means 6 is brought close to the carrying-out means 78 by the Y-axis feeding means 38, the hub portion 58 is inserted into the opening portion 54a of the new cutting blade 54, and the support portion 56b of the fixed flange 56 of the rotating shaft 52 is aligned with the opening portion 54a of the new cutting blade 54. The end faces of the cutting blade 54 are in contact. Next, the suction force of the blade holding portion 114 is released, and a new cutting blade 54 is transferred from the blade holding portion 114 to the cutting means 6 .

Then, the cutting means 6 is separated from the carrying-in means 78 by the Y-axis feeding means 38, and the casing 118 of the carrying-in means 78 is rotated by 60° to attract and hold the nut 64 that has been removed. The holding portion 116 faces the hub portion 58 of the cutting means 6 (see FIG. 20 ).

Next, the cutting means 6 is brought close to the carrying-in/out means 78 by the Y-axis feeding means 38 , and the nut 64 sucked and held by the nut holding part 116 is positioned at the front end of the hub part 58 . Next, as shown in FIG. 21 , the nut holder 116 is rotated at a predetermined rotational speed (for example, 50 degrees/second), and the nut 64 is screwed to the male thread 58 a of the hub portion 58 . In addition, the normal rotation in the illustrated embodiment refers to the rotation in the direction indicated by the arrow R1 in FIG. 21 .

Then, when the tightening torque of the nut 64 reaches the threshold value (for example, about 4.3 N·m) for the completion of locking, the rotation of the nut holding portion 116 is stopped. Next, using the position where the rotation of the nut holder 116 is stopped as a reference position, as shown in FIG. Reverse rotation is the direction shown by arrow R2 in FIG. 22 .

In addition, the tightening torque of the nut 64 can be calculated from the current value of the motor 133 of the nut holding part 116 . In addition, the rotation angle of the nut holder 116 can be obtained by an appropriate rotation angle detection sensor such as a rotary encoder.

Afterwards, as shown in FIG. 23 , the nut holder 116 is rotated in the R1 direction only by the same angle as the angle (20 degrees in the above example) of the reverse rotation of the nut holder 116 . That is, the nut holding part 116 is rotated forwardly from the stop position after reverse rotation to the above-mentioned reference position. Then, in the case where the tightening torque of the nut 64 in the reference position reaches the above-mentioned threshold value of completion of locking, the control means 208 judges that the cutting blade 54 has been properly locked.

On the other hand, in other cases, the control means 208 judges that the cutting blade 54 is not properly locked. That is, when (1) the tightening torque of the nut 64 reaches the threshold value before the nut holding portion 116 returns to the reference position, or (2) the tightening torque of the nut 64 does not reach the reference position In the case of the above threshold, the control means 208 judges that the cutting blade 54 is not properly locked.

Thus, in the illustrated embodiment, after the tightening torque of the nut 64 reaches the threshold value, if the nut 64 is temporarily loosened and the nut 64 is tightened again, the above (1) or (2) occurs. In this case, the control means 208 judges that there is a problem with the screwing between the male thread 58a of the hub portion 58 and the nut 64 . Then, in case a problem occurs, a message for notifying the operator of the problem is issued.

Thereby, the operator can disassemble the cutting means 6 to find out that the nut 64 is not properly threaded with the male thread 58a, there is debris between the nut 64 and the male thread 58a, thread abrasion of the nut 64 or the male thread 58a, etc. Problems can be solved, and various maintenance operations such as cleaning/replacing parts can be carried out at an appropriate time. Therefore, in the illustrated embodiment, it is possible to prevent the processing device 2 from being operated without properly locking the cutting blade 54 .

If the cutting blade 54 has been properly locked, the second cover member 66b of the blade cover 66 of the cutting means 6 is positioned at the blocking position after the attractive force of the nut holder 116 is released. In addition, the detachment and attachment of the nut 64 and the cutting blade 54 as described above may be performed simultaneously with respect to a pair of cutting means 6, and may be performed separately.

Then, the first/second movable body 178, 180 is retreated, and the housing 118 of the carrying-out means 78 is rotated by 60°, so that one of the removed pair of cutting blades 54 and the cutting blade storage means 76 face. Then, the caterpillar belt 94 of the cutting blade storage means 76 is rotated to position the support shaft 96 in the space where the cutting blade 54 is not supported at a predetermined position (for example, the position of the lowest end in the track of the support shaft 96 ).

Then, the X-axis moving means 84 and the Z-axis moving means 82 are operated so that the shaft portion 106 of the support shaft 96 at the above-mentioned predetermined position can be inserted into the opening portion 54a of one of the cutting blades 54 sucked and held by the blade holding portion 114. , adjust the X-axis direction position and the Z-axis direction position of the blade holder 114 .

Then, the frame body 140 is moved in the Y-axis direction by the Y-axis direction positioning means 80, and the shaft portion 106 of the support shaft 96 at the predetermined position is inserted into the opening of one of the cutting blades 54 sucked and held by the blade holding portion 114. 54a, and bring the end face of one of the cutting blades 54 into contact with the end face of the base 104 of the support shaft 96. Next, the suction force of the blade holder 114 is released, and one of the removed pair of cutting blades 54 is handed over to the support shaft 96 .

And, by the Y-axis direction positioning means 80, the carrying-out and carrying-in means 78 are separated from the cutting blade storage means 76, and the housing 118 of the carrying-out and carrying-in means 78 is rotated by 180°, so that the suction holds the removed pair of cutting blades. The blade holding part 114 on the opposite side to the other one of 5 faces the cutting blade storage means 76 .

Next, the frame body 140 is moved in the Y-axis direction by the Y-axis direction positioning means 80, and the shaft portion 106 of the support shaft 96 at the predetermined position is inserted into the other cutting blade 54 sucked and held by the blade holding portion 114 on the opposite side. The opening portion 54a of the other cutting blade 54 is brought into contact with the end face of the cutting blade 54 supported by the support shaft 96 . Next, the suction force of the blade holding portion 114 is released, and the other of the removed pair of cutting blades 54 is handed over to the support shaft 96 .

As above, in the machining device 2 of the illustrated embodiment, the nut holder 116 is rotated forward, the nut 64 is screwed into the male thread 58a of the hub portion 58, and the torque reaches the threshold at which the locking is completed. As the reference position, when the nut holding part 116 is rotated forward after the nut holding part 116 is reversely rotated and the torque reaches the threshold at the reference position, it is judged that the cutting blade 54 has been properly locked, otherwise it is judged The cutting blade 54 is not properly locked, so the cutting blade 54 may be properly locked.

2: Processing device 4: keep the means 6: Cutting means 8: Cutting blade installation means 52: axis of rotation 54: Cutting blade 54a: opening of cutting blade 56: Fixed flange 58: hub part 58a: Male thread 64: Nut 116: nut holding part

Fig. 1 is a perspective view of a processing device constructed according to the present invention. Fig. 2 is a perspective view of the holding means and the cutting means shown in Fig. 1 . Fig. 3 is a perspective view of the holding means shown in Fig. 1 . Fig. 4 is a perspective view of the cutting means shown in Fig. 1 . Fig. 5 is a perspective view of the cutting means in the state where the blade cover shown in Fig. 4 has been opened. Fig. 6 is an exploded perspective view of the cutting means shown in Fig. 4 . Fig. 7 is a perspective view of the means for installing the cutting blade shown in Fig. 1 . Fig. 8 is an exploded perspective view of the cutting blade storage means shown in Fig. 7 . Fig. 9 is a perspective view of the supporting shaft shown in Fig. 8 . Fig. 10 is a sectional view of the support shaft shown in Fig. 8 . Fig. 11 is a perspective view of the unloading and loading means shown in Fig. 7 . Fig. 12 is a schematic diagram showing a state in which a nut is attached and detached from a cutting means by using the nut holder shown in Fig. 11 . Fig. 13 is an exploded perspective view of the frame body, lifting platform and base stand shown in Fig. 7 . Fig. 14 is an exploded perspective view of the frame shown in Fig. 7 . Fig. 15 is a perspective view showing a state where the cutting blade storage means and the carrying-out and carrying-in means shown in Fig. 7 face each other. Fig. 16 is a perspective view showing a state in which the frame body advances from the state shown in Fig. 15 toward the cutting blade storage means. Fig. 17 is a perspective view showing a state in which the housing is retracted from the state shown in Fig. 16 and the lift table is raised. Fig. 18 is a perspective view showing a state in which the first moving body advances from the state shown in Fig. 17 toward the cutting means. Fig. 19 is a perspective view showing a state where the second moving body advances from the state shown in Fig. 18 toward the cutting means. Fig. 20 is a perspective view showing a state in which the nut holding portion holding the nut faces the hub portion. Fig. 21 is a perspective view showing a state where the nut holding portion is normally rotated at the first rotational speed. Fig. 22 is a perspective view showing a state in which the nut holding portion is reversely rotated. Fig. 23 is a perspective view showing a state where the nut holding portion is normally rotated at the second rotational speed. Fig. 24 is a perspective view showing a state in which the cutting blade is locked to the rotating shaft.

4: keep the means

6: Cutting means

10: Abutment

10a: guide rail

12: X-axis movable plate

14: pillar

16: cover plate

16a: round opening

18: Chuck table

20: Adsorption Chuck

22: Fixture

24: X-axis feed means

26: Ball screw

28: motor

30: frame

32: Pillar

34: Beam

34a: guide rail

36: Y-axis movable member

38: Y-axis feed means

40: Z-axis movable member

42: Z-axis feed means

44: shell

66: Blade cover

68: Camera means

70: means of movement

72: Ball screw

74: motor

Claims (1)

A processing device comprising: Holding means for holding a workpiece; cutting means for installing a cutting blade for cutting the workpiece held by the holding means; and cutting blade installation means for installing the cutting blade on the means of cutting, The cutting means includes: a rotating shaft; a fixed flange provided at the front end of the rotating shaft and supporting the back of the cutting blade; the opening of the central part fits; and the male thread formed at the front end of the hub part, The cutting blade mounting means is provided with a nut holding part which detachably holds a nut, and the nut and the fixing flange sandwich the cutting blade fitted into the hub part, Taking the position where the nut is screwed into the male thread of the hub portion by forward rotation of the nut holder and the torque reaches the threshold value of locking completion as a reference position, after the nut holder is rotated backwards, the When the nut holder is rotating and the torque reaches the threshold at the reference position, it is judged that the cutting blade is properly locked, otherwise it is judged that the cutting blade is not properly locked.

Images