JP7205047B2 - Positioning device and positioning method for transported object - Google Patents

Description

The present invention relates to a transported object positioning device and a transported object positioning method, and more particularly to a transported object positioning device and positioning method for positioning a transported object in a processing section of a processing apparatus.

2. Description of the Related Art Conventionally, in a dicing apparatus for cutting semiconductor wafers, a blade replacement operation for replacing a dicing blade provided in a processing section is periodically performed. Recently, a dicing machine equipped with an automatic blade changer for automatically changing a dicing blade is known (see, for example, Patent Document 1).

When changing the blade, it is necessary to transport the automatic blade changer from the standby position in the dicing machine to the processing section and position it on the stage of the processing section.

On the other hand, as a method for positioning an object to be conveyed to a fixed member, there is a pin fitting method in which a positioning pin provided on the fixed member is fitted into a hole provided in the object to be conveyed (for example, Patent Document 2), A method using both a pin fitting method and a vacuum fixing method using a vacuum pad (for example, Patent Document 3) is generally known.

JP 2016-168652 A JP-A-11-3875 JP-A-64-57800

However, when, for example, the pin fitting method described above is adopted as the positioning device of the automatic blade changer with respect to the processing portion, the following problems occur. That is, when an external force acts on the processing section or the automatic blade changer, there is a problem that the automatic blade changer and the processing section tend to be displaced relative to each other due to the gap between the positioning pin and the hole.

In addition, since the processing part of the dicing machine is in an environment where dust (for example, scraps and sludge) generated during processing is scattered, the above dust may adhere to the positioning pin. . In such a case, there is a problem that the hole does not fit into the positioning pin, or the positioning pin becomes corroded due to adhesion of foreign metal dust, making positioning impossible.

On the other hand, when the above-described vacuum fixing system is adopted as the positioning device of the automatic blade changer with respect to the processing part, the dust may also adhere to the suction surface to which the vacuum pad is suctioned. In this case, there is a problem that the vacuum pad cannot be adsorbed to the surface to be adsorbed.

In any case, the conventional positioning device has a problem that it is difficult to reliably position the transported object in an environment where dust is scattered.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a transported object positioning apparatus and a transported object positioning method capable of reliably positioning a transported object.

In order to achieve the object of the present invention, the apparatus for positioning a carried object of the present invention comprises an engaging pin formed with an engaging groove opened to the positioning pin side of a fixing member, and a tubular member surrounding the engaging pin. A pad, and an air duct that opens to the inner surface of the engaging groove and applies negative pressure to the inner side of the cylindrical pad.

According to one aspect of the present invention, it is preferable that the engagement groove is a groove whose width widens toward the positioning pin.

According to one aspect of the present invention, the engagement groove is preferably a V-shaped groove including two opposing flat slopes.

According to one aspect of the invention, the engaging groove is preferably a conical concave groove.

According to one aspect of the present invention, the air conduit is preferably a conduit that selectively applies negative pressure and positive pressure to the inside of the cylindrical pad.

In order to achieve the object of the present invention, the method for positioning a carried object of the present invention includes a positioning step of engaging an engaging groove of an engaging pin with a positioning pin side of a fixing member; and a fixing step of sucking and fixing the shaped pad to the positioning pin side.

According to one aspect of the present invention, the step preceding the positioning step and the fixing step includes an air blowing step of blowing air toward the positioning pin from the opening of the inner surface of the engaging groove.

ADVANTAGE OF THE INVENTION According to this invention, a to-be-conveyed object can be positioned reliably.

The perspective view which showed the processing part of a dicing apparatus. FIG. 10 is a perspective view showing a state in which the automatic blade changer is positioned on the table; FIG. 4 is a perspective view showing a state immediately before the automatic blade changer is positioned on the table; Cross-sectional view of main part of positioning device Block diagram of the air suction supply device that constitutes the positioning device Overall perspective view showing an enlarged taper pin Flowchart of positioning method by positioning device Operation transition diagram of the positioning device Cross-sectional view showing a modification of the taper pin

Preferred embodiments of a device for positioning a transferred object and a positioning method according to the present invention will be described in detail below with reference to the accompanying drawings.

FIG. 1 is a perspective view showing a processing section 10 of a dicing apparatus to which a device for positioning a transferred object according to an embodiment is applied. Note that FIG. 1 also shows an automatic blade changing device 12 corresponding to an object to be conveyed, and a conveying device 14 for the automatic blade changing device 12 . 2 is a perspective view of the automatic blade changing device 12 indicated by a two-dot chain line positioned on the table 16 provided in the processing section 10 by the positioning device 18 of the embodiment, and FIG. It is a perspective view showing the state of.

In this specification, a three-dimensional orthogonal coordinate system of three axial directions (X-axis direction, Y-axis direction, Z-axis direction) is used for description. The X-axis direction shown in FIGS. 1 to 3 is horizontal and indicates the cutting feed direction of the table 16 . The Y-axis direction is a horizontal direction orthogonal to the X-axis direction, and indicates an index feeding direction of a blade 20 (see FIG. 1), which will be described later. Furthermore, the Z-axis direction is a vertical direction orthogonal to the X-axis direction and the Y-axis direction, and indicates the cutting feed direction of the blade 20 .

Further, in this specification, a positioning device 18 for positioning the automatic blade changing device 12 on the table 16 of the processing unit 10 of the dicing machine is described, and the positioning device 18 of the embodiment is applied as the positioning device for the automatic blade changing device 12. Advantages in the case of

As shown in FIG. 1, the processing section 10 has a table 16 for fixing a wafer (not shown) and blades 20 for cutting the wafer fixed to the table 16 .

As an example, the table 16 is configured in a disc shape, and has a horizontally flat suction surface 22 on its upper surface, to which the wafer is vacuum-sucked and fixed.

In addition, the table 16 has an X movement mechanism 24 at its lower portion for reciprocating the table 16 along the X-axis direction. The X movement mechanism 24 includes a pair of guide rails 26, 26 arranged along the X-axis direction, and a linear motor 28 arranged between the pair of guide rails 26, 26. As shown in FIG. According to the X movement mechanism 24, by driving the linear motor 28, the table 16 can be reciprocated in the X direction along the pair of guide rails 26,26.

As an example, the blade 20 is an electrodeposited blade in which diamond abrasive grains or CBN (cubic boron nitride) abrasive grains are electrodeposited with nickel. In addition to the electrodeposition blade, a metal-resin bond blade bonded with a resin mixed with metal powder can also be used. The blade 20 configured in this manner is connected to spindles 30, 30 with a built-in high-frequency motor arranged oppositely along the Y-axis direction. be done. The spindles 30 , 30 are attached to a Z movement mechanism section 32 , and the Z movement mechanism section 32 is attached to a Y movement mechanism section 34 . With such a configuration, the blade 20 adjusts the depth of cut in the Z-axis direction by the Z-moving mechanism 32 and adjusts the index position in the Y-axis direction by the Y-moving mechanism 34 . The Z movement mechanism 32 and the Y movement mechanism 34 can also have the same structure as the X movement mechanism 24 (a movement mechanism having guide rails and linear motors).

As shown in FIG. 1 , the transfer device 14 of the automatic blade changer 12 has a Z transfer mechanism section 36 and a Y transfer mechanism section 38 . The automatic blade changer 12 is detachably attached to the Z transport mechanism section 36 , and the Z transport mechanism section 36 is attached to the Y transport mechanism section 38 in a suspended state. With such a configuration, the automatic blade changing device 12 is transported in the Z-axis direction by the Z-transporting mechanism section 36 and transported in the Y-axis direction by the Y-transporting mechanism section 38 . As a result, the automatic blade changer 12 is transported to a predetermined position for exchanging the blades 20 . A moving mechanism having a guide rail and a linear motor can be applied to the Z transport mechanism section 36 and the Y transport mechanism section 38 as well.

For the automatic blade changing device 12, for example, the device disclosed in Japanese Patent Application Laid-Open No. 2016-168652 can be used. As described above, the automatic blade changer 12 is a well-known device, so detailed description thereof will be omitted.

Next, the positioning device 18 of the embodiment will be described.

As shown in FIGS. 2 and 3, the positioning devices 18 are arranged at predetermined three locations on the outer periphery of the base 40 that constitutes the automatic blade changing device 12 . The automatic blade changer 12 is positioned on the table 16 by fitting these positioning devices 18, 18, 18 to three positioning pins 42, 42, 42 provided on the table 16 side. The three positioning pins 42 , 42 , 42 are projected along the Z-axis direction from a frame-shaped fixing member 43 arranged around the table 16 .

4 is a longitudinal sectional view of the taper pin 46 and the vacuum pad 48 that constitute the positioning device 18, and FIG. 5 is a block diagram of the air suction supply device 44 that constitutes the positioning device 18. As shown in FIG. FIG. 6 is an enlarged perspective view of the taper pin 46. As shown in FIG.

First, the taper pin 46 will be described. As shown in FIG. 6, the taper pin 46 has an axis A1 and is generally cylindrical as a whole. 4 and 6, the taper pin 46 is provided with a cylindrical suction portion 52 having an air pipe 50 thereinside, and a fitted portion 54 is provided at the lower end thereof. Note that the taper pin 46 is an example of an engagement pin that is a component of the present invention.

As shown in FIG. 6, the suction portion 52 has a connecting portion 56 formed in the upper portion and a mounted portion 58 formed in the lower portion. The connecting portion 56 is fixed to the connector tube 60 as shown in FIG. The connector tube 60 is fixed to a connecting hole 62 formed in the base 40 of the automatic blade changer 12 so that the axis A1 extends along the Z-axis direction. As a result, the taper pin 46 is fixed to the automatic blade changer 12 via the connector tube 60 in the Z-axis direction.

The connector tube 60 also has an L-shaped air passage 68 having a first port 64 at one end and a second port 66 at the other end, and the connecting portion 56 is fitted into the first port 64. fixed. Thereby, the air passage 68 of the connector tube 60 and the air passage 50 of the taper pin 46 are communicated with each other. The second port 66 is connected to the 3-port valve 70 of the air suction supply device 44 shown in FIG. The air suction/supply device 44 will be described later, but the air suction/supply device 44 and the air pipe 50 are communicated via the air passage 68 by connecting the 3-port valve 70 to the second port 66 .

Returning to FIG. 6, the mounted portion 58 is formed to be larger in outer diameter than the connecting portion 56, and the vacuum pad 48 (see FIG. 4) is mounted on the outer peripheral portion thereof. The vacuum pad 48 will also be described later.

An engaging groove 72 is formed in the lower portion of the fitted portion 54 of the taper pin 46 . The engaging groove 72 is a groove that is open to the positioning pin 42 side (see FIG. 4) and has a groove width that expands toward the positioning pin 42 side. Specifically, the engaging groove 72 is a V-shaped groove including two flat slopes 72A, 72A facing each other, and has a flat upper surface 72B connecting the slopes 72A, 72A. An air conduit 50 is opened in the upper surface 72B, which is the inner surface of the engaging groove 72. As shown in FIG.

Here, the taper pin 46 is lowered toward the positioning pin 42 (see FIG. 4) by the Z transport mechanism 36 (see FIG. 1) when positioning the automatic blade changer 12. At this time, the engagement groove 72 is fitted to the positioning pin 42 , the automatic blade changer 12 is positioned on the table 16 . As the detailed fitting structure, in the embodiment, as shown in FIG. It is

Adopting such a fitting structure has the following advantages. That is, when the automatic blade changer 12 is positioned with respect to the table 16, the axis A1 in the Z direction of the taper pin 46 (see FIG. 3) and the axis A2 in the Z direction of the protrusion 74 (see FIG. 3) are relatively aligned in the XY directions. , the slopes 72A, 72A of the engaging groove 72 move downward while sliding on the protrusion 74, so that the automatic blade changer 12 side moves so that the axis A1 coincides with the axis A2. It automatically moves minutely in the XY directions. In other words, the axis A1 can be aligned with the axis A2 (also referred to as self-alignment) simply by lowering the automatic blade changer 12 toward the table 16 . Therefore, according to the fitting structure in which the V-shaped engagement groove 72 is fitted to the conical protrusion 74, there is an advantage that the automatic blade changer 12 can be easily positioned on the table 16. be.

Next, the vacuum pad 48 will be described with reference to FIG. The vacuum pad 48 is made of elastic rubber, for example, and is configured in a tubular shape as a whole. Also, the vacuum pad 48 has an annular mounting portion 76 formed on the upper end side, and the mounting portion 76 is mounted on the mounting portion 58 of the taper pin 46 . Thereby, the vacuum pad 48 is attached to the tapered pin 46 . A lip portion 78 is formed on the lower end side of the vacuum pad 48 .

The lip portion 78 is tapered so that its diameter increases and its thickness decreases toward the lower end 78A. A lower end 78A of the lip portion 78 is located below a lower end 54A of the fitted portion 54 in the Z-axis direction. With such a configuration, the fitted portion 54 is surrounded by the lip portion 78 . The lip portion 78 is elastically abutted against the upper end surface 42A of the positioning pin 42 when the engagement groove 72 of the fitted portion 54 is fitted to the projection portion 74, and also acts as an air suction supply device 44 ( 5), the inside of the vacuum pad 48 is brought into close contact with the upper end surface 42A when negative pressure is applied. As a result, the pin fitting by the engagement groove 72 and the protrusion 74 and the suction fixation by the vacuum pad 48 are performed on the aligned axes A1 and A2. It should be noted that the vacuum pad 48 is an example of a tubular pad that is a component of the present invention.

Next, the air suction supply device 44 shown in FIG. 5 will be described. The air suction supply device 44 has a pump 80 that generates compressed air, a flow path switching valve 82 , an ejector 84 , and a 3-port valve 70 . One end 88A of an air supply line 88 is connected to a line 86 that connects the pump 80 and the valve 82, and the other end 88B of the air supply line 88 is connected to the first port of the 3-port valve 70. (not shown). One end 92A of an air suction line 92 is connected to a line 90 that connects the valve 82 and the ejector 84, and the other end 92B of the air suction line 92 is connected to the second port of the 3-port valve 70. (not shown). Furthermore, a third port (not shown) of the three-port valve 70 is connected via a conduit 94 to the second port 66 (see FIG. 4) of the connector tube 60 . A pressure sensor 96 is connected to the pipeline 94 , and the internal pressure of the pipeline 94 can be detected by the pressure sensor 96 .

According to the air suction supply device 44 configured in this manner, the valve 82 opens the 3-port valve 70 side (closes the ejector 84 side) and opens the first port of the 3-port valve 70 (the 3-port valve 70 is closed). When the second port is closed), compressed air from the pump 80 is supplied to the air conduit 50 of the taper pin 46 through the conduit 86, the air supply conduit 88, the 3-port valve 70, the conduit 94, and the connector tube 60. , and is jetted to the outside from the air conduit 50 . A positive pressure is thereby applied to the inside of the vacuum pad 48 .

On the other hand, when the valve 82 opens the ejector 84 side (closes the 3-port valve 70 side) and opens the second port of the 3-port valve 70 (closes the first port of the 3-port valve 70), the Compressed air is supplied to ejector 84 via line 86 , valve 82 and line 90 . Then, the action of the vacuum pump of the ejector 84 sucks the air in the air suction line 92, and the outside air flows through the air line 50 of the taper pin 46, the connector tube 60, the line 94, the 3-port valve 70, and the air suction. It is sucked into the ejector 84 through the conduit 92 and exhausted to the outside. A negative pressure is thereby applied to the inside of the vacuum pad 48 .

As described above, according to the air suction supply device 44 of the embodiment, by switching between the valve 82 and the 3-port valve 70, the compressed air from the pump 80 is jetted (air blown) from the opening of the air pipe line 50. It is possible to selectively switch between the operation and the operation of sucking (air vacuuming) outside air from the opening of the air conduit 50 . As a result, the air conduit 50 becomes a conduit that selectively applies negative pressure and positive pressure to the inside of the vacuum pad 48 . In the embodiment, the single air suction supply device 44 is configured to switch between air suction and air blow. Alternatively, the air suction device and the air supply device may be selectively switched.

Next, an example of the operation of the positioning device 18 constructed as described above will be described with reference to the flowchart of the positioning method shown in FIG. 7 and the operation transition diagram of the positioning device 18 shown in FIG. In FIG. 8, the detailed configuration of each part of the positioning device 18 is omitted in order to explain the operation of the positioning device 18 in an easy-to-understand manner.

In the processing section 10 of the dicing apparatus, the wafer is cut by the blade 20 while cutting water and cooling water are supplied to the blade 20 and the wafer. For this reason, the processing unit 10 is in an environment where dust (for example, scraps and sludge) generated during processing is scattered, and such dust adheres to the positioning pins 42 as well. In such an environment, when the replacement of the blade 20 by the automatic blade replacement device 12 is started (S10 in FIG. 7), the table 16 is moved to the blade replacement position by the X movement mechanism 24, and accordingly Then, the automatic blade changer 12 is conveyed in the Z-axis and Y-axis directions by the Z conveying mechanism 36 and the Y conveying mechanism 38 to a position above the blade exchange position. As a result, the automatic blade changing device 12 reaches the position above the blade changing position (S20 in FIG. 7). At this time, the taper pin 46 is positioned directly above the protrusion 74 (for example, the position where the axis A1 coincides with the axis A2) as shown in 8-1 of FIG.

Next, as shown in 8-2 of FIG. 8, the air blow is started from the air conduit 50 of the taper pin 46 toward the positioning pin 42 side (S30 of FIG. 7: air blow step). In 8-2 of FIG. 8, an arrow B indicates the direction of air jetting from the air pipe 50. As shown in FIG. As a result, dust (for example, scraps and sludge) adhering to the projection 74 and the upper end surface 42A (see FIG. 4) of the positioning pin 42 can be blown off, and the dust can be removed from the projection 74 and the positioning pin 42. can be done. Since the switching operation to the air blow by the air suction supply device 44 shown in FIG. 5 has been described above, the explanation thereof will be omitted.

Next, after stopping the air blow, as shown in 8-3 of FIG. 8, the Z conveying mechanism 36 (see FIG. 1) is driven to lower the taper pin 46 toward the protrusion 74, and the taper pin 46 is When the predetermined position before seating is reached, the taper pin 46 stops descending (S40 in FIG. 7). Note that the taper pin 46 may be lowered while blowing air.

Next, as shown in 8-3 of FIG. 8, air vacuum from the air pipe 50 of the taper pin 46 is started (S50 of FIG. 7: vacuum step). In 8-3 of FIG. 8, the arrow C indicates the air suction direction of the air suction line 50. As shown in FIG. Since the switching operation to the air vacuum by the air suction supply device 44 shown in FIG. 5 has been described above, the explanation thereof will be omitted.

Next, while performing air vacuum, the Z transport mechanism 36 (see FIG. 1) is driven to lower the taper pin 46 toward the protrusion 74, and the taper pin 46 is seated as shown in 8-4 of FIG. When the position is reached, the taper pin 46 stops descending (S60 in FIG. 7: positioning step). As a result, the automatic blade changer 12 is positioned on the table 16 by pin fitting between the engaging grooves 72 and the protrusions 74 . Also, at this time, the lip portion 78 of the vacuum pad 48 (see FIG. 4) is in close contact with the upper end surface 42A of the positioning pin 42 due to the outside air being vacuumed from the air conduit 50 . Thereby, vacuum fixing by the vacuum pad 48 is performed. After confirming that the internal pressure of the conduit 94 detected by the pressure sensor 96 shown in FIG. (S80 in FIG. 7).

As described above, according to the positioning device 18 of the embodiment, the taper pin 46 formed with the engagement groove 72 opened to the positioning pin 42 side of the table 16, the vacuum pad 48 surrounding the taper pin 46, and the engagement groove 72 to apply negative pressure to the inside of the vacuum pad 48, the table 16 or the blade automatically moves after the fitted portion 54 and the positioning pin 42 are fitted together. Even if an external force acts on the blade changing device 12, the adsorption force of the vacuum pad 48 can solve the problem of relative displacement between the automatic blade changing device 12 and the table 16. FIG. Therefore, the automatic blade changer 12 can be reliably positioned on the table 16 .

By applying the positioning device 18 described above to the positioning device of the automatic blade changing device 12, the following advantageous effects can be obtained.

That is, the positioning device 18 of the embodiment has an air suction supply device 44 that also functions as an air supply means, and performs the vacuum step shown in S50 in FIG. It has an air blow process. As a result, dust adhering to the upper end surface 42A of the positioning pin 42 and the projection 74 before positioning the automatic blade changer 12 is removed in the processing section 10 of the dicing apparatus in an environment where dust generated during processing is scattered. can be previously removed from the locating pin 42 . Therefore, it is possible to solve the problem that the taper pin 46 does not fit into the protrusion 74 due to the influence of dust, or that the positioning pin 42 is corroded due to adhesion of foreign metal dust, making positioning impossible. Moreover, it is possible to solve the problem that the vacuum pad 48 cannot be adsorbed to the upper end surface 42A, which is the surface to be adsorbed.

FIG. 9 is a cross-sectional view showing a modification of the taper pin 100. As shown in FIG. In describing the taper pin 100, the same or similar configurations as those of the taper pin 46 shown in FIG.

The taper pin 100 of FIG. 9 differs from the taper pin 46 of FIG. 100 is that it has a substantially conical concave groove 102 . Even if the substantially conical recessed groove 102 is used instead of the inverted V-shaped engagement groove 72 in this manner, the automatic blade changer 12 can be moved to the table 16 by fitting the recessed groove 102 to the protrusion 74 . can be positioned. The recessed groove 102 is an example of a groove whose groove width widens toward the positioning pin 42 side, like the engagement groove 72 which is a V-shaped groove.

Further, as shown in FIG. 9, a plurality of through holes 104 are formed in the taper pin 100 . One end of the through hole 104 communicates with the concave groove 102 in the upper portion of the fitted portion 54 , and the other end communicates with the space 106 between the fitted portion 54 and the vacuum pad 48 . By providing such a through-hole 104 in the taper pin 100, even when the recessed groove 102 is fitted to the protrusion 74, the through-hole 104 maintains the state of communication between the air conduit 50 and the space 106. Therefore, the adsorption force of the vacuum pad 48 to the upper end surface 42A can be improved.

In the above description, an example in which the positioning device 18 of the embodiment is applied to the positioning device of the automatic blade changing device 12 has been described, but the positioning device 18 of the embodiment can also be applied to a positioning device for a workpiece. can.

In this case, the workpiece is machined while being positioned by the positioning device 18. At this time, the upper end surface 42A of the positioning pin 42 and the protrusion 74 are shielded from the outside air by the vacuum pad 48, so that the machining Dust generated at times can be prevented from adhering to the upper end surface 42A and the protrusion 74 . Thus, when the positioning device 18 of the embodiment is applied to the positioning device for the workpiece, the air blowing step shown in S30 in FIG. 7 is not necessarily required. only the function of

Although the embodiments of the present invention have been described above, the present invention is not limited to the above examples, and of course various improvements and modifications may be made without departing from the gist of the present invention. .

DESCRIPTION OF SYMBOLS 10... Processing part, 12... Blade automatic exchange apparatus, 14... Conveying apparatus, 16... Table, 18... Positioning apparatus, 20... Blade, 22... Attraction surface, 24... X moving mechanism part, 26... Guide rail, 28... Linear Motor 30 Spindle 32 Z movement mechanism 34 Y movement mechanism 36 Z transport mechanism 38 Y transport mechanism 40 Base 42 Positioning pin 43 Fixed member 44 Air suction supply device 46 Taper pin 48 Vacuum pad 50 Air pipe 52 Suction portion 54 Fitted portion 56 Connection portion 58 Mounted portion 60 Connector tube 62 Connection hole 64 First port 66 Second port 68 Air passage 70 3-port valve 72 Engagement groove 74 Protrusion 76 Mounting portion 78 Lip portion 80 Pump 82 Valve 84 Ejector 86 Pipe 88 Air supply pipe 90 Pipe 92 Air suction pipe 94 Pipe 96 Pressure sensor 100 Taper pin 102 concave groove, 104 through hole, 106 space

Claims (7)

an engaging pin formed with an engaging groove that is open to the positioning pin side of the fixing member;
a cylindrical pad surrounding the engagement pin;
an air conduit that opens to the inner surface of the engagement groove and applies negative pressure to the inner side of the cylindrical pad;
A device for positioning a transported object. The engagement groove is a groove whose groove width widens toward the positioning pin,
The device for positioning a transported object according to claim 1 . The engagement groove is a V-shaped groove including two flat slopes facing each other,
The device for positioning a transferred object according to claim 2 . The engagement groove is a conical concave groove,
The device for positioning a transferred object according to claim 2 . The air pipeline is a pipeline that selectively applies negative pressure and positive pressure to the inside of the cylindrical pad,
The device for positioning a transported object according to any one of claims 1 to 4. a positioning step of engaging the engagement groove of the engagement pin with the positioning pin side of the fixing member;
a fixing step of sucking and fixing the cylindrical pad surrounding the engaging pin to the positioning pin;
A method for positioning a transported object, comprising: An air blowing step of injecting air toward the positioning pin from an opening of the inner surface of the engaging groove in the step preceding the positioning step and the fixing step,
The method for positioning a transferred object according to claim 6 .

Images