JP5824367B2 - Cutting equipment - Google Patents

Description

  The present invention relates to a cutting apparatus having a cutting blade including a base and a cutting blade disposed on an outer peripheral edge of the base.

  For example, when a thin plate-like object such as a semiconductor wafer, a ceramic plate, or a resin substrate is divided into a large number of chips, a cutting device that cuts a cutting blade into a workpiece that is a plate-like object is used. ing. As this type of cutting apparatus, there are a holding table that sucks and holds a workpiece to be placed, a cutting means having a cutting blade disposed above the holding table, a holding table, and a cutting means. Are moved relative to each other so as to cut the cutting blade into the work piece and feed it. The cutting blade is detachably attached to the tip of the spindle of a spindle unit that rotates the spindle at high speed with a servo motor. As a mounting means, a mounting flange is screwed to the tip of the spindle, a cutting blade base is fitted into the mounting flange, a fixing nut is screwed onto the male thread of the mounting flange, and the cutting blade is mounted with the mounting flange and the fixing nut. Such a structure is generally used in which the base is sandwiched and fastened (see Patent Document 1, etc.).

JP 2009-262266 A

  With the mounting means configured as described above, when replacing the cutting blade, with the rotation of the spindle locked, the fixing nut is removed, the cutting blade is detached from the mounting flange, and then the new cutting blade is mounted on the mounting flange. The operation is such that the fixing nut is screwed into the male thread portion of the mount flange again. However, this attachment / detachment work is very time-consuming and improvement of the attachment means has been desired.

  The present invention has been made in view of the above circumstances, and a main technical problem thereof is to provide a cutting device that facilitates an operation of attaching and detaching a cutting blade to and from a spindle.

  The cutting device of the present invention is a cutting device comprising a holding table for holding a workpiece and a cutting means for cutting the workpiece held by the holding table, wherein the cutting means includes a spindle, A drive source for rotating the spindle, a base having a mounting hole formed in the center for cutting a workpiece mounted on the tip of the spindle and held by the holding table, and an outer peripheral edge of the base A cutting blade composed of a cutting blade and a pressing portion that presses the cutting blade mounted on the spindle, and the spindle has a closing hole formed at the center of the end face of the tip, A magnet disposed at the bottom, a plurality of claws disposed around the closing hole extending from the end surface in the axial direction of the spindle and inserted into the mounting hole of the cutting blade; A back surface side contact portion that contacts the back surface side of the base of the cutting blade on the outer peripheral side of the claw, and the pressing portion penetrates into the plurality of claws inserted into the mounting holes of the cutting blade And an insertion column having a magnetized portion inserted into the closed hole of the spindle and magnetically attached to the magnet at the tip, and an outer peripheral side of the insertion column in contact with the base surface of the cutting blade A flange having a contact surface for pressing the cutting blade, and the insertion column of the pressing portion is penetrated by the cutting blade and magnetically attached to the magnet of the spindle. The cutting blade is fixed, and at the time of rotation of the spindle, the plurality of claws are spread by centrifugal force to further fix the cutting blade.

  In the present invention, for example, a plurality of spindle claws are relatively inserted into the mounting holes of the base of the cutting blade and the cutting blade is temporarily fixed to the tip of the spindle, and then the insertion column of the pressing portion is inserted into the plurality of claws. The cutting blade is attached to the tip of the spindle by inserting into the spindle's closed hole and magnetizing the magnetized part of the insertion column to the magnet at the bottom of the spindle's closed hole. In this mounted state, the base of the cutting blade is in contact with the abutting portion on the back side of the end surface of the tip of the spindle, and the surface is in contact with the abutting surface of the collar portion of the pressing portion, It will be in the state clamped by the collar part of the pressing part. This mounting state is maintained by the magnetized portion of the insertion column being magnetized on the magnet of the spindle, and the cutting blade is fixed to the spindle. When the spindle rotates, a plurality of claws of the spindle spread by centrifugal force, and these claws are in a state of being crimped to the inner peripheral edge of the mounting hole of the cutting blade base. For this reason, a stronger fixed state can be obtained when the spindle rotates. On the other hand, in order to remove the cutting blade from the spindle, a force is applied so that the pressing portion is pulled out from the spindle, and the magnetized portion of the insertion column is detached from the spindle magnet. Then, when the insertion column is pulled out from the closing hole and the claw as it is, the pressing portion is detached. Thereafter, the base is removed from the claw and the cutting blade is removed from the spindle.

  According to the present invention, the cutting blade can be easily mounted on the spindle by a one-touch operation of inserting the insertion column of the pressing portion into the closing hole at the tip of the spindle and magnetizing the magnetized portion to the magnet. Further, as described above, the base of the cutting blade is firmly fixed to the spindle by the crimping action by the claw of the spindle that spreads by centrifugal force when the spindle rotates, and there is no possibility of detachment.

  In the present invention, the holding portion has a first opening that opens at the tip of the insertion column, a second opening that opens at the back of the contact surface of the flange portion, and one end connected to the first opening. And a gas passage penetrating through the pressing portion whose other end is connected to the second opening. In this embodiment, when a gas is supplied from the second opening through the gas passage with the cutting blade mounted on the spindle as described above, the pressure of the gas discharged from the first opening causes the magnetism of the insertion column of the pressing portion. The attaching portion is detached from the magnet in the closing hole of the spindle, and the holding portion can be easily removed.

  According to the present invention, it is possible to provide a cutting device that facilitates the attachment and detachment of the cutting blade to the spindle.

It is a perspective view of the cutting device concerning one embodiment of the present invention. It is a perspective view which shows the front-end | tip part of the cutting means with which the same cutting device is provided. It is sectional drawing of the front-end | tip part of the cutting means, Comprising: The attachment structure of the cutting blade with respect to a spindle is shown. It is sectional drawing which shows the state which removed the cutting blade from the spindle. It is a perspective view which shows the front-end | tip part of a spindle. It is a perspective view which shows the back surface side of the holding | suppressing part for mounting | wearing a spindle with a cutting blade. It is a partial cross section figure which shows the jig | tool for removal of a holding | suppressing part. It is a partially broken perspective view of the removal jig. It is sectional drawing which shows the state which mounted | wore the holding part with the jig | tool for the same removal.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
[1] Basic Configuration and Operation of Cutting Device FIG. 1 shows the entire cutting device 10 according to an embodiment. The cutting apparatus 10 is a two-axis opposed type in which a pair of cutting means (first cutting means 40A and second cutting means 40B) are arranged to face each other, and is placed on the holding table 32 and is held by the workpiece. (Not shown) is cut by the cutting means 40A and 40B. In this case, the workpiece is a disc-shaped plate such as a semiconductor wafer, and the holding table 32 is formed in a disc shape corresponding to the workpiece. Cutting includes full cutting and grooving that cut through the workpiece.

  The cutting apparatus 10 includes an apparatus base 11, and an X-axis moving unit 20 that supports the holding table 32 so as to be movable in the X direction is provided on the upper surface of the apparatus base 11. The X-axis moving means 20 includes a pair of X-axis linear guides 21 fixed on the apparatus base 11 and extending in the X direction, an X-axis movable base portion 22 slidably incorporated in these X-axis linear guides 21, A ball screw 23 that is rotatably disposed between the X-axis linear guides 21 and that is screwed to and coupled to the X-axis movable base portion 22 extends in the X direction, and a motor 24 that rotates the ball screw 23. Yes. According to this X-axis moving means 20, when the motor 24 is operated, the ball screw 23 rotates, and the X-axis movable base portion 22 moves in the direction corresponding to the rotation direction of the ball screw 23 (X1 direction or X2 direction). 21 is moved.

  A cylindrical table 31 is fixed to the upper surface of the X-axis movable base 22, and a disk-shaped holding table 32 is rotatably supported on the table 31. The holding table 32 is of a general well-known vacuum chuck type that sucks and holds a workpiece placed on the holding surface 32a on the horizontal upper surface by a negative pressure effect generated by sucking air. The holding table 32 is rotated in one direction or both directions by a rotation drive mechanism (not shown) provided in the table base 31. The holding table 32 is reciprocally moved between the loading / unloading position on the near side (X1 side) in the X direction and the processing position on the far side (X2 side) by the X-axis moving means 20.

  In FIG. 1, a portal column 12 across the machining position is fixed to the X2 side on the apparatus base 11. The portal column 12 has a pair of leg portions 12a erected side by side in the Y direction on both sides of the machining position, and a beam portion 12b horizontally spanned between the upper end portions of the leg portions 12a. Yes. The first cutting means 40A is provided on the Y1 side of the front surface (X1 side surface) of the beam portion 12b so as to be movable in the Y direction and the Z direction via the first Y axis moving means 50A and the first Z axis moving means 60A. On the Y2 side of the front surface of the beam portion 12b, the second cutting means 40B is provided so as to be movable in the Y direction and the Z direction via the second Y axis moving means 50B and the second Z axis moving means 60B.

  The first Y-axis moving unit 50A and the second Y-axis moving unit 50B have the same configuration, and a pair of upper and lower Y-axis linear guides 51 fixed to the beam portion 12b are used as a common component. A linear guide 51, a Y-axis movable base portion 52 slidably incorporated in the Y-axis linear guide 51, a ball screw 53 extending in the Y direction rotatably disposed between the Y-axis linear guide 51, and a ball The motor 54 rotates the screw 53 (in FIG. 2, the second Y-axis moving means 50B side is not shown, see FIG. 3). One ball screw 53 is provided for each of the first Y-axis moving means 50A and one for the second Y-axis moving means 50B. One ball screw 53 is a Y-axis movable base of the first Y-axis moving means 50A. The other ball screw 53 is screwed and connected to the Y-axis movable base portion 52 of the second Y-axis moving means 50B.

  A first Z-axis moving unit 60A and a second Z-axis moving unit 60B are provided on the front surface of the Y-axis movable base 52 in the first Y-axis moving unit 50A and the second Y-axis moving unit 50B, respectively. The first Z-axis moving means 60A and the second Z-axis moving means 60B have the same configuration, and are a pair of Z-axis linear guides 61 that are fixed to the Y-axis movable base portion 52 and that are separated in the Y direction, and these Z-axis linear guides Z-axis movable base 62 slidably incorporated in 61 and a Z-axis (vertical direction) rotatably disposed between Z-axis linear guide 61 and screwed to and coupled to Z-axis movable base 62 ) And a motor 64 that rotates the ball screw 63.

  The first cutting means 40A is fixed to the lower end of the Z-axis movable base 62 of the first Z-axis moving means 60A, and the second cutting is applied to the lower end of the Z-axis movable base 62 of the second Z-axis moving means 60B. The means 40B is fixed. As shown in FIG. 2, the first cutting means 40A and the second cutting means 40B have a rectangular parallelepiped spindle housing 41 that accommodates a cylindrical spindle 42 whose axial direction extends in the Y direction. ing. In the spindle housing 41, a drive source (not shown) such as a servo motor for rotating the spindle 42 is accommodated. The spindles 42 protrude from the spindle housing 41 on opposite sides, and a cutting blade 44 is attached to the protruding tip. A blade cover 45 that suppresses the scattering of the supplied cutting water is attached to the tip of the spindle housing 41.

  According to the first Y-axis moving means 50A and the second Y-axis moving means 50B, when each motor 54 is operated, the ball screw 53 rotates in either the forward or reverse direction, and the Y-axis movable base 52 rotates in the rotational direction of the ball screw 53. It moves along the Y-axis linear guide 51 in a direction (Y1 direction or Y2 direction) according to the above. Accordingly, the first cutting means 40A and the second cutting means 40B move along the Y direction so as to approach or separate from each other.

  Further, according to the first Z-axis moving means 60A and the second Z-axis moving means 60B, when each motor 64 is operated, the ball screw 63 rotates in either the forward or reverse direction, and the Z-axis movable base portion 62 is It moves up and down along the Z-axis linear guide 61 in a direction (upward: Z1 direction or downward: Z2 direction) according to the rotation direction. Thereby, the first cutting means 40A and the second cutting means 40B move up and down along the Z direction.

  As shown in FIG. 1, in each of the cutting means 40 </ b> A and 40 </ b> B, an alignment means 46 is fixed at a position on the front surface (X1 side surface) of the spindle housing 41 and close to the blade cover 45. The alignment means 46 performs the alignment which images the surface of the workpiece hold | maintained at the holding table 32, and detects the predetermined cutting line set to the workpiece based on the imaged image.

  According to the cutting apparatus 10 having the above configuration, the workpiece is cut as follows, and the workpiece is divided into a large number of chips, for example.

  First, the workpiece is placed on the holding surface 32a of the holding table 32 positioned at the loading / unloading position, and the workpiece is adsorbed and held on the holding surface 32a. Next, the X-axis movable base portion 22 moves in the X2 direction in FIG. 2, and the workpiece 1 is conveyed to the machining position. At this processing position, the surface of the workpiece is imaged by the alignment means 46 and alignment is performed.

  Subsequently, the workpiece is cut by the cutting means 40A and 40B according to the alignment. In the cutting process, the holding table 32 is rotated so that the cutting line is parallel to the X direction, and the cutting means 40A and 40B are moved in the Y direction to determine the cutting line. This is done by moving the work piece in the X direction by moving it in the X direction, and feeding it by cutting the cutting blade 44 into the cutting line.

  In the cutting apparatus 10 of this embodiment, by providing the two cutting means 40A and 40B, for example, it is possible to perform operations such as cutting and cutting two cutting lines at the same time. Can be implemented.

  When all the cutting lines are cut, the workpiece is returned to the loading / unloading position, taken up from the holding table 32, and moved to the next step (for example, a cleaning step).

  The above is the basic configuration and operation of the cutting apparatus 10. Next, the mounting structure of the cutting blade 44 in the cutting means 40A and 40B according to the present invention will be described.

[2] Cutting Blade Mounting Structure FIG. 2 shows the tip of the cutting means 40A (40B). The cutting means 40A (40B) is attached to the tip of the spindle 42 accommodated in the spindle housing 41 as described above. A cutting blade 44 is mounted, and the cutting blade 44 is rotated together with the spindle 42 by a drive source accommodated in the spindle housing 41. The cutting means 40A (40B) includes a pressing portion 300 for detachably mounting the cutting blade 44 on the tip of the spindle 42.

  As shown in FIG. 4, the cutting blade 44 includes a disk-shaped base 100 having a circular mounting hole 101 formed in the center thereof, and an annular cutting blade 110 disposed on the outer peripheral edge of the base 100. It is composed of The outer peripheral edge of the base 100 is formed with a taper shape on one side, the front surface 102 is the taper-shaped side, and the back surface 103 is the opposite surface, which is a flat surface. As the cutting blade 110, for example, a nickel base material in which diamond abrasive grains are dispersed is used, and is fixed to the back surface 103 of the base 100 by electrodeposition.

  As shown in FIG. 4, a circular cross-sectional closed hole 202 having a predetermined depth is formed in the center of the circular end surface 201 at the tip of the spindle 42. The closing hole 202 is smaller in diameter than the mounting hole 101 of the base 100, and a magnet (permanent magnet) 210 is disposed and fixed at the bottom thereof.

  Further, as shown in FIG. 5, a plurality of claws 204 extending from the end surface 201 in the axial direction of the spindle 42 are arranged at equal intervals in the circumferential direction around the closing hole 202 of the end surface 201. Yes. Each claw 204 has a cross section formed in an arc shape along the circumferential direction, and is disposed so as to surround the closing hole 202. The entire outer diameter and inner diameter of the claws 204 are concentric with the end surface 201, and the outer diameter is set to a size that is inserted into the mounting hole 101 of the base 100 in a tightly fitted state. The claw 204 is made of metal by being integrally formed with the spindle 42, and has elasticity that can be elastically deformed so as to spread by centrifugal force when the spindle 42 rotates. The claw 204 may be formed by a material such as a resin and may be provided by means such as being embedded and bonded to the end surface 201 of the spindle 42. In this case, the claw 204 can be elastically deformed by a centrifugal force when the spindle 42 rotates. The one molded with a simple material is used.

  Further, on the outer peripheral side of the plurality of claws 204 on the end surface 201 at the tip of the spindle 42, a back surface side contact portion 205 made of an annular protrusion is formed concentrically with the end surface 201. The back surface side contact portion 205 is formed so as to contact the back surface 103 side of the base 100 when the cutting blade 44 is mounted.

  The cutting blade 44 is fixed to the spindle 42 by the pressing unit 300. As shown in FIGS. 4 and 6, the holding portion 300 is formed by forming a disc-shaped flange 320 at one end of a columnar insertion column 310, and the insertion column 310 is the center of the back surface 321 of the flange 320. Projected vertically. The insertion column 310 has a diameter that can be inserted into the closing hole 202 of the spindle 42. An annular protrusion 330 is formed concentrically with the flange 320 on the outer peripheral side of the insertion column 310 on the back surface 321 of the flange 320, and the tip surface of the annular protrusion 330 is a contact surface 331. The contact surface 331 functions to contact the surface 102 of the base 100 and press the cutting blade 44 when the cutting blade 44 is mounted by the pressing unit 300.

  In addition, a plurality of positioning pins 340 are vertically provided between the insertion column 310 and the annular protrusion 330 on the back surface 321 of the flange portion 320. The positioning pin 340 functions so as to enter between the two adjacent claws 204 of the spindle 42 and restrict the relative rotation of the pressing unit 300 and the spindle 42 when the cutting blade 44 is mounted by the pressing unit 300. In this case, there are two positioning pins 340, which are arranged at two positions with the insertion column 310 interposed therebetween. The outer peripheral side of the annular protrusion 330 on the back surface 321 side of the collar portion 320 is formed in a tapered shape. Moreover, the surface 322 opposite to the back surface 321 of the collar part 320 is formed flat.

  As shown in FIG. 4, a gas passage 350 is formed through the center of the pressing portion 300 from the tip 311 of the insertion column 310 to the surface 322 of the flange portion 320. In this gas passage 350, the opening on the tip 311 side of the insertion column 310 is a first opening 351, and the opening on the surface 322 side (the back side of the contact surface 331 of the flange 320) is a second opening 352. Yes. That is, the gas passage 350 has one end connected to the first opening 351 and the other end connected to the second opening 352.

  The entire holding portion 300 may be made of a magnetic metal such as SUS430, or a part (for example, the positioning pin 340) may be made of resin, but at least the insertion column 310 is made of a magnetic metal. Composed. As a result, the distal end portion of the insertion column 310 is a magnetized portion 312, and when the cutting blade 44 is mounted by the pressing portion 300, the insertion column 310 is inserted into the closing hole 202 of the spindle 42, and the magnetized portion 312 is magnetized to the magnet 210. It comes to wear.

  In the present embodiment in which the tip of the spindle 42 and the pressing portion 300 have the above-described configuration, the procedure for attaching the cutting blade 44 to the spindle 42 by the pressing portion 300 will be described with reference to FIGS. 3 and 4. The following procedure is a preferred example, but the installation procedure is not limited to this.

  First, the plurality of claws 204 of the spindle 42 are fitted into the mounting holes 101 of the base 100 of the cutting blade 44 so that the claws 204 are relatively inserted into the mounting holes 101. The claw 204 is inserted into the mounting hole 101 with a tight fit, whereby the cutting blade 44 is temporarily fixed to the tip of the spindle 42.

  Next, the insertion column 310 of the holding portion 300 penetrates the inside of the plurality of claws 204 and is inserted into the closing hole 202 of the spindle 42 to penetrate the base 100, and the magnetized portion 312 of the insertion column 310 is attached to the magnet 210. Magnetize. At this time, the positioning pin 340 is inserted between any adjacent claws 204. As a result, as shown in FIG. 3, the base 100 of the cutting blade 44 has the back surface 103 in contact with the back surface side contact portion 205 of the spindle 42, and the front surface 102 is in contact with the flange portion 320 of the pressing portion 300. 331 abuts. That is, the base 100 is pressed against the spindle 42 by the flange portion 320 of the pressing portion 300 and is sandwiched between the flange portion 320 and the spindle 42. This state is maintained by the magnetized portion 312 of the insertion post 310 being magnetized to the magnet 210 of the spindle 42, and the cutting blade 44 is fixed to the spindle 42.

  When the workpiece is cut with the cutting blade 44 mounted on the spindle 42 as described above, the following action occurs. That is, when the spindle 42 rotates during cutting, the plurality of claws 204 are spread to the outer peripheral side by centrifugal force, and the claws 204 are in a state of being crimped to the inner peripheral edge of the mounting hole 101 of the base 100. For this reason, in addition to the magnetic adhesion strength of the pressing part 300 with respect to the magnet 210, the cutting blade 44 is more firmly fixed by a fixing action in which the expanding claw 204 is pressed against the inner peripheral edge of the mounting hole 101.

  Next, when it is necessary to replace the cutting blade 44 or the like, when removing the cutting blade 44 from the spindle 42, a force is applied so as to pull out the holding portion 300 from the spindle 42 with the flange portion 320 interposed therebetween. Then, since the magnetized portion 312 of the insertion column 310 is detached from the magnet 210 of the spindle 42, when the insertion column 310 is pulled out from the inside of the closing hole 202 and the claw 204 as it is, the pressing portion 300 is detached. Thereafter, the base 100 is pulled out from the claw 204 and the cutting blade 44 is removed from the spindle 42.

  According to the mounting structure of the cutting blade 44 according to the present embodiment, the insertion post 310 of the holding part 300 is inserted into the closing hole 202 of the spindle 42 and the magnetized part 312 is magnetically attached to the magnet 210. The cutting blade 44 can be mounted on the spindle 42. Further, as described above, when the spindle 42 rotates, the base 100 of the cutting blade 44 is firmly fixed to the spindle 42 by the pressure-bonding action of the claw 204 that spreads by centrifugal force, so that the cutting blade 44 is not likely to be detached from the spindle 42. . Further, when the positioning pin 340 that has entered between the two adjacent claws 204 of the spindle 42 hits the claws 204, the relative rotation between the pressing portion 300 and the spindle 42 is restricted.

  When the cutting blade 44 is mounted, the magnetized portion 312 of the insertion column 310 of the pressing portion 300 is magnetized to the magnet 210 of the spindle 42, and the back surface 103 of the base 100 of the cutting blade 44 is the back surface side of the spindle 42. The abutment portion 205 abuts and the surface 102 abuts on the abutment surface 331 of the flange portion 320 of the pressing portion 300. Such three contact states are ensured and the cutting blade 44 is fixed to the spindle 42. However, the back surface side contact portion 205 and the contact surface 331 are formed on the base 100 due to a dimensional error or the like. Or the magnetized part 312 does not reach the magnet 210.

  In that case, the above-mentioned three contact states can be ensured by adjusting the protruding height by polishing the rear surface side contact portion 205 and the contact surface 331 that are provided. The end surface 201 at the tip of the spindle 42 and the back surface 321 of the collar portion 320 may be flattened, and the flat surface may be held in contact with the base 100, but considering the dimensional error, the back surface side contact portion 205 may be used. It is preferable to project the contact surface 331 and make the polishing process easy.

  In order to remove the cutting blade 44 mounted on the spindle 42, in addition to performing the above-described operation manually, it is possible to remove the cutting blade 44 more easily by using a removal jig 400 shown in FIGS.

  The jig 400 detaches the presser part 300 from the spindle 42 by air pressure. A disc-like cap 410 detachably attached to the hook part 320 of the presser part 300 from the surface 322 side; A tubular joint 420 provided at the center of 410 is provided. A throttle valve 421 is provided in the joint part 420, and an air supply tube 430 connected to an air supply source (not shown) is connected to the joint part 420. The joint unit 420 is provided with an air supply ON / OFF button 422.

  The cap 410 has a disc portion 411, and an annular engagement in which an outer peripheral edge on the inner surface 412 side of the disc portion is formed with an inner circumferential groove 413 into which the outer peripheral edge of the flange portion 320 of the pressing portion 300 is fitted. A ring portion 414 is formed. The joint portion 420 is provided at the center of the outer surface 415 of the disc portion 411 of the cap 410.

  An air circulation hole 416 communicating with the inside of the joint part 420 is formed at the center of the cap 410. The engagement ring portion 414 has elasticity, and the engagement ring portion 414 is deformed to fit the circumferential groove 413 into the flange portion 320 of the pressing portion 300 to engage the engagement ring portion 414 with the flange portion 320. Then, the jig 400 is attached to the holding part 300. FIG. 9 shows a state in which the jig 400 is mounted on the flange portion 320 of the pressing portion 300, and in this mounting state, the inner surface 412 of the cap 410 is in close contact with the surface 322 of the flange portion 320 of the pressing portion 300. The circulation hole 416416 communicates with the gas passage 350 of the insertion column 310.

  The jig 400 is used as described above by mounting the jig 400 on the collar portion 320 of the pressing portion 300 and turning on the ON / OFF button 422. Then, air is discharged from the air flow hole 416 through the joint portion 420 from the air supply tube 430. The air enters the gas passage 350 from the second opening 352 of the gas passage 350 of the holding portion 300 and is discharged from the first opening 351, and the magnetized portion 312 of the insertion column 310 is detached from the magnet 210 by the pressure of this air. . In this way, the magnetized portion 312 of the pressing portion 300 is detached from the magnet 210 of the spindle 42. Thereafter, the insertion column 310 of the pressing portion 300 is pulled out from the inside of the claw 204, and the pressing portion 300 is removed.

  According to the jig 400, the pressing portion 300 fixed to the spindle 42 by the magnetic force can be easily detached from the spindle 42 by the air pressure, and therefore the cutting blade 44 can be removed more easily. be able to. In addition, the throttle valve 421 provided in the joint part 420 appropriately reduces the pressure of the supplied air and prevents the pressing part 300 from jumping out abruptly.

  In the above embodiment, the magnet 210 provided at the bottom of the closing hole 202 of the spindle 42 is a permanent magnet. However, the magnet 210 may be an electromagnet. When an electromagnet is used, when the cutting blade 44 is mounted, the electromagnet is turned on to generate a magnetic force. Further, when the cutting blade 44 is removed, the pressing portion 300 can be easily detached from the spindle 42 without resisting the magnetic force by turning off the electromagnet. When the magnet 210 is an electromagnet, the removal jig 400 is not particularly required.

  DESCRIPTION OF SYMBOLS 10 ... Cutting device, 32 ... Holding table, 40A, 40B ... Cutting means, 42 ... Spindle, 44 ... Cutting blade, 100 ... Base, 101 ... Mounting hole, 102 ... Surface of base, 103 ... Back surface of base, DESCRIPTION OF SYMBOLS 110 ... Cutting blade, 201 ... End surface of the front-end | tip of a spindle, 202 ... Closing hole, 204 ... Nail | claw, 205 ... Back surface side contact part, 210 ... Magnet, 300 ... Holding part, 310 ... Insertion pillar, 312 ... Magnetic adhesion part, 320 ... buttocks, 331 ... abutment surface, 350 ... gas passage, 351 ... first opening, 352 ... second opening.

Claims (2)

A cutting device comprising a holding table for holding a workpiece and a cutting means for cutting the workpiece held by the holding table,
The cutting means includes a spindle, a drive source for rotating the spindle, a base having a mounting hole formed in the center for cutting the workpiece mounted on the tip of the spindle and held by the holding table, and the cutting means. A cutting blade composed of a cutting blade disposed on the outer peripheral edge of the base, and a pressing part for pressing the cutting blade mounted on the spindle,
The spindle has a closing hole formed at the center of the end face of the tip, a magnet disposed at the bottom of the closing hole, and an axial direction of the spindle extending from the end face to the mounting hole of the cutting blade. A plurality of claws disposed around the closed hole to be inserted; and a back surface side contact portion that contacts the back surface side of the base of the cutting blade on the outer peripheral side of the plurality of claws. ,
The pressing portion is inserted at the tip of a magnetized portion that penetrates the plurality of claws inserted into the mounting hole of the cutting blade and is magnetically attached to the magnet by being inserted into the closing hole of the spindle. A column and a flange having a contact surface that contacts the surface of the base of the cutting blade and presses the cutting blade on the outer peripheral side of the insertion column;
The insertion column of the pressing portion is penetrated by the cutting blade and is magnetically attached to the magnet of the spindle so that the pressing portion fixes the cutting blade, and when the spindle rotates, the plurality of claws are A cutting apparatus characterized by further fixing the cutting blade by spreading by centrifugal force.   The holding portion includes a first opening that opens at the tip of the insertion column, a second opening that opens at the back of the contact surface of the flange, and one end connected to the first opening and the other. The cutting apparatus according to claim 1, wherein a gas passage penetrating through the pressing portion whose end is connected to the second opening is formed.

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