JP7454920B2 - processing equipment - Google Patents

Description

The present invention relates to a processing device equipped with a cutting blade.

A technique is known in which a cutting blade is attached and fixed to a mount attached to a spindle using a nut (see Patent Document 1).

JP2012-035388A

In the above-mentioned patent document, there is a nut for mounting and fixing the cutting blade, so when there are two spindles facing each other, there is a problem that the distance between the spindles cannot be made close, resulting in poor processing efficiency. Another problem was that the task of tightening the nut to a predetermined torque was troublesome. A technique has also been developed in which the blade is fixed using a vacuum without using a nut, but this method has the problem of a complicated structure such as the formation of a vacuum line.

The present invention has been made in view of the above problems, and its purpose is to provide a processing device to which a cutting blade is attached, which does not require troublesome work, and also allows the distance between the spindles to be made close to each other. The purpose of the present invention is to provide a processing device that does the following.

In order to solve the above-mentioned problems and achieve the objects, the processing device of the present invention includes a spindle housing that rotatably holds a spindle, a mount fixed to the tip of the spindle, and a cutting machine fixed to the mount. A processing device comprising a blade and a blade cover attached to the spindle housing and covering the cutting blade, the mount including a cylindrical boss portion extending in the front-rear direction, and a cylindrical boss portion extending from the spindle housing side of the boss portion. a support surface projecting outward in the radial direction and supporting the cutting blade, the cutting blade having an insertion hole in the center to be inserted into the boss portion, and a magnet provided on the surface of the cutting blade. The blade cover includes an opposing portion that faces the front side of the cutting blade when the back side of the cutting blade is attached to the mount, and the opposing portion includes a portion provided on the surface of the cutting blade. A magnet with the same polarity as the magnet provided on the surface of the cutting blade facing the spindle housing is provided at a position facing the magnet, and the opposing portion and the surface of the cutting blade are connected to each other. A magnetic field of the same polarity is applied by the magnet provided on the opposing part and the magnet provided on the surface of the cutting blade, and the cutting blade is pressed and held against the mount by a repulsive force.

Moreover, in order to solve the above-mentioned problem and achieve the object, the processing device of the present invention is a processing device, and includes a spindle serving as a rotating shaft, a fixed flange fixed to the spindle, and a cutting blade. A holding flange that holds the cutting blade between the cutting blade and the fixed flange; a blade cover that covers at least a part of the cutting blade; a support surface that protrudes radially outward from the spindle housing side of the boss portion and supports the cutting blade, and the holding flange is attached to the boss portion and supports the cutting blade between the support surface and the support surface. A magnet is provided on the surface of the holding flange, and the blade cover includes an opposing portion facing the holding flange, and the opposing portion faces the magnet provided on the surface of the holding flange. A magnet is provided at a position where the magnet provided on the surface of the holding flange has the same polarity facing the spindle housing side , and the opposing portion and the holding flange are disposed on the opposing portion. The cutting blade is characterized in that magnetic fields of the same polarity are applied by the magnet provided on the surface of the holding flange and the cutting blade is pressed against the fixed flange with a repulsive force.

The present invention is a processing device to which a cutting blade is attached, and the distance between the spindles can be made close to each other without requiring troublesome work.

FIG. 1 is a perspective view showing a configuration example of a processing device according to a first embodiment. FIG. 2 is an exploded perspective view showing a partial configuration example of a cutting unit in the processing apparatus according to the first embodiment. FIG. 3 is a perspective view showing the main parts of the cutting unit in the processing apparatus according to the first embodiment. FIG. 4 is a front view showing the main parts of the cutting unit in the processing apparatus according to the first embodiment. FIG. 5 is an exploded perspective view showing a partial configuration example of a cutting unit in the processing apparatus according to the second embodiment. FIG. 6 is an exploded perspective view showing a partial configuration example of a cutting unit in the processing apparatus according to the third embodiment.

DESCRIPTION OF THE PREFERRED EMBODIMENTS Modes (embodiments) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiments. Further, the constituent elements described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Furthermore, the configurations described below can be combined as appropriate. Moreover, various omissions, substitutions, or changes in the configuration can be made without departing from the gist of the present invention.

[Embodiment 1]
A processing device 100 according to a first embodiment of the present invention will be described with reference to the drawings. Fig. 1 is a perspective view showing a configuration example of the processing device 100 according to the first embodiment. Fig. 2 is an exploded perspective view showing a configuration example of a part of the cutting unit 10 in the processing device 100 according to the first embodiment. Fig. 3 is a perspective view showing a main part of the cutting unit 10 in the processing device 100 according to the first embodiment. Fig. 4 is a front view showing a main part of the cutting unit 10 in the processing device 100 according to the first embodiment.

The processing device 100 is a device that cuts a workpiece 200. In the first embodiment, the workpiece 200 cut by the processing apparatus 100 is, for example, a wafer such as a disk-shaped semiconductor wafer or an optical device wafer whose base material is silicon, sapphire, gallium, or the like. A device 203 is formed on a workpiece 200 in an area defined by a plurality of dividing lines 202 formed in a lattice shape on a flat surface 201 . The workpiece 200 has an adhesive tape 210 attached to the back surface 204 on the back side of the front surface 201, and an annular frame 211 attached to the outer edge of the adhesive tape 210. Further, in the present invention, the workpiece 200 may be a rectangular package substrate having a plurality of devices sealed with resin, a ceramic plate, a glass plate, or the like.

As shown in FIG. 1, the processing apparatus 100 includes a chuck table 110 that suction-holds a workpiece 200 on a holding surface 111 and is rotatable around an axis by a rotational drive source, and a workpiece held on the chuck table 110. A cutting unit 10 that cuts the object 200, an X-axis moving unit 120 that moves the chuck table 110 in the X-axis direction, a Y-axis moving unit 130 that moves the cutting unit 10 in the Y-axis direction, and a Z-axis It includes a Z-axis moving unit 140 that moves in the axial direction. The processing apparatus 100 also includes a cleaning unit 150 that cleans the workpiece 200 after cutting, a cassette 160 that stores the workpiece 200 before and after cutting, a cassette 160 that cleans the workpiece 200, a chuck table 110, and a cleaning unit. 150, and a control unit 170 that is a computer that controls each component.

In the processing apparatus 100, the transport unit takes out one workpiece 200 from the cassette 160 and places it on the holding surface 111 of the chuck table 110. The processing device 100 suction-holds the workpiece 200 on the holding surface 111 of the chuck table 110 and supplies cutting water from the cutting unit 10 to the workpiece 200 while moving the X-axis moving unit 120, the rotational drive source, and the Y The chuck table 110 and the cutting unit 10 are relatively moved along the dividing line 202 by the axis moving unit 130 and the Z-axis moving unit 140, and the cutting unit 10 cuts the dividing line 202 of the workpiece 200. . After cutting all of the scheduled dividing lines 202 of the workpiece 200, the processing apparatus 100 cleans the workpiece 200 with the cleaning unit 150, and then stores the workpiece 200 in the cassette 160.

In Embodiment 1, the cutting unit 10 of the processing apparatus 100 includes a cutting unit 10-1 that is provided facing each other in the Y-axis direction with a chuck table 110 and an X-axis moving unit 120 in between, as shown in FIG. A cutting unit 10-2 is provided. As shown in FIG. 1, the processing device 100 is a so-called facing dual type cutting device that includes two cutting units 10-1 and 10-2, that is, a two-spindle dicer. Both the cutting unit 10-1 and the cutting unit 10-2 have the same structure, and in the following, each part that is common to both is given a common reference numeral.

As shown in FIG. 2, the cutting unit 10 of the processing device 100 includes a spindle housing formed in a cylindrical shape and provided movably in the Y-axis direction and the Z-axis direction by a Y-axis movement unit 130 and a Z-axis movement unit 140. 11, and a spindle 12 rotatably provided in the spindle housing 11 around an axis parallel to the Y-axis direction. Further, as shown in FIG. 1, the cutting unit 10 includes a mount 13 fixed to the tip of the spindle 12, a cutting blade 14 mounted and fixed to the mount 13, and a blade cover 15.

The spindle 12 is rotatably supported by the spindle housing 11. The tip of the spindle 12 projects outward from one end of the spindle housing 11. A motor (not shown) for rotating the spindle 12 is connected to the base end of the spindle 12 . As shown in FIG. 2, the tip of the spindle 12 is tapered so that the outer diameter gradually decreases toward the tip. The spindle 12 is rotatably housed in the spindle housing 11 with its tip exposed, about an axis along the Y-axis direction. The spindle 12 serves as a rotation axis for the mount 13 and the cutting blade 14.

As shown in FIG. 2, the mount 13 includes a cylindrical boss portion 13-1 that extends in the front-rear direction, and a cylindrical boss portion 13-1 that extends outward in the radial direction of the boss portion 13-1 from the +Y direction side that is the rear side of the boss portion 13-1. The flange portion 13-2 includes a disk-shaped flange portion 13-2 that is integrally formed so as to protrude from the flange portion 13-2, and a cylindrical portion 13-3 that is integrally formed and protrudes from the rear side of the flange portion 13-2. In the mount 13, a boss portion 13-1, a flange portion 13-2, and a cylindrical portion 13-3 are arranged so that their central axes overlap with each other and face in the Y-axis direction.

The mount 13 has a mounting hole 13-4 formed inside the boss portion 13-1, the flange portion 13-2, and the cylindrical portion 13-3. The mounting hole 13-4 is formed in a tapered shape so that the inner diameter gradually decreases toward the distal end on the base end side, and is fitted onto the outer periphery of the distal end of the spindle 12 without a gap. The mount 13 is mounted on the spindle 12 by inserting a screw (not shown) into the mounting hole 13-4 through a washer (not shown), and tightening the screw into the screw hole 12-1 formed at the tip of the spindle 12. is fixed to the tip of the

The axial length of the mounting hole 13-4 is equal to the axial length of each portion of the boss portion 13-1, flange portion 13-2, and cylindrical portion 13-3, and one end of the spindle housing 11 of the spindle 12 The length in the axial direction of the protrusion protruding to the outside is longer by a predetermined length necessary for fixing with a washer (not shown) and a screw (not shown). Therefore, the axial length of the cylindrical portion 13-3 is formed according to the axial length of each portion of the boss portion 13-1, the flange portion 13-2, and the protruding portion of the spindle 12. Although the mount 13 has a cylindrical portion 13-3 in the first embodiment, the present invention is not limited to this. For example, the mount 13 may have a cylindrical portion 13-3 having a length of 0 in the axial direction. etc. may be in an abbreviated form.

The boss portion 13-1 is attached to the back surface 24-1 side of the base 14-1 of the cutting blade 14. Specifically, as shown in FIG. 2, the boss portion 13-1 is inserted into the insertion hole 14-3 of the base 14-1 of the cutting blade 14 from the back surface 24-1 side, and is inserted into the cutting blade 14 on the outer peripheral side. The base 14-1 of the blade 14 is supported from the inner peripheral side of the insertion hole 14-3.

The axial length of the boss portion 13-1 is the rear surface of the blade cover 15 that protrudes toward the tip side of the base 14-1 of the cutting blade 14 inserted and mounted in the insertion hole 14-3. It is preferable that the length is such that it does not contact the opposing portion 15-2, and in this case, the opposite side of the opposing portion 15-2 of each blade cover 15 of the cutting unit 10-1 and the cutting unit 10-2 provided oppositely. The distance between the spindles 12 is made close until their outer surfaces, which are the surfaces of the spindles 12, touch each other.

The flange portion 13-2 has an annular support surface 23-1 formed on the radially outer side of the front-facing surface, and an outer periphery of the boss portion 13-1 on the radially inner side of the front-facing surface. It has an annular recess 23-2 formed around it. The annular support surface 23-1 is formed to surround the outer periphery of the annular recess 23-2. The annular recess 23-2 is formed to be more recessed in the +Y direction than the annular support surface 23-1. Although the flange portion 13-2 has a ring-shaped support surface 23-1 and an annular recess 23-2 in the first embodiment, the present invention is not limited to this, and the flange portion 13-2 has a support surface 23-1. For example, the entire front surface may form the support surface 23-1.

The front facing surface of the flange portion 13-2, that is, the annular support surface 23-1 and the annular recess 23-2, are connected to the attached cutting blade 14 when the cutting blade 14 is attached to the boss portion 13-1. It faces the rear surface 24-1, which is the surface facing the rear side of the base 14-1.

The cutting blade 14 is fixed to the tip of the spindle 12 via the mount 13, and cuts the workpiece 200 by being rotated by the spindle 12 serving as a rotation axis. In the first embodiment, the cutting blade 14 is a so-called hub blade, and as shown in FIG. 2, it is made of a metal such as an aluminum alloy and has an annular disk shape with an insertion hole 14-3 in the center. It has a base 14-1, and an annular cutting blade 14-2 provided on the outer periphery of the base 14-1 and protruding from the outer periphery of the base 14-1.

The insertion hole 14-3 is a hole for fixing the cutting blade 14 to the mount 13, and is a hole inserted into the boss portion 13-1 of the mount 13. The cutting blade 14-2 is made of abrasive grains such as diamond or CBN (Cubic Boron Nitride) and a bond material (binding material) such as metal or resin, and is formed to a predetermined thickness. As shown in FIG. 2, the cutting blade 14-2 is fixed to the outer peripheral edge of one flat side surface of the base 14-1, and protrudes in the outer peripheral direction from the outer edge of the base 14-1.

The cutting blade 14 has a rear surface of the base 14-1, a back surface 24-1 facing the front surface of the flange portion 13-2 of the mount 13, and a front surface of the base 14-1. It has a surface 24-2 that faces the facing portion 15-2 of the blade cover 15 when covered with the blade cover 15.

The cutting blade 14 is provided with a magnet 21-1 on a surface 24-2, with a predetermined magnetic pole facing forward. In the first embodiment, the magnets 21-1 are arranged at four locations at equal intervals in the circumferential direction on the surface 24-2 of the cutting blade 14; Any form may be used as long as it provides a magnetic force of a predetermined magnetic pole toward the magnetic field.For example, it may be arranged in one place over the entire circumference, or it may be arranged in two, three, or five or more places. It may be provided.

As shown in FIGS. 3 and 4, the blade cover 15 has two positions via a hinge 15-1: a cover position that covers the upper part of the cutting blade 14 and at least one side in the X-axis direction, and a cover position that is retracted upward from the cover position. It is attached and fixed to the front end of the spindle housing 11 so as to be movable between the retracted position and the retracted position. It should be noted that the blade cover 15 is not limited to this form, and may be fixed in any manner as long as it is attached and fixed so as to be movable between the cover position and a retracted position, which is retracted from the cover position in any direction up, down, left or right. It may be attached and fixed in some form. When the blade cover 15 is in the cover position, the blade cover 15 covers the upper part of the cutting blade 14 and at least one side in the X-axis direction, and uses a cutting water nozzle attached to the lower end to provide machining fluid during cutting. It supplies cutting water to the cutting blade 14 and the workpiece 200.

As shown in FIGS. 3 and 4, when the blade cover 15 is in the cover position, the back surface 24-1 side of the cutting blade 14 is attached to the mount 13, and the front surface 24-2 of the cutting blade 14 is attached to the mount 13. It includes a facing portion 15-2 facing on the side. The blade cover 15 has a predetermined magnetic pole having the same magnetic pole (same polarity) as the magnet 21-1 at a position facing the magnet 21-1 provided on the surface 24-2 of the cutting blade 14 in the opposing portion 15-2. A magnet 25-1 facing the rear side is provided. In the first embodiment, the magnets 25-1 are arranged at four equal intervals in the circumferential direction on the facing portion 15-2 of the blade cover 15 in accordance with the magnets 21-1, but the present invention is not limited to this. However, any form may be used as long as the magnetic force of a predetermined magnetic pole is produced from the facing portion 15-2 of the blade cover 15 toward the rear side.

As shown in FIGS. 3 and 4, the spindle housing 11 is located at a position facing the blade cover 15 when the blade cover 15 is in the cover position at the front end where the blade cover 15 is attached. A magnet 21-2 is provided. Further, as shown in FIGS. 3 and 4, the blade cover 15 is attached to the front end of the spindle housing 11 when the blade cover 15 is in the cover position at the front end where the blade cover 15 is attached. A magnet 25-2 is provided at a position facing the magnet 21-2 provided at the side end, with a magnetic pole different from that of the magnet 21-2 directed toward the magnet 21-2. In the first embodiment, the magnet 21-2 and the magnet 25-2 are arranged in two locations facing each other, but the present invention is not limited to this, and may be in a form that brings magnetic forces of different magnetic poles toward each other. If so, such a form is also acceptable.

The magnitude of the magnetic force of the same magnetic poles directed toward each other by magnet 21-1 and magnet 25-1 is smaller than the magnitude of the magnetic force of different magnetic poles brought toward each other by magnet 21-2 and magnet 25-2. Therefore, when the back surface 24-1 side of the cutting blade 14 is attached to the mount 13 and the blade cover 15 is located at the cover position, the surface of the cutting blade 14 brought about by the magnets 21-1 and 25-1 The repulsive force (repulsive force) between the facing portion 15-2 of the blade cover 15 and the front end of the spindle housing 11 is caused by the magnet 21-2 and the magnet 25-2. is smaller than the force of attraction between As a result, when the back surface 24-1 side of the cutting blade 14 is attached to the mount 13 and the blade cover 15 is located at the cover position, the blade cover 15 is The cutting blade 14 is firmly fixed to the front end of the spindle housing 11 by the attractive force of the strong magnets 21-2 and 25-2, and the cutting blade 14 is firmly fixed to the front end of the spindle housing 11 by the repulsive force of the magnets 21-1 and 25-1. 15 is pressed against and held by the mount 13 on the rear side from the opposing portion 15-2.

Since the processing apparatus 100 according to the first embodiment has the above-described configuration, the opposing portion 15-2 of the blade cover 15 and the surface 24-2 of the cutting blade 14 are applied with a magnetic field of the same polarity, and the repulsive force is applied. Since the cutting blade 14 is pressed against and held by the mount 13, a nut is not required when fixing the cutting blade 14 to the mount 13. Therefore, the processing apparatus 100 according to the first embodiment does not require the troublesome work of tightening the nut with a predetermined torque. Further, in the processing apparatus 100 according to the first embodiment, since the nut does not protrude from the tip side of the cutting blade 14, the distance between the spindles 12 provided facing each other can be made close to each other.

If the structure is such that the cutting blade is pressed against the mount and held by magnetic fields of different polarities applied to the mount and the cutting blade, the cutting blade will collide with the mount with force and the cutting blade will be damaged. There was a possibility. However, in the processing apparatus 100 according to the first embodiment, the cutting blade 14 is pressed and held against the mount 13 using the repulsive force as described above, so there is a possibility that the cutting blade 14 will collide with the mount 13 with force. This suppresses the possibility that the cutting blade 14 will be damaged.

In addition, if the mount and the cutting blade have a structure in which magnetic fields of different polarities are applied to the mount and the cutting blade is held by the attraction force, the cutting blade will be strongly attracted to the mount, and the cutting blade will move away from the mount. could be difficult to remove. However, in the processing apparatus 100 according to the first embodiment, since the cutting blade 14 is pressed and held against the mount 13 using the repulsive force as described above, the cutting blade 14 is strongly attracted to the mount 13. This makes it possible to easily remove the cutting blade 14 from the mount 13.

[Embodiment 2]
A processing apparatus 100 according to a second embodiment of the present invention will be described based on the drawings. FIG. 5 is an exploded perspective view showing a partial configuration example of the cutting unit 30 in the processing apparatus 100 according to the second embodiment. In FIG. 5, the same parts as in Embodiment 1 are denoted by the same reference numerals, and the description thereof will be omitted.

The processing apparatus 100 according to the second embodiment is the same as the first embodiment except that the cutting unit 10 is replaced with a cutting unit 30. The cutting unit 30 is the same as the cutting unit 10 except that the mount 13 and the cutting blade 14 are replaced with a mount 33 and a cutting blade 34.

As shown in FIG. 5, the mount 33 includes a boss portion 33-1, a flange portion 33-2, and a cylindrical portion 33-3, and has a mounting hole 33-4 formed inside. The shapes of the boss portion 33-1, flange portion 33-2, cylindrical portion 33-3, and mounting hole 33-4 are the same as those of the boss portion 13-1, flange portion 13-2, and cylindrical portion of the mount 13 according to the first embodiment. 13-3 and the mounting hole 13-4 are changed to match the shape of the cutting blade 34 to be mounted, but their functions are the same.

The flange portion 33-2 has an annular support surface 43 on the entire front surface thereof. The surface facing the front side of the flange portion 33-2, that is, the annular support surface 43 is the surface facing the rear side of the attached cutting blade 34 when the cutting blade 34 is attached to the boss portion 33-1. It faces a certain back surface 44-1.

The cutting blade 34 is fixed to the tip of the spindle 12 via the mount 33, and is rotated by the spindle 12 serving as a rotation axis to cut the workpiece 200. In the second embodiment, the cutting blade 34 is a so-called hubless blade, and as shown in FIG. It has 34-3. The cutting blade 34 is made of the same material and has the same predetermined thickness as the cutting blade 14-2 of the cutting blade 14 according to the first embodiment.

The cutting blade 34 has a rear surface 44-1 facing the front surface of the flange portion 33-2 of the mount 33, and a front surface covered with the blade cover 15. and a surface 44-2 that faces the facing portion 15-2 of the blade cover 15 when the blade cover 15 is turned.

The cutting blade 34 is provided with the magnet 21-1 on the surface 44-2, similarly to the surface 24-2 of the cutting blade 14 according to the first embodiment. As a result, when the back surface 44-1 side of the cutting blade 34 is attached to the mount 33 and the blade cover 15 is located at the cover position, the blade cover 15 is The cutting blade 34 is firmly fixed to the front end of the spindle housing 11 by the attractive force of the strong magnets 21-2 and 25-2, and the cutting blade 34 is firmly fixed to the front end of the spindle housing 11 by the strong attractive force of the magnets 21-2 and 25-2. 15 is pressed against and held by the mount 33 on the rear side from the opposing portion 15-2.

Since the processing device 100 according to the first embodiment has the above configuration, the opposing portion 15-2 of the blade cover 15 and the surface 44-2 of the cutting blade 34 are similar to the processing device 100 according to the first embodiment. Since the cutting blade 34 is pressed and held against the mount 33 by the repulsive force applied to the magnetic field having the same polarity, the processing apparatus 100 has the same effect as the processing apparatus 100 according to the first embodiment.

[Embodiment 3]
A processing apparatus 100 according to a third embodiment of the present invention will be described based on the drawings. FIG. 6 is an exploded perspective view showing a partial configuration example of the cutting unit 50 in the processing apparatus 100 according to the second embodiment. In FIG. 6, the same parts as those in Embodiment 1 and Embodiment 2 are denoted by the same reference numerals, and description thereof will be omitted.

The processing apparatus 100 according to the third embodiment is the same as the processing apparatus 100 in the second embodiment, except that the cutting unit 30 is replaced with a cutting unit 50. The cutting unit 50 is the same as the cutting unit 30 except that the mount 33 and the cutting blade 34 are replaced with a fixed flange 53, a cutting blade 54, and a holding flange 55.

As shown in FIG. 6, the fixed flange 53 includes a boss portion 53-1, a flange portion 53-2, and a cylindrical portion 53-3, and has a mounting hole 53-4 formed inside. The shapes of the boss portion 53-1, flange portion 53-2, cylindrical portion 53-3, and mounting hole 53-4 are the same as those of the boss portion 33-1, flange portion 33-2, and cylindrical portion of the mount 33 according to the second embodiment. 33-3 and the mounting hole 33-4 are modified to match the shapes of the cutting blade 54 and holding flange 55 to be mounted, but their functions are generally the same.

As shown in FIG. 6, the flange portion 53-2 includes an annular support surface 63-1 formed on the radially outer side of the front-facing surface, and a boss on the radially inner side of the front-facing surface. It has an annular recess 63-3 formed to surround the outer periphery of the portion 53-1. The annular support surface 63-1 is formed to surround the outer periphery of the annular recess 63-3. The annular recess 63-3 is formed to be more recessed in the +Y direction than the annular support surface 63-1.

The cutting blade 54 is held between a fixed flange 53 and a holding flange 55, is fixed to the tip of the spindle 12 via the fixed flange 53, and is rotated by the spindle 12 serving as a rotating shaft, thereby cutting the workpiece 200. Cut. In Embodiment 3, the cutting blade 54 is a hubless blade similar to Embodiment 2, and as shown in FIG. It has an insertion hole 54-3 which is a hole for attaching it to 53-1.

The cutting blade 54 has a surface facing the rear side, a back surface 64-1 facing the annular support surface 63-1 of the front surface of the flange portion 53-2 of the fixed flange 53, and a rear surface 64-1 facing the front side. It has a surface 64-2 facing the annular support surface 65-1 of the rear side surface of the holding flange 55.

The holding flange 55 clamps and fixes the cutting blade 54 together with the fixing flange 53. As shown in FIG. 6, the holding flange 55 is disk-shaped (annular), and has an insertion hole 55-1 in the center for attaching the holding flange 55 to the boss portion 53-1 of the fixed flange 53. have.

The holding flange 55 has an annular support surface 65-1 formed on the radially outer side of the rearward-facing surface, and a ring-shaped support surface 65-1 formed on the radially inner side of the rearward-facing surface surrounding the outer periphery of the insertion hole 55-1. It has an annular convex portion 65-3 formed by. The annular support surface 65-1 is formed to surround the outer periphery of the annular protrusion 65-3. The annular convex portion 65-3 is formed to protrude in the +Y direction from the annular support surface 65-1.

As shown in FIG. 6, the boss portion 53-1 is attached to the back surface 64-1 side of the cutting blade 54, and further has a holding flange 55 attached thereto. The boss portion 53-1 supports the holding flange 55 from the inner circumferential side of the insertion hole 55-1 on the outer circumferential side.

Among the front facing surfaces of the flange portion 53-2, the annular support surface 63-1 faces the rear side of the attached cutting blade 54 when the cutting blade 54 is attached to the boss portion 53-1. It faces the back surface 64-1, which is the surface that was previously used. The annular support surface 63-1 of the flange portion 53-2 supports the attached cutting blade 54 when the cutting blade 54 is attached to the boss portion 53-1, on the rear side of the holding flange 55. It is held together with the annular support surface 65-1.

Of the surfaces facing the front side of the flange portion 53-2, the annular recess 63-3 is the surface facing the rear side of the attached presser flange 55 when the presser flange 55 is attached to the boss portion 53-1. The step between the support surface 63-1 and the annular recess 63-3 and the step between the support surface 65-1 and the annular projection 65-3 are opposite to the annular projection 65-3 of the can be fitted into each other.

The holding flange 55 is a front facing surface, and further has a surface 65-2 that faces the facing portion 15-2 of the blade cover 15 when covered with the blade cover 15. The holding flange 55 is provided with a magnet 21-1 on the surface 65-2, similarly to the surface 44-2 of the cutting blade 34 according to the second embodiment. As a result, when the back surface 64-1 side of the cutting blade 54 is attached to the fixed flange 53, and the holding flange 55 is attached to the fixed flange 53, and the blade cover 15 is located at the cover position, the blade cover 15 is firmly fixed to the front end of the spindle housing 11 by the attractive force of the magnets 21-2 and 25-2, which is stronger than the repulsive force of the magnets 21-1 and 25-1, and the cutting blade 54 is , the blade cover 15 is pressed against the rear fixed flange 53 from the facing portion 15-2 of the blade cover 15 via the holding flange 55 by the repulsive force generated by the magnets 21-1 and 25-1.

Since the processing apparatus 100 according to the third embodiment has the above configuration, the opposing part 15-2 of the blade cover 15 and the surface 65-2 of the holding flange 55 are similar to the processing apparatus 100 according to the second embodiment. The cutting blade 54 is pressed and held against the fixed flange 53 via the holding flange 55 by the repulsive force applied to the magnetic field of the same polarity, so that the same operation and effect as the processing device 100 according to the second embodiment is achieved. becomes.

Note that the present invention is not limited to the above embodiments. That is, various modifications can be made without departing from the gist of the invention.

10,10-1,10-2,30,50 Cutting unit 11 Spindle housing 12 Spindle 13,33 Mount 13-1,33-1,53-1 Boss part 13-2,33-2,53-2 Flange part 13-3, 33-3, 53-3 Cylindrical part 13-4, 33-4, 53-4 Mounting hole 14, 34, 54 Cutting blade 14-1 Base 14-2 Cutting blade 14-3, 34-3 , 54-3, 55-1 Insertion hole 15 Blade cover 15-1 Hinge 15-2 Opposing part 21-1, 21-2, 25-1, 25-2 Magnet 23-1, 43, 63-1, 65 -1 Support surface 23-2 Annular recess 24-1, 44-1, 64-1 Back surface 24-2, 44-2, 64-2, 65-2 Surface 53 Fixed flange 55 Holding flange 63-3 Annular recess 65- 3 Annular convex portion 100 Processing device

Claims (2)

A processing device that includes a spindle housing that rotatably holds a spindle, a mount that is fixed to the tip of the spindle, a cutting blade that is fixed to the mount, and a blade cover that is attached to the spindle housing and covers the cutting blade. And,
The mount is
A cylindrical boss part that extends in the front-rear direction,
a support surface that protrudes radially outward from the spindle housing side of the boss portion and supports the cutting blade;
The cutting blade is
It has an insertion hole in the center to be inserted into the boss part,
A magnet is provided on the surface of the cutting blade,
The blade cover is
comprising a facing portion that faces the front side of the cutting blade when the back side of the cutting blade is attached to the mount;
In the opposing part, a magnet is provided at a position opposite to the magnet provided on the surface of the cutting blade, the magnet having the same polarity as the magnet provided on the surface of the cutting blade and directed toward the spindle housing ,
A magnetic field of the same polarity is applied to the opposing part and the surface of the cutting blade by a magnet provided on the opposing part and a magnet provided on the surface of the cutting blade, and a repulsive force causes the mount to cut. A processing device characterized in that a blade is pressed and held. A processing device,
A spindle serving as a rotating shaft, a fixed flange fixed to the spindle, a cutting blade, a holding flange holding the cutting blade between the fixed flange, and a blade cover that covers at least a part of the cutting blade. , comprising;
The fixed flange is
A cylindrical boss part that extends in the front-rear direction,
a support surface that protrudes radially outward from the spindle housing side of the boss portion and supports the cutting blade;
The holding flange is
A cutting blade is mounted on the boss portion and held between the support surface and the cutting blade.
A magnet is provided on the surface of the holding flange,
The blade cover is
an opposing portion that faces the holding flange;
In the opposing portion, a magnet is provided at a position opposite to the magnet provided on the surface of the holding flange, and the magnet has the same polarity as the magnet provided on the surface of the holding flange and is directed toward the spindle housing ,
A magnetic field of the same polarity is applied to the opposing part and the holding flange by a magnet provided on the opposing part and a magnet provided on the surface of the holding flange, and the cutting blade is fixed by a repulsive force. A processing device that presses against a flange.

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