JP6407694B2 - プラズマ処理装置 - Google Patents

プラズマ処理装置 Download PDF

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Publication number
JP6407694B2
JP6407694B2 JP2014253583A JP2014253583A JP6407694B2 JP 6407694 B2 JP6407694 B2 JP 6407694B2 JP 2014253583 A JP2014253583 A JP 2014253583A JP 2014253583 A JP2014253583 A JP 2014253583A JP 6407694 B2 JP6407694 B2 JP 6407694B2
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Japan
Prior art keywords
temperature
sample
plasma
potential
voltage
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Active
Application number
JP2014253583A
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English (en)
Japanese (ja)
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JP2016115819A (ja
JP2016115819A5 (enExample
Inventor
和幸 池永
和幸 池永
正貴 石黒
正貴 石黒
角屋　誠浩
誠浩 角屋
茂 白米
茂 白米
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
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Hitachi High Technologies Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi High Technologies Corp filed Critical Hitachi High Technologies Corp
Priority to JP2014253583A priority Critical patent/JP6407694B2/ja
Priority to CN201510459206.5A priority patent/CN106206233B/zh
Priority to KR1020150108307A priority patent/KR101746046B1/ko
Priority to TW104126389A priority patent/TWI594287B/zh
Priority to US14/834,404 priority patent/US11424108B2/en
Publication of JP2016115819A publication Critical patent/JP2016115819A/ja
Publication of JP2016115819A5 publication Critical patent/JP2016115819A5/ja
Application granted granted Critical
Publication of JP6407694B2 publication Critical patent/JP6407694B2/ja
Priority to US17/866,687 priority patent/US12191121B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32715—Workpiece holder
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32568—Relative arrangement or disposition of electrodes; moving means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32577—Electrical connecting means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32697—Electrostatic control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32697—Electrostatic control
    • H01J37/32706—Polarising the substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32715—Workpiece holder
    • H01J37/32724—Temperature

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Drying Of Semiconductors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Plasma Technology (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
JP2014253583A 2014-12-16 2014-12-16 プラズマ処理装置 Active JP6407694B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2014253583A JP6407694B2 (ja) 2014-12-16 2014-12-16 プラズマ処理装置
CN201510459206.5A CN106206233B (zh) 2014-12-16 2015-07-30 等离子体处理装置
KR1020150108307A KR101746046B1 (ko) 2014-12-16 2015-07-30 플라즈마 처리 장치
TW104126389A TWI594287B (zh) 2014-12-16 2015-08-13 Plasma processing equipment
US14/834,404 US11424108B2 (en) 2014-12-16 2015-08-24 Plasma processing apparatus
US17/866,687 US12191121B2 (en) 2014-12-16 2022-07-18 Plasma processing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014253583A JP6407694B2 (ja) 2014-12-16 2014-12-16 プラズマ処理装置

Publications (3)

Publication Number Publication Date
JP2016115819A JP2016115819A (ja) 2016-06-23
JP2016115819A5 JP2016115819A5 (enExample) 2017-11-24
JP6407694B2 true JP6407694B2 (ja) 2018-10-17

Family

ID=56111849

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014253583A Active JP6407694B2 (ja) 2014-12-16 2014-12-16 プラズマ処理装置

Country Status (5)

Country Link
US (2) US11424108B2 (enExample)
JP (1) JP6407694B2 (enExample)
KR (1) KR101746046B1 (enExample)
CN (1) CN106206233B (enExample)
TW (1) TWI594287B (enExample)

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JP6727068B2 (ja) * 2016-08-08 2020-07-22 株式会社日立ハイテク プラズマ処理装置およびプラズマ処理方法
KR102269344B1 (ko) * 2017-07-25 2021-06-28 주식회사 원익아이피에스 기판처리장치
CN109427610B (zh) * 2017-08-23 2021-01-29 北京北方华创微电子装备有限公司 晶片温控系统、晶片温控方法及反应腔室
KR102474052B1 (ko) * 2018-01-15 2022-12-02 어플라이드 머티어리얼스, 인코포레이티드 반도체 제조 생산성을 위한 진보된 온도 모니터링 시스템 및 방법들
JP7061922B2 (ja) * 2018-04-27 2022-05-02 東京エレクトロン株式会社 プラズマ処理方法及びプラズマ処理装置
JP7258562B2 (ja) * 2019-01-11 2023-04-17 東京エレクトロン株式会社 処理方法及びプラズマ処理装置
WO2020100357A1 (ja) * 2019-08-05 2020-05-22 株式会社日立ハイテク プラズマ処理装置
JP7398909B2 (ja) * 2019-09-12 2023-12-15 東京エレクトロン株式会社 静電吸着方法及びプラズマ処理装置
JP7604111B2 (ja) * 2020-04-07 2024-12-23 株式会社日立ハイテク プラズマ処理装置
US12013291B2 (en) * 2020-10-14 2024-06-18 Applied Materials, Inc. Advanced temperature monitoring system with expandable modular layout design
KR102812573B1 (ko) * 2022-06-07 2025-05-26 주식회사 히타치하이테크 플라스마 처리 장치
KR20240123168A (ko) * 2023-02-06 2024-08-13 주식회사 원익아이피에스 기판 지지 장치의 조립 방법

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Also Published As

Publication number Publication date
TW201624518A (zh) 2016-07-01
KR20160073290A (ko) 2016-06-24
TWI594287B (zh) 2017-08-01
CN106206233A (zh) 2016-12-07
US20160172161A1 (en) 2016-06-16
KR101746046B1 (ko) 2017-06-27
CN106206233B (zh) 2017-12-26
US20220359172A1 (en) 2022-11-10
US12191121B2 (en) 2025-01-07
JP2016115819A (ja) 2016-06-23
US11424108B2 (en) 2022-08-23

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