JP6406911B2 - 撮像装置及び撮像装置の製造方法 - Google Patents

撮像装置及び撮像装置の製造方法 Download PDF

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JP6406911B2
JP6406911B2 JP2014151122A JP2014151122A JP6406911B2 JP 6406911 B2 JP6406911 B2 JP 6406911B2 JP 2014151122 A JP2014151122 A JP 2014151122A JP 2014151122 A JP2014151122 A JP 2014151122A JP 6406911 B2 JP6406911 B2 JP 6406911B2
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semiconductor region
region
type semiconductor
capacitor
junction
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Japanese (ja)
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JP2016025331A5 (https=
JP2016025331A (ja
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小林　昌弘
昌弘 小林
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Canon Inc
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Canon Inc
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Priority to JP2014151122A priority Critical patent/JP6406911B2/ja
Priority to US14/805,254 priority patent/US9391102B2/en
Priority to CN201510441369.0A priority patent/CN105280660B/zh
Publication of JP2016025331A publication Critical patent/JP2016025331A/ja
Publication of JP2016025331A5 publication Critical patent/JP2016025331A5/ja
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/802—Geometry or disposition of elements in pixels, e.g. address-lines or gate electrodes
    • H10F39/8023—Disposition of the elements in pixels, e.g. smaller elements in the centre of the imager compared to larger elements at the periphery
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00—Resistors, capacitors or inductors
    • H10D1/60—Capacitors
    • H10D1/62—Capacitors having potential barriers
    • H10D1/66—Conductor-insulator-semiconductor capacitors, e.g. MOS capacitors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/60—Impurity distributions or concentrations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/011—Manufacture or treatment of image sensors covered by group H10F39/12
    • H10F39/014—Manufacture or treatment of image sensors covered by group H10F39/12 of CMOS image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H10F39/18—Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
    • H10F39/182—Colour image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/802—Geometry or disposition of elements in pixels, e.g. address-lines or gate electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/803—Pixels having integrated switching, control, storage or amplification elements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/803—Pixels having integrated switching, control, storage or amplification elements
    • H10F39/8037—Pixels having integrated switching, control, storage or amplification elements the integrated elements comprising a transistor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/803—Pixels having integrated switching, control, storage or amplification elements
    • H10F39/8037—Pixels having integrated switching, control, storage or amplification elements the integrated elements comprising a transistor
    • H10F39/80373—Pixels having integrated switching, control, storage or amplification elements the integrated elements comprising a transistor characterised by the gate of the transistor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/805—Coatings
    • H10F39/8053—Colour filters
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/811—Interconnections

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  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
JP2014151122A 2014-07-24 2014-07-24 撮像装置及び撮像装置の製造方法 Active JP6406911B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2014151122A JP6406911B2 (ja) 2014-07-24 2014-07-24 撮像装置及び撮像装置の製造方法
US14/805,254 US9391102B2 (en) 2014-07-24 2015-07-21 Imaging device
CN201510441369.0A CN105280660B (zh) 2014-07-24 2015-07-24 成像设备

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014151122A JP6406911B2 (ja) 2014-07-24 2014-07-24 撮像装置及び撮像装置の製造方法

Publications (3)

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JP2016025331A JP2016025331A (ja) 2016-02-08
JP2016025331A5 JP2016025331A5 (https=) 2017-08-31
JP6406911B2 true JP6406911B2 (ja) 2018-10-17

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US (1) US9391102B2 (https=)
JP (1) JP6406911B2 (https=)
CN (1) CN105280660B (https=)

Families Citing this family (7)

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Publication number Priority date Publication date Assignee Title
JP6727830B2 (ja) * 2016-02-09 2020-07-22 キヤノン株式会社 撮像装置
JP6719984B2 (ja) * 2016-06-06 2020-07-08 キヤノン株式会社 撮像装置、撮像システム
JP7013119B2 (ja) * 2016-07-21 2022-01-31 キヤノン株式会社 固体撮像素子、固体撮像素子の製造方法、及び撮像システム
CN110832844B (zh) * 2017-07-07 2021-11-09 普里露尼库斯新加坡私人有限公司 固态摄像装置、固态摄像装置的驱动方法、以及电子设备
WO2019193800A1 (ja) * 2018-04-04 2019-10-10 ソニーセミコンダクタソリューションズ株式会社 固体撮像素子および撮像装置
US12490539B2 (en) 2020-05-29 2025-12-02 Sony Semiconductor Solutions Corporation Semiconductor device and electronic apparatus
WO2025258462A1 (ja) * 2024-06-12 2025-12-18 株式会社ニコン 撮像素子、および撮像装置

Family Cites Families (10)

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Publication number Priority date Publication date Assignee Title
JP2006197392A (ja) * 2005-01-14 2006-07-27 Canon Inc 固体撮像装置、カメラ、及び固体撮像装置の駆動方法
JP4459098B2 (ja) * 2005-03-18 2010-04-28 キヤノン株式会社 固体撮像装置及びカメラ
JP2008205639A (ja) * 2007-02-16 2008-09-04 Texas Instr Japan Ltd 固体撮像装置及びその動作方法
JP2008305983A (ja) * 2007-06-07 2008-12-18 Nikon Corp 固体撮像素子
CN101752392A (zh) * 2008-12-02 2010-06-23 上海华虹Nec电子有限公司 四晶体管cmos图像传感器及其制造方法
JP5558859B2 (ja) * 2010-02-18 2014-07-23 キヤノン株式会社 固体撮像装置および固体撮像装置の製造方法
JP2011204797A (ja) * 2010-03-24 2011-10-13 Sony Corp 固体撮像装置とその製造方法、及び電子機器
JP5767465B2 (ja) * 2010-12-15 2015-08-19 キヤノン株式会社 固体撮像装置およびその製造方法ならびにカメラ
JP5959877B2 (ja) * 2012-02-17 2016-08-02 キヤノン株式会社 撮像装置
DE102012101368B4 (de) * 2012-02-21 2020-02-27 Leuze Electronic Gmbh & Co. Kg Lichtvorhang

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Publication number Publication date
US20160027824A1 (en) 2016-01-28
CN105280660A (zh) 2016-01-27
JP2016025331A (ja) 2016-02-08
CN105280660B (zh) 2018-08-07
US9391102B2 (en) 2016-07-12

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