JP6404580B2 - 電力制御モードのためのチャンバマッチング - Google Patents

電力制御モードのためのチャンバマッチング Download PDF

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Publication number
JP6404580B2
JP6404580B2 JP2014044455A JP2014044455A JP6404580B2 JP 6404580 B2 JP6404580 B2 JP 6404580B2 JP 2014044455 A JP2014044455 A JP 2014044455A JP 2014044455 A JP2014044455 A JP 2014044455A JP 6404580 B2 JP6404580 B2 JP 6404580B2
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plasma
plasma chamber
chamber
free test
power
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JP2014197676A (ja
JP2014197676A5 (cg-RX-API-DMAC7.html
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リュック・アルバレード
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Lam Research Corp
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Lam Research Corp
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge
    • H01J37/32183—Matching circuits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
    • H01J37/32899—Multiple chambers, e.g. cluster tools
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H2242/00—Auxiliary systems
    • H05H2242/20—Power circuits
    • H05H2242/26—Matching networks

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
  • Drying Of Semiconductors (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
JP2014044455A 2013-03-14 2014-03-07 電力制御モードのためのチャンバマッチング Active JP6404580B2 (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US201361784086P 2013-03-14 2013-03-14
US61/784,086 2013-03-14
US13/901,509 US9119283B2 (en) 2013-03-14 2013-05-23 Chamber matching for power control mode
US13/901,509 2013-05-23

Publications (3)

Publication Number Publication Date
JP2014197676A JP2014197676A (ja) 2014-10-16
JP2014197676A5 JP2014197676A5 (cg-RX-API-DMAC7.html) 2017-04-06
JP6404580B2 true JP6404580B2 (ja) 2018-10-10

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JP2014044455A Active JP6404580B2 (ja) 2013-03-14 2014-03-07 電力制御モードのためのチャンバマッチング

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US (1) US9119283B2 (cg-RX-API-DMAC7.html)
JP (1) JP6404580B2 (cg-RX-API-DMAC7.html)
KR (1) KR102223834B1 (cg-RX-API-DMAC7.html)
TW (1) TWI609606B (cg-RX-API-DMAC7.html)

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US10020168B1 (en) * 2017-07-20 2018-07-10 Lam Research Corporation Systems and methods for increasing efficiency of delivered power of a megahertz radio frequency generator in the presence of a kilohertz radio frequency generator
US10607815B2 (en) * 2018-06-29 2020-03-31 Applied Materials, Inc. Methods and apparatuses for plasma chamber matching and fault identification
CN112017931B (zh) * 2019-05-30 2022-03-22 北京北方华创微电子装备有限公司 应用于等离子体系统的方法及相关等离子体系统
CN113113282B (zh) * 2021-04-01 2023-11-14 北京北方华创微电子装备有限公司 上电极电源功率调节方法、半导体工艺设备
KR20240138176A (ko) * 2023-03-10 2024-09-20 삼성전자주식회사 Rf 전력 제공 장치 및 그것의 동작 방법

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Also Published As

Publication number Publication date
JP2014197676A (ja) 2014-10-16
TWI609606B (zh) 2017-12-21
US9119283B2 (en) 2015-08-25
KR102223834B1 (ko) 2021-03-05
KR20140113526A (ko) 2014-09-24
TW201503764A (zh) 2015-01-16
US20140265851A1 (en) 2014-09-18

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