JP6374093B2 - レーザーパッケージングシステム及び方法 - Google Patents
レーザーパッケージングシステム及び方法 Download PDFInfo
- Publication number
- JP6374093B2 JP6374093B2 JP2017504388A JP2017504388A JP6374093B2 JP 6374093 B2 JP6374093 B2 JP 6374093B2 JP 2017504388 A JP2017504388 A JP 2017504388A JP 2017504388 A JP2017504388 A JP 2017504388A JP 6374093 B2 JP6374093 B2 JP 6374093B2
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- Japan
- Prior art keywords
- laser
- module
- glass frit
- predetermined
- output
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 238000000034 method Methods 0.000 title claims description 76
- 238000004806 packaging method and process Methods 0.000 title claims description 46
- 239000011521 glass Substances 0.000 claims description 137
- 238000001816 cooling Methods 0.000 claims description 28
- 238000007789 sealing Methods 0.000 claims description 21
- 238000010438 heat treatment Methods 0.000 claims description 20
- 238000009529 body temperature measurement Methods 0.000 claims description 13
- 230000000737 periodic effect Effects 0.000 claims description 11
- 238000002844 melting Methods 0.000 claims description 10
- 230000008018 melting Effects 0.000 claims description 10
- 230000008859 change Effects 0.000 claims description 9
- 230000003247 decreasing effect Effects 0.000 claims description 5
- 230000003213 activating effect Effects 0.000 claims description 3
- 230000033001 locomotion Effects 0.000 description 22
- 230000008569 process Effects 0.000 description 15
- 238000010586 diagram Methods 0.000 description 11
- 238000009826 distribution Methods 0.000 description 9
- 239000000758 substrate Substances 0.000 description 9
- 230000007423 decrease Effects 0.000 description 7
- 230000007246 mechanism Effects 0.000 description 7
- 238000005452 bending Methods 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 4
- 239000005394 sealing glass Substances 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 3
- 239000005357 flat glass Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 230000001360 synchronised effect Effects 0.000 description 3
- 230000001133 acceleration Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000005538 encapsulation Methods 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 238000005457 optimization Methods 0.000 description 2
- 239000012044 organic layer Substances 0.000 description 2
- 238000012858 packaging process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000032798 delamination Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000008393 encapsulating agent Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000004093 laser heating Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000009828 non-uniform distribution Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
- 230000008685 targeting Effects 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/40—Thermal treatment, e.g. annealing in the presence of a solvent vapour
- H10K71/421—Thermal treatment, e.g. annealing in the presence of a solvent vapour using coherent electromagnetic radiation, e.g. laser annealing
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/80—Constructional details
- H10K59/87—Passivation; Containers; Encapsulations
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Laser Beam Processing (AREA)
- Electroluminescent Light Sources (AREA)
- Joining Of Glass To Other Materials (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201410367513.6A CN105336877B (zh) | 2014-07-29 | 2014-07-29 | 激光扫描密封玻璃封装体的系统和方法 |
CN201410367513.6 | 2014-07-29 | ||
PCT/CN2015/079918 WO2016015515A1 (zh) | 2014-07-29 | 2015-05-27 | 激光封装系统和方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017524538A JP2017524538A (ja) | 2017-08-31 |
JP6374093B2 true JP6374093B2 (ja) | 2018-08-15 |
Family
ID=55216738
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017504388A Active JP6374093B2 (ja) | 2014-07-29 | 2015-05-27 | レーザーパッケージングシステム及び方法 |
Country Status (6)
Country | Link |
---|---|
JP (1) | JP6374093B2 (zh) |
KR (1) | KR101920286B1 (zh) |
CN (1) | CN105336877B (zh) |
SG (1) | SG11201700622VA (zh) |
TW (1) | TWI629915B (zh) |
WO (1) | WO2016015515A1 (zh) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107331590B (zh) * | 2016-04-29 | 2019-06-25 | 上海微电子装备(集团)股份有限公司 | 准同步激光封装系统及方法 |
CN107665826B (zh) * | 2016-07-29 | 2019-11-26 | 上海微电子装备(集团)股份有限公司 | 激光封装方法及激光封装装置 |
CN106206985B (zh) * | 2016-08-19 | 2017-11-07 | 京东方科技集团股份有限公司 | 封装结构及制作方法、显示面板及显示装置 |
CN106425088B (zh) * | 2016-10-25 | 2019-09-17 | 昆山国显光电有限公司 | 激光密封玻璃料的方法及激光密封系统 |
CN109093251B (zh) * | 2017-06-20 | 2020-08-04 | 上海微电子装备(集团)股份有限公司 | 一种激光封装装置及封装方法 |
CN109422449B (zh) * | 2017-09-01 | 2021-03-09 | 上海微电子装备(集团)股份有限公司 | 一种激光扫描封装系统及方法 |
CN109542449A (zh) * | 2018-10-29 | 2019-03-29 | 大族激光科技产业集团股份有限公司 | 一种非线性激光功率控制nc编程方法及激光功率控制系统 |
CN110018668A (zh) * | 2019-04-11 | 2019-07-16 | 湖北三江航天红峰控制有限公司 | 一种激光功率跟随控制方法 |
CN110031327A (zh) * | 2019-04-19 | 2019-07-19 | 西北核技术研究所 | 复合材料高温力学性能-升温率相关性参数测试系统及方法 |
CN111138076B (zh) * | 2019-12-30 | 2022-04-19 | 武汉华工激光工程有限责任公司 | 一种激光玻璃焊接控制系统及方法 |
CN112171056B (zh) * | 2020-08-14 | 2023-04-07 | 大族激光科技产业集团股份有限公司 | 一种oled激光封装装置 |
CN115890009B (zh) * | 2023-03-03 | 2023-05-12 | 北京金橙子科技股份有限公司 | 基于功能升级的激光器和振镜数据处理系统、方法和介质 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006205216A (ja) * | 2005-01-28 | 2006-08-10 | Pioneer Electronic Corp | レーザ溶接装置、及びレーザ溶接方法 |
KR100885563B1 (ko) * | 2005-12-06 | 2009-02-24 | 코닝 인코포레이티드 | 글래스 패키지 제조방법 및 그 밀봉장치 |
US7537504B2 (en) * | 2005-12-06 | 2009-05-26 | Corning Incorporated | Method of encapsulating a display element with frit wall and laser beam |
CN101512709B (zh) * | 2005-12-06 | 2011-03-23 | 康宁股份有限公司 | 气密式密封玻璃封装及其制造方法 |
CN201002157Y (zh) * | 2006-12-08 | 2008-01-09 | 华南理工大学 | 基于振镜扫描的选择性激光微钎焊系统 |
US8247730B2 (en) * | 2007-09-28 | 2012-08-21 | Corning Incorporated | Method and apparatus for frit sealing with a variable laser beam |
KR101117732B1 (ko) * | 2010-01-19 | 2012-02-24 | 삼성모바일디스플레이주식회사 | 기판 밀봉에 사용되는 레이저 빔 조사 장치 및 이를 이용한 유기 발광 디스플레이 장치의 제조 방법 |
CN102248304A (zh) * | 2011-01-13 | 2011-11-23 | 苏州德龙激光有限公司 | 用于背光源加工的co2激光高速划槽装置及其方法 |
CN102690045A (zh) * | 2011-03-21 | 2012-09-26 | 上海微电子装备有限公司 | 封装装置及封装方法 |
CN102694132B (zh) * | 2011-03-21 | 2016-04-20 | 上海微电子装备有限公司 | 一种封装装置及封装方法 |
JP2013125718A (ja) * | 2011-12-16 | 2013-06-24 | Sharp Corp | 表示装置及びその製造方法 |
JP6116170B2 (ja) * | 2012-09-24 | 2017-04-19 | 株式会社半導体エネルギー研究所 | 封止体の作製方法 |
CN102945054A (zh) * | 2012-10-12 | 2013-02-27 | 上海大学 | 光电器件封装、激光键合温度采集与控制系统和方法 |
CN103474587B (zh) * | 2013-09-30 | 2015-12-02 | 上海大学 | Oled封装装置 |
CN103482857A (zh) * | 2013-09-30 | 2014-01-01 | 上海大学 | 激光准同步扫描方法和系统 |
CN103553312A (zh) * | 2013-10-18 | 2014-02-05 | 昆山思拓机器有限公司 | 用于激光焊接oled玻璃的温控装置和方法 |
-
2014
- 2014-07-29 CN CN201410367513.6A patent/CN105336877B/zh active Active
-
2015
- 2015-05-27 KR KR1020177005694A patent/KR101920286B1/ko active IP Right Grant
- 2015-05-27 SG SG11201700622VA patent/SG11201700622VA/en unknown
- 2015-05-27 JP JP2017504388A patent/JP6374093B2/ja active Active
- 2015-05-27 WO PCT/CN2015/079918 patent/WO2016015515A1/zh active Application Filing
- 2015-05-29 TW TW104117484A patent/TWI629915B/zh active
Also Published As
Publication number | Publication date |
---|---|
TW201605285A (zh) | 2016-02-01 |
CN105336877B (zh) | 2018-01-26 |
WO2016015515A1 (zh) | 2016-02-04 |
TWI629915B (zh) | 2018-07-11 |
KR20170041779A (ko) | 2017-04-17 |
SG11201700622VA (en) | 2017-03-30 |
CN105336877A (zh) | 2016-02-17 |
JP2017524538A (ja) | 2017-08-31 |
KR101920286B1 (ko) | 2018-11-20 |
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