JP6342017B2 - 弾性波素子とこれを用いたラダーフィルタ - Google Patents

弾性波素子とこれを用いたラダーフィルタ Download PDF

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JP6342017B2
JP6342017B2 JP2016569125A JP2016569125A JP6342017B2 JP 6342017 B2 JP6342017 B2 JP 6342017B2 JP 2016569125 A JP2016569125 A JP 2016569125A JP 2016569125 A JP2016569125 A JP 2016569125A JP 6342017 B2 JP6342017 B2 JP 6342017B2
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Prior art keywords
connection wiring
electrode
acoustic wave
piezoelectric body
lower connection
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Japanese (ja)
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JP2017506866A (ja
JP2017506866A5 (enExample
Inventor
陽介 濱岡
陽介 濱岡
光則 宮成
光則 宮成
中村　弘幸
弘幸 中村
中西　秀和
秀和 中西
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スカイワークスフィルターソリューションズジャパン株式会社
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H03H9/02944—Means for compensation or elimination of undesirable effects of ohmic loss
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02992—Details of bus bars, contact pads or other electrical connections for finger electrodes
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6423—Means for obtaining a particular transfer characteristic
    • H03H9/6433—Coupled resonator filters
    • H03H9/644—Coupled resonator filters having two acoustic tracks
    • H03H9/6456—Coupled resonator filters having two acoustic tracks being electrically coupled
    • H03H9/6459—Coupled resonator filters having two acoustic tracks being electrically coupled via one connecting electrode
    • H03H9/6463—Coupled resonator filters having two acoustic tracks being electrically coupled via one connecting electrode the tracks being electrically cascaded
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6423—Means for obtaining a particular transfer characteristic
    • H03H9/6433—Coupled resonator filters
    • H03H9/6483—Ladder SAW filters
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/40—Piezoelectric or electrostrictive devices with electrical input and electrical output, e.g. functioning as transformers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/872—Interconnections, e.g. connection electrodes of multilayer piezoelectric or electrostrictive devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/58—Multiple crystal filters
    • H03H9/60—Electric coupling means therefor
    • H03H9/605—Electric coupling means therefor consisting of a ladder configuration

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
JP2016569125A 2014-02-18 2015-02-17 弾性波素子とこれを用いたラダーフィルタ Active JP6342017B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2014028059 2014-02-18
JP2014028059 2014-02-18
PCT/JP2015/000718 WO2015125460A1 (en) 2014-02-18 2015-02-17 Acoustic wave elements and ladder filters using same

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2018093592A Division JP6513262B2 (ja) 2014-02-18 2018-05-15 弾性波素子の接続配線における電気損失を低減する方法

Publications (3)

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JP2017506866A JP2017506866A (ja) 2017-03-09
JP2017506866A5 JP2017506866A5 (enExample) 2018-03-29
JP6342017B2 true JP6342017B2 (ja) 2018-06-13

Family

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Family Applications (2)

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JP2016569125A Active JP6342017B2 (ja) 2014-02-18 2015-02-17 弾性波素子とこれを用いたラダーフィルタ
JP2018093592A Active JP6513262B2 (ja) 2014-02-18 2018-05-15 弾性波素子の接続配線における電気損失を低減する方法

Family Applications After (1)

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JP2018093592A Active JP6513262B2 (ja) 2014-02-18 2018-05-15 弾性波素子の接続配線における電気損失を低減する方法

Country Status (5)

Country Link
US (2) US9614495B2 (enExample)
JP (2) JP6342017B2 (enExample)
KR (1) KR20160124175A (enExample)
CN (1) CN106031031B (enExample)
WO (1) WO2015125460A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107852148B (zh) * 2015-08-31 2021-05-25 京瓷株式会社 声表面波元件
US11463037B2 (en) * 2020-09-10 2022-10-04 Delta Electronics, Inc. Motor control system and method of controlling the same
US20230179171A1 (en) 2021-12-06 2023-06-08 Skyworks Solutions, Inc. Multi-band surface acoustic wave filters

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5003579A (en) * 1986-08-22 1991-03-26 Farallon Computing, Incorporated System for connecting computers via telephone lines
US5338575A (en) * 1990-01-10 1994-08-16 Kohiensaure-werke Rud. Buse GmbH & Co. Process for the quasi-continuous decaffeination of raw coffee
US5738931A (en) * 1994-09-16 1998-04-14 Kabushiki Kaisha Toshiba Electronic device and magnetic device
JPH1022767A (ja) * 1996-07-09 1998-01-23 Oki Electric Ind Co Ltd 表面弾性波フィルタ及びその製造方法
US7612470B2 (en) * 1999-01-12 2009-11-03 Microsemi Corp.—Analog Mixed Signal Group Ltd. System for providing power over Ethernet through a patch panel
JP3925133B2 (ja) * 2000-12-26 2007-06-06 株式会社村田製作所 弾性表面波装置の製造方法及び弾性表面波装置
JP2003087080A (ja) * 2001-07-06 2003-03-20 Murata Mfg Co Ltd 弾性表面波素子及びその製造方法
US7376734B2 (en) * 2002-02-14 2008-05-20 Panduit Corp. VOIP telephone location system
JP2004129238A (ja) * 2002-09-10 2004-04-22 Matsushita Electric Ind Co Ltd 帯域阻止型フィルタ、フィルタ装置、アンテナ共用器、通信機器
JP3764450B2 (ja) * 2003-07-28 2006-04-05 Ｔｄｋ株式会社 表面弾性波素子、表面弾性波装置、表面弾性波デュプレクサ、及び表面弾性波素子の製造方法
JP2006074223A (ja) * 2004-08-31 2006-03-16 Murata Mfg Co Ltd 電子部品およびその製造方法
JP5023749B2 (ja) * 2007-03-16 2012-09-12 パナソニック株式会社 弾性表面波フィルタ
EP2175556B1 (en) * 2007-07-30 2014-09-03 Murata Manufacturing Co. Ltd. Elastic wave device and method for manufacturing the same
US8401387B2 (en) * 2007-08-30 2013-03-19 Calix, Inc. Optical network interface devices and methods
WO2009057195A1 (ja) * 2007-10-30 2009-05-07 Fujitsu Limited 弾性波素子、デュープレクサ、通信モジュール、および通信装置
JP2011030208A (ja) * 2009-07-03 2011-02-10 Panasonic Corp 弾性波フィルタ及びこれを用いたデュプレクサ
US8334737B2 (en) * 2009-07-15 2012-12-18 Panasonic Corporation Acoustic wave device and electronic apparatus using the same
JP5338575B2 (ja) * 2009-09-03 2013-11-13 パナソニック株式会社 弾性波素子とこれを用いた電子機器
JP5325729B2 (ja) 2009-09-28 2013-10-23 太陽誘電株式会社 弾性波フィルタ
US9099981B2 (en) * 2010-01-20 2015-08-04 Skyworks Panasonic Filter Solutions Japan Co., Ltd. Acoustic wave device having an inorganic insulator and an organic insulator
US8935543B2 (en) * 2010-04-02 2015-01-13 Andrew Llc Method and apparatus for distributing power over communication cabling
JP5402841B2 (ja) * 2010-06-14 2014-01-29 株式会社村田製作所 弾性表面波デバイス
CN103181078B (zh) * 2010-10-26 2015-09-02 株式会社村田制作所 弹性波分波器
JP5182437B2 (ja) * 2010-11-10 2013-04-17 株式会社村田製作所 弾性波装置及びその製造方法

Also Published As

Publication number Publication date
CN106031031B (zh) 2019-03-08
US20170170797A1 (en) 2017-06-15
JP2018170765A (ja) 2018-11-01
KR20160124175A (ko) 2016-10-26
JP2017506866A (ja) 2017-03-09
US20150236238A1 (en) 2015-08-20
JP6513262B2 (ja) 2019-05-15
US10389326B2 (en) 2019-08-20
US9614495B2 (en) 2017-04-04
CN106031031A (zh) 2016-10-12
WO2015125460A1 (en) 2015-08-27

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