JP6339557B2 - ナノ構造化材料及びその作製方法 - Google Patents
ナノ構造化材料及びその作製方法 Download PDFInfo
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- JP6339557B2 JP6339557B2 JP2015503210A JP2015503210A JP6339557B2 JP 6339557 B2 JP6339557 B2 JP 6339557B2 JP 2015503210 A JP2015503210 A JP 2015503210A JP 2015503210 A JP2015503210 A JP 2015503210A JP 6339557 B2 JP6339557 B2 JP 6339557B2
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- nanostructured
- polymer matrix
- acrylate
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Classifications
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- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/12—Optical coatings produced by application to, or surface treatment of, optical elements by surface treatment, e.g. by irradiation
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
- G02B1/118—Anti-reflection coatings having sub-optical wavelength surface structures designed to provide an enhanced transmittance, e.g. moth-eye structures
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
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- G—PHYSICS
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- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/04—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of organic materials, e.g. plastics
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
- G02B1/111—Anti-reflection coatings using layers comprising organic materials
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/16—Optical coatings produced by application to, or surface treatment of, optical elements having an anti-static effect, e.g. electrically conducting coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B2207/00—Coding scheme for general features or characteristics of optical elements and systems of subclass G02B, but not including elements and systems which would be classified in G02B6/00 and subgroups
- G02B2207/101—Nanooptics
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/32—Processing objects by plasma generation
- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
- H01J2237/334—Etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/32—Processing objects by plasma generation
- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
- H01J2237/334—Etching
- H01J2237/3343—Problems associated with etching
- H01J2237/3345—Problems associated with etching anisotropy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/70—Nanostructure
- Y10S977/778—Nanostructure within specified host or matrix material, e.g. nanocomposite films
- Y10S977/781—Possessing nonosized surface openings that extend partially into or completely through the host material
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Crystallography & Structural Chemistry (AREA)
- Biophysics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Laminated Bodies (AREA)
- Surface Treatment Of Optical Elements (AREA)
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| US201261615646P | 2012-03-26 | 2012-03-26 | |
| US61/615,646 | 2012-03-26 | ||
| PCT/US2013/027348 WO2013148031A1 (en) | 2012-03-26 | 2013-02-22 | Nanostructured material and method of making the same |
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| JP2017214837A Division JP6685987B2 (ja) | 2012-03-26 | 2017-11-07 | ナノ構造化材料及びその作製方法 |
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| EP (1) | EP2831648B1 (https=) |
| JP (2) | JP6339557B2 (https=) |
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| CN (1) | CN104335078B (https=) |
| SG (1) | SG11201406122WA (https=) |
| WO (1) | WO2013148031A1 (https=) |
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| CN104335078B (zh) | 2012-03-26 | 2017-08-08 | 3M创新有限公司 | 纳米结构化材料及其制造方法 |
| US20150202834A1 (en) | 2014-01-20 | 2015-07-23 | 3M Innovative Properties Company | Lamination transfer films for forming antireflective structures |
| TW201539736A (zh) | 2014-03-19 | 2015-10-16 | ３Ｍ新設資產公司 | 用於藉白光成色之 oled 裝置的奈米結構 |
| SG11201706397XA (en) | 2015-02-04 | 2017-09-28 | Agency Science Tech & Res | Anti-reflection coating |
| WO2016176129A1 (en) * | 2015-04-29 | 2016-11-03 | 3M Innovative Properties Company | Swellable film forming compositions and methods of nanoimprint lithography employing same |
| US11571490B2 (en) | 2015-06-29 | 2023-02-07 | 3M Innovative Properties Company | Anti-microbial articles and methods of using same |
| JP6784487B2 (ja) | 2015-10-30 | 2020-11-11 | デクセリアルズ株式会社 | 光学体、および表示装置 |
| AU2017263312B2 (en) | 2016-05-12 | 2019-01-03 | 3M Innovative Properties Company | Protective headgear comprising a curved switchable shutter and comprising multiple antireflective layers |
| EP3694486A4 (en) * | 2017-10-10 | 2020-12-16 | Central Glass Co., Ltd. | USE OF UV SENSITIVE INTERLAYER MATERIALS INCLUDING A FUNCTIONAL NANOSTRUCTURED COATING |
| EP3694815A4 (en) * | 2017-10-10 | 2020-11-11 | Central Glass Co., Ltd. | IMPROVED ANTI-REFLECTIVE FUNCTIONAL COATING FOR GLAZING |
| US11422294B2 (en) | 2017-10-10 | 2022-08-23 | Central Glass Company, Limited | Durable functional coatings |
| EP3729186A4 (en) * | 2017-12-21 | 2021-07-14 | Macinnis, Brent | EYEWEAR ARTICLES AND METHODS FOR MANUFACTURING EYEWEAR ARTICLES |
| US12038592B2 (en) | 2018-01-05 | 2024-07-16 | 3M Innovative Properties Company | Stray light absorbing film |
| CN112334549A (zh) * | 2018-06-20 | 2021-02-05 | 美国圣戈班性能塑料公司 | 具有抗反射涂层的复合膜 |
| EP3924770A4 (en) | 2019-02-14 | 2022-04-27 | Central Glass Co., Ltd. | VEHICLE WINDSHIELD INTENDED FOR USE WITH A HEAD-UP DISPLAY SYSTEM |
| JP6611113B1 (ja) * | 2019-06-11 | 2019-11-27 | ナルックス株式会社 | 表面に微細凹凸構造を備えたプラスチック素子の製造方法 |
| DE102023111441A1 (de) * | 2023-05-03 | 2024-11-07 | Gesellschaft für angewandte Mikro- und Optoelektronik mit beschränkter Haftung - AMO GmbH | Verfahren zur Herstellung eines strukturierten Bauteils, sowie strukturiertes Bauteil |
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- 2013-02-22 KR KR1020147029907A patent/KR102047392B1/ko not_active Expired - Fee Related
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| US10126469B2 (en) | 2018-11-13 |
| US20170221680A1 (en) | 2017-08-03 |
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| KR102047392B1 (ko) | 2019-11-21 |
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| WO2013148031A1 (en) | 2013-10-03 |
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| US9651715B2 (en) | 2017-05-16 |
| EP2831648A1 (en) | 2015-02-04 |
| JP2018028693A (ja) | 2018-02-22 |
| US20150077854A1 (en) | 2015-03-19 |
| JP6685987B2 (ja) | 2020-04-22 |
| EP2831648B1 (en) | 2016-09-14 |
| CN104335078A (zh) | 2015-02-04 |
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