KR102047392B1 - 나노구조화된 재료 및 그의 제조방법 - Google Patents

나노구조화된 재료 및 그의 제조방법 Download PDF

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Publication number
KR102047392B1
KR102047392B1 KR1020147029907A KR20147029907A KR102047392B1 KR 102047392 B1 KR102047392 B1 KR 102047392B1 KR 1020147029907 A KR1020147029907 A KR 1020147029907A KR 20147029907 A KR20147029907 A KR 20147029907A KR 102047392 B1 KR102047392 B1 KR 102047392B1
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South Korea
Prior art keywords
nanostructured
polymeric matrix
layer
phase
acrylate
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KR1020147029907A
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Korean (ko)
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KR20140139074A (ko
Inventor
타-후아 유
모세스 엠 데이비드
압두자바르 케이 디레
알버트 아이 에버에츠
윌리암 블레이크 콜브
토드 엠 샌드맨
?스케 스즈키
스코트 에이 워커
Original Assignee
쓰리엠 이노베이티브 프로퍼티즈 캄파니
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/12—Optical coatings produced by application to, or surface treatment of, optical elements by surface treatment, e.g. by irradiation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/111—Anti-reflection coatings using layers comprising organic materials
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/118—Anti-reflection coatings having sub-optical wavelength surface structures designed to provide an enhanced transmittance, e.g. moth-eye structures
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/16—Optical coatings produced by application to, or surface treatment of, optical elements having an anti-static effect, e.g. electrically conducting coatings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/04—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of organic materials, e.g. plastics
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B2207/00—Coding scheme for general features or characteristics of optical elements and systems of subclass G02B, but not including elements and systems which would be classified in G02B6/00 and subgroups
    • G02B2207/101—Nanooptics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/334—Etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/334—Etching
    • H01J2237/3343—Problems associated with etching
    • H01J2237/3345—Problems associated with etching anisotropy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/70—Nanostructure
    • Y10S977/778—Nanostructure within specified host or matrix material, e.g. nanocomposite films
    • Y10S977/781—Possessing nonosized surface openings that extend partially into or completely through the host material

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Biophysics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Laminated Bodies (AREA)
  • Surface Treatment Of Optical Elements (AREA)
KR1020147029907A 2012-03-26 2013-02-22 나노구조화된 재료 및 그의 제조방법 Expired - Fee Related KR102047392B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261615646P 2012-03-26 2012-03-26
US61/615,646 2012-03-26
PCT/US2013/027348 WO2013148031A1 (en) 2012-03-26 2013-02-22 Nanostructured material and method of making the same

Publications (2)

Publication Number Publication Date
KR20140139074A KR20140139074A (ko) 2014-12-04
KR102047392B1 true KR102047392B1 (ko) 2019-11-21

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KR1020147029907A Expired - Fee Related KR102047392B1 (ko) 2012-03-26 2013-02-22 나노구조화된 재료 및 그의 제조방법

Country Status (7)

Country Link
US (2) US9651715B2 (https=)
EP (1) EP2831648B1 (https=)
JP (2) JP6339557B2 (https=)
KR (1) KR102047392B1 (https=)
CN (1) CN104335078B (https=)
SG (1) SG11201406122WA (https=)
WO (1) WO2013148031A1 (https=)

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US20150202834A1 (en) 2014-01-20 2015-07-23 3M Innovative Properties Company Lamination transfer films for forming antireflective structures
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Also Published As

Publication number Publication date
WO2013148031A1 (en) 2013-10-03
EP2831648B1 (en) 2016-09-14
KR20140139074A (ko) 2014-12-04
EP2831648A1 (en) 2015-02-04
US10126469B2 (en) 2018-11-13
US20150077854A1 (en) 2015-03-19
CN104335078B (zh) 2017-08-08
US20170221680A1 (en) 2017-08-03
JP6339557B2 (ja) 2018-06-06
JP2018028693A (ja) 2018-02-22
CN104335078A (zh) 2015-02-04
JP6685987B2 (ja) 2020-04-22
US9651715B2 (en) 2017-05-16
SG11201406122WA (en) 2014-10-30
JP2015514231A (ja) 2015-05-18

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