CN104335078B - 纳米结构化材料及其制造方法 - Google Patents

纳米结构化材料及其制造方法 Download PDF

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Publication number
CN104335078B
CN104335078B CN201380017019.0A CN201380017019A CN104335078B CN 104335078 B CN104335078 B CN 104335078B CN 201380017019 A CN201380017019 A CN 201380017019A CN 104335078 B CN104335078 B CN 104335078B
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CN
China
Prior art keywords
nanostructured
phase
nanoscale
nanostructured material
range
Prior art date
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Expired - Fee Related
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CN201380017019.0A
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English (en)
Chinese (zh)
Other versions
CN104335078A (zh
Inventor
余大华
莫塞斯·M·大卫
阿卜杜贾巴尔·K·迪雷
艾伯特·I·埃费拉茨
威廉·布莱克·科尔布
托德·M·桑德曼
铃木俊介
斯科特·A·沃克
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3M Innovative Properties Co
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3M Innovative Properties Co
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Publication of CN104335078A publication Critical patent/CN104335078A/zh
Application granted granted Critical
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Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/12—Optical coatings produced by application to, or surface treatment of, optical elements by surface treatment, e.g. by irradiation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/04—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of organic materials, e.g. plastics
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/111—Anti-reflection coatings using layers comprising organic materials
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/118—Anti-reflection coatings having sub-optical wavelength surface structures designed to provide an enhanced transmittance, e.g. moth-eye structures
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/16—Optical coatings produced by application to, or surface treatment of, optical elements having an anti-static effect, e.g. electrically conducting coatings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B2207/00—Coding scheme for general features or characteristics of optical elements and systems of subclass G02B, but not including elements and systems which would be classified in G02B6/00 and subgroups
    • G02B2207/101—Nanooptics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/334—Etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/334—Etching
    • H01J2237/3343—Problems associated with etching
    • H01J2237/3345—Problems associated with etching anisotropy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/70—Nanostructure
    • Y10S977/778—Nanostructure within specified host or matrix material, e.g. nanocomposite films
    • Y10S977/781—Possessing nonosized surface openings that extend partially into or completely through the host material

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Biophysics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Laminated Bodies (AREA)
  • Surface Treatment Of Optical Elements (AREA)
CN201380017019.0A 2012-03-26 2013-02-22 纳米结构化材料及其制造方法 Expired - Fee Related CN104335078B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261615646P 2012-03-26 2012-03-26
US61/615,646 2012-03-26
PCT/US2013/027348 WO2013148031A1 (en) 2012-03-26 2013-02-22 Nanostructured material and method of making the same

Publications (2)

Publication Number Publication Date
CN104335078A CN104335078A (zh) 2015-02-04
CN104335078B true CN104335078B (zh) 2017-08-08

Family

ID=47913545

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201380017019.0A Expired - Fee Related CN104335078B (zh) 2012-03-26 2013-02-22 纳米结构化材料及其制造方法

Country Status (7)

Country Link
US (2) US9651715B2 (https=)
EP (1) EP2831648B1 (https=)
JP (2) JP6339557B2 (https=)
KR (1) KR102047392B1 (https=)
CN (1) CN104335078B (https=)
SG (1) SG11201406122WA (https=)
WO (1) WO2013148031A1 (https=)

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CN104335078B (zh) 2012-03-26 2017-08-08 3M创新有限公司 纳米结构化材料及其制造方法
US20150202834A1 (en) 2014-01-20 2015-07-23 3M Innovative Properties Company Lamination transfer films for forming antireflective structures
TW201539736A (zh) 2014-03-19 2015-10-16 ３Ｍ新設資產公司 用於藉白光成色之 oled 裝置的奈米結構
SG11201706397XA (en) 2015-02-04 2017-09-28 Agency Science Tech & Res Anti-reflection coating
WO2016176129A1 (en) * 2015-04-29 2016-11-03 3M Innovative Properties Company Swellable film forming compositions and methods of nanoimprint lithography employing same
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JP6784487B2 (ja) 2015-10-30 2020-11-11 デクセリアルズ株式会社 光学体、および表示装置
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EP3694486A4 (en) * 2017-10-10 2020-12-16 Central Glass Co., Ltd. USE OF UV SENSITIVE INTERLAYER MATERIALS INCLUDING A FUNCTIONAL NANOSTRUCTURED COATING
EP3694815A4 (en) * 2017-10-10 2020-11-11 Central Glass Co., Ltd. IMPROVED ANTI-REFLECTIVE FUNCTIONAL COATING FOR GLAZING
US11422294B2 (en) 2017-10-10 2022-08-23 Central Glass Company, Limited Durable functional coatings
EP3729186A4 (en) * 2017-12-21 2021-07-14 Macinnis, Brent EYEWEAR ARTICLES AND METHODS FOR MANUFACTURING EYEWEAR ARTICLES
US12038592B2 (en) 2018-01-05 2024-07-16 3M Innovative Properties Company Stray light absorbing film
CN112334549A (zh) * 2018-06-20 2021-02-05 美国圣戈班性能塑料公司 具有抗反射涂层的复合膜
EP3924770A4 (en) 2019-02-14 2022-04-27 Central Glass Co., Ltd. VEHICLE WINDSHIELD INTENDED FOR USE WITH A HEAD-UP DISPLAY SYSTEM
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DE102023111441A1 (de) * 2023-05-03 2024-11-07 Gesellschaft für angewandte Mikro- und Optoelektronik mit beschränkter Haftung - AMO GmbH Verfahren zur Herstellung eines strukturierten Bauteils, sowie strukturiertes Bauteil

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Also Published As

Publication number Publication date
US10126469B2 (en) 2018-11-13
US20170221680A1 (en) 2017-08-03
KR20140139074A (ko) 2014-12-04
KR102047392B1 (ko) 2019-11-21
SG11201406122WA (en) 2014-10-30
WO2013148031A1 (en) 2013-10-03
JP2015514231A (ja) 2015-05-18
JP6339557B2 (ja) 2018-06-06
US9651715B2 (en) 2017-05-16
EP2831648A1 (en) 2015-02-04
JP2018028693A (ja) 2018-02-22
US20150077854A1 (en) 2015-03-19
JP6685987B2 (ja) 2020-04-22
EP2831648B1 (en) 2016-09-14
CN104335078A (zh) 2015-02-04

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Granted publication date: 20170808