JP6337962B2 - Heat treatment jig - Google Patents

Description

  The present invention relates to a jig for heat treatment.

  An inert atmosphere continuous furnace for heat-treating an object by a tray pusher method is described in Japanese Patent Application Laid-Open No. 2004-132673 (Patent Document 1). In this furnace, a graphite tray slides on a graphite hearth. Guide means having a groove is provided on the hearth. The tray used here is a square graphite plate having a thickness of 7 mm and a side of 120 mm. An object to be heat-treated is loaded on each tray, and a plurality of trays are continuously sent into the furnace.

JP 2004-132673 A

  As described in Patent Document 1, when a large number of objects are placed on one graphite tray and transported inside the continuous furnace, the surface of the tray is flat, so that the objects are horizontally aligned during transport. There is a risk of cracking and chipping due to movement of objects. In addition, since the position of the object on the surface of the tray is not fixed, when performing heat treatment with a large number of objects placed on one tray, the object is irregularly positioned on the tray, and depending on the part on the tray There is a possibility that a difference in density of the object may occur, resulting in temperature variations.

  Therefore, the present invention prevents cracking and chipping due to collisions between objects even when a large number of objects are placed on one member and performs heat treatment as much as possible, and also reduces temperature variations due to differences in density of the objects. An object of the present invention is to provide a jig for heat treatment that can be used.

  In order to achieve the above object, a heat treatment jig according to the present invention includes a placement member made of a graphite sheet for placing an object to be heat treated, and the main surface of the placement member has a recess.

  According to the present invention, even when a large number of objects are placed on one member and subjected to heat treatment, cracks and chipping due to collision between objects can be prevented as much as possible, and temperature variations due to density differences can be reduced. .

It is an exploded view of the jig for heat treatment in Embodiment 1 based on the present invention. It is the elements on larger scale of the mounting member contained in the jig for heat treatment in Embodiment 1 based on the present invention. It is arrow sectional drawing regarding the III-III line in FIG. It is a partial expanded sectional view of the state which mounted the target object on the jig for heat processing in Embodiment 1 based on this invention. It is a partial expanded sectional view of the mounting member contained in the jig for heat treatment in Embodiment 2 based on the present invention. It is a partial expanded sectional view of the mounting member contained in the modification of the jig for heat treatment in Embodiment 2 based on the present invention. It is a partial expanded sectional view of the frame part vicinity of the 1st example of the jig for heat processing in Embodiment 1, 2 based on this invention. It is the 1st partial expanded sectional view near the frame part of the 2nd example of the jig for heat treatment in Embodiments 1 and 2 based on the present invention. It is the 2nd partial expanded sectional view near the frame part of the 2nd example of the jig for heat treatment in Embodiments 1 and 2 based on the present invention. It is an exploded view of the jig for heat treatment in Embodiment 3 based on the present invention. It is the elements on larger scale of the mounting member contained in the jig for heat processing in Embodiment 3 based on this invention. It is arrow sectional drawing regarding the XII-XII line | wire in FIG. It is a partial expanded sectional view of the state which mounted the target object on the jig for heat processing in Embodiment 3 based on this invention. It is a perspective view of the jig for heat treatment in Embodiment 4 based on the present invention. It is a side view of the mounting member contained in the jig for heat treatment in Embodiment 4 based on the present invention. It is a top view of the jig for heat treatment in Embodiment 4 based on the present invention. It is the elements on larger scale of the Z section in FIG. It is a partial expanded sectional view of the modification of the jig for heat treatment in Embodiment 4 based on the present invention.

(Embodiment 1)
With reference to FIGS. 1-3, the jig | tool for heat processing in Embodiment 1 based on this invention is demonstrated.

  An exploded view of the heat treatment jig 101 in the present embodiment is shown in FIG. The heat treatment jig 101 includes a frame portion 1 and a mounting member 3. The placing member 3 is supported by the frame portion 1. The frame part 1 includes a lower frame part 2 and an upper frame part 4. The lower frame portion 2 and the upper frame portion 4 are fixed to each other by a known technique (not shown). The peripheral edge portion of the mounting member 3 is sandwiched between the lower frame portion 2 and the upper frame portion 4. The mounting member 3 is formed using a graphite sheet. The mounting member 3 is not a flat graphite sheet over the entire main surface, but a recess formed on the main surface of the graphite sheet.

  In other words, the heat treatment jig 101 includes the placing member 3 made of a graphite sheet for placing an object to be heat treated, and the main surface of the placing member 3 has a recess.

  The thickness of the graphite sheet constituting the mounting member 3 is, for example, about 0.05 mm to 0.1 mm. As a material of the mounting member 3, for example, a commercially available graphite sheet having a thickness of 50 μm, 70 μm, 100 μm, or the like can be used. The material of the frame 1 may be, for example, carbon, ceramic, or refractory metal. Examples of the refractory metal herein include inconel and nickel.

  In the example shown in FIG. 1, the lower frame portion 2 has a thickness of 5 mm, the mounting member 3 has a thickness of 0.05 mm, and the upper frame portion 4 has a thickness of 1.3 mm. In the example shown in FIG. 1, the outer shape of the frame portion 1 when viewed in plan is a square having a side of 150 mm. The width of the frame 1 when viewed in a plane is 5 mm. However, the dimensions given here are merely examples.

  The recess formed on the main surface of the graphite sheet as the mounting member 3 is preferably large enough to be caught by the object to be heat-treated. Even if the mounting member 3 is slightly tilted in a state where the target object is placed on the mounting member 3, it is expected that the target object will be caught and stayed. In particular, when what is formed on the main surface of the mounting member is a recess, it is preferably a recess having a size larger than the object to be heat-treated. Although it is preferred that the recess is large enough to accommodate a single object, such size is not essential. The recess may be large enough to accommodate a part of one object.

  FIG. 2 shows a partially enlarged view of the mounting member 3 in FIG. The recesses 5 are arranged in a matrix on the main surface of the mounting member 3. FIG. 3 shows a cross-sectional view taken along the line III-III in FIG.

  According to the jig for heat treatment in the present embodiment, it is possible to reduce the probability that an object being transferred or heat-treated is undesirably shifted. Therefore, even when a large number of objects are placed on a single heat treatment jig, cracking and chipping due to collisions between the objects are prevented as much as possible, and temperature variations due to differences in density of the objects are also reduced. Can do. In addition, the movement of the object on the mounting member while being displaced can also accelerate the wear deterioration of the mounting member, but the service life of the mounting member is extended by reducing such movement. You can also

  In the jig for heat treatment in the present embodiment, since the surface area of the mounting member is increased by providing the recess on the main surface of the mounting member, the heating efficiency due to the increase in the heat receiving area of the mounting member is increased. As a result of the improvement, the heating rate can be increased. Further, since the surface area is increased, the temperature variation due to the site in one placement member can be improved.

  In addition, as shown in this Embodiment, it is preferable that the concave surface where each became independent is formed in the main surface of the mounting member 3 as a recessed part. In FIG. 3, the recessed part 5 is shown as an example of the recessed part which satisfy | fills this condition. The recess 5 has a concave curved surface 31. By adopting this configuration, the object can be dispersed and held. In particular, it is preferable that the concave curved surfaces are regularly arranged at regular intervals. Because of such a configuration, by holding the object on the curved surface, a large number of objects can be dispersed and held at regular intervals for each concave curved surface as shown in FIG. Because. FIG. 4 shows a state in which a large number of objects 10 are placed on the mounting member 3 and heat-treated. FIG. 4 shows a case where a large number of the objects 10 are placed on the upper surface of the mounting member 3 and slightly swung on the mounting member 3 even if the positions of the objects 10 are not precisely specified one by one. Thus, the object 10 is naturally dispersed appropriately and fits in the recess 5. The number of objects 10 that can be accommodated in one recess 5 is not limited to one, and a plurality of objects 10 may be simultaneously accommodated in one recess 5. Thus, since the target object 10 can be dispersed and held in an appropriate amount, good heat treatment can be performed.

  The recess 5 shown in FIGS. 2 and 3 is also called “dimple”. In this case, the curved surface 31 of the recess 5 may be a part of a spherical surface. The process of forming such a recess in a sheet-like material is also called “dimple process”. Dimple processing can also be performed on a graphite sheet. The mounting member 3 can be obtained by performing dimple processing on the graphite sheet in advance.

  The recesses 5 shown in FIGS. 2 and 3 are arranged in a matrix, but may be arranged so as to be shifted by a half pitch between adjacent columns. The positions of the recesses 5 when viewed in a plan view may follow other arrangement patterns.

  A portion of the main surface that separates the curved surfaces is preferably flat. In the example shown in FIG. 3, this condition is satisfied. That is, in FIG. 3, a portion that separates the curved surfaces 31 of the mounting member 3 is a flat surface 32. If this is the case, the object 10 placed on the flat surface 32 is easily slid sideways, so that even when there is an object 10 that has not yet entered the recess 5 on the mounting member 3, the object 10 is slightly shaken. As a result, the object 10 is guided to one of the recesses 5.

  The presence of the frame 1 shown here is not essential for the heat treatment jig according to the present invention. However, it is preferable that the mounting member has a rectangular shape in plan view, and the heat treatment jig includes a frame portion that supports the mounting member so as to surround the four sides of the mounting member. If the frame portion is provided, the mounting member can stably maintain the posture, and the heat treatment jig can be easily handled. The same applies to the following embodiments.

  In the case where the heat treatment jig is provided with the frame part 1, it is not essential that the frame part 1 is divided into upper and lower parts. However, the frame portion 1 includes a lower frame portion 2 and an upper frame portion 4, and the frame portion 1 supports the mounting member 3 by sandwiching the mounting member 3 between the lower frame portion 2 and the upper frame portion 4. It is preferable. This is because the placement member 3 can be reliably held by adopting this configuration.

  Moreover, it is good also as what can replace | exchange only the mounting member 3 by isolate | separating the lower frame part 2 and the upper frame part 4 as needed. In this case, the same frame portion 1 can be used after the mounting member 3 is replaced.

(Embodiment 2)
In the first embodiment, each concave portion 5 has a concave curved surface 31, but each concave portion 5 may be cylindrical as in the mounting member 3 i shown in FIG. 5. The jig for heat treatment in Embodiment 2 based on this invention is equipped with such a mounting member 3i. Other configurations are the same as those shown in the first embodiment.

Also in the present embodiment, the same effect as in the first embodiment can be obtained.
Alternatively, as another modified example, like the mounting member 3j shown in FIG. 6, the concave member 5 having a shape in which the truncated cone is turned upside down may be provided. The shape of the recess 5 is not limited to these and may be any other shape.

(Fixing the mounting member by the frame)
In both of the first and second embodiments, the frame portion 1 has a configuration in which the mounting member is sandwiched and fixed between the lower frame portion 2 and the upper frame portion 4, but in this case, for example, FIG. As shown. In the example shown in FIG. 7, the lower frame portion 2 and the upper frame portion 4 press the mounting member 3 completely without a gap, but as shown in FIG. 8, the lower frame portion 2 and the upper frame portion 4 The structure which has pinched | interposed the mounting member 3 so that may have a clearance gap may be sufficient. That is, the lower frame portion 2 and the upper frame portion 4 sandwich the mounting member 3 while being separated from each other. Such a configuration can be realized by using a stepped screw 6 as shown in FIG. FIG. 9 is a cross-sectional view of different parts of the heat treatment jig shown in FIG. 8 as seen from different directions, and the mounting member 3 has a through hole or a notch at a position corresponding to the stepped screw 6. ing. As shown in FIGS. 8 and 9, if the lower frame portion 2 and the upper frame portion 4 sandwich the mounting member 3 while being separated from each other, the mounting member 3 is completely removed by the frame portion 1. Since it is not restrained and a slight displacement is possible, when the temperature is changed by using the heat treatment jig, the mounting member 3 can smoothly expand or contract. As a result, it is possible to avoid an excessive load or damage to the mounting member 3 and the frame 1 during use.

(Embodiment 3)
With reference to FIGS. 10-12, the heat processing jig | tool in Embodiment 3 based on this invention is demonstrated.

  An exploded view of the heat treatment jig 102 in the present embodiment is shown in FIG. The heat treatment jig 102 includes a frame portion 1 and a placement member 3k. The placement member 3k is supported by the frame portion 1. The details of the frame 1 are the same as those described in the first embodiment. FIG. 11 shows a partially enlarged plan view of the mounting member 3k shown in FIG. FIG. 12 shows a cross-sectional view taken along the line XII-XII in FIG. The mounting member 3k is formed using a graphite sheet and is basically the same as that described in the first embodiment, but the mounting member 3k has a linear valley instead of dimples. Part 7 is formed. A recess 5 is realized by the linear valley 7.

  In the heat treatment jig 102 according to the present embodiment, a plurality of each extending in the first direction 41 and the second direction 42 are formed on the main surface of the mounting member 3k as recesses so as to intersect each other. A linear valley portion 7 is formed.

In the present embodiment, the linear valley portions 7 are arranged in a lattice shape when seen in a plan view.
According to the jig 102 for heat treatment in the present embodiment, when a large number of objects 10 are placed on the mounting member 3 and heat treated, the recess 5 formed by the linear valley 7 as shown in FIG. In addition, the object 10 is dispersed and accommodated moderately. Since the object 10 can be dispersed and held little by little, good heat treatment can be performed. Thus, also in the present embodiment, the same effect as in the first and second embodiments can be obtained.

  Here, the first direction 41 and the second direction 42 have been described as being perpendicular to each other, but they are not necessarily perpendicular to each other. The angle formed by the first direction 41 and the second direction 42 is not limited to 90 °, and may be an acute angle. Either one of the first direction 41 and the second direction 42 need not be parallel to the side of the frame portion 1.

  In addition, it is preferable that the recessed part of the main surface of a mounting member is formed by embossing. This is because the embossing can easily form concave portions having a desired arrangement over a wide area. In the present embodiment, description has been made assuming that the linear valleys are formed by embossing, but the shape formed by embossing is not limited thereto. As long as it is a shape that can hold and hold the object on each part, it may have an uneven shape with another pattern.

(Embodiment 4)
With reference to FIGS. 14-18, the heat processing jig | tool in Embodiment 4 based on this invention is demonstrated.

  FIG. 14 is a perspective view of the heat treatment jig 103 in the present embodiment. The heat treatment jig 103 includes a frame portion 1 and a placement member 3w. The placement member 3 w is supported by the frame portion 1. The details of the frame 1 are the same as those described in the first embodiment. A side view of the placement member 3w taken out alone is shown in FIG. A plan view of the heat treatment jig 103 is shown in FIG. FIG. 17 shows a perspective view when the portion Z in FIG. 16 is cut out and taken out.

  In the heat treatment jig 103, the mounting member 3w has a corrugated shape in which the graphite sheet has a shape in which a mountain fold and a valley fold are alternately repeated when viewed from the side. 3w has a rectangular shape in plan view, and the heat treatment jig 103 includes a frame portion 1 that supports the mounting member 3w so as to surround four sides of the mounting member 3w.

  As shown in FIGS. 16 and 17, in the two sides 35 extending in the direction parallel to the wavy line of the outer periphery of the mounting member 3 w, the end of the mounting member 3 w is the lower frame portion 2. And the upper frame portion 4 to be fixed. Of the outer periphery of the mounting member 3w, the two sides 36 extending in the direction perpendicular to the corrugated polygonal line have a structure in which the lower frame portion 2 protrudes inward from the upper frame portion 4. The end portion of the mounting member 3w is placed on the protruding portion of the lower frame portion 2. In this example, the mounting member 3w has a structure sandwiched by the frame portion 1 only on two sides facing each other out of the four sides, but such a support method may be used. However, this is an example of a structure that supports the wave-shaped mounting member 3w, and is not limited to such a structure. For example, as shown in a sectional view in FIG. 18, corrugated irregularities are formed on the upper surface of the lower frame portion 2 and the lower surface of the upper frame portion 4, respectively, and the corrugated mounting member 3 w is sandwiched between them. Also good.

  In the present embodiment, the corrugated valley fold portion of the mounting member 3w corresponds to a recess formed in the main surface of the mounting member 3w, and the object is contained in the recess during heat treatment. It will stay.

  Also in the present embodiment, since the object can be held by the valleys formed over the entire mounting member 3w, the object 10 is subjected to heat treatment by placing a large number of objects 10 on the mounting member 3. Can be appropriately dispersed and held, and good heat treatment can be performed. Thus, also in this embodiment, the same effects as those of the previous embodiments can be obtained.

  In addition, although the kind of target object which should be heat-processed is not specifically limited, a target object may be an electronic component, for example, and may be a chip-shaped electronic component especially. As the electronic component here, a minute one is mainly assumed, and a chip-shaped electronic component having a dimension of several mm or 1 mm or less on one side can be assumed.

  In addition, the said embodiment disclosed this time is an illustration in all the points, Comprising: It is not restrictive. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

  DESCRIPTION OF SYMBOLS 1 Frame part, 2 Lower frame part, 3,3i, 3j, 3k, 3w Mounting member, 4 Upper frame part, 5 Recessed part, 6 Stepped screw, 7 Linear trough part, 10 Object, 31 Curved surface, 32 Flat surface, 35, 36 sides, 41 First direction, 42 Second direction, 101, 102, 103 Heat treatment jig.

Claims (9)

It has a main surface for placing an object to be heat-treated, and includes a placing member made of a graphite sheet,
The heat treatment jig, wherein the main surface has a recess having a size capable of accommodating at least one object.   The heat treatment jig according to claim 1, wherein each of the main surfaces is formed with a concave curved surface that is independent of each other as the concave portion.   The heat treatment jig according to claim 2, wherein a portion of the main surface that separates the curved surfaces is flat.   2. The heat treatment according to claim 1, wherein a plurality of linear valleys each extending in the first direction and the second direction are formed on the main surface as the recesses so as to intersect each other. jig.   The heat treatment jig according to claim 1, wherein the concave portion of the main surface is formed by embossing.   6. The mounting member according to claim 1, wherein the mounting member has a rectangular shape when viewed in plan, and the heat treatment jig includes a frame portion that supports the mounting member so as to surround four sides of the mounting member. The jig for heat treatment according to any one of the above. The mounting member is a corrugated shape in which the graphite sheet has a shape in which a mountain fold and a valley fold are alternately repeated when viewed from the side,
The mounting member according to claim 1, wherein the mounting member has a rectangular shape when seen in a plan view, and the heat treatment jig includes a frame portion that supports the mounting member so as to surround four sides of the mounting member. Heat treatment jig.   The frame portion includes a lower frame portion and an upper frame portion, and the frame portion supports the mounting member by sandwiching the mounting member by the lower frame portion and the upper frame portion. The jig for heat treatment according to claim 6 or 7.   The heat treatment jig according to claim 8, wherein the lower frame portion and the upper frame portion sandwich the mounting member while being spaced apart from each other.

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