JP5067554B2 - Jig for heat treatment of chip-shaped electronic components - Google Patents

Jig for heat treatment of chip-shaped electronic components Download PDF

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JP5067554B2
JP5067554B2 JP2007330601A JP2007330601A JP5067554B2 JP 5067554 B2 JP5067554 B2 JP 5067554B2 JP 2007330601 A JP2007330601 A JP 2007330601A JP 2007330601 A JP2007330601 A JP 2007330601A JP 5067554 B2 JP5067554 B2 JP 5067554B2
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JP2009152476A (en
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泰弥 伊藤
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TDK Corp
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Description

本発明は、チップ状電子部品の熱処理に用いられる熱処理用冶具に関する。   The present invention relates to a heat treatment jig used for heat treatment of a chip-shaped electronic component.

例えば、チップ状セラミックコンデンサなどの内部電極を有するチップ状電子部品は、内部電極と導通する端子電極(外部電極)を、基体の両端部に設ける必要がある。端子電極の形成にあたっては、まず、Cuなどの導電性粉体と、有機バインダと、溶剤とを混合した電極ペーストをセラミック基体に塗布し、焼付処理を行って、下地電極膜を形成する。この焼付処理において、有機バインダ及び溶剤などの有機成分が揮発して発散し、セラミック基体には、Cuを主成分とする下地電極膜が形成される。   For example, in a chip-shaped electronic component having an internal electrode such as a chip-shaped ceramic capacitor, it is necessary to provide terminal electrodes (external electrodes) that are electrically connected to the internal electrode at both ends of the substrate. In forming the terminal electrode, first, an electrode paste in which a conductive powder such as Cu, an organic binder, and a solvent are mixed is applied to a ceramic substrate, and a baking process is performed to form a base electrode film. In this baking treatment, organic components such as an organic binder and a solvent are volatilized and emitted, and a base electrode film containing Cu as a main component is formed on the ceramic substrate.

次に、電気めっき処理を行い、下地電極膜の上に、Niめっき膜及びSnめっき膜を形成する。これにより、端子電極が完成する。   Next, electroplating is performed to form a Ni plating film and a Sn plating film on the base electrode film. Thereby, a terminal electrode is completed.

従来、下地電極膜の焼き付けに当たっては、電極ペーストの塗布されたチップ状電子部品を、ステンレス鋼線でなるメッシュで作製された冶具にランダムにばら積みし、この冶具をステンレス鋼線でなる枠に載置して、メッシュベルトに載せ、トンネル焼成炉を通過させていた。   Conventionally, when baking a base electrode film, chip-like electronic components coated with electrode paste are randomly stacked on a jig made of a stainless steel wire mesh, and the jig is mounted on a stainless steel wire frame. Placed on a mesh belt and passed through a tunnel firing furnace.

この場合に用いられる冶具としては、一般的に、特許文献1にあるように、金属フレームに金属製網体を張る構造のものが用いられていた。   As a jig used in this case, as described in Patent Document 1, generally, a jig having a structure in which a metal net is stretched on a metal frame has been used.

しかし、金属フレームに金属製網体を張る構造では、充分な機械的強度を確保することができず、繰り返し使用すると、金属製網体の底部が撓んだり、変形したりし、チップ状電子部品に付着を生じてしまう虞がある。   However, with a structure in which a metal net is stretched on a metal frame, sufficient mechanical strength cannot be ensured, and if used repeatedly, the bottom of the metal net will be bent or deformed, and chip-like electronic There is a risk of adhesion to parts.

機械的強度向上のために、金属製網体を二重に張る構造のものも知られているが、この場合には、強度的には満足するものの、揮発するガスの抜けが悪く、雰囲気制御できない場合や、還元される場合などがあり、電子部品の特性に悪影響を与える虞がある。   In order to improve the mechanical strength, a structure in which a metal net is doubled is also known. In this case, although the strength is satisfactory, the escape of volatile gas is poor and the atmosphere is controlled. There are cases where it cannot be performed or reduced, which may adversely affect the characteristics of the electronic component.

機械的強度向上の手段として、特許文献2に開示されているように、熱処理用治具のメッシュの底部に、金属フレームを配置する構造のものも知られている。さらには、金属フレームとメッシュをスポット溶接等により溶接して固定するものも存在する。   As a means for improving mechanical strength, as disclosed in Patent Document 2, a structure in which a metal frame is arranged at the bottom of a mesh of a heat treatment jig is also known. In addition, there are some which fix the metal frame and the mesh by welding by spot welding or the like.

しかし、金属フレームとメッシュをスポット溶接等により溶接して固定する場合には、溶接部において、部品の付着やガスの抜けができない等の問題があり、やはり、電子部品の特性劣化を招きかねない。   However, when the metal frame and the mesh are fixed by spot welding or the like, there is a problem that the parts cannot be attached and the gas cannot escape from the welded part, which may cause deterioration of the characteristics of the electronic parts. .

特に、チップ状電子部品の外形形状は、近年、極限まで小型化、薄型化されており、メッシュの孔径もそれに対応して、著しく小さくなっており、ガスが抜けにくいから、ガス抜け対策は、電子部品の特性維持のために、極めて重要な事項である。
特開2000−169243 特開2005−19698
In particular, the outer shape of the chip-shaped electronic component has recently been reduced in size and thickness to the limit, and the mesh pore diameter is correspondingly significantly reduced, making it difficult for gas to escape. This is an extremely important matter for maintaining the characteristics of electronic components.
JP 2000-169243 A JP-A-2005-19698

本発明の課題は、軽量で、ガス抜けが良く、かつ、満足し得る機械的強度を確保し得る熱処理用治具を提供することである。   An object of the present invention is to provide a heat treatment jig that is lightweight, has good gas escape, and can ensure satisfactory mechanical strength.

上述した課題を解決するため、本発明に係る熱処理用冶具は、チップ状電子部品の熱処理に用いられるものであって、チップ状電子部品を積載する受け部材を含む。前記受け部材は、多数の貫通孔を開口させた積載面を有する。前記積載面は、山折及び谷折の繰返しによる凹凸面である。   In order to solve the above-described problems, a jig for heat treatment according to the present invention is used for heat treatment of a chip-shaped electronic component, and includes a receiving member on which the chip-shaped electronic component is loaded. The receiving member has a stacking surface having a large number of through holes. The loading surface is an uneven surface due to repeated mountain and valley folds.

本発明に係る熱処理用冶具は、Cuなどの導電性粉体と、有機バインダと、溶剤とを混合した電極ペーストをセラミック基体に塗布して、下地電極膜を形成したチップ状電子部品において、下地電極膜の焼付処理を行うプロセスにおいて用いられる。   The heat treatment jig according to the present invention is a chip-like electronic component in which a base electrode film is formed by applying an electrode paste mixed with conductive powder such as Cu, an organic binder, and a solvent to a ceramic base. It is used in a process for baking an electrode film.

焼付処理において、焼付未処理の下地電極膜を有するチップ状電子部品を、本発明に係る熱処理用冶具に、ランダムにばら積みする。そして、この熱処理用冶具を、ステンレス鋼線でなる枠に載置して、メッシュベルトに載せトンネル焼成炉を通過させる。熱処理用冶具が、トンネル焼成炉を通過する間に、セラミック基体に塗布された下地電極膜中の有機バインダ及び溶剤が揮発して発散し、セラミック基体に、Cuを主成分とする下地電極膜が形成される。   In the baking process, chip-shaped electronic components having an unbaked base electrode film are randomly stacked on the heat treatment jig according to the present invention. And this jig for heat processing is mounted in the frame which consists of a stainless steel wire, and it puts on a mesh belt and passes a tunnel baking furnace. While the jig for heat treatment passes through the tunnel firing furnace, the organic binder and solvent in the base electrode film applied to the ceramic base are volatilized and emitted, and the base electrode film mainly composed of Cu is formed on the ceramic base. It is formed.

ここで、本発明に係る熱処理用冶具を構成する受け部材は、多数の貫通孔を開口させた積載面を有しているから、この積載面に、下地電極膜を形成したチップ状電子部品を、ランダムにばら積み収容することができる。   Here, since the receiving member constituting the heat treatment jig according to the present invention has a loading surface having a large number of through holes, a chip-shaped electronic component having a base electrode film formed on the loading surface is provided. Can be accommodated in bulk, randomly.

チップ状電子部品がばら積みされる積載面は、山折及び谷折の繰返しによる凹凸面であるから、山折及び谷折の繰返しによる機械的強度補強効果が得られる。このため、受け部材を薄型化し、熱処理用冶具全体としての重量を軽量化することができる。   Since the loading surface on which the chip-shaped electronic components are stacked is an uneven surface due to repeated mountain and valley folds, a mechanical strength reinforcing effect can be obtained due to repeated mountain and valley folds. For this reason, a receiving member can be thinned and the weight as the whole jig for heat processing can be reduced in weight.

しかも、山折及び谷折の繰返しによる機械的強度補強効果が得られるから、金属製網体を二重に張る構造、メッシュの底部に金属フレームを配置する構造、さらには、金属フレームとメッシュをスポット溶接等により溶接して固定する構造などを採用する必要がない。このため、従来問題となっていたガス抜け障害がなくなり、ガス抜けが促進される結果、特性の安定したチップ状電子部品を得ることができる。   In addition, the effect of reinforcing the mechanical strength due to repeated mountain and valley folds is obtained, so a structure in which a metal mesh body is stretched double, a structure in which a metal frame is placed at the bottom of the mesh, and a metal frame and mesh are spotted. There is no need to employ a structure that is fixed by welding. For this reason, the problem of outgassing, which has been a problem in the past, is eliminated, and outgassing is promoted, so that a chip-shaped electronic component with stable characteristics can be obtained.

さらに、積載面は、山折及び谷折の繰返しによる凹凸面であるから、積載面の表面積が拡大される。このため、積載面にばら積みされるチップ状電子部品の量を一定化した条件下では、積載面におけるチップ状電子部品の積載密度が低下し、熱処理工程において、電極ペースト中から有機バインダ及び溶剤が揮発して発散する作用(ガス抜け)が促進される。   Furthermore, since the loading surface is an uneven surface due to repeated mountain and valley folding, the surface area of the loading surface is increased. For this reason, under the condition that the amount of chip-shaped electronic components stacked on the loading surface is constant, the loading density of the chip-shaped electronic components on the loading surface is reduced, and in the heat treatment process, the organic binder and solvent are removed from the electrode paste. The action of volatilizing and escaping (outgassing) is promoted.

また、積載面は、山折及び谷折の繰返しによる凹凸面であるから、凹凸面が、積載面の上方又は下方から供給される雰囲気ガスに対して、その流れ方向を多様化し、攪拌する作用をもたらす。このため、ガス抜けが更に促進される。   In addition, since the loading surface is an uneven surface due to repeated mountain and valley folding, the uneven surface acts to diversify and agitate the flow direction of the atmospheric gas supplied from above or below the loading surface. Bring. For this reason, the outgassing is further promoted.

受け部材は金属経線と金属緯線とを織り込んだ網状体で構成することもできるし、多数の貫通孔を高密度で設けた多孔薄板を用いて構成することもできる。   The receiving member can be constituted by a net-like body in which metal meridians and metal latitudes are woven, or can be constituted by using a porous thin plate provided with a large number of through holes at high density.

また、積載面は、山折の両側に谷折を有する断面山形状であってもよいし、断面鋸歯状であってもよい。断面山形状、断面鋸歯状の何れの場合も、上述した作用効果を奏する。特に、断面鋸歯状の場合は、ほぼ垂直に立ち上がる部分があるので、この部分の上部を、チップ状電子部品によっては埋められない開口領域として利用し、上方及び下方から供給される雰囲気ガスの両者を通過させ、それによって雰囲気ガスの衝突、乱流、攪拌を生じさせることにより、ガス抜け作用を更に促進することができる。   Further, the loading surface may have a cross-sectional mountain shape having valley folds on both sides of the mountain fold, or may have a cross-sectional sawtooth shape. In both cases of the cross-sectional mountain shape and the cross-sectional sawtooth shape, the above-described operational effects are exhibited. In particular, in the case of a sawtooth cross section, there is a portion that rises substantially vertically, so the upper part of this portion is used as an opening region that is not filled with chip-shaped electronic components, and both atmospheric gases supplied from above and below are used. , And thereby causing atmospheric gas collision, turbulent flow, and agitation, can further promote the outgassing action.

以上述べたように、本発明によれば、軽量で、ガス抜けが良く、かつ、機械的強度も満たしえる熱処理用治具を提供することができる。   As described above, according to the present invention, it is possible to provide a heat treatment jig that is lightweight, has good gas release, and can satisfy mechanical strength.

本発明の他の目的、構成及び利点については、添付図面を参照し、更に詳しく説明する。但し、添付図面は、単なる例示に過ぎない。   Other objects, configurations and advantages of the present invention will be described in more detail with reference to the accompanying drawings. However, the attached drawings are merely examples.

図1は本発明に係る熱処理用冶具の一実施の形態を示す斜視図、図2は図1の2‐2線拡大断面図である。図示された熱処理用冶具は、チップ状セラミックコンデンサやチップ状インダクタなど、チップ状電子部品の熱処理に用いられるもので、支持部材1と、受け部材2とを含む。   FIG. 1 is a perspective view showing an embodiment of a heat treatment jig according to the present invention, and FIG. 2 is an enlarged sectional view taken along line 2-2 of FIG. The illustrated heat treatment jig is used for heat treatment of chip-shaped electronic components such as a chip-shaped ceramic capacitor and a chip-shaped inductor, and includes a support member 1 and a receiving member 2.

支持部材1は、四角形の外枠を構成している。支持部材1の材質としては、下地電極膜焼付を700℃〜900℃の温度範囲にて行うことを前提にした場合、この温度範囲で安定性のある材料、例えばSUS304(Fe-18Cr-Ni)、MN(63Ni−30Cu)、Ha(Ni-Cr-Mo)及びチタン等が好適である。   The support member 1 constitutes a rectangular outer frame. As a material of the support member 1, when it is assumed that the base electrode film is baked in a temperature range of 700 ° C. to 900 ° C., a material that is stable in this temperature range, for example, SUS304 (Fe-18Cr-Ni) , MN (63Ni-30Cu), Ha (Ni-Cr-Mo), titanium and the like are preferable.

受け部材2は、支持部材1の内側に配置され、その周辺が支持部材1に固定され、支持されている。受け部材2も、支持部材1と同様の金属材料によって構成することができる。この受け部材2は、多数の貫通孔を開口させた積載面20を有する。積載面20は、山折P及び谷折Vの繰返しによる凹凸面である。   The receiving member 2 is disposed inside the support member 1, and its periphery is fixed to and supported by the support member 1. The receiving member 2 can also be made of the same metal material as the supporting member 1. The receiving member 2 has a stacking surface 20 having a large number of through holes. The loading surface 20 is a concavo-convex surface formed by repeated mountain folds P and valley folds V.

受け部材2は、図3に図示するように、基体21に多数の貫通孔22を高密度で設けた多孔薄板を用いて構成することもできるし、図4に図示するように、金属経線24と金属緯線23とを織り込んだ網状体で構成することもできる。図3に示した多孔薄板及び図4に示した網状体に折り曲げ加工を施すことにより、図1及び図2に示した受け部材2を得ることができる。   As shown in FIG. 3, the receiving member 2 can be configured by using a porous thin plate in which a large number of through holes 22 are provided in the base 21 at a high density, and as shown in FIG. It is also possible to form a net-like body woven with metal latitude lines 23. The receiving member 2 shown in FIGS. 1 and 2 can be obtained by bending the porous thin plate shown in FIG. 3 and the net-like body shown in FIG.

貫通孔22(図3)や、網状体(図4)の「目」の大きさ及び分布密度は、チップ状電子部品が抜け出ることがなく、しかも、チップ状電子部品を均一に、かつ、効率よく加熱できるように設定される。この種のチップ状電子部品には、例えば、長さ0.6mm、幅0.3mmのいわゆる「0603」タイプなどのように、小型化、薄型化が著しく進展したものも見られる。このようなチップ状電子部品にも対応でき、しかも、ガス抜きが効率的に行われるよう、貫通孔22の孔径及び分布密度が設定される。   The size and distribution density of the “eyes” of the through holes 22 (FIG. 3) and the net-like body (FIG. 4) prevents the chip-like electronic components from coming out, and makes the chip-like electronic components uniform and efficient. It is set so that it can be heated well. In this type of chip-shaped electronic component, for example, a so-called “0603” type having a length of 0.6 mm and a width of 0.3 mm has been remarkably advanced in size and thickness. The hole diameter and distribution density of the through-holes 22 are set so that such chip-shaped electronic components can be handled and the gas is efficiently vented.

図5は、本発明に係る熱処理用冶具に積載されるチップ状電子部品を示している。チップ状電子部品3は、焼付け前の状態にあり、未焼成の下地電極膜31、32が付与されている。下地電極膜31、32は、例えば、Cu等の金属粉を主成分とする導電成分と、有機バインダとを含み、これらを混合してペースト状に調整したものを、セラミック基体30に塗布し、乾燥させることによって得られる。   FIG. 5 shows chip-shaped electronic components loaded on the heat treatment jig according to the present invention. The chip-shaped electronic component 3 is in a state before baking, and is provided with unfired base electrode films 31 and 32. The base electrode films 31 and 32 include, for example, a conductive component mainly composed of a metal powder such as Cu, and an organic binder. Obtained by drying.

チップ状電子部品3が、例えばチップ状セラミックコンデンサであれば、下地電極膜31、32は、セラミック基体30の長手方向の両端に塗布される。セラミック基体30の内部には多数の内部電極膜33が埋設されており、隣接する2つの内部電極33、33の相反する一端が、下地電極膜31、32のそれぞれに接続されている。他のタイプのチップ状電子部品では、端子電極がセラミック基体の3辺又は4辺に設けられることもある。このようなタイプの場合は、端子電極の形成位置に対応して下地電極膜が形成される。   If the chip-shaped electronic component 3 is, for example, a chip-shaped ceramic capacitor, the base electrode films 31 and 32 are applied to both ends of the ceramic substrate 30 in the longitudinal direction. A large number of internal electrode films 33 are embedded in the ceramic substrate 30, and opposite ends of two adjacent internal electrodes 33 and 33 are connected to the base electrode films 31 and 32, respectively. In other types of chip-shaped electronic components, terminal electrodes may be provided on three or four sides of the ceramic substrate. In the case of such a type, the base electrode film is formed corresponding to the position where the terminal electrode is formed.

本発明に係る熱処理用冶具は、図5に図示するように、下地電極膜31、32を塗布・乾燥したチップ状電子部品について、未焼成の下地電極膜31、32の焼付処理を行うプロセスにおいて用いられる。   As shown in FIG. 5, the heat treatment jig according to the present invention is a process in which a non-fired base electrode film 31, 32 is baked on a chip-shaped electronic component coated and dried with the base electrode film 31, 32. Used.

この焼付処理において、図6に図示するように、多数のチップ状電子部品群3を、熱処理用冶具にランダムにばら積み収容する。そして、この熱処理用冶具をステンレス鋼線でなる枠に載置して、メッシュベルトに載せ、トンネル焼成炉を通過させる。熱処理用冶具が、トンネル焼成炉を通過する間に、未焼成の下地電極膜31、32中の有機バインダ及び溶剤が揮発して発散し、セラミック基体30には、Cuを主成分とする焼付済みの下地電極膜31、32が形成される。   In this baking process, as shown in FIG. 6, a large number of chip-shaped electronic component groups 3 are randomly stacked and accommodated in a heat treatment jig. Then, this heat treatment jig is placed on a frame made of stainless steel wire, placed on a mesh belt, and passed through a tunnel firing furnace. While the heat treatment jig passes through the tunnel firing furnace, the organic binder and solvent in the unfired base electrode films 31 and 32 are volatilized and emitted, and the ceramic base 30 is baked with Cu as a main component. The underlying electrode films 31 and 32 are formed.

ここで、本発明に係る熱処理用冶具を構成する受け部材2は、多数の貫通孔22を開口させた積載面20を有しているから、この積載面20に、未焼成の下地電極膜31、32を有するチップ状電子部品3を、ランダムにばら積みすることができる。   Here, since the receiving member 2 constituting the heat treatment jig according to the present invention has a stacking surface 20 having a large number of through holes 22 opened, an unfired base electrode film 31 is formed on the stacking surface 20. , 32 can be randomly stacked.

チップ状電子部品がばら積みされる積載面20は、山折P及び谷折Vの繰返しによる凹凸面であるから、山折P及び谷折Vの繰返しによる機械的強度補強効果が得られる。このため、受け部材2を薄型化し、熱処理用冶具全体としての重量を軽量化しながら、積載されたチップ状電子部品群3の荷重に耐えることができる。   Since the stacking surface 20 on which the chip-shaped electronic components are stacked is an uneven surface due to repeated mountain folds P and valley folds V, an effect of reinforcing mechanical strength due to repeated mountain folds P and valley folds V can be obtained. For this reason, it is possible to withstand the load of the loaded chip-like electronic component group 3 while reducing the thickness of the receiving member 2 and reducing the weight of the heat treatment jig as a whole.

しかも、山折P及び谷折Vの繰返しによる機械的強度補強効果が得られるから、金属製網体を二重に張る構造、メッシュの底部に金属フレームを配置する構造、さらには、金属フレームとメッシュをスポット溶接等により溶接して固定する構造などを採用する必要がない。このため、従来問題となっていたガス抜け障害がなくなり、ガス抜けが促進される。   Moreover, since the mechanical strength reinforcement effect can be obtained by repeating mountain folds P and valley folds V, a structure in which a metal net is stretched double, a structure in which a metal frame is arranged at the bottom of the mesh, and further, a metal frame and a mesh There is no need to adopt a structure that is fixed by welding by spot welding or the like. For this reason, the problem of outgassing, which has been a problem in the past, is eliminated and outgassing is promoted.

さらに、積載面20は、山折P及び谷折Vの繰返しによる凹凸面であるから、積載面20の表面積が拡大される。このため、積載面20にばら積みされるチップ状電子部品3の量を一定化した条件下では、積載面20におけるチップ状電子部品3の積載密度が低下し、熱処理工程において、下地電極膜31、32の内部から、有機バインダ及び溶剤が揮発して発散する作用(ガス抜け)が促進される。   Furthermore, since the loading surface 20 is an uneven surface due to repeated mountain folds P and valley folds V, the surface area of the loading surface 20 is increased. For this reason, under the condition that the amount of the chip-like electronic components 3 stacked on the loading surface 20 is constant, the loading density of the chip-like electronic components 3 on the loading surface 20 decreases, and in the heat treatment step, the base electrode film 31, From the inside of 32, the action (gas release) of the organic binder and the solvent evaporating and escaping is promoted.

また、積載面20は、山折P及び谷折Vの繰返しによる凹凸面であるから、凹凸面が、積載面20の上方又は下方から供給される雰囲気ガスF1、F2に対して、その流れ方向を多様化し、攪拌する作用をもたらす。このため、ガス抜けが更に促進される。   Further, since the loading surface 20 is a concavo-convex surface due to repeated mountain folds P and valley folds V, the concavo-convex surface changes the flow direction with respect to the atmospheric gases F1, F2 supplied from above or below the loading surface 20. Diversify and bring about stirring. For this reason, the outgassing is further promoted.

図示実施例の積載面20は、山折Pの両側に谷折Vを有する断面山形状である。従って、積載面20の上方又は下方から供給される雰囲気ガスF1、F2は、山折Pから谷折Vの方向に、その傾斜に従って流れ、それによって攪拌作用が生じる。この作用によって、ガス抜けが更に促進される。   The loading surface 20 in the illustrated embodiment has a mountain-shaped cross section having valley folds V on both sides of the mountain fold P. Therefore, the atmospheric gases F1 and F2 supplied from above or below the loading surface 20 flow in the direction from the mountain fold P to the valley fold V according to the inclination, thereby causing a stirring action. This action further promotes outgassing.

図7は、本発明に係る熱処理用冶具の別の実施形態を示す斜視図、図8は、図7の8‐8線に沿った断面図である。図示の熱処理用冶具では、積載面20は、山折P及び谷折Vの繰返しによる断面鋸歯状の凹凸面となっている。断面鋸歯状とは、一つの山折Pを基準にして、その両側の谷折Vに向かって下降傾斜する斜面の角度θ1、θ2の間に大きな差がある場合のその断面形状をいう。図7及び図8は、その典型的な例として、角度θ1が45度よりも小さな角度で、角度θ2がほぼ90度の場合を示してある。   7 is a perspective view showing another embodiment of the jig for heat treatment according to the present invention, and FIG. 8 is a cross-sectional view taken along line 8-8 of FIG. In the illustrated heat treatment jig, the loading surface 20 is an uneven surface having a sawtooth cross-section formed by repeated mountain folds P and valley folds V. The cross-sectional sawtooth shape refers to a cross-sectional shape in the case where there is a large difference between the angles θ1 and θ2 of the slopes inclined downward toward the valley fold V on both sides with respect to one mountain fold P. 7 and 8 show typical cases where the angle θ1 is smaller than 45 degrees and the angle θ2 is approximately 90 degrees.

図9は、図7及び図8に示した熱処理用冶具を用いた焼付処理を示す図で、多数のチップ状電子部品3を、熱処理用冶具にランダムにばら積みする。チップ状電子部品群3は、山折Pのほぼ真下にある谷折Vから別の山折Pに向かって上昇傾斜する斜面の上に積載されている。チップ状電子部品群3は、好ましくは、谷折Vと、そのほぼ真上の山折Pとの間に生じる壁面(図示の場合、ほぼ直角の壁面)の上部に、チップ状電子部品群3によっては閉塞されない開口領域が生じるように積載する。   FIG. 9 is a diagram showing a baking process using the heat treatment jig shown in FIGS. 7 and 8, and a large number of chip-shaped electronic components 3 are randomly stacked on the heat treatment jig. The chip-shaped electronic component group 3 is loaded on a slope that is inclined upward from a valley fold V almost directly below the mountain fold P toward another mountain fold P. The chip-shaped electronic component group 3 is preferably formed by the chip-shaped electronic component group 3 on the upper part of the wall surface (in the illustrated case, a substantially right-angle wall surface) formed between the valley fold V and the mountain fold P substantially above it. Are loaded so as to produce an open area that is not blocked.

このように、断面鋸歯状の場合は、ほぼ垂直に立ち上がる壁面があるので、この部分の上部を、チップ状電子部品3によっては埋められない開口領域として利用し、上方及び下方から供給される雰囲気ガスF1,F2の両者を通過させ、それによって雰囲気ガスF1,F2の衝突、乱流、攪拌を生じさせることにより、ガス抜け作用を更に促進することができる。   Thus, in the case of a sawtooth cross-section, there is a wall surface that rises substantially vertically, so the upper part of this portion is used as an opening region that is not filled with the chip-like electronic component 3 and is supplied from above and below. By letting both of the gases F1 and F2 pass, thereby causing collision, turbulence, and agitation of the atmospheric gases F1 and F2, the gas escape action can be further promoted.

以上、好ましい実施例を参照して本発明を詳細に説明したが、本発明はこれらに限定されるものではなく、当業者であれば、その基本的技術思想および教示に基づき、種々の変形例を想到できることは自明である。   The present invention has been described in detail with reference to the preferred embodiments. However, the present invention is not limited to these embodiments, and various modifications can be made by those skilled in the art based on the basic technical idea and teachings. It is self-evident that

本発明に係る熱処理用冶具の一実施形態を示す斜視図である。It is a perspective view which shows one Embodiment of the jig for heat processing which concerns on this invention. 図1の2‐2線拡大断面図である。FIG. 2 is an enlarged sectional view taken along line 2-2 of FIG. 本発明に係る熱処理用冶具の受け部材に用い得る多孔薄板の断面図である。It is sectional drawing of the porous thin plate which can be used for the receiving member of the jig for heat processing which concerns on this invention. 本発明に係る熱処理用冶具の受け部材に用い得る網状体の断面図である。It is sectional drawing of the mesh body which can be used for the receiving member of the jig for heat processing which concerns on this invention. 本発明に係る熱処理用冶具に積載されるチップ状電子部品の一例を示す拡大断面図である。It is an expanded sectional view which shows an example of the chip-shaped electronic component mounted in the jig for heat processing concerning this invention. 本発明に係る熱処理用冶具を用いた熱処理工程における作用を説明する図である。It is a figure explaining the effect | action in the heat processing process using the jig for heat processing which concerns on this invention. 本発明に係る熱処理用冶具の別の実施形態を示す斜視図である。It is a perspective view which shows another embodiment of the jig for heat processing which concerns on this invention. 図7の8‐8線に沿った断面図である。FIG. 8 is a cross-sectional view taken along line 8-8 in FIG. 7. 図7及び図8に示す熱処理用冶具を用いた熱処理工程における作用を説明する図である。It is a figure explaining the effect | action in the heat processing process using the jig for heat processing shown in FIG.7 and FIG.8.

符号の説明Explanation of symbols

1 支持部材
2 受け部材
20 積載面
P 山折
V 谷折
1 Support member 2 Receiving member 20 Loading surface
P Yamaori
V Taniori

Claims (3)

チップ状電子部品の熱処理に用いられる冶具であって、
前記チップ状電子部品を積載する受け部材を含んでおり、
前記受け部材は、多数の貫通孔を開口させた積載面を有し、前記積載面は、山折及び谷折の繰返しによる凹凸面であり、
前記凹凸面は、前記山折及び前記谷折を繰り返す一方向において、上昇斜面及び下降斜面が交互に繰り返されることによって構成されており、
前記上昇斜面のそれぞれは、前記一方向において、前記谷折から前記山折に向かう平坦な斜面であるとともに、複数の貫通孔を有しており、
前記下降斜面のそれぞれは、前記一方向において、前記山折から前記谷折に向かう平坦な斜面であるとともに、複数の貫通孔を有しており、
前記上昇斜面及び前記下降斜面のうち、少なくとも前記下降斜面のそれぞれは、面内に多数の前記チップ状電子部品をランダムにばら積みすることが可能である、
熱処理用冶具。
A jig used for heat treatment of chip-shaped electronic components,
Including a receiving member for loading the chip-like electronic component;
The receiving member has a loading surface in which a large number of through holes are opened, and the loading surface is an uneven surface due to repeated mountain and valley folding,
The concavo-convex surface is configured by alternately repeating an ascending slope and a descending slope in one direction in which the mountain fold and the valley fold are repeated,
Each of the rising slopes is a flat slope facing the mountain fold from the valley fold in the one direction, and has a plurality of through holes.
Each of the descending slopes is a flat slope from the mountain fold to the valley fold in the one direction, and has a plurality of through holes.
Of the ascending slope and the descending slope, at least each of the descending slopes can randomly stack a large number of the chip-shaped electronic components in a plane.
Heat treatment jig.
請求項1に記載された熱処理用冶具であって、
前記上昇傾斜面のそれぞれは、前記一方向に対して垂直に起立している、
熱処理用冶具。
A heat treatment jig according to claim 1,
Each of the rising inclined surfaces stands upright with respect to the one direction,
Heat treatment jig.
請求項1又は2に記載された熱処理用冶具であって、前記受け部材は金属経線と金属緯線とを織り込んだ網状体である、熱処理用冶具。 3. The heat treatment jig according to claim 1, wherein the receiving member is a mesh body in which metal meridians and metal latitudes are woven . 4.
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CN106662402A (en) * 2014-07-18 2017-05-10 株式会社村田制作所 Heat treatment jig
KR101812985B1 (en) * 2013-09-04 2017-12-28 가부시키가이샤 무라타 세이사쿠쇼 Heat treatment jig

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JP6186314B2 (en) * 2013-09-04 2017-08-23 株式会社村田製作所 Heat treatment jig
CN104422288B (en) * 2013-09-04 2016-08-24 株式会社村田制作所 Heat treatment fixture

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JPS58172270A (en) * 1982-03-31 1983-10-11 松下電器産業株式会社 Ceramic baking method
JPS6395095U (en) * 1986-12-12 1988-06-18
JPH09133474A (en) * 1995-11-08 1997-05-20 Hitachi Aic Inc Instrument for loading ceramic molded body
JP2004047584A (en) * 2002-07-09 2004-02-12 Murata Mfg Co Ltd Manufacturing method of electronic component, and fixture for external electrode baking of electronic component

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KR101812985B1 (en) * 2013-09-04 2017-12-28 가부시키가이샤 무라타 세이사쿠쇼 Heat treatment jig
CN106662402A (en) * 2014-07-18 2017-05-10 株式会社村田制作所 Heat treatment jig
CN106662402B (en) * 2014-07-18 2020-01-07 株式会社村田制作所 Heat treatment jig

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