CN106662402B

CN106662402B - Heat treatment jig

Info

Publication number: CN106662402B
Application number: CN201580037792.2A
Authority: CN
Inventors: 南大介
Original assignee: Murata Manufacturing Co Ltd
Current assignee: Murata Manufacturing Co Ltd
Priority date: 2014-07-18
Filing date: 2015-07-02
Publication date: 2020-01-07
Anticipated expiration: 2035-07-02
Also published as: WO2016009849A1; CN106662402A; KR101931993B1; JP6337962B2; KR20170009990A; JPWO2016009849A1

Abstract

A heat treatment jig (101) comprises a mounting member (3) made of a graphite sheet for mounting an object to be heat-treated, and the main surface of the mounting member (3) has a recess.

Description

Heat treatment jig

Technical Field

The present invention relates to a heat treatment jig.

Background

Japanese patent laid-open No. 2004-132674 (patent document 1) describes an inert gas continuous furnace for heat-treating an object by a pusher plate method. In this furnace, a graphite tray is configured to slide on a graphite hearth. A guide unit having a groove is provided on the hearth. The tray used here was a square graphite plate having a thickness of 7mm and one side of 120 mm. The object to be heat-treated is loaded on each tray, and the plurality of trays are continuously fed into the furnace.

Documents of the prior art

Patent document

Patent document 1: japanese patent laid-open No. 2004-132674

Disclosure of Invention

Technical problem to be solved by the invention

As described in patent document 1, when a plurality of objects are placed on 1 tray made of graphite and conveyed into the continuous furnace, the surface of the tray is flat, and therefore the objects may move in the horizontal direction during conveyance, and cracks or chips may occur due to collision between the objects. Further, since the position of the object on the surface of the tray is not determined, when a plurality of objects are placed on 1 tray and heat-treated, the objects are irregularly positioned on the tray, and there is a possibility that density differences occur among the objects depending on the position on the tray, and temperature variations occur.

Accordingly, an object of the present invention is to provide a heat treatment jig capable of preventing cracking or chipping due to collision between objects and reducing temperature variation due to difference in density of the objects even when a plurality of objects are placed on 1 member and heat treated.

Technical scheme for solving technical problem

In order to achieve the above object, a heat treatment jig according to the present invention includes: a mounting member made of a graphite sheet for mounting an object to be heat-treated, the mounting member having a recess on a main surface thereof.

Effects of the invention

According to the present invention, even when a plurality of objects are placed on 1 member and heat-treated, cracking or chipping due to collision between the objects can be prevented, and temperature variation due to density difference of the objects can be reduced.

Drawings

Fig. 1 is an exploded view of a heat treatment jig according to embodiment 1 of the present invention.

Fig. 2 is a partially enlarged plan view of a mounting member included in a heat treatment jig according to embodiment 1 of the present invention.

FIG. 3 is a sectional view taken along line III-III in FIG. 2. Fig. 4 is a partially enlarged cross-sectional view of a heat treatment jig according to embodiment 1 of the present invention in a state where an object is placed thereon.

Fig. 5 is a partially enlarged cross-sectional view of a mounting member included in a heat treatment jig according to embodiment 2 of the present invention.

Fig. 6 is a partially enlarged cross-sectional view of a mounting member included in a modification of the heat treatment jig according to embodiment 2 of the present invention.

Fig. 7 is a partially enlarged cross-sectional view of the vicinity of the frame portion of the 1 st example of the heat treatment jig according to

embodiments

1 and 2 of the present invention.

Fig. 8 is a 1 st partially enlarged cross-sectional view of the vicinity of the frame portion of the 2 nd example of the heat treatment jig according to

embodiments

1 and 2 of the present invention.

Fig. 9 is a 2 nd partially enlarged cross-sectional view of the vicinity of the frame portion of the 2 nd example of the heat treatment jig according to

embodiments

1 and 2 of the present invention.

Fig. 10 is an exploded view of a heat treatment jig according to embodiment 3 of the present invention.

Fig. 11 is a partially enlarged plan view of a mounting member included in a heat treatment jig according to embodiment 3 of the present invention.

FIG. 12 is a sectional view taken along line XII-XII in FIG. 11. Fig. 13 is a partially enlarged cross-sectional view of a heat treatment jig according to embodiment 3 of the present invention in a state where an object is placed on the heat treatment jig.

Fig. 14 is a perspective view of a heat treatment jig according to embodiment 4 of the present invention.

Fig. 15 is a side view of a mounting member included in a heat treatment jig according to embodiment 4 of the present invention.

Fig. 16 is a plan view of a heat treatment jig according to embodiment 4 of the present invention.

Fig. 17 is a partially enlarged explanatory view of a Z portion in fig. 16.

Fig. 18 is a partially enlarged cross-sectional view of a modification of the heat treatment jig according to embodiment 4 of the present invention.

Detailed Description

(embodiment mode 1)

A heat treatment jig according to embodiment 1 of the present invention will be described with reference to fig. 1 to 3.

Fig. 1 shows an exploded view of a heat treatment jig 101 according to the present embodiment. The heat treatment jig 101 includes: frame 1 and mounting member 3. The mounting member 3 is supported by the frame 1. The frame 1 includes a lower frame portion 2 and an upper frame portion 4. The lower frame portion 2 and the upper frame portion 4 are fixed to each other by a known technique not shown. The peripheral edge of the mounting member 3 is sandwiched between the lower frame portion 2 and the upper frame portion 4. The mounting member 3 is formed using a graphite sheet. The mounting member 3 is not a graphite sheet having a flat main surface, but a member having a concave portion formed on the main surface of the graphite sheet.

In other words, the heat treatment jig 101 includes: a mounting member 3 made of a graphite sheet for mounting an object to be heat-treated has a recessed portion on a main surface of the mounting member 3.

The thickness of the graphite sheet constituting the mounting member 3 is, for example, about 0.05mm to 0.1 mm. As a material of the mounting member 3, for example, commercially available graphite sheets having thicknesses of 50 μm, 70 μm, 100 μm, and the like can be used. The frame 1 may be made of, for example, carbon, ceramic, or heat-resistant metal. Examples of the heat-resistant metal include nickel-chromium alloy (INCONEL) and nickel.

In the example shown in fig. 1, the lower frame portion 2 has a thickness of 5mm, the mounting member 3 has a thickness of 0.05mm, and the upper frame portion 4 has a thickness of 1.3 mm. In the example shown in fig. 1, one side of the outer shape of the frame portion 1 is a square of 150mm in plan view. The width of the frame 1 in a plan view is 5 mm. Wherein the dimensions recited herein are merely exemplary.

The concave portion formed on the main surface of the graphite sheet as the mounting member 3 is preferably large enough to allow the object to be heat-treated to be caught and stay there. It is expected that the object will be caught and stay even if the placing member 3 is slightly inclined in a state where the object is placed on the placing member 3. In particular, when the recessed portion is formed on the main surface of the mounting member, the size of the recessed portion is preferably larger than the size of the object to be heat-treated. The recess is preferably, but not necessarily, of such a size as to completely accommodate 1 object. The recess may be of a size to accommodate a part of 1 object.

Fig. 2 shows a partially enlarged view of the mounting member 3 in plan view 1. The concave portions 5 are arranged in a matrix on the main surface of the mounting member 3. Fig. 3 shows a sectional view in fig. 2 in a view along the line III-III.

According to the heat treatment jig of the present embodiment, the possibility of undesired displacement of the object during conveyance or heat treatment can be reduced. Therefore, even when a plurality of objects are placed in 1 heat treatment jig and heat treated, it is possible to prevent cracking or chipping due to collision between the objects and reduce temperature variation due to density difference between the objects. Further, the displacement of the object on the mounting member may accelerate wear deterioration of the mounting member, but by reducing such movement, the life of the mounting member can be extended.

In the heat treatment jig of the present embodiment, since the recessed portion is provided on the main surface of the mounting member to increase the surface area of the mounting member, the result of improvement in heating efficiency and the rate of temperature increase due to an increase in the heat receiving area of the mounting member can be improved. Further, the increase in the surface area can improve the temperature variation in the 1 mounting member depending on the location.

As shown in the present embodiment, it is preferable that the main surface of the mounting member 3 has concave curved surfaces as the concave portions. Fig. 3 shows the recess 5 as an example of a recess satisfying this condition. The recess 5 has a concavely curved surface 31. By adopting this configuration, the object can be held in a dispersed state. In particular, it is preferable that the concave curved surfaces be aligned at a certain interval. The reason for adopting the above-described configuration is that by holding the object on the curved surface, a plurality of objects can be dispersed on each concave curved surface and held at a constant interval as shown in fig. 4. Fig. 4 shows a state where a plurality of objects 10 are placed on the placing member 3 and heat-treated. Even if the objects 10 are not accurately positioned and arranged one by one, if a plurality of objects 10 are collectively placed on the upper surface of the mounting member 3 and a slight oscillation is applied to the mounting member 3, the objects 10 are naturally and appropriately dispersed and accommodated in the concave portions 5 as shown in fig. 4. The number of objects 10 stored in 1 recess 5 is not limited to 1, and a plurality of objects 10 may be stored in 1 recess 5 at the same time. This allows the object 10 to be dispersed and held in an appropriate amount in a stepwise manner, thereby enabling a favorable heat treatment.

The concave portion 5 shown in fig. 2 and 3 is referred to as a "pit (dimple)". The curved surface 31 of the concave portion 5 in this case may be a part of a spherical surface. The process of forming such a concave portion in a sheet-like material is also referred to as "dimpling". The pit processing can be performed even for a graphite sheet. The mounting member 3 can be obtained by performing a dimple process on the graphite sheet in advance.

The concave portions 5 shown in fig. 2 and 3 are arranged in a matrix, but may be arranged with a half pitch between adjacent rows. The positions of the recesses 5 in the plan view may be arranged in other patterns.

The portion of the main surface that separates the curved surfaces from each other is preferably flat. In the example shown in fig. 3, this condition is satisfied. That is, in fig. 3, the portion separating the curved surfaces 31 of the mounting member 3 is the flat surface 32. Accordingly, since the object 10 placed on the flat surface 32 is easily slid sideways, even if there is any object 10 that does not enter the concave portion 5 on the placing member 3, the object 10 can be guided to any concave portion 5 by slight play.

The presence of the frame portion 1 shown here is not essential to the heat treatment jig according to the present invention. However, the mounting member is preferably rectangular in plan view, and the heat treatment jig includes a frame portion that supports the mounting member so as to surround four sides of the mounting member. This is because, if the frame portion is provided, the mounting member can maintain a stable posture, and the heat treatment jig can be easily handled. This point is also the same in the following embodiments.

When the heat treatment jig includes the frame portion 1, the frame portion 1 is not necessarily divided into the upper and lower portions 2. However, the frame 1 preferably includes a lower frame portion 2 and an upper frame portion 4, and the frame 1 preferably supports the mounting member 3 by sandwiching the mounting member 3 between the lower frame portion 2 and the upper frame portion 4. This is because the mounting member 3 can be reliably held by adopting this configuration.

Further, the lower frame portion 2 and the upper frame portion 4 may be separated as necessary, so that only the placement member 3 can be exchanged. In this case, the frame 1 can be used continuously even after the placement member 3 is replaced.

(embodiment mode 2)

In embodiment 1, each concave portion 5 is a concave curved surface 31, but each concave portion 5 may be cylindrical as in the mounting member 3i shown in fig. 5. The heat treatment jig according to embodiment 2 of the present invention includes the mounting member 3 i. The other configurations are the same as those described in embodiment 1.

In the present embodiment, the same effects as those in embodiment 1 can be obtained. Alternatively, as another modification, the mounting member may have a recessed portion 5 having an inverted truncated cone shape, as in the mounting member 3j shown in fig. 6. The shape of the recess 5 is not limited to this, and may be any other shape.

(fixing the mounting Member with the frame portion)

In

embodiments

1 and 2, the frame portion 1 is configured to be fixed by sandwiching a mounting member between the lower frame portion 2 and the upper frame portion 4, but in this case, for example, as shown in fig. 7. In the example shown in fig. 7, the lower frame portion 2 and the upper frame portion 4 press the mounting member 3 without any gap at all, but as shown in fig. 8, the mounting member 3 may be configured to be relatively loosely sandwiched so that a gap is present between the lower frame portion 2 and the upper frame portion 4. That is, the lower frame portion 2 and the upper frame portion 4 sandwich the mounting member 3 with a space therebetween. Such a configuration can be realized by using a stepped screw 6 as shown in fig. 9. Fig. 9 is a cross-sectional view of the heat treatment jig shown in fig. 8, viewed from a different direction, and the mounting member 3 has a through-hole or notch at a position corresponding to the stepped screw 6. As shown in fig. 8 and 9, when the lower frame portion 2 and the upper frame portion 4 sandwich the mounting member 3 with a gap therebetween, the mounting member 3 is not completely restricted by the frame portion 1 and can be displaced slightly, and therefore, when the temperature changes by using the heat treatment jig, the mounting member 3 can be smoothly expanded or contracted. As a result, excessive load and damage to the mounting member 3 and the frame 1 during use can be avoided as much as possible.

(embodiment mode 3)

A heat treatment jig according to embodiment 3 of the present invention will be described with reference to fig. 10 to 12.

Fig. 10 shows an exploded view of the heat treatment jig 102 of the present embodiment. The heat treatment jig 102 includes a frame 1 and a mounting member 3 k. The mounting member 3k is supported by the frame 1. The details of the frame portion 1 are the same as those described in embodiment 1. Fig. 11 is a partially enlarged plan view of the mounting member 3k shown in fig. 10. Fig. 12 shows a cross-sectional view in fig. 11 taken about line XII-XII. The mounting member 3k is formed using a graphite sheet, and basically the same as that described in embodiment 1, except that linear trough portions 7 are formed instead of the depressions in the mounting member 3 k. The recess 5 is realized by a linear valley 7.

In the heat treatment jig 102 of the present embodiment, a plurality of linear trough portions 7 extending in the 1 st direction 41 and the 2 nd direction 42 so as to intersect each other are formed as recessed portions in the main surface of the mounting member 3 k.

In the present embodiment, the linear trough portions 7 are arranged in a grid shape in plan view. According to the heat treatment jig 102 of the present embodiment, when a plurality of objects 10 are placed on the placement member 3 and heat treated, the objects 10 are appropriately dispersed and accommodated in the concave portions 5 formed by the linear trough portions 7, as shown in fig. 13. Since the object 10 can be dispersed and held in small amounts in steps, a good heat treatment can be performed. Thus, in the present embodiment, the same effects as those in

embodiments

1 and 2 can be obtained.

Here, the structure in which the 1 st direction 41 and the 2 nd direction 42 are in a perpendicular relationship to each other is explained, however, it is not limited to that both are perpendicular to each other. The angle formed by the 1 st direction 41 and the 2 nd direction 42 is not limited to 90 °, and may be an acute angle. It is not necessary that any one of the 1 st direction 41 and the 2 nd direction 42 is parallel to the side of the frame 1.

Preferably, the concave portion of the main surface of the mounting member is formed by embossing. This is because the desired arrangement of the concave portions can be easily formed over a large area by the embossing. In the present embodiment, the linear trough portion is described as being formed by embossing, but the linear trough portion is not limited to the shape formed by embossing. The shape may be a concave-convex shape having another pattern as long as the object can be retained in each part.

(embodiment mode 4)

A heat treatment jig according to embodiment 4 of the present invention will be described with reference to fig. 14 to 18.

Fig. 14 is a perspective view of the heat treatment jig 103 according to the present embodiment. The heat treatment jig 103 includes a frame 1 and a mounting member 3 w. The placing member 3w is supported by the frame 1. The details of the frame portion 1 are the same as those described in embodiment 1. Fig. 15 shows a side view when the mounting member 3w is taken out alone. Fig. 16 shows a plan view of the heat treatment jig 103. Fig. 17 is a perspective view showing a case where the Z portion in fig. 16 is cut out and taken out.

In the heat treatment jig 103, the mounting member 3w is formed in a wave shape such that the graphite sheet has a shape in which mountain folds and valley folds are alternately repeated when viewed from the side, and the mounting member 3w is rectangular when viewed from the top, and the heat treatment jig 103 includes a frame portion 1 that supports the mounting member 3w so as to surround four sides of the mounting member 3 w.

As shown in fig. 16 and 17, the end of the mounting member 3w is fixed by being sandwiched between the lower frame portion 2 and the upper frame portion 4 on the 2 sides 35 extending in the direction parallel to the wavy fold line in the outer periphery of the mounting member 3 w. The 2 sides 36 extending in the direction perpendicular to the wavy fold line in the outer periphery of the mounting member 3w are configured such that the lower frame portion 2 protrudes more inward than the upper frame portion 4, and the end portion of the mounting member 3w is placed on the protruding portion of the lower frame portion 2. In this example, only two sides of the 4 sides of the mounting member 3w facing each other are sandwiched by the frame 1, but such a support method is also possible. However, this is an example of a structure for supporting the wavy placement member 3w, and is not limited to this structure. For example, as shown in the sectional view of fig. 18, a wavy mounting member 3w may be sandwiched between the upper surface of the lower frame portion 2 and the lower surface of the upper frame portion 4 by forming wavy irregularities in advance.

In the present embodiment, the wavy valley portion of the mounting member 3w corresponds to a concave portion formed in the main surface of the mounting member 3w, and the object is accommodated and stays in the concave portion during the heat treatment.

In the present embodiment, since the objects can be held by the trough portions formed on the entire placement member 3w, when a plurality of objects 10 are placed on the placement member 3 and heat-treated, the objects 10 can be appropriately dispersed and held, and a favorable heat treatment can be performed. Thus, the same effects as those of the previous embodiments can be obtained in the present embodiment.

The type of the object to be subjected to the heat treatment is not particularly limited, and the object may be, for example, an electronic component, and particularly, may be a chip-shaped electronic component. The electronic component referred to herein is mainly assumed to be a minute electronic component, and may be assumed to be a chip-like electronic component having a size of several mm or 1mm or less on the 1 side.

The above-described embodiments disclosed herein are illustrative and not restrictive in all respects. The scope of the present invention is indicated by the scope of the claims, rather than by the foregoing description, and all changes that come within the meaning and range of equivalency of the claims are intended to be embraced therein.

Description of the reference symbols

1 frame part, 2 lower frame part, 3i, 3j, 3k, 3w carrying member, 4 upper frame part, 5 concave part, 6 stepped screw, 7 linear trough part, 10 object, 31 curved surface, 32 flat surface, 35, 36 sides, 41 1 st direction, 42 nd 2 nd direction, 101, 102, 103 heat treatment clamp.

Claims

1. A jig for heat treatment, characterized in that,

comprises a placing member made of a graphite sheet for placing an object to be heat-treated,

the main surface of the mounting member has a recess,

the main surface is formed with respective independent concave curved surfaces as the concave portions,

the portion of the main surface that separates the curved faces from each other is flat.

2. The heat treatment jig according to claim 1,

the concave portion of the main surface is formed by embossing.

3. The heat treatment jig according to claim 1,

the mounting member is rectangular in plan view, and the heat treatment jig includes a frame portion that supports the mounting member so as to surround four sides of the mounting member.

4. The heat treatment jig according to claim 3,

the frame portion includes a lower frame portion and an upper frame portion, and the frame portion supports the mounting member by sandwiching the mounting member between the lower frame portion and the upper frame portion.

5. The heat treatment jig according to claim 4,

the lower frame portion and the upper frame portion are spaced apart from each other and sandwich the mounting member.