JP5552773B2 - Divided body manufacturing apparatus and manufacturing method - Google Patents

Description

  The present invention relates to an apparatus for manufacturing a divided body such as a ceramic substrate on which an electronic component is mounted by dividing a plate-like material made of a brittle material such as ceramics into small pieces, and a manufacturing method thereof.

Ceramic substrates for mounting electronic components such as semiconductor elements are obtained by laser processing or the like so that a plurality of these substrates can be formed on the surface of a plate-shaped material made of ceramics having a large area, and is divided for each substrate. It is manufactured by providing a dividing groove in advance, forming a circuit in each of the regions partitioned by the dividing groove, and then dividing along the dividing groove.
As a technique for dividing such a plate-shaped material, conventionally, a method of bending the belt-shaped material by pressing the plate-shaped material with a roll while sandwiched between belts (see Patent Document 1), between two rolls having different diameters. There is a method of applying a bending force by sandwiching a plate material (see Patent Document 2), and any of these methods is a method of dividing by generating cracks from the dividing grooves using the brittleness of ceramics.

JP 2002-18830 A JP 2000-238034 A

  By the way, when the dividing groove is provided on one surface of the ceramic material, the plate-like material is divided by a crack occurring on the opposite surface from the dividing groove, but the crack is uniformly cracked over the length direction of the dividing groove. It is difficult to generate, and the dividing line is not straight, and is likely to be bent.

  The present invention has been made in view of such circumstances, and is divided into a straight line along the dividing groove, and also in a cross section perpendicular to the plane of the material to manufacture a highly accurate divided body. An object of the present invention is to provide a split body manufacturing apparatus and a manufacturing method that can be used.

The split body manufacturing apparatus of the present invention is a split body manufacturing apparatus that splits from the split groove to produce a plurality of split bodies by pressing a plate-like material made of a brittle material with split grooves formed in advance, In the middle of the conveyance path for carrying the plate-shaped material on a belt, a set of divided members for pressing the plate-shaped member in a sandwiched state is provided, and the plate-shaped material is interposed between the divided members. An interval restricting member is provided that restricts the minimum interval between the divided members on both sides of the plate-like material when the plate is sandwiched, and the height of the interval restricting member is set larger than the total plate thickness of the plate-like member. Between the two divided members, the belt is crushed at the position of the spacing regulating member, so that the belt bulges between the left and right spacing regulating members, and the plate-like material is formed at the bulging portion. characterized in that but is pressed

If the plate-shaped material is simply sandwiched and pressed between the divided members, the center part of both divided members R sandwiching the plate-shaped material P as shown in FIG. The two split members R are likely to bend in a convex direction. Since the plate-shaped material is pressed in a state in which this bending occurs, the dividing line of the plate-shaped material is bent. In the present invention, by restricting the minimum distance between both end portions of both divided members by the space regulating member, the center portion of both divided members in which the plate-like material is interposed, and both end portions of both divided members in which the space regulating member is interposed Are equalized to prevent the split members from being bent, and the plate-like material can be divided linearly along the dividing groove and perpendicular to the surface of the plate-like material. it can.
The distance between the central portions of the two divided members is not limited as long as a pressing force sufficient to divide the plate-like material of the brittle material acts. can do.

In the divided body manufacturing apparatus of the present invention, it is preferable that an elastic member that contacts the surface of the plate-shaped material is provided on at least one surface of the divided member.
When the elastic member is in contact with the plate-like material, even if there is some variation in the pressing force, this can be alleviated, and the occurrence of scratches on the surface of the plate-like material can be prevented.

In the divided body manufacturing apparatus according to the present invention, the interval regulating member may be formed to protrude from at least one of the divided members, or may be formed to protrude from the surface of the elastic member. Also good.
By forming the interval regulating member on the divided member or the elastic member, workability is improved as compared with the case where the interval regulating member is handled alone.

The divided body manufacturing method of the present invention is a divided body manufacturing method in which a plurality of divided bodies are manufactured by being divided from the divided grooves by pressing a plate-like material made of a brittle material in which divided grooves are formed in advance. In addition, an interval restricting member having a height larger than the total plate thickness of the plate member is disposed at both side positions of the plate material placed on the belt, and the plate shape together with the interval restricting member. By pressing the material in a sandwiched state by a pair of dividing members, the belt is crushed between the two dividing members at the position of the spacing regulating member, and the belt is expanded between the left and right spacing regulating members. The plate-shaped material is divided by pressing out at the bulging portion .

  According to the divided body manufacturing apparatus of the present invention, by restricting the minimum distance between both ends of both divided members by the interval regulating member, it is possible to prevent the occurrence of bending of both divided members when the plate-shaped material is sandwiched. A high-precision divided body can be manufactured by dividing the shaped material linearly along the dividing groove and perpendicularly to the surface of the plate-shaped material.

It is sectional drawing which shows 1st Embodiment of the division body manufacturing apparatus which concerns on this invention, and is equivalent to the cross section in alignment with the AA of FIG. It is a longitudinal cross-sectional view of the division body manufacturing apparatus of FIG. It is a perspective view of the principal part which shows the positional relationship of the space | interval control member and plate-shaped raw material of the division body manufacturing apparatus of FIG. It is sectional drawing similar to FIG. 1 which shows 2nd Embodiment of the division body manufacturing apparatus which concerns on this invention. It is a perspective view which shows the roller part of the belt edge part of the division body manufacturing apparatus of FIG. It is sectional drawing similar to FIG. 1 which shows 3rd Embodiment of the division body manufacturing apparatus which concerns on this invention. It is a perspective view which shows the winding part around the roller of the belt of the division body manufacturing apparatus of FIG. It is sectional drawing of the power module using the board | substrate for power modules as an example of the division body manufactured with the division body manufacturing apparatus of this invention. It is sectional drawing which shows the state which the bending produced in both division members by pinching | interposing a plate-shaped raw material with a division member.

Hereinafter, embodiments of a divided body manufacturing apparatus and a manufacturing method thereof according to the present invention will be described with reference to the drawings.
In this embodiment, a substrate used in a power module that controls a large current and a high voltage is applied as the divided body.
The power module 1 will be described in advance. The power module 1 includes a power module substrate 2 and an electronic component 3 such as a semiconductor chip mounted on the surface of the power module substrate 2 as shown in FIG. It consists of. In the power module substrate 2, the circuit layer metal layer 5 is laminated on the surface of the ceramic substrate 4, and the heat dissipation layer metal layer 6 is laminated on the back surface of the ceramic substrate 4. The electronic component 3 is mounted thereon, and the heat sink 7 is attached to the heat dissipation layer metal layer 6.

The ceramic substrate 4 is formed in a rectangular shape using, for example, a nitride ceramic such as AlN (aluminum nitride) or Si ₃ N ₄ (silicon nitride) or an oxide ceramic such as Al ₂ O ₃ (alumina) as a base material. Has been. The circuit layer metal layer 5 is formed of pure aluminum or an aluminum alloy, and is formed into an outer shape of a circuit pattern by pressing or etching. The heat dissipation layer metal layer 6 is formed of pure aluminum in a rectangular shape slightly smaller than the ceramic substrate 4. The ceramic substrate 4 and the metal layers 5 and 6 are joined to each other by brazing. The brazing material includes Al-Si, Al-Ge, Al-Cu, and Al-Mg. Or Al-Mn type | system | group etc. are used.

And the electronic component 3 is joined on the metal layer 5 for circuit layers with the solder material 8 of Sn-Ag-Cu type, Zn-Al type, or Pb-Sn type. The electronic component 3 and the terminal portion of the metal layer 5 are connected by a bonding wire (not shown) made of aluminum.
On the other hand, the heat sink 7 is formed by extrusion molding of an aluminum alloy, and is formed with a number of flow paths 9 for circulating cooling water along the length direction thereof. Joined by soldering, bolts, etc.

  Of the power module 1 configured as described above, the power module substrate 2 is divided into one surface of a ceramic flat plate 11 having a large area where a plurality of the substrates 2 can be formed, and is divided for each ceramic substrate 4. A dividing groove 12 is provided in advance, and a metal layer 5 for circuit layer and a metal layer 6 for heat dissipation layer are formed in regions divided by the dividing groove 12, respectively. The material 13 is manufactured as individual power module substrates 2 by dividing the material 13 along the dividing grooves 12 by the divided body manufacturing apparatus 21 shown in FIGS.

1 to 3 show a first embodiment of the present invention. In this divided body manufacturing apparatus 21, an endless belt (lower belt) 22 that feeds the plate-like material 13 in a mounted state is wound around support rollers 23, 24 and disposed horizontally. In addition, an endless belt (upper belt) 27 wound between the pair of support rollers 25 and 26 is arranged in parallel with a slight gap therebetween. In this case, the upper belt 27 is formed shorter than the lower belt 22 and is disposed on the central portion in the length direction of the lower belt 22, and the upper side of the lower belt 22 is opened before and after the upper belt 27. ing.
Further, at the middle position in the length direction of the lower belt 22 and the upper belt 27, divided rollers 28 and 29 having a smaller diameter than the support rollers 23 to 26 around which the belts 22 and 27 are wound are back surfaces of the belts 22 and 27. The two split rollers 28 and 29 are arranged side by side with the belts 22 and 27 interposed therebetween.
These divided rollers 28 and 29 have a length that is greater than the width of the plate-like material 13 and are set to a length that can sandwich an interval regulating member 30 described later between both ends thereof.

A pair of prismatic spacing regulating members 30 are sent between the belts 22 and 27 at positions on both sides of the plate-like material 13 sandwiched between them. The spacing regulating member 30 is made of hard plastic, metal, wood, etc., and its height is set slightly larger than the total plate thickness of the plate-like material 13, for example, the ceramic flat plate 11 of the plate-like material 13 and both of them. When the total thickness of the metal layers 5 and 6 is 1.835 mm, the height is set to 2.0 mm.
The material of the gap regulating member 30 can maintain the original shape when the plate-like material 13 is pressed and divided between the divided rollers 28 and 29, and can be broken similarly to the plate-like material 13. Can also be used.
Note that, in the lower belt 22 that is a conveyance path for the plate-like material 13, the front end portion protruding forward from the upper belt 27 supplies the plate-like material 13 on the lower belt 22 in a loaded state. The rear end portion protruding rearward from the upper belt 27 serves as the discharge portion 32 for taking out each divided piece (power module substrate 2).

A method for manufacturing the power module substrate 2 by dividing the plate-like material 13 into a plurality of the dividing grooves 12 using the divided body manufacturing apparatus 21 configured as described above will be described.
The plate-shaped material 13 is placed on the upper surface of the introduction portion 31 of the lower belt 22 with the dividing grooves 12 facing downward, and the spacing regulating members 30 are arranged on both sides of the plate-shaped material 13 in parallel with each other. In this state, the belts 22 and 27 are driven, and the plate-like material 13 and the interval regulating member 30 are conveyed between the belts 22 and 27 in a sandwiched state. In FIG. 2, the plate-shaped material 13 or the divided power module substrate 2 is indicated by a solid line on the introduction part 31 and the discharge part 32, and the interval regulating member 30 is indicated by a chain line, and between the belts 22 and 28. Only the interval regulating member 30 is shown.

Then, at the intermediate position between the belts 22 and 27, the plate-like material 13 is pressed in a sandwiched state between the split rollers 28 and 29 and is split from the split groove 12. At this time, as shown in FIG. 1, the gap regulating members 30 are interposed at both ends of the divided rollers 28 and 29, so that the divided rollers 28 and 29 are restrained by the gap regulating member 30. The minimum distance is maintained, and there is no further approach, the occurrence of bending where the intermediate portions of the split rollers 28 and 29 swell outward is prevented, and the height of the distance regulating member 30 is the total height of the plate-like material 13. By being set slightly larger than the plate thickness, the pressing force to the plate-like material 13 sandwiched between the intermediate portions of the two divided rollers 28 and 29 is also suppressed. Specifically, the belts 22 and 27 are crushed between the divided rollers 28 and 29 at the position of the gap regulating member 30, but the belts 22 and 27 are slightly between the left and right gap regulating members 30. The plate material 13 is pressed and divided at the bulging portion. Since the pressing is performed by the bulging portions of the belts 22 and 27, which are elastic members, the pressing force is small.
In this way, the spacing regulating member 30 prevents the split rollers 28 and 29 from being bent, and the pressing force is suppressed. As a result, the plate-like material 13 is pressed with a uniform pressing force in the width direction, and the split groove 12 is divided linearly and perpendicularly to the surface of the plate-like material 13.

  4 and 5 show a second embodiment of the split body manufacturing apparatus. In the first embodiment, the divided body manufacturing apparatus 35 is provided with the interval regulating member 30 separately from the roller and the belt, but the interval regulating member is formed integrally with the roller. That is, both the split rollers 36 and 37 are formed longer than the width of the belts 22 and 27. Of these, in the illustrated example, the upper split roller 36 is formed in a straight cylindrical shape, but the lower split roller is formed. The roller 37 has a large-diameter portion 38 integrally formed at both ends, and is configured to be rotated while the outer peripheral surface of the large-diameter portion 38 is in contact with the outer peripheral surface of the upper divided roller 36. The large-diameter portion 38 of the lower divided roller 37 comes into contact with the upper divided roller 36 so that the interval between the two divided rollers 36 and 37 is regulated. An interval regulating member is configured.

Also in this divided body manufacturing apparatus 35, between both end portions of both divided rollers 36 and 37, the space regulating member 38 of the lower divided roller 37 contacts the upper divided roller 36, and more than both divided rollers 36. , 37 are prevented from approaching, the bending of the dividing rollers 36, 37 is suppressed, the plate material 13 is pressed with an equal pressing force, and the plate material 13 is linearly formed along the dividing groove 12. It can be divided perpendicular to the surface.
In this case, since the space regulating member 38 is formed integrally with the outer peripheral portion of the lower split roller 37, there is no need to separately handle the space regulating member as in the first embodiment. It is only necessary to supply the plate material 13 to 31 (see FIG. 1), and the workability is good.
In the divided body manufacturing apparatus 35 of the second embodiment, the interval regulating member 38 is formed integrally with the divided roller 37 and contacts the surface of the other divided roller 36, as in the first embodiment. It is not interposed between the elastic members. Therefore, since the rigid body of the space | interval control member 38 and the division | segmentation roller 36 is contacted, the height dimension of the space | interval control member 38 is the total board thickness of the plate-shaped raw material 13, and the thickness of the two belts 22 and 27. It is better to set the dimensions slightly smaller than the sum.

  The upper belt 27 may be formed wide so that the spacing regulating member 38 comes into contact with the upper belt 27. In this case, the belt 27 bulges due to elasticity, as in the first embodiment. Accordingly, the height of the interval regulating member 38 is increased, and for example, the plate-like material 13 is approximately equal to the sum of the total plate thickness of the plate-like material 13 and one belt 27 or depending on the elastic force of the belt. Can be set slightly larger than the sum of the total plate thickness and one belt 27.

  6 and 7 show a third embodiment of the split body manufacturing apparatus. In this divided body manufacturing apparatus 41, both side portions of the lower belt 42 are formed thick so that the interval regulating member 43 is integrally formed on both side portions of the lower belt 42. In the case of the third embodiment, since the interval regulating member 43 is integrally formed on both sides of the belt 42 that is an elastic member, the height of the interval regulating member 43 is larger than the total plate thickness of the plate-like material 13. It is set so that the plate-like material 13 is pressed in a state in which the gap regulating member 43 is crushed by being sandwiched between the two divided rollers 28 and 29.

Also in this divided body manufacturing apparatus 41, the minimum distance between the belts 42 is regulated by the both-space regulating members 43, and the plate-like material 13 is pressed with an equal pressing force to be linear and against the surface of the plate-like material 13. Can be divided vertically. In the case of this embodiment as well, as in the second embodiment, since the interval regulating member is not handled alone, workability is good.
In addition, when the height of the space | interval control member 43 is large compared with the outer diameter of the support rollers 23 and 24 of the both ends where the belt 42 is wound, in order to make winding to the support rollers 23 and 24 easy, As shown in FIG. 7, when slits 44 along the width direction are formed in the interval regulating member 43 at an appropriate pitch and wound around the support rollers 23 and 24 (only one support roller 24 is shown in FIG. 7). It is preferable that the slit 44 is opened on the outer peripheral side.

In addition, this invention is not limited to the said embodiment, A various change can be added in the range which does not deviate from the meaning of this invention.
For example, in the above-described embodiment, the plate-shaped material is pressed while being sandwiched and fed by a pair of endless belts, but the lower side is configured by the same belt as in the above-described embodiment, and the upper side is only the split roller. It may be a thing. Further, the diameters of the two split rollers may be the same or different, and in this case, the lower split roller may be enlarged.
Further, in the second embodiment and the third embodiment, the interval regulating member is provided on the lower divided roller side, but may be provided on the upper divided roller side, or may be divided by half of the height. You may provide in both.
Further, although the upper and lower parts of the dividing roller are configured as rollers, the upper side may be a roller and the lower side may be a flat plate along the belt. The upper roller may also be a member having a downward convex arcuate curved surface. The divided member of the present invention includes those in the form of a roller, a plate, and a curve.
Moreover, although the division | segmentation groove | channel of the ceramic substrate used what was formed only in one side, you may form in both surfaces. In FIG. 2, the dividing grooves are arranged downward, but may be arranged upward.

DESCRIPTION OF SYMBOLS 1 Power module 2 Power module substrate 3 Electronic component 4 Ceramic plate 5 Metal layer for circuit layer 6 Metal layer for heat radiation layer 11 Ceramic flat plate 12 Divided groove 13 Plate material 21 Divided body manufacturing apparatus 22, 27 Belt 23-26 Support roller 28, 29 Dividing roller (dividing member)
DESCRIPTION OF SYMBOLS 30 Space | interval control member 31 Introduction | transduction part 32 Output | discharge part 35 Divided body manufacturing apparatus 36,37 Dividing roller 38 Space | interval restricting member 41 Divided body manufacturing apparatus 42 Lower belt 43 Space | interval restricting member 44 Slit

Claims (5)

A split body manufacturing apparatus for manufacturing a plurality of split bodies by splitting from the split grooves by pressing a plate-like material made of a brittle material in which split grooves are formed in advance,
In the middle of the conveyance path for carrying the plate-shaped material on a belt, a set of divided members for pressing the plate-shaped member in a sandwiched state is provided, and the plate-shaped material is interposed between the divided members. An interval restricting member is provided that restricts the minimum interval between the divided members on both sides of the plate-like material when the plate is sandwiched, and the height of the interval restricting member is set larger than the total plate thickness of the plate-like member. Between the two divided members, the belt is crushed at the position of the spacing regulating member, so that the belt bulges between the left and right spacing regulating members, and the plate-like material is formed at the bulging portion. The divided body manufacturing apparatus is characterized in that is pressed .   2. The divided body manufacturing apparatus according to claim 1, wherein an elastic member that contacts the surface of the plate material is provided on at least one surface of the divided member.   3. The divided body manufacturing apparatus according to claim 1, wherein the interval regulating member is formed to protrude from at least one of the divided members.   The divided body manufacturing apparatus according to claim 2, wherein the interval regulating member is formed to protrude from a surface of the elastic member. A split body manufacturing method for manufacturing a plurality of split bodies by splitting from the split grooves by pressing a plate-like material made of a brittle material in which split grooves are formed in advance,
An interval regulating member having a height larger than the total plate thickness of the plate member is disposed at both side positions of the plate material placed on the belt, and the plate material together with the interval regulating member is disposed. By pressing in a sandwiched state by a pair of divided members, the belt is crushed between the divided members at the position of the gap regulating member, and the belt bulges between the left and right gap regulating members, A divided body manufacturing method, wherein the plate-shaped material is divided by pressing at the bulging portion .