JP5573105B2 - Split body manufacturing apparatus and manufacturing method - Google Patents

Description

  The present invention relates to an apparatus and a method for manufacturing a divided body such as a ceramic substrate on which electronic components are mounted by dividing a plate-like material made of a brittle material such as ceramics into small pieces.

  A ceramic substrate on which electronic components such as semiconductor elements are mounted has a dividing groove formed on the surface of a plate-shaped material made of ceramics having a large area on which a plurality of substrates can be formed by laser processing or the like so as to partition each substrate. Produced in advance by forming a circuit in each of the regions defined by the dividing grooves and then dividing the circuit along the dividing grooves.

  Conventionally, as a technique for dividing the plate-like material, a method of bending the belt-like material by pressing the plate-like material with a roll while being sandwiched between belts (see Patent Document 1), a plate-like material between two rolls having different diameters. There is a method of applying a bending force by pinching (see Patent Document 2). Both are methods of dividing by generating cracks from the dividing grooves using the brittleness of ceramics.

JP 2002-18830 A JP 2000-238034 A

  When the dividing groove is provided on one side of the ceramic material, the plate-like material is divided by generating a crack from the dividing groove to the opposite surface, but it is difficult to generate a crack uniformly over the length direction of the dividing groove. The dividing line is not straight and is likely to bend.

  In addition, the conventional method of dividing a plate material with a belt or roll can improve the productivity because it can be divided continuously. However, since the conveyance and division are always performed while applying a load to the plate material, the product division accuracy is poor. Otherwise, the product may be warped or chipped.

  The present invention has been made in view of such circumstances, and the plate-like material is divided linearly along the dividing groove, and the cross-section is also divided perpendicularly to the plane of the material to obtain a high-precision. It aims at providing the division body manufacturing apparatus and manufacturing method which can manufacture a division body.

The present invention is a divided body manufacturing apparatus for manufacturing a plurality of divided bodies by dividing a plate-like material including a plate-like brittle material in which divided grooves along a predetermined first direction are formed along the divided grooves. A base table on which the plate-shaped material is placed, an upper surface cover film and a lower surface cover film that are in contact with the upper and lower surfaces of the plate-shaped material, and disposed on the base table, with the lower surface cover film interposed therebetween. An elastic sheet on which a plate-like material is disposed; a pressing portion that is disposed above the base table and has a curved elastic pressing surface having a center of curvature along the first direction; and the plate shape on the base table. against the material, the elastic pressing surface is moved in the vertical direction, and a pressing portion drive unit Ru is pressed through the top cover film with respect to arranged the plate-like material on the base stand on, the elastic sheet Along the second direction An elastic sheet driving device that conveys the plate-like material by intermittently advancing, a supply roller for supplying the upper surface cover film for advancing the upper surface cover film in the second direction, and the upper surface cover film. A supporting roller for supporting, a winding roller for winding up the upper surface cover film, a supply roller for supplying the lower surface cover film to advance the lower surface cover film in the second direction, and the lower surface cover film are supported. A support roller, and a take-up roller for winding the lower surface cover film .

According to this manufacturing apparatus, pressure can be applied to the plate-shaped material along the dividing grooves between the elastic sheet and the elastic pressing surface on the base table. For this reason, a plate-shaped material is hard to bend, and a plate-shaped material can be divided | segmented accurately. Furthermore, since the elastic pressing surface is curved, it is possible to prevent the plate-shaped material from being damaged at portions other than the dividing grooves by applying excessive pressure locally.
In addition, by providing an upper surface cover film and a lower surface cover film that are in contact with the upper and lower surfaces of the plate material, the division is performed in a state where the plate material is covered with the cover film. It is possible to prevent degradation of the elastic sheet and the elastic pressing surface due to adhesion of the cracked chips generated when the sheet is divided, and adhesion of the broken chips to the plate material to be divided next.
In addition, since the elastic sheet drive device that intermittently advances the elastic sheet along the second direction can easily convey the plate-shaped material placed on the elastic sheet, a plurality of plate-shaped materials can be used. By sequentially moving the elastic pressing surface downward, a large number of divided bodies can be manufactured efficiently.

  In this manufacturing apparatus, it is preferable that the pressing unit driving device precisely moves the elastic pressing surface along a second direction intersecting the first direction. In this case, since the elastic pressing surface can be arranged at an accurate position with respect to the dividing groove, the plate-like material can be divided with high accuracy.

  In this manufacturing apparatus, it is preferable that the pressing portion includes an elastic cover that covers an upper surface of the plate-shaped material and a pressure element that pressurizes the plate-shaped material through the elastic cover. In this case, it is possible to prevent the plate-like material from bouncing at the time of division, and it is possible to prevent damage such as scratches or partial chipping of the divided body.

  In this manufacturing apparatus, it is preferable that the elastic sheet has a hardness lower than that of the elastic pressing surface. In this case, the amount of bending of the plate-shaped material necessary for the division can be obtained by absorbing the amount of bending displacement of the plate-shaped material at the time of division by the elastic sheet.

Moreover, the divided body manufacturing method of the present invention places a plate-like material including a plate-like brittle material in which division grooves are formed in advance on an elastic sheet in a state covered with an upper surface cover film and a lower surface cover film , A curved elastic pressing surface having a center of curvature along the dividing groove is lowered from above the plate-shaped material toward the dividing groove of the plate-shaped material in a stopped state, and the elastic pressing surface, the elastic sheet, The plate material is pressed along the dividing groove between the plate material, the plate material is divided along the dividing groove in a state of being covered with the upper surface cover film and the cover film, and the lower surface cover is divided. While conveying the said plate-shaped raw material with a film, the said upper surface cover film is advanced, and a several division body is manufactured.

  According to this manufacturing method, pressure can be applied to the plate-shaped material along the dividing groove between the elastic sheet and the elastic pressing surface, so that the plate-shaped material is hardly deformed and the plate-shaped material is divided with high accuracy. can do. Furthermore, since the elastic pressing surface is curved, it is possible to prevent the plate-shaped material from being damaged at portions other than the dividing grooves by applying excessive pressure locally.

  In this manufacturing method, it is preferable that the elastic sheet has a hardness lower than that of the elastic pressing surface, and the plate-like material is placed so that the divided grooves are brought into contact with the elastic sheet. In this case, the bending amount of the plate-shaped material necessary for the division can be obtained by absorbing the bending displacement amount of the plate-shaped material at the time of the division by the elastic sheet having a lower hardness.

  According to the divided body manufacturing apparatus and manufacturing method of the present invention, since the product is divided separately from the conveyance, it is possible to prevent the bending of the plate-like material, and to accurately divide it linearly along the dividing groove, Even in the cross section, it can be divided perpendicularly to the plane of the material to produce a highly accurate divided body.

It is sectional drawing which shows a power module provided with the division body (substrate for power modules) manufactured with the division body manufacturing apparatus of this invention. It is a top view which shows the plate-shaped raw material for manufacturing the division body which concerns on this invention. It is a perspective view which shows the division body manufacturing apparatus of this invention. It is a figure which shows the state which a part of division body manufacturing apparatus of this invention operate | moves.

  Hereinafter, embodiments of a divided body manufacturing apparatus and a divided body manufacturing method according to the present invention will be described with reference to the drawings. In the following embodiments, a substrate used in a power module that controls a large current and a high voltage is applied as a divided body.

  As shown in FIG. 1, the power module 10 includes a power module substrate 11 and an electronic component 12 such as a semiconductor chip mounted on the surface of the power module substrate 11.

  The power module substrate 11 includes a ceramic substrate 13, a circuit layer metal layer 14 laminated on the surface of the ceramic substrate 13, and a heat dissipation layer metal layer 15 laminated on the back surface. An electronic component 12 is mounted on the circuit layer metal layer 14. A heat sink 16 is attached to the heat dissipation layer metal layer 15.

The ceramic substrate 13 is formed in a rectangular shape using, for example, a nitride ceramic such as AlN (aluminum nitride) or Si ₃ N ₄ (silicon nitride) or an oxide ceramic such as Al ₂ O ₃ (alumina) as a base material. Has been.

  The circuit layer metal layer 14 is formed of pure aluminum or an aluminum alloy, and is formed into an outer shape of a circuit pattern by pressing or etching. The heat radiation layer metal layer 15 is formed of pure aluminum in a rectangular shape slightly smaller than the ceramic substrate 13.

  The circuit layer metal layer 14 and the heat dissipation layer metal layer 15 and the ceramic substrate 13 are made of a brazing material such as Al—Si, Al—Ge, Al—Cu, Al—Mg, or Al—Mn. It is brazed.

  The electronic component 12 is joined to the circuit layer metal layer 14 by a solder material 17 such as Sn—Ag—Cu, Zn—Al, or Pb—Sn. The electronic component 12 and the terminal portion of the circuit layer metal layer 14 are connected by a bonding wire (not shown) made of aluminum.

  The heat sink 16 is joined to the heat radiation layer metal layer 15 by brazing, soldering, bolts or the like. The heat sink 16 is formed by extrusion molding of an aluminum alloy, and a plurality of flow paths 16a through which cooling water flows are formed along the length direction thereof.

  The power module substrate 11 is formed by dividing a plate-like material 20 including a plate-like brittle material (ceramics flat plate 22) having a division groove 21 formed on one side in advance by laser processing or the like along the division groove 21. It is a divided body. As shown in FIG. 2, the ceramic flat plate 22 has a wide area where a plurality of power module substrates 11 can be formed, and the circuit layer metal layer 14 and the heat dissipation are formed on the front and back surfaces of each region partitioned by the dividing grooves 21. The layer metal layer 15 is joined. That is, the ceramic flat plate 22 (that is, the plate-like material 20) to which the circuit layer metal layer 14 and the heat dissipation layer metal layer 15 are joined is divided along the dividing groove 21 using the divided body manufacturing apparatus 30 shown in FIG. As a result, a plurality of power module substrates 11 (divided bodies) are manufactured from one plate-like material 20. The dividing groove 21 is formed on either the front or back surface of the ceramic flat plate 22.

  FIG. 3 shows a divided body manufacturing apparatus 30 according to the first embodiment of the present invention. The divided body manufacturing apparatus 30 includes a flat base table 32 having rigidity, an elastic sheet 41 that is disposed on the base table 32 and on which the plate-like material 20 is placed, and is disposed above the base table 32. A pressing portion 70 having a curved elastic pressing surface 71 having a center of curvature along the direction x and a pressing portion driving device 50 for moving the elastic pressing surface 71 relative to the plate-like material 20 on the base table 32 are provided. In this divided body manufacturing apparatus 30, the plate-like material 20 is arranged so that the divided grooves 21 are along the first direction x.

  The pressing unit 70 includes an elastic cover 35 that covers the upper surface of the plate-shaped material 20 and a pressure element 34 that pressurizes the plate-shaped material 20 via the elastic cover 35, and is disposed almost above the center of the base table 32. Has been. In the pressing portion 70, the elastic pressing surface 71 is formed by the lower surface of the elastic cover 35 pushed downward by the lower surface 34a of the pressure element 34, and has a curved surface shape (for example, a diameter of 80 mm) along the curved surface of the lower surface 34a of the pressure element 34. Therefore, the center of curvature thereof is parallel to the first direction x.

  The elastic pressing surface 71 can be moved in the vertical direction by the pressing unit driving device 50 and can be precisely moved along the second direction y. For example, as shown in FIG. 4, the pressing unit driving device 50 includes a cylinder 51 for moving up and down, an electric actuator 52 using a ball screw for precise movement along the second direction y, an elastic cover 35, and a lower cover film 43. It comprises a drive device (not shown) and the like.

  The elastic cover 35 is an endless belt made of urethane coating cloth having a thickness of, for example, 0.9 mm and a shore hardness of about 80, which is provided around the pressure element 34. The elastic cover 35 includes a pair of support rollers 36a arranged substantially horizontally, and the support rollers 36a. It is wound around the tension adjusting roller 36b disposed above. The tension of the elastic cover 35 is adjusted by moving the tension adjusting roller 36b in the vertical direction.

  Further, an upper surface cover film 37 that contacts the upper surface of the plate material 20 when the plate material 20 is divided is provided below the elastic cover 35. The upper surface cover film 37 is supplied from the supply roller 38a, passed under the support rollers 36a, and wound around the take-up roller 38b, and can be advanced along the second direction y. .

  The elastic cover 35 and its supporting roller 36a and tension adjusting roller 36b, and the upper surface cover film 37 and its supply roller 38a and take-up roller 38b are provided so as to move up and down as the pressure member 34 moves up and down. .

  The elastic sheet 41 on which the plate-like material 20 is placed advances intermittently on the base table 32 along the second direction y by the elastic sheet driving device 40. The elastic sheet 41 is a urethane endless belt having a thickness of about 0.9 mm and a Shore hardness of about 80, for example, and is wound between a pair of support rollers 42a arranged substantially horizontally. The tension of the elastic sheet 41 is adjusted by moving the tension adjusting roller 42b in the vertical direction. The hardness of the elastic sheet 41 is preferably lower than that of the elastic pressing surface 71 (that is, the elastic cover 35).

Furthermore, a lower surface cover film 43 that covers the lower surface of the plate material 20 when the plate material 20 is divided is provided on the upper side of the elastic sheet 41. The lower surface cover film 43 is provided so as to be supplied from the supply roller 44a, passed over each of the support rollers 42a, and taken up by the take-up roller 44b, and integrally with the elastic sheet 41 along the second direction y. It is possible to move forward.

  The base table 32 is provided with a positioning plate 33 for positioning the plate material 20 with respect to the base table 32. With this positioning plate 33, the plate material 20 or the power module substrate 11 can be arranged at a predetermined position during supply, division, and recovery.

  A method of manufacturing the divided body (power module substrate) 11 by dividing the plate-like material 20 using the divided body manufacturing apparatus 30 will be described. First, the plate-like material 20 in which the division grooves 21 are formed in advance is held by the supply hand 60 and supplied onto the elastic sheet 41 (that is, on the lower surface cover film 43). At this time, the plate-like material 20 is disposed so that the dividing grooves 21 are aligned in a direction (that is, the first direction x) that intersects the conveying direction of the elastic sheet 41 (that is, the second direction y). The plate-like material 20 is disposed with the dividing grooves 21 facing downward so that the dividing grooves 21 are brought into contact with the elastic sheet 41 having a relatively low hardness.

  Next, the elastic sheet 41 is advanced together with the lower surface cover film 43, and the plate material 20 is moved to a predetermined position below the pressing portion 70. Then, the elastic cover 35, the upper surface cover film 37, and the pressure element 34 are lowered toward the plate material 20. At this time, by lowering the elastic cover 35 and the upper surface cover film 37 prior to the pressure element 34, the plate-like material 20 has the elastic sheet 41, the lower surface cover film 43, the elastic cover 35, and the upper surface cover as shown in FIG. 4. The film 37 is placed and held on the base table 32 in a stopped state with the upper and lower surfaces covered.

  Next, the pressure member 34 is further lowered, and the elastic pressing surface 71 having the center of curvature along the dividing groove 21 is pressed against the plate material 20. Thereby, a pressure is applied to the plate-shaped material 20 along the dividing groove 21 between the pressing portion 70 and the base base 32, the ceramic flat plate 22 is divided, and the power module substrate (divided body) 11 is manufactured. . At this time, since the plate-shaped material 20 is in a state where the upper surface and the lower surface are covered by the elastic sheet 41, the lower surface cover film 43, the elastic cover 35, and the upper surface cover film 37, the plate-shaped material 20 is held without being displaced.

  More specifically, due to the hardness difference between the elastic sheet 41 and the elastic pressing surface 71, the pressing force by the elastic pressing surface 71 having a high hardness effectively acts on the plate-shaped material 20, and the elastic sheet 41 having a low hardness Since the displacement of the plate material 20 is effectively absorbed, pressure can be applied to the plate material 20 while suppressing deformation.

  Furthermore, as shown in FIG. 4, when a plurality of dividing grooves 21 are formed in the plate-shaped material 20, the lower surface cover film 43 (elastic sheet 41) is advanced as necessary to convey the plate-shaped material 20. At the same time, the pressing part 70 is moved to an accurate position with respect to each divided groove 21, and the pressing part 70 is sequentially pressed similarly for each divided groove 21 to divide the plate-like material 20. Thereby, a plurality of power module substrates 11 are manufactured from one plate-like material 20.

  In this way, while the plate material 20 is divided, the next divided plate material 20 is supplied onto the lower surface cover film 43 (elastic sheet 41). When the division of one plate-like material 20 is completed, the pressing portion 70, the elastic cover 35, and the upper cover film 37 are raised and separated from the power module substrate 11 on the elastic sheet 41. Next, the elastic sheet 41 and the lower surface cover film 43 are advanced, the next plate-shaped material 20 is arranged below the pressing portion 70 to start the division process, and the power module substrate 11 that has advanced to a predetermined position is recovered. It collects from the elastic sheet 41 by 61.

  As described above, according to the divided body manufacturing apparatus 30 according to the embodiment of the present invention, the divided groove directed downward in a state where the plate-like material 20 is held between the elastic sheet 41 and the elastic cover 35. Since pressure is applied to the plate-shaped material 20 from above along the line 21, the plate-shaped material 20 is difficult to bend and can be divided with high accuracy.

  Further, since the elastic pressing surface 71 of the pressing portion 70 is curved, no excessive pressure is applied locally, and the plate-like material 20 can be prevented from being damaged at portions other than the dividing grooves 21. Further, by moving the elastic pressing surface 71 of the pressing portion 70 with respect to the base base 32, one plate-like material 20 in which the plurality of dividing grooves 21 are formed is divided into a plurality of power module substrates (divided bodies). ) 11 can be easily manufactured.

  Furthermore, since the upper and lower surfaces are covered with the elastic sheet 41 and the elastic cover 35 via the lower surface cover film 43 and the upper surface cover film 37, the scraps at the time of division are divided into the elastic sheet 41 and the elastic cover 35. It can prevent adhesion. In particular, the lower surface cover film 43 and the upper surface cover film 37 move forward together with the elastic cover 35 and the elastic sheet 41, respectively, and the position of the plate-like material 20 is shifted during division because the new surface and the upper and lower surfaces are always pressed. When the elastic pressing surface 71 is sequentially pressed against the plurality of divided grooves 21 of the plate-shaped material 20, it can be pressed in parallel to each divided groove 21, and the plate-shaped material 20 at a portion other than the divided grooves 21 can be pressed. Damage can be suppressed. Further, since the upper cover film 37 and the lower cover film 43 are covered, deterioration of the elastic cover 35 and the elastic sheet 41 is suppressed.

In addition, this invention is not limited to the thing of the structure of the said embodiment, In a detailed structure, it is possible to add a various change in the range which does not deviate from the meaning of this invention.
For example, in the above-described embodiment, as the driving device for relatively moving the plate-like material 20 and the pressing portion 70 on the base table 32, the conveying device for the plate-like material 20 and the driving device for the pressing portion are provided. It may be only. Moreover, although the plate-shaped raw material 20 provided the dividing groove 21 only on one side in the said embodiment, you may provide the dividing groove 21 on both surfaces.

  Moreover, in the said embodiment, although the plate-shaped material is conveyed along the 2nd direction which cross | intersects the division groove | channel of a plate-shaped material, even if it makes the conveyance direction of a plate-shaped material correspond to the 1st direction along a division | segmentation groove | channel. Good. In other words, the plate-shaped material may be supplied so that the dividing grooves are along the conveying direction, and the elastic pressing surface may be moved precisely in a direction intersecting the conveying direction of the plate-shaped material. Thereby, the plate-shaped raw material which has a division groove along the direction which cross | intersects the division groove in the said embodiment can be divided | segmented. Moreover, you may combine these structures.

10 Power Module 11 Power Module Substrate (Partition)
DESCRIPTION OF SYMBOLS 12 Electronic component 13 Ceramic substrate 14 Circuit layer metal layer 15 Heat radiation layer metal layer 16 Heat sink 16a Flow path 17 Solder material 20 Plate material 21 Split groove 22 Ceramic flat plate 30 Split body manufacturing apparatus 32 Base stand 33 Positioning plate 34 Pressure element 34a Lower surface 35 Elastic cover 36a Support roller 36b Tension adjustment roller 37 Upper surface cover film 38a Supply roller 38b Winding roller 40 Elastic sheet driving device 41 Elastic sheet 42a Support roller 42b Tension adjustment roller 43 Lower surface cover film 44a Supply roller 44b Winding roller 50 Press part drive device 51 Cylinder 52 Electric actuator 60 Supply hand 61 Collection hand 70 Press part 71 Elastic pressing surface x 1st direction y 2nd direction

Claims (6)

A split body manufacturing apparatus for manufacturing a plurality of split bodies by splitting a plate-like material including a plate-like brittle material in which split grooves along a predetermined first direction are formed, along the split grooves,
A base table on which the plate-like material is placed;
An upper surface cover film and a lower surface cover film in contact with the upper and lower surfaces of the plate-shaped material;
An elastic sheet disposed on the base table and on which the plate-like material is placed via the lower surface cover film ;
A pressing portion that is disposed above the base table and has a curved elastic pressing surface having a center of curvature along the first direction;
Pressing the respect to the plate-like material on said base platform, said moving the elastic pressing surface in the vertical direction, Ru is pressed through the top cover film with respect to arranged the plate-like material on the base stand on A drive unit ;
An elastic sheet driving device that conveys the plate-like material by intermittently advancing the elastic sheet along a second direction intersecting the first direction;
A supply roller for supplying the upper surface cover film, a support roller for supporting the upper surface cover film, and a take-up roller for winding the upper surface cover film for advancing the upper surface cover film in the second direction;
A supply roller for supplying the lower surface cover film, a support roller for supporting the lower surface cover film, and a take-up roller for winding the lower surface cover film for advancing the lower surface cover film in the second direction. A divided body manufacturing apparatus comprising: The pressing portion drive device, the divided body manufacturing apparatus according to claim 1, characterized in that to precisely move along the elastic pressing surface before Symbol second direction.   The divided body according to claim 1, wherein the pressing portion includes an elastic cover that covers an upper surface of the plate-shaped material, and a pressure element that pressurizes the plate-shaped material through the elastic cover. manufacturing device.   The divided body manufacturing apparatus according to claim 1, wherein the elastic sheet has a lower hardness than the elastic pressing surface. Placing a plate-like material including a plate-like brittle material in which split grooves are formed in advance on an elastic sheet in a state of being covered by an upper surface cover film and a lower surface cover film ,
A curved elastic pressing surface having a center of curvature along the dividing groove is lowered from above the plate-shaped material toward the dividing groove of the plate-shaped material in a stopped state,
By pressing the plate-shaped material along the divided groove between the elastic pressing surface and the elastic sheet, the plate-shaped material is covered with the upper surface cover film and the cover film in the divided groove. Split along
A divided body manufacturing method, wherein the elastic sheet and the lower surface cover film are advanced to convey the plate material, and the upper surface cover film is advanced to manufacture a plurality of divided bodies. The elastic sheet has a lower hardness than the elastic pressing surface,
The divided body manufacturing method according to claim 7, wherein the plate-shaped material is placed so that the divided grooves are brought into contact with the elastic sheet.

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