JP2009143197A - Divided body manufacturing method and apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To manufacture divided bodies without causing chipping even from a plate-like material which is thin-walled with low rigidity. <P>SOLUTION: A method is for manufacturing a plurality of divided bodies 13 divided from division grooves 12 by curving the plate-like material 11 formed of a brittle material formed beforehand with division grooves 12, wherein a pair of contact plate members 21 formed of a flexible material are arranged on both faces of the plate-like material 11, and in a state of holding the plate-like material 11 by these contact plate members 21, the contact plate members 21 are bent to divide the plate-like material 11 between both contact plate members 21. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a method of manufacturing individual divided bodies by dividing a plate-like material made of a brittle material such as a ceramic substrate on which electronic components are mounted into small pieces, and a manufacturing apparatus therefor.

  Substrates for mounting electronic components such as semiconductor elements are divided in advance on the surface of a plate-like material such as a ceramic plate having a large area where a plurality of these substrates can be formed so that each substrate is partitioned. A circuit is formed in each of the regions defined by the dividing grooves, and then divided along the dividing grooves.

As a technique for dividing such a plate-shaped material, conventionally, a method of bending the plate-shaped material between a pair of molds having a concave surface and a convex surface (see Patent Document 1), and bending each belt in a state of being sandwiched between belts. Method (see Patent Document 2). In addition, a method of dividing the divided portion by pressing the part to be divided by a comb-like mold so as not to contaminate the circuit surface (see Patent Document 3) has also been proposed, and this method maintains the cleanness of the circuit surface, The division method has a small dimensional inclination and high dimensional accuracy.
JP-A-8-206999 JP 2002-18830 A JP 2006-281324 A

  By the way, as an electronic component, a power module for supplying electric power among semiconductor elements is exposed to thermal stress more than ever under use due to an increase in heat generation and a reduction in rigidity due to thinning of a joining member. The insulating substrate may be bent and deformed by distortion of the mating member, and the insulating substrate may be cracked. This crack is considered to start from a small chipping (chipping) that has occurred at the time of division, which has not been a problem until now, and it is desired to divide the crack so that such chipping does not occur.

  The present invention has been made in view of such circumstances, and can produce a divided body without causing chipping even in a thin and low-rigid plate material, and is a manufacturing method suitable for manufacturing a power module substrate. And to provide a manufacturing apparatus.

  The ratio of occurrence of small chipping by the conventional method is often observed in the central portion of the plate-like material, and the inventor presumed that the cause is related to the division process, and examined the division phenomenon in detail. FIG. 7 schematically shows a state in which the plate-shaped material 3 is divided using a pair of comb-shaped molds 1 and 2 having a concave or convex tip, in the order of (a) to (d). First, as shown in (a) to (b), it is divided into two parts from the center of the plate-like material 3 and then divided into the center parts of the two divided plate-like materials 3 as shown in (c). As shown in (d), it is sequentially divided and subdivided into individual divided bodies 4. However, the order may be changed depending on the dimensions of the uneven molds 1 and 2.

  Paying attention to each process, in FIGS. 7A to 7B, the entire plate-like material 3 bends until it is divided at the center, in addition to the force necessary to be divided from the central dividing groove, A force for bending the plate material 3 is applied. This surplus energy becomes “blow” of the divided plate-like material 3, and the plate-like material 3 is not sufficiently restrained by the upper and lower comb teeth 5, or the upper and lower comb-teeth 5 and the plate-like material 3 It is thought that splitting occurs in situations where there is play between them. When the plate-like material 3 is sufficiently restrained by the upper and lower comb teeth 5, the plate-like material 3 is equally divided into left and right as shown in FIG. 8A, but the constraint by the upper and lower comb teeth 5 is not sufficient. For example, as shown in FIG. 8B, a tongue-like burr 6 is generated in the plate-like material 3 (or divided body 4), and the burr portion becomes a chip 7 in the other divided body 4, or FIG. As shown in (c), it was estimated that chipping 8 occurred due to contact between the divided plate-like materials 3 (divided bodies 4). This phenomenon is the same not only in the process of FIG. 7B but also in the process of FIG. 7C, and it was estimated that the frequency of chipping is large in the order of the surplus energy.

  Under such knowledge, the method for manufacturing a divided body of the present invention manufactures a plurality of divided bodies by dividing a plate-like material made of a brittle material, in which a divided groove is formed in advance, by dividing from the divided groove. A method comprising: arranging a pair of patch plate members made of a flexible material on both surfaces of the plate material, and bending the corresponding plate member in a state where the plate material is sandwiched by the patch plate members. The plate-shaped material is divided between the two contact plate members.

  Moreover, the divided body manufacturing apparatus of the present invention is a divided body manufacturing apparatus for manufacturing a plurality of divided bodies by dividing a plate-like material made of a brittle material, in which divided grooves are formed in advance, by dividing the divided material from the divided grooves. A pair of contact plate members made of a flexible material disposed on both surfaces of the plate material, and a contact plate member that flexes the corresponding plate member with the plate material held between the contact plate members And a deformation means.

  That is, by placing the contact plate members made of a flexible material on both sides of the plate-shaped material and bending these contact plate members, the plate-shaped material is curved via the contact plate member, and from the brittle material The plate member presses the entire surface of the plate-like material due to its flexibility, and is bent while being in contact with the entire surface of the plate-like material. Accordingly, even when the plate-like material is divided, it is restrained from both sides by the both abutting plate members, so that “blow” does not occur.

  Further, in the manufacturing apparatus of the present invention, a protruding strip portion that contacts the formation site of the dividing groove in the plate-shaped material is provided on the surface of the contact plate member facing the plate-shaped material. To do.

  In this manufacturing apparatus, since the contact plate member comes into contact only with the division groove forming portion of the plate-shaped material by the protruding portion, the mounting surface is kept clean even when used as an electronic component mounting substrate. can do.

  According to the method for manufacturing a split body and the manufacturing apparatus of the present invention, the plate-like material is divided because the plate-like material is bent while being sandwiched between the contact plate members made of a flexible material. Until the surface of the plate-like material can be kept in full contact with the flexible plate member, it prevents the occurrence of “blowing” of the plate-like material at the time of division, and there is no chipping. Divided bodies can be manufactured. Therefore, a high-quality substrate can be manufactured by applying it to the manufacture of a power module substrate that is thin and has low rigidity.

  Hereinafter, embodiments of a method for manufacturing a divided body and a manufacturing apparatus according to the present invention will be described with reference to the drawings.

  The plate-like material divided by the manufacturing method of this embodiment is an insulating substrate for a power module, and is made of, for example, AlN (aluminum nitride) ceramics. In the plate-like material 11, a division groove 12 is formed on one side of the division-scheduled portion by laser machining, cutting with a diamond wheel, or the like. For example, in order to form a plurality of rectangular insulating substrates (divided bodies) 13 by division, the division grooves 12 are formed in a lattice shape as a whole by being arranged at regular intervals in the vertical direction and the horizontal direction, respectively. Yes. In addition, in the region defined by the dividing grooves 12, metal plates 14 such as aluminum are attached to both surfaces by brazing or the like, and the surface of one metal plate 14 is the electronic component of the power module. The other metal plate 14 is a mounting surface and is a heat transfer body to a heat sink or the like. In addition, this plate-shaped raw material 12 is an example, and can be suitably changed according to design.

  FIG. 1 shows a manufacturing apparatus according to the first embodiment. The manufacturing apparatus according to the first embodiment includes a pair of contact plate members 21 arranged on both surfaces of the plate-shaped material 11, a fixing member 22 that holds one end of the contact plate member 21, and the contact plate member 21. It comprises bending moment applying means 23 for gripping the end and applying a bending moment.

  The backing plate member 21 is made of a synthetic resin having a larger flexibility than a plate-like material that is a brittle material, for example, a vinyl chloride resin (elastic coefficient at room temperature is about 3 GPa), a rectangular plate-like portion 24, The plate-like portion 24 is provided with a plurality of ridge portions 25 formed in a comb-teeth shape on one surface. The plate-like portion 24 is formed in a larger area than the plate-like material 11 so as to cover the entire surface of the plate-like material 11, and has a uniform thickness so that it can be evenly curved as a whole.

  In addition, the ridges 25 are placed along the length direction of the divided grooves 12 on the part where the divided grooves 12 are formed in the plate-shaped material 11 when the contact plate member 21 is disposed on the surface of the plate-shaped material 11. It is in contact with each other, and is formed on the surface of the plate-like portion 11 so as to rise vertically with a certain width. The width of the tip of the ridge 25 is set to be approximately the same as the width of the dividing groove 12. The dividing grooves 12 are formed in a lattice shape, but the ridges 25 are formed in only one of the longitudinal direction and the lateral direction of the lattice, for example, along the longitudinal direction, and follow the longitudinal direction. The dividing grooves 12 are formed in parallel with the same interval.

  A pair of the abutting plate members 21 are provided so as to sandwich the plate-shaped material 11 from both sides. In this case, the protruding strip portions 25 of both the contacting plate members 21 are opposed to each other, and the protruding strip portions 25 form the plate-shaped material. 11 is formed so as to hold the part where the dividing groove 12 is formed. Therefore, these two contact plate members 21 are respectively arranged on the front surface side and the back surface side of the plate-shaped material 11, and are formed in the same shape and the same size by the same material.

  The fixing member 22 is rotatably supported by a fulcrum 22a and holds one end portion of the both plate members 21 in a state where the plate-like material 11 is sandwiched, and serves as a pin fulcrum. A concavity 26 is formed. Further, in this embodiment, the bending moment applying means 23 applies a bending moment to the end opposite to the end fixed to the fixing member 22, and grips the end. It is the structure which provides rotational force. In this case, the bending moment applying means 23 bends in a direction in which the dividing grooves 12 of the plate-like material 11 expand, that is, as shown by arrows in FIG. A bending moment is applied in the direction to be applied. That is, the bending moment applying means 23 and the fixing member 22 constitute a contact plate member deforming means for bending the contact plate member 21.

  Next, a method of manufacturing a power module substrate as the divided body 13 using the manufacturing apparatus configured as described above will be described.

  The dividing grooves 12 are formed in a lattice shape on one side of the plate-shaped material 11 in advance, and the metal plates 14 are pasted to both surfaces of the region surrounded by the dividing grooves 12 by brazing.

  Then, the contact plate member 21 is brought into contact with both surfaces of the plate material 11. At this time, as described above, the protruding strip portion 25 of the contact plate member 21 is disposed so as to contact the portion of the dividing groove 12 of the plate-like material 11. In a state where the plate-shaped material 11 is sandwiched, one end portion is fitted and fixed to the concave portion of the fixing member 22, and the other end portion is held by the bending moment applying means 23. In this state, it arrange | positions so that the surface in which the division | segmentation groove | channel 12 of the plate-shaped raw material 11 is formed may be curved convexly by the bending moment. In the example of FIG. 1, the dividing grooves 12 are arranged facing downward. When a bending moment is applied to the end held by the bending moment applying means 23 as indicated by the arrow in FIG. 1A, the bending moment acts as a constant over the entire length of the contact plate member 21. It will be. Then, the plate-like material 11 is bent together with the both abutting plate members 21 by the bending moment, and when the plate-like material 11 is bent beyond the elastic limit of the plate-like material 11, the plate-like material 11 is divided along the dividing grooves 12.

  In this case, the ridges 25 of the backing plate member 21 are in contact with both sides of the dividing groove 12 of the plate-like material 11 by the backing plate members 21 arranged on both sides of the plate-like material 11. Since almost the entire surface of the member 21 is formed in parallel with each other at the same fixed interval as the dividing groove 12, the plate-shaped material 11 is in contact with almost the entire surface. Moreover, since both the contact plate members 21 are formed of the same material and have the same shape and the same dimensions, they are curved and deformed by the same amount. Therefore, both the abutting plate members 21 and the plate-shaped material 11 are deformed as an integral one while maintaining the contact state of the ridges 25.

  Of these contact plate member 21 and plate-shaped material 11, the contact plate member 21 is highly flexible compared to the plate-shaped material 11, so that it is greatly curved and deformed by the applied bending moment. On the other hand, the plate-like material 11 is a brittle material and deforms following the curved deformation of the backing plate member 21 to some extent, but cannot be followed and is divided from the dividing groove 12. FIG. 1B shows the state at the time of the division. When the plate-like material 11 reaches the division, the backing plate member 21 is still within the elastic range, and It is deformed while maintaining the state in which the plate-like material 11 is sandwiched therebetween. Since the bending moment acts uniformly, any portion in the length direction of the contact plate member 21 is curved with substantially the same radius of curvature, so that it is sandwiched between both contact plate members 21. The plate-like material 11 is all divided at a time at substantially the same timing.

Therefore, the plate-like material 11 is divided almost at a time in a state in which the portion of the dividing groove 12 is constrained from both sides by the convex strip portion 25 of the contact plate member 21, so that the phenomenon of “abare” occurs. In addition, occurrence of chipping such as chipping is also suppressed.
In addition, even after the division, the divided bodies 13 are held between the ridges 25, and the contact plate member 21 does not contact the metal plates 14 provided on both surfaces thereof. The 14 surfaces can be kept clean.

FIG. 2 shows a second embodiment of the production apparatus of the present invention.
Also in the manufacturing apparatus of this embodiment, the plate-shaped material 11 is held in a state where the protrusions 25 are formed on the contact plate member 31 and between the protrusions 25 of the pair of contact plate members 31. The points and the like are the same as those of the first embodiment. In this embodiment, extension portions 31a having the same length are formed at both ends of the contact plate member 31, and the plate-like material 11 is sandwiched between intermediate portions between the extension portions 31a. ing. Further, the end portions of the extension portions 31a of the both contact plate members 31 sandwiching the plate-like materials 11 are rotatably supported by the pin fulcrums 32, and are located inside the pin fulcrums 32 and from the extension portions 31a. Also, pin-shaped protrusions 34 at both ends of the beam 33 are in contact with the inside (that is, both ends of the intermediate portion sandwiching the plate-like material 11), and a load is applied to the center of the beam 33. . The distance from each pin fulcrum 32 to the pin-like protrusions 34 at both ends of the beam 33 (the length of the extension 31a in the example of FIG. 2) is the same dimension.

  In the case of this embodiment, the abutting plate member 31 has a so-called simple beam support structure, and the beam 33 is positioned at the same distance from each pin fulcrum 32 (in the case of FIG. 2, both end positions of the plate-like material 11). The same concentrated load is applied by the pin-shaped protrusion 34. Therefore, the bending moment gradually increases from each pin fulcrum 32 to the pin-shaped protrusion 34 of the beam 33, and on the inner side of the pin-shaped protrusion 34 of the beam 33 (in other words, a plate-shaped material). 11), a uniform bending moment is applied. That is, in this embodiment, the contact plate member deforming means for bending the contact plate member 31 is configured by the beam 33 having the pin fulcrum 32 and the pin-shaped protrusion 34 and the pressing means for applying a load to the beam 33. In addition, the same code | symbol is attached | subjected to the same part as the structure of other 1st Embodiment, and description is abbreviate | omitted.

  Also in this embodiment, the plate-shaped material 11 is bent and deformed together while being almost entirely sandwiched by the contact plate member 31, and the plate material 11 is still in the elastic region when the contact plate member 31 having excellent flexibility is still in the elastic region. Since the state material 11 is divided and the state of being constrained by the projecting ridge portions 25 of the both abutting plate members 31 is maintained even during the division, the occurrence of chipping is suppressed without causing the phenomenon of “blurring”. .

  FIG. 3 shows a third embodiment of the manufacturing apparatus of the present invention. In the manufacturing apparatus of this embodiment, the structure of the contact plate member 21 is the same as that of the first embodiment. In this embodiment, the contact plate member 21 is sandwiched between a mold 42 having a convex surface 41 and a mold 44 having a concave surface 43, and is bent and deformed along the convex surface 41 and the concave surface 43. In this case, the convex surface 41 and the concave surface 43 have the same curvature radius. In this embodiment, the die 42 having the convex surface 41, the die 44 having the concave surface 43, and the pressing means for applying a load to the die 42 constitute the contact plate member deformation means.

  In this manufacturing apparatus, the molds 42 and 44 having the convex surface 41 and the concave surface 43 are subjected to a concentrated load at the center of the plate-like material 11, and in that respect, the comb-like structure of the conventional structure shown in FIG. The bending moment is maximized at the center, as is the case with the molds 1 and 2, but since the flexible backing plate members 21 are provided on both sides of the plate-like material 11, The plate-shaped material 11 is pressed almost entirely by the bending deformation, and is deformed and divided while maintaining both surfaces in a state of being constrained by the ridges 25 of the contact plate member 21.

  Therefore, even if a concentrated load is applied locally to the contact plate member 21 as in this embodiment, the plate material 11 is deformed while the flexible contact plate member is bent, and this contact plate Since the member 21 is in full contact with the plate material 11, a localized concentrated load acts as a uniform force on the plate material 11 as a whole, and also applies to the plate member during division. The constrained state from both sides by the ridge portions 25 of the 21 is maintained, the phenomenon of “blowing” between the two contact plate members 21 is suppressed, and the occurrence of chipping is prevented.

  FIG. 4 shows a fourth embodiment of the manufacturing apparatus of the present invention. In the manufacturing apparatus according to this embodiment, the contact plate member 51 is formed to be longer than the plate-shaped material 11, and a pair of upper and lower portions that press both surfaces of both end portions while leaving a part of the intermediate portion of the contact plate member 51. The base metal members 52A, 52B and 53A, 53B are arranged one by one in the front and rear, and the contact plate member exposed between the front base metal members 52A, 52B and the rear base metal members 53B, 53B. By pressing 51 from above, a roll-shaped reduction member 54 that is bent between the front base metal members 52A and 52B and the rear base metal members 53A and 53B is provided. In this embodiment, the two plate metal members 52A, 52B, 53A, 53B and the rolling-down member 54 constitute a contact plate member deformation means.

  In this manufacturing apparatus, the contact plate member 51 sandwiching the plate-like material 11 is inserted between the upper base metal members 52A and 53A and the lower base metal members 52B and 53B, and the interval between the dividing grooves 12 is increased. While intermittently feeding, the portion of the dividing groove 12 is curved by reducing and curving the portion of the dividing groove 12 by the reducing member 54 between the base metal members 52A and 52B on the front side and the base metal members 53A and 53B on the rear side. It is divided sequentially. When the division of one plate-like material 11 is completed, another plate-like material is sandwiched between the contact plate members 51, and the operation of dividing one by one from the portion of the dividing groove while intermittently feeding in the same manner is repeated. Is done.

  FIG. 5 shows a fifth embodiment of the production apparatus of the present invention. In the manufacturing apparatus of this embodiment, the contact plate members 61 and 62 are formed in an endless belt shape, and the protruding strip portion 25 similar to that in each of the above embodiments is formed on the surface of the strip-shaped portion 63. The part 25 is wound in a state in which it faces outward, and is arranged with an interval at which the plate-like material 11 can be sandwiched vertically. In addition, in a portion where the contact plate members 61 and 62 are arranged in parallel to each other, a pair of upper and lower base metal members 65A and 65B and 66A and 66B, which are the same as those in the fourth embodiment, A pressing member 67 is provided. The pressing plate members 61 and 62 exposed between the pair of front base metal members 65A and 65B and the rear base metal members 66A and 66B are pressed by the reducing member 67 from above. By doing so, the contact plate members 61 and 62 are bent.

And the plate-shaped raw material 11 clamped between the both contact plate members 61 and 62 by intermittently driving the pulley 64 and causing the contact plate members 61 and 62 to run intermittently at intervals of the ridge portions 25. In this configuration, the plate-shaped material 11 is divided by bending the contact plate members 61 and 62 by being moved at intervals of the dividing grooves 12 and being pressed down from above by a pressing member 67 in the middle. In the case of this embodiment, the base plate member deformation means is constituted by the two sets of the base metal members 65A, 65B, 66A, 66B and the reduction member 67.
The lower contact plate member 62 is formed to be longer than the upper contact plate member 61 and protrudes to the near side in the feeding direction from the upper contact plate member 61, and the protruding portion is plate-shaped. A plate-shaped material supply unit 68 is provided on which the material 11 is placed, and the plate-shaped material 11 can be sequentially divided while being continuously supplied thereon.

  In the dividing method according to the above embodiment, the occurrence of chipping of the plate material is extremely reduced, the straightness of the divided surface is increased, and the roughness of the divided surface is improved. Therefore, the product at the center position is divided between the product arbitrarily extracted from the conventional method shown in FIG. 7 and the product divided by the method of the second embodiment of the present invention shown in FIG. 2 and the method of the third embodiment shown in FIG. The surface roughness was compared. In FIG. 6, the result of having measured the range of 2.5 mm from a corner | angular part with the roughness meter is shown. FIG. 7A shows the conventional method, FIG. 2B shows the second embodiment, and FIG. 3C shows the third embodiment. The average roughness Ra = 3.07 μm in the conventional method, 2.60 μm in the method according to the second embodiment of FIG. 2, and 2.37 μm in the method according to the third embodiment of FIG. The improvement was confirmed.

  In the case of the conventional method shown in FIG. 7, chipping occurred in the plate-like material at a rate of about 2%, and most of it occurred in the central portion. However, in the investigation of the cut surface (n = 21) by the simple test using the construction method of the second embodiment in FIG.

  In addition, the generation of chips and the generation of fine powder during division were suppressed, and the cleanliness of the surface was remarkably improved. Further, since the division is performed while being constrained from both sides, the straightness of the divided surface is increased and the dimensional accuracy is improved. For this reason, the divided body manufactured by this manufacturing method is extremely less susceptible to cracking during use and can maintain high reliability.

  In each of the above embodiments, the method of dividing the plate material 11 along the dividing groove 12 along the vertical direction among the dividing grooves 12 formed in a lattice shape has been described. On the other hand, another patch plate member in which a ridge portion is formed along the horizontal direction is prepared, and the same applies to the strip-shaped plate material formed by dividing from the dividing groove 12 along the vertical direction. Can be divided in a way.

The present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the spirit of the present invention.
For example, in the above-described embodiment, the two contact plate members are formed of vinyl chloride resin, but may be formed of other materials as long as they have greater flexibility than the plate-shaped material to be divided. Further, in each embodiment, the two caulking plate members are formed in the same shape and the same size by the same material, and therefore the flexibility thereof is also formed to the same extent, but until the plate-shaped material is deformed and divided. As long as the plate-like material or the divided body can be held between the two abutting plate members even during and after the division, both do not necessarily have the same characteristics. Furthermore, the material of the plate-like portion and the protruding strip portion of the backing plate member may be changed, the plate-like portion is made of a flexible material, and the protruding strip portion is in contact with the plate-like material, so that it has wear resistance. You may make it comprise with a hard plastic etc. as a material. Moreover, although the example which formed the division | segmentation groove | channel only on the single side | surface of a plate-shaped raw material was shown, you may apply to what formed the division | segmentation groove | channel on both surfaces. Further, the present invention can be applied to the case of manufacturing various semiconductor substrates in addition to the power module substrate.

BRIEF DESCRIPTION OF THE DRAWINGS It is a front view which shows 1st Embodiment of the manufacturing apparatus of the division body which concerns on this invention, (a) shows the state before deforming a backing plate member, (b) is a plate-shaped raw material which deform | transforms a backing plate member. Shows a state where is divided. It is a front view which shows 2nd Embodiment of the manufacturing apparatus of the division body which concerns on this invention, and shows the state before and behind a deformation | transformation similarly to FIG. 1, respectively (a) (b). It is a front view which shows 3rd Embodiment of the manufacturing apparatus of the division body which concerns on this invention, and shows the state before and behind a deformation | transformation similarly to FIG. 1, respectively (a) (b). It is a front view which shows 4th Embodiment of the manufacturing apparatus of the division body which concerns on this invention. It is a front view which shows 5th Embodiment of the manufacturing apparatus of the division body which concerns on this invention. It is a chart figure which shows the result of having measured the roughness of the division surface by this invention and the conventional method with the roughness meter. It is the front view which showed a mode that the plate-shaped raw material was divided | segmented with the conventional manufacturing apparatus in order. It is the front view typically shown assuming the case of various conditions about the state immediately after a plate-shaped raw material was divided | segmented.

Explanation of symbols

11 Plate material 12 Dividing groove 13 Insulating substrate (divided body)
DESCRIPTION OF SYMBOLS 14 Metal plate 21 Contact plate member 22 Fixing member 22a Support point 23 Bending moment provision means 24 Plate-shaped part 25 Projection part 26 Recess 31 Contact plate member 31a Extension part 32 Pin support point 33 Beam 34 Pin-shaped protrusion 41 Convex surface 42 Type 43 Concave 44 type 51 contact plate member 52A, 52B base member 53A, 53B base member 54 reduction member 61, 62 contact plate member 63 strip 64 pulley 65A, 65B base member 66A, 66B base member 67 reduction member 68 plate shape Material supply department

Claims (3)

A method of manufacturing a plurality of divided bodies by dividing from a divided groove by curving a plate-like material made of a brittle material in which divided grooves are formed in advance,
A pair of patch plate members made of a flexible material are arranged on both sides of the plate material,
A method of manufacturing a divided body, wherein the plate-like material is divided between the two plate members by bending the plate member in a state where the plate-like material is sandwiched between the plate members. A split body manufacturing apparatus for manufacturing a plurality of split bodies by splitting from a split groove by curving a plate-like material made of a brittle material in which split grooves are formed in advance,
A pair of backing plate members made of a flexible material disposed on both sides of the plate-like material;
An apparatus for manufacturing a divided body, comprising: a plate member deformation means for bending the plate member in a state where the plate material is sandwiched between the plate members.   3. The divided body manufacturing according to claim 2, wherein a projecting ridge portion is provided on a surface of the abutting plate member facing the plate-shaped material, which is in contact with a portion where the divided groove is formed in the plate-shaped material. apparatus.

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