JP5277943B2 - Divided body manufacturing apparatus and manufacturing method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To manufacture divided bodies without chipping even from a thin, less rigid plate material. <P>SOLUTION: An apparatus for manufacturing divided bodies comprises a pair of holder members 21 of an elastic material for holding a plate material 11 in between, a plurality of base members 23 and 24 provided with an insertion clearance 22 into which the holder members 21 holding the plate material 11 in between can be inserted, and spaced in the insertion direction, and a pressure member 25 for elastically deforming both holder members 21 holding the plate material 11 in between from the back of either holder member 21 between the base members 23 and 24. The holder members 21 have on the holding surface a plurality of ribs 32 adapted to abut portions of the plate material 11 where dividing grooves 12 are formed. The base members 23 and 24 are positioned such that, when the ribs 32 of the holder members 21 are arranged in the position of pressure by the pressure member 25, they are in contact with the holder members 21 at the back of both adjacent ribs 32. <P>COPYRIGHT: (C)2009,JPO&amp;INPIT

Description

  The present invention relates to an apparatus and a manufacturing method for manufacturing individual divided bodies by dividing a plate-like material made of a brittle material such as a ceramic substrate on which electronic components are mounted into small pieces.

  Substrates for mounting electronic components such as semiconductor elements are divided in advance on the surface of a plate-like material such as a ceramic plate having a large area where a plurality of these substrates can be formed so that each substrate is partitioned. A circuit is formed in each of the regions defined by the dividing grooves, and then divided along the dividing grooves.

As a technique for dividing such a plate-shaped material, conventionally, a method of bending the plate-shaped material between a pair of molds having a concave surface and a convex surface (see Patent Document 1), and bending each belt in a state of being sandwiched between belts. Method (see Patent Document 2). In addition, a method of dividing the divided portion by pressing the part to be divided by a comb-like mold so as not to contaminate the circuit surface (see Patent Document 3) has also been proposed, and this method maintains the cleanness of the circuit surface, The division method has a small dimensional accuracy and high dimensional accuracy.
JP-A-8-206999 JP 2002-18830 A JP 2006-281324 A

  By the way, as an electronic component, a power module for supplying electric power among semiconductor elements is exposed to thermal stress more than ever under use due to an increase in heat generation and a reduction in rigidity due to thinning of a joining member. The insulating substrate may be bent and deformed by distortion of the mating member, and the insulating substrate may be cracked. This crack is considered to start from a small chipping (chipping) that has occurred at the time of division, which has not been a problem until now, and it is desired to divide the crack so that such chipping does not occur.

  The present invention has been made in view of such circumstances, and can produce a divided body without causing chipping even with a thin and low-rigid plate material, and is a manufacturing apparatus suitable for manufacturing a power module substrate. And to provide a manufacturing method.

  The ratio of occurrence of small chipping by the conventional method is often observed in the central portion of the plate-like material, and the inventor presumed that the cause is related to the division process, and examined the division phenomenon in detail. FIG. 4 schematically shows a state in which the plate-shaped material 3 is divided using a pair of comb-shaped dies 1 and 2 having a concave or convex tip, in the order of (a) to (d). First, as shown in (a) to (b), it is divided into two parts from the center of the plate-like material 3 and then divided into the center parts of the two divided plate-like materials 3 as shown in (c). As shown in (d), it is sequentially divided and subdivided into individual divided bodies 4. However, the order may be changed depending on the dimensions of the uneven molds 1 and 2.

  Paying attention to each process, in FIGS. 4 (a) to (b), the entire plate-like material 3 bends until it is divided at the center, in addition to the force necessary to be divided from the central dividing groove, A force for bending the plate material 3 is applied. This surplus energy becomes “blow” of the divided plate-like material 3, and the plate-like material 3 is not sufficiently restrained by the upper and lower comb teeth 5, or the upper and lower comb-teeth 5 and the plate-like material 3 It is thought that splitting occurs in situations where there is play between them. When the plate-like material 3 is sufficiently restrained by the upper and lower comb teeth 5, the plate-like material 3 is equally divided into the left and right as shown in FIG. 5A, but the constraint by the upper and lower comb teeth 5 is not sufficient. For example, as shown in FIG. 5B, a tongue-like burr 6 is generated in the plate-like material 3 (or divided body 4), and the burr portion becomes a chip 7 in the other divided body 4, or FIG. As shown in (c), it was estimated that chipping 8 occurred due to contact between the divided plate-like materials 3 (divided bodies 4). This phenomenon is the same not only in the process of FIG. 4B but also in the process of FIG. 4C, and it was estimated that the frequency of chipping is large in the order of the surplus energy.

Under such knowledge, the split body manufacturing apparatus according to the present invention splits a plate-like material made of a brittle material, in which split grooves are formed in advance, and splits the split grooves to manufacture a plurality of split bodies. A body manufacturing apparatus having a pair of contact plate members made of an elastic material for sandwiching the plate-shaped material, and an insertion gap portion into which the contact plate member in a state of sandwiching the plate-shaped material can be inserted , It consists vertical pair of the upper member and the lower member, and a plurality of base members which are arranged spaced along the insertion direction, by both caul member from the back side of one of the wear plate member between these base members A reduction member that elastically deforms in a state where the plate-like material is held, and a plurality of ridges that are in contact with the formation site of the divided grooves in the plate-like material are provided on the holding surface of the contact plate member, The base member is When the convex portion of the backing plate member the lower position is disposed, characterized in that it is arranged on the possible contact with the rear in caul member ridge portions of the front and rear positions.

  That is, by placing the backing plate member made of an elastic material on both surfaces of the plate-like material and elastically deforming these backing plate members, the plate-like material made of a brittle material is supported by the backing plate member from both sides. Even after being deformed together and divided, the support from both sides is maintained to prevent the occurrence of “blurring”. In this case, since the protruding strip portion is provided on the contact plate member, the protruding strip portion constrains the split groove forming portion of the plate-shaped material from both sides, and the portion of the protruding strip portion is pressed down by the reduction member. The material is divided. When the ridge portion is crushed by the rolling member, the base plate member is in contact with the backing plate member at the back of the ridge portion before and after the rolling strip portion. In addition, the front and rear divided grooves are constrained by the ridges, and the “fluttering” phenomenon can be reliably prevented.

  When one dividing groove is divided, the abutting plate member is fed by the interval of the dividing grooves, and the next dividing groove is divided in the same manner. In this way, it is possible to divide the divided grooves one by one while intermittently feeding the contact plate members by the interval of the divided grooves. In addition, since this convex strip part contacts only a division | segmentation groove | channel formation site | part to a plate-shaped raw material, when using as an electronic component mounting substrate, the mounting surface can be kept clean.

  In the divided body manufacturing apparatus according to the present invention, the abutting plate member is an endless belt, and a pulley around which the endless belt is wound is provided with a drive unit for running both endless belts. By making the contact plate member an endless belt, it is possible to continuously divide a plurality of plate-like materials while causing the pulley to intermittently rotate and running the endless belt.

  Further, in the divided body manufacturing apparatus using the abutting plate member as an endless belt, the endless belt is disposed so as to face up and down, and the lower endless belt is formed so as to protrude in the upstream direction of the traveling direction from the upper endless belt, The upper surface of the protruding portion is a plate-shaped material supply unit. When a plurality of plate materials are continuously divided, the plate materials can be continuously supplied by sequentially placing them on the plate material supply unit.

Further, the method for manufacturing a divided body according to the present invention is a method for manufacturing a plurality of divided bodies by dividing a plate-like material made of a brittle material in which a divided groove is formed in advance, and then dividing the divided material from the divided groove. A pair of patch plate members made of an elastic material are arranged on both surfaces of the plate material, and a plurality of ridges formed on the sandwiching surfaces of the patch plate members are formed in the divided groove forming portions of the plate material. The abutting plate members are supported by a plurality of base members arranged at intervals in the length direction, and are composed of a pair of upper and lower upper and lower members. A step of dividing the plate-like material by squeezing the back side of the protruding strip portion of the abutting plate member with a reducing member and elastically deforming both the abutting plate members; Convex strips of the plate member Of when rolling the back side, characterized by contacting the two caul members at the rear of the convex portion of the front and rear.

  According to the divided body manufacturing apparatus and the manufacturing method according to the present invention, since the plate-like material is bent while being sandwiched between the contact plate members made of an elastic material, the plate-like material is deformed together while being supported from both sides. At this time, the dividing groove forming portion of the plate-like material is constrained by the projecting ridge portion, and the constricted state is squeezed by the reducing member, and the projecting ridge portions before and after that are supported from the back by the base member. Therefore, the restraint state of the plate-like material is maintained until the plate-like material is divided, and the occurrence of “blowing” of the plate-like material at the time of division can be prevented, and a divided body without chipping can be manufactured. Therefore, a high-quality substrate can be manufactured by applying it to the manufacture of a power module substrate that is thin and has low rigidity.

Hereinafter, embodiments of a divided body manufacturing apparatus and a manufacturing method according to the present invention will be described with reference to the drawings.
The plate-like material divided by the manufacturing apparatus of this embodiment is an insulating substrate for a power module, and is made of, for example, AlN (aluminum nitride) ceramics. In the plate-like material 11, a division groove 12 is formed on one side of the division-scheduled portion by laser machining, cutting with a diamond wheel, or the like. For example, in order to form a plurality of rectangular insulating substrates (divided bodies) 13 by division, the division grooves 12 are formed in a lattice shape as a whole by being arranged at regular intervals in the vertical direction and the horizontal direction, respectively. Yes. In addition, in the region defined by the dividing grooves 12, metal plates 14 such as aluminum are attached to both surfaces by brazing or the like, and the surface of one metal plate 14 is the electronic component of the power module. The other metal plate 14 is a mounting surface and is a heat transfer body to a heat sink or the like. In addition, this plate-shaped raw material 12 is an example, and can be suitably changed according to design.

  FIG. 1 shows a manufacturing apparatus according to the first embodiment. The manufacturing apparatus according to the first embodiment includes a pair of contact plate members 21 disposed on both surfaces of the plate material 11 and an insertion gap portion 22 through which the contact plate member 21 in a state of sandwiching the plate material 11 can be inserted. A plurality of base members 23 and 24 and a reduction member 25 that elastically deforms the contact plate member 21 between the base members 23 and 24 are provided.

  The backing plate member 21 is made of a material that can be elastically deformed with respect to the plate-like material 11 that is a brittle material, for example, hard rubber, and is a belt shape that is substantially the same as or slightly wider than the plate-like material 11, rather than the plate-like material 11. The strip plate portion 31 is formed to have a large length, and a plurality of ridge portions 32 formed in a comb shape on one surface of the strip plate portion 31 are provided.

  Further, the projecting ridge portion 32 abuts along the length direction of the dividing groove 12 to the formation site of the dividing groove 12 in the plate-like material 11 when the contact plate member 21 is arranged on the surface of the plate-like material 11. It is in contact with each other, and is formed on the surface of the band plate-like portion 31 so as to rise vertically with a certain width. The width of the tip of the ridge 32 is set to be approximately the same as the width of the dividing groove 12. The dividing grooves 12 are formed in a lattice shape, but the ridges 32 are formed in only one of the longitudinal direction and the lateral direction of the lattice, for example, along the longitudinal direction, and follow the longitudinal direction. The dividing grooves 12 are formed in parallel with the same interval.

  A pair of the abutting plate members 21 are provided so as to sandwich the plate-shaped material 11 from both sides. In this case, the protruding strip portions 32 of both the abutting plate members 21 are opposed to each other, and the protruding strip portions 32 form the plate-shaped material. 11 is formed so as to hold the part where the dividing groove 12 is formed. Therefore, these two contact plate members 21 are respectively arranged on the front surface side and the back surface side of the plate-shaped material 11, and are formed in the same shape and the same size by the same material.

  On the other hand, the base members 23 and 24 are arranged in two sets apart from each other along the length direction of the backing plate member 21, and each base member 23 and 24 is a pair of upper and lower upper members 23 A and 24 A and a lower member. 23B and 24B, the insertion gap part which can insert the both plate member 21 of the state which clamped the plate-shaped raw material 11 between upper member 23A, 24A and lower member 23B, 24B of each base member 23,24 22 is formed. Further, the two sets of base members 23 and 24 are arranged at an interval smaller than twice the pitch of the ridge portions 32 in the backing plate member 21, and the insertion gap portions 22 are aligned on a straight line. In this configuration, the two contact plate members 21 with the plate-like material 11 sandwiched between the insertion gap portions 22 are inserted so as to be spanned.

  Then, when the backing plate member 21 is spanned between the insertion gap portions 22 of the base members 23 and 24, one of the ridge portions 32 of the backing plate member 21 is disposed between the both base members 23 and 24. Then, the front and rear ridges 32 are in a positional relationship arranged in any one of the insertion gaps 22 of the base members 23, 24, and the base member 23, 24 is in contact.

  The rolling-down member 25 is formed in a roll shape, and is slightly shifted from the passing path of the abutting plate member 21 connecting the insertion gap portions 22 at an intermediate position between the both base members 23 and 24, in the illustrated example, upward. It is provided at a position deviated from the above position, and can be reciprocated so as to cross the passage path of the contact plate member 21 by a drive unit (not shown). In this case, the rolling-down member 25 has a surface in which the dividing grooves 12 in the plate-shaped material 11 are provided, as indicated by arrows in the direction in which the dividing grooves 12 of the plate-shaped material 11 widen, that is, downward in FIG. It is squeezed in the direction of deforming into a convex shape. As the drive unit, as a mechanical configuration, a configuration in which an electric motor is provided with a cam mechanism, a link mechanism, or the like may be used, and electrical control may be performed.

Next, a method of manufacturing a power module substrate as the divided body 13 using the manufacturing apparatus configured as described above will be described.
The dividing grooves 12 are formed in a lattice shape on one side of the plate-shaped material 11 in advance, and the metal plates 14 are pasted to both surfaces of the region surrounded by the dividing grooves 12 by brazing.

  Then, the contact plate member 21 is brought into contact with both surfaces of the plate material 11. At this time, as described above, the protruding strip portion 32 of the contact plate member 21 is disposed so as to abut the portion of the dividing groove 12 of the plate-like material 11. In a state where the plate material 11 is sandwiched, the contact plate member 21 is arranged so as to be spanned between the both base members 23 and 24 from the insertion gap portion 22 of the one base member 23. At this time, the surface of the plate-like material 11 on which the dividing grooves 12 are formed is arranged facing away from the rolling-down member 25. In the example of FIG. 1, the dividing grooves 12 are arranged facing downward. Further, in the plate-shaped material 11 between the two contact plate members 21, the first dividing groove 12 counted from the tip is arranged below the rolling-down member 25.

  In this state, when the reduction member 25 is driven downward as indicated by an arrow, the contact plate member 21 of the contact plate member 21 and the plate-like material 11 is formed of an elastic material. The plate-shaped material 11 is a brittle material, and is deformed following the curved deformation of the backing plate member 21 to some extent. When the elastic limit is exceeded without being able to follow, it is divided from the dividing groove 12 as shown in FIG.

  In this case, the plate-like material 11 is restrained by the protruding strip portions 32 of the two contact plate members 21 before and after the dividing groove 12 divided by the reduction member 25, and the back surface of the contact plate member 21 is placed on the base members 23 and 24. Since the contact is made, even when the plate-like material 11 is divided, as shown in FIG. 2, the other divided grooves 12 do not move between the base members 23 and 24 except for the divided grooves 12 to be divided. So that it is fixed. Therefore, the phenomenon of “fuzz” when the dividing groove 12 is divided does not occur, and the occurrence of chipping such as chipping is suppressed.

Moreover, since the edge part of the division body 13 is hold | maintained between the protruding item | line parts 32 also in the division | segmentation part, and the contact plate member 21 does not contact the metal plate 14 provided in the both surfaces, The surface can be kept clean.
In this way, the action of both the elastic deformation by the band plate-like portion 31 of the abutting plate member 21 and the restraining function to the plate-like material 11 by the protruding strip portion 32 are combined, and the plate-like material 11 is “abalone”. "Can be divided without causing" and can be held in a divided state.

Then, after dividing one dividing groove 12, the abutting plate member 21 is exposed between both base members 23, 24 while intermittently feeding the contact plate member 21 by the interval of the ridge portion 32 (the interval of the dividing groove 12). The portion of the dividing groove 12 is rolled down by the reduction member 25 at a portion where the portion is located and curved, thereby sequentially dividing the portion of the dividing groove 12 one by one. When the division of one plate material 11 is finished,
While the backing plate member 21 is extracted from between the base members 24, another plate-like material 11 is sandwiched between the two backing plate members 21, and is similarly intermittently fed through the insertion gap portion 22 of the base member 23. The operation of dividing one by one from the division groove 12 is repeated.

  FIG. 3 shows a second embodiment of the manufacturing apparatus of the present invention. In the manufacturing apparatus according to this embodiment, the contact plate members 41 and 42 are formed in an endless belt shape, and the protruding strip portion 32 similar to that in each of the above embodiments is formed on the surface of the belt plate portion 43. The ridges 32 are wound in a state of facing outward, and are arranged with an interval at which the plate-like material 11 can be sandwiched vertically. In addition, the base members 23 and 24 similar to those of the first embodiment and the roll-shaped reduction member 25 are provided in the portions where the contact plate members 41 and 42 are arranged in parallel to each other. The contact plate members 41 and 42 exposed between the front base member 23 and the rear base member 24 are pressed from above by the reduction member 25 to elastically deform the contact plate members 41 and 42. Yes. Also in this 2nd Embodiment, the space | interval of the front-and-back base members 23 and 24 is set to a dimension shorter than twice the space | interval of the protruding strip part 32 of the contact plate members 41 and 42. FIG.

Further, the lower plate member 42 is formed longer than the upper plate member 41 and protrudes to the near side in the feeding direction from the upper plate member 41, and the protruding portion is the plate-like material 11. Is a plate-like material supply unit 45.
In addition, the same code | symbol is attached | subjected to the same part as the structure of other 1st Embodiment, and description is abbreviate | omitted.

And the plate-shaped raw material 11 clamped between both the contact plate members 41 and 42 by intermittently driving the pulley 44 and causing the contact plate members 41 and 42 to run intermittently at intervals of the ridge portion 32. The plate members 11 and 42 are divided by elastically deforming the abutting plate members 41 and 42 by being moved at intervals of the dividing grooves 12 and being pressed down from above by the pressing member 25 in the middle. And it can divide | segment sequentially, supplying the plate-shaped raw material 11 on the plate-shaped raw material supply part 45 in the lower side plate member 42 continuously.
In the second embodiment, the contact plate members 41 and 42 are formed of an elastically deformable material. However, since tension is applied by being wound around the pulley 44, the contact plate members 41 and 42 of the first embodiment are used. A material having an elastic modulus smaller than that of the plate member 21 is also applicable.

In the dividing method according to the above embodiment, the occurrence of chipping of the plate material 11 is extremely reduced, the straightness of the divided surface is increased, and the roughness of the divided surface is improved.
In addition, generation of fine powder during division is suppressed together with the generation of the chip, and the surface cleanliness is remarkably improved. Furthermore, since the division is performed in a state of being constrained from both surfaces, the straightness of the divided surface is increased and the dimensional accuracy is improved. For this reason, the divided body 13 manufactured by this manufacturing apparatus is extremely less likely to crack during use, and can maintain high reliability.

  In each of the above embodiments, the method of dividing the plate material 11 along the dividing groove 12 along the vertical direction among the dividing grooves 12 formed in a lattice shape has been described. On the other hand, another patch plate member in which a ridge portion is formed along the horizontal direction is prepared, and the same applies to the strip-shaped plate material formed by dividing from the dividing groove 12 along the vertical direction. Can be divided in a way.

The present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the spirit of the present invention.
For example, in the above embodiment, the two contact plate members are formed of hard rubber, but may be formed of other materials as long as they have elasticity greater than the plate-shaped material to be divided. Further, in each embodiment, the two contact plate members are made of the same degree of elasticity by the same material, but both the contact plate members until the plate-like material is deformed and divided, and also after the division. Both may not necessarily have the same characteristics as long as the plate-like material or the divided body can be held between them. Furthermore, the material of the band plate-like portion and the protruding strip portion of the backing plate member may be changed. You may make it comprise with a hard plastic etc. as a material. Moreover, although the example which formed the division | segmentation groove | channel only on the single side | surface of a plate-shaped raw material was shown, you may apply to what formed the division | segmentation groove | channel on both surfaces. Further, the present invention can be applied to a case where various semiconductor substrates are manufactured in addition to the power module substrate.

It is a front view which shows 1st Embodiment of the division body manufacturing apparatus which concerns on this invention. It is an enlarged view of the principal part which shows the state which divided | segmented the plate-shaped raw material with the apparatus of FIG. It is a front view which shows 2nd Embodiment of the manufacturing apparatus of the division body which concerns on this invention. It is the front view which showed a mode that the plate-shaped raw material was divided | segmented with the conventional manufacturing apparatus in order. It is the front view typically shown assuming the case of various conditions about the state immediately after a plate-shaped raw material was divided | segmented.

Explanation of symbols

11 Plate material 12 Dividing groove 13 Insulating substrate (divided body)
DESCRIPTION OF SYMBOLS 14 Metal plate 21 Contact plate member 22 Insertion gap part 23, 24 Base member 23A, 24A Upper member 23B, 24B Lower member 25 Reduction member 31 Band plate-like part 32 Projection part 41, 42 Contact plate member 43 Band plate-like part 44 Pulley 45 Plate material supply unit

Claims (5)

A split body manufacturing apparatus for manufacturing a plurality of split bodies by splitting from a split groove by curving a plate-like material made of a brittle material in which split grooves are formed in advance,
A pair of upper plate members made of an elastic material for holding the plate-like material, and an insertion gap portion through which the plate member in a state of holding the plate-like material can be inserted; It consists member, and a plurality of base members which are arranged spaced along the insertion direction, and sandwiching the plate-like material by both caul member from the back side of one of the wear plate member between these base members A reduction member that is elastically deformed in a state,
A plurality of projecting ridges are provided on the clamping surface of the abutting plate member so as to abut on the part where the dividing groove is formed in the plate-like material, and the base member is located at the squeezing position of the squeezing member. When a part is arrange | positioned, it arrange | positions in the position which can contact a backing plate member in the back surface of the protruding item | line part before and behind that part, The division body manufacturing apparatus characterized by the above-mentioned.   2. The divided body manufacturing apparatus according to claim 1, wherein the abutting plate member is an endless belt, and a drive unit for running the endless belts is provided on a pulley around which the endless belts are wound.   The endless belt is disposed so as to face the upper and lower sides, and the lower endless belt is formed so as to protrude upstream in the traveling direction from the upper endless belt, and the upper surface of the protruding portion is a plate-like material supply unit. The divided body manufacturing apparatus according to claim 2, wherein: A method of manufacturing a plurality of divided bodies by dividing from a divided groove by curving a plate-like material made of a brittle material in which divided grooves are formed in advance,
A pair of contact plate members made of an elastic material are arranged on both surfaces of the plate material, and a plurality of ridges formed on the holding surfaces of the contact plate members are applied to the portions where the split grooves are formed in the plate material. It is composed of a pair of upper and lower upper and lower members that are in contact with each other, and these backing plate members are supported by a plurality of base members arranged at intervals in the length direction, and one of the base members is A step of dividing the plate-like material by squeezing the back side of the ridge portion of the backing plate member with a rolling-down member and elastically deforming both the backing plate members;
The base member has a structure in which when the rolling-down member rolls down the back surface side of the protruding strip portion of the contact plate member, the back member contacts the contact plate members on the back surface of the front and back protruding strip portions. Production method.   A plate-like material made of a brittle material, in which a dividing groove is formed in advance, is bent using the divided body manufacturing apparatus according to any one of claims 1 to 3, thereby dividing the plate-like material into a plurality of dividing pieces. A method for producing a divided body, characterized by producing a body.

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