JP6333345B2 - 電磁誘導式エンコーダ - Google Patents

電磁誘導式エンコーダ Download PDF

Info

Publication number
JP6333345B2
JP6333345B2 JP2016237422A JP2016237422A JP6333345B2 JP 6333345 B2 JP6333345 B2 JP 6333345B2 JP 2016237422 A JP2016237422 A JP 2016237422A JP 2016237422 A JP2016237422 A JP 2016237422A JP 6333345 B2 JP6333345 B2 JP 6333345B2
Authority
JP
Japan
Prior art keywords
scale
measurement
electromagnetic induction
scanning
induction encoder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2016237422A
Other languages
English (en)
Japanese (ja)
Other versions
JP2017106920A5 (enExample
JP2017106920A (ja
Inventor
マルティン・ホイマン
マルク・オーリヴァー・ティーマン
アレクサンダー・フランク
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dr Johannes Heidenhain GmbH
Original Assignee
Dr Johannes Heidenhain GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dr Johannes Heidenhain GmbH filed Critical Dr Johannes Heidenhain GmbH
Publication of JP2017106920A publication Critical patent/JP2017106920A/ja
Publication of JP2017106920A5 publication Critical patent/JP2017106920A5/ja
Application granted granted Critical
Publication of JP6333345B2 publication Critical patent/JP6333345B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/2006—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils
    • G01D5/2013—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils by a movable ferromagnetic element, e.g. a core
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/003—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring position, not involving coordinate determination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/204—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils
    • G01D5/2053—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils by a movable non-ferromagnetic conductive element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/30—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/245—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
    • G01D5/2451—Incremental encoders
    • G01D5/2452—Incremental encoders incorporating two or more tracks having an (n, n+1, ...) relationship

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
JP2016237422A 2015-12-08 2016-12-07 電磁誘導式エンコーダ Active JP6333345B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102015224589.6 2015-12-08
DE102015224589.6A DE102015224589A1 (de) 2015-12-08 2015-12-08 Induktive Positionsmesseinrichtung

Publications (3)

Publication Number Publication Date
JP2017106920A JP2017106920A (ja) 2017-06-15
JP2017106920A5 JP2017106920A5 (enExample) 2018-04-26
JP6333345B2 true JP6333345B2 (ja) 2018-05-30

Family

ID=56888996

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016237422A Active JP6333345B2 (ja) 2015-12-08 2016-12-07 電磁誘導式エンコーダ

Country Status (6)

Country Link
US (1) US9958296B2 (enExample)
EP (1) EP3179214B1 (enExample)
JP (1) JP6333345B2 (enExample)
CN (1) CN106969695B (enExample)
DE (1) DE102015224589A1 (enExample)
ES (1) ES2683650T3 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3255384B1 (de) * 2016-06-07 2018-11-28 Dr. Johannes Heidenhain GmbH Massverkörperung sowie positionsmesseinrichtung
US20190111800A1 (en) 2017-10-16 2019-04-18 Neapco Intellectual Property Holdings, Llc High coverage battery usage monitor
DE102017222063A1 (de) * 2017-12-06 2019-06-06 Dr. Johannes Heidenhain Gmbh Induktive Positionsmesseinrichtung
DE102018102698A1 (de) * 2018-02-19 2019-08-22 HELLA GmbH & Co. KGaA Induktiver Positionssensor
JP7431032B2 (ja) * 2019-12-23 2024-02-14 株式会社ミツトヨ 電磁誘導式エンコーダ
CN116710733A (zh) * 2021-01-21 2023-09-05 海拉有限双合股份公司 用于车辆的车辆系统的具有指示器带的长形的主体
WO2022156931A1 (de) * 2021-01-21 2022-07-28 HELLA GmbH & Co. KGaA Induktiver linearwegsensor
WO2022156930A1 (de) * 2021-01-21 2022-07-28 HELLA GmbH & Co. KGaA Länglicher körper mit cursorband für ein fahrzeugsystem eines fahrzeugs
WO2023227481A1 (de) * 2022-05-21 2023-11-30 Flux Gmbh Mehrspuranordnung für linear- und winkelmesssysteme
US11940470B2 (en) 2022-05-31 2024-03-26 Allegro Microsystems, Llc Current sensor system
US12352607B2 (en) * 2022-06-28 2025-07-08 Allegro Microsystems, Llc Position sensing method
US12455178B2 (en) 2023-12-22 2025-10-28 Allegro Microsystems, Llc Inductive linear stroke sensor using dual tracks with different periodicity

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19941464A1 (de) 1999-09-01 2001-03-15 Hella Kg Hueck & Co Induktiver Positionssensor
DE10244234A1 (de) * 2002-09-23 2004-03-25 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
US20130090890A1 (en) * 2011-10-10 2013-04-11 Advanced Sensor Technology Limited Absolute position measuring device and method
DE102012223037A1 (de) * 2012-12-13 2014-06-18 Dr. Johannes Heidenhain Gmbh Induktive Positionsmesseinrichtung
CN103206912A (zh) * 2013-04-24 2013-07-17 四川大学 一种磁致伸缩位移传感器测量装置
DE102013218768A1 (de) * 2013-09-19 2015-03-19 Dr. Johannes Heidenhain Gmbh Induktive Positionsmesseinrichtung

Also Published As

Publication number Publication date
EP3179214A1 (de) 2017-06-14
US20170160102A1 (en) 2017-06-08
ES2683650T3 (es) 2018-09-27
CN106969695A (zh) 2017-07-21
US9958296B2 (en) 2018-05-01
DE102015224589A1 (de) 2017-06-08
EP3179214B1 (de) 2018-08-01
CN106969695B (zh) 2019-03-08
JP2017106920A (ja) 2017-06-15

Similar Documents

Publication Publication Date Title
JP6333345B2 (ja) 電磁誘導式エンコーダ
JP6400385B2 (ja) 誘導式エンコーダ
CN107478146B (zh) 量具以及位置测量机构
US7049924B2 (en) Electromagnetic induction type position sensor
USRE37490E1 (en) Electronic caliper using a reduced offset induced current position transducer
US9013192B2 (en) Inductive measuring device for detecting lengths and angles
JP6873543B2 (ja) 電磁誘導式アブソリュート型位置エンコーダ
US9435663B2 (en) Absolute position encoder scale having layers in a stacked configuration
JP6873544B2 (ja) 電磁誘導式アブソリュート型エンコーダ
JP3559225B2 (ja) 誘電型位置検出装置
JP2017106920A5 (enExample)
JP2011226894A (ja) 電磁誘導式エンコーダ
CN110657826A (zh) 用于感应位置编码器的标尺构造
US5619132A (en) Position measuring device employing primary and auxiliary magnetic fields
JP2010500862A (ja) 位置又は移動用測定系を有するモータ
CN109959398A (zh) 用于感应式位置编码器的绕组和刻度构造
US20150061650A1 (en) Method and arrangement and sensor for determing the postion of a component
JP6373717B2 (ja) エンコーダ
US7812597B2 (en) Inductive magnetic position sensor
JP3047099B2 (ja) 位置検出装置
US12326334B2 (en) Inductive position-measuring device
JP5374739B2 (ja) リニアセンサ
JP2005077150A (ja) 誘導型位置検出装置
JPH03238315A (ja) 電磁結合型位置センサ
JP2007108027A (ja) 電磁誘導式変位センサ

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20180313

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20180313

A871 Explanation of circumstances concerning accelerated examination

Free format text: JAPANESE INTERMEDIATE CODE: A871

Effective date: 20180313

A975 Report on accelerated examination

Free format text: JAPANESE INTERMEDIATE CODE: A971005

Effective date: 20180328

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20180404

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20180424

R150 Certificate of patent or registration of utility model

Ref document number: 6333345

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250