CN106969695B - 感应的位置测量机构 - Google Patents

感应的位置测量机构 Download PDF

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Publication number
CN106969695B
CN106969695B CN201611078139.3A CN201611078139A CN106969695B CN 106969695 B CN106969695 B CN 106969695B CN 201611078139 A CN201611078139 A CN 201611078139A CN 106969695 B CN106969695 B CN 106969695B
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China
Prior art keywords
scale
measuring
scanning
graduation
measurement
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CN201611078139.3A
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English (en)
Chinese (zh)
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CN106969695A (zh
Inventor
M.霍伊曼
M.O.蒂曼
A.弗兰克
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
John Nei Si Heidenhain Doctor Co Ltd
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John Nei Si Heidenhain Doctor Co Ltd
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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/2006Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils
    • G01D5/2013Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils by a movable ferromagnetic element, e.g. a core
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/003Measuring arrangements characterised by the use of electric or magnetic techniques for measuring position, not involving coordinate determination
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/204Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils
    • G01D5/2053Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils by a movable non-ferromagnetic conductive element
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/30Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/245Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
    • G01D5/2451Incremental encoders
    • G01D5/2452Incremental encoders incorporating two or more tracks having an (n, n+1, ...) relationship

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
CN201611078139.3A 2015-12-08 2016-11-30 感应的位置测量机构 Active CN106969695B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102015224589.6 2015-12-08
DE102015224589.6A DE102015224589A1 (de) 2015-12-08 2015-12-08 Induktive Positionsmesseinrichtung

Publications (2)

Publication Number Publication Date
CN106969695A CN106969695A (zh) 2017-07-21
CN106969695B true CN106969695B (zh) 2019-03-08

Family

ID=56888996

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201611078139.3A Active CN106969695B (zh) 2015-12-08 2016-11-30 感应的位置测量机构

Country Status (6)

Country Link
US (1) US9958296B2 (enExample)
EP (1) EP3179214B1 (enExample)
JP (1) JP6333345B2 (enExample)
CN (1) CN106969695B (enExample)
DE (1) DE102015224589A1 (enExample)
ES (1) ES2683650T3 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3255384B1 (de) * 2016-06-07 2018-11-28 Dr. Johannes Heidenhain GmbH Massverkörperung sowie positionsmesseinrichtung
US20190111800A1 (en) 2017-10-16 2019-04-18 Neapco Intellectual Property Holdings, Llc High coverage battery usage monitor
DE102017222063A1 (de) * 2017-12-06 2019-06-06 Dr. Johannes Heidenhain Gmbh Induktive Positionsmesseinrichtung
DE102018102698A1 (de) * 2018-02-19 2019-08-22 HELLA GmbH & Co. KGaA Induktiver Positionssensor
JP7431032B2 (ja) * 2019-12-23 2024-02-14 株式会社ミツトヨ 電磁誘導式エンコーダ
CN116710733A (zh) * 2021-01-21 2023-09-05 海拉有限双合股份公司 用于车辆的车辆系统的具有指示器带的长形的主体
WO2022156931A1 (de) * 2021-01-21 2022-07-28 HELLA GmbH & Co. KGaA Induktiver linearwegsensor
WO2022156930A1 (de) * 2021-01-21 2022-07-28 HELLA GmbH & Co. KGaA Länglicher körper mit cursorband für ein fahrzeugsystem eines fahrzeugs
WO2023227481A1 (de) * 2022-05-21 2023-11-30 Flux Gmbh Mehrspuranordnung für linear- und winkelmesssysteme
US11940470B2 (en) 2022-05-31 2024-03-26 Allegro Microsystems, Llc Current sensor system
US12352607B2 (en) * 2022-06-28 2025-07-08 Allegro Microsystems, Llc Position sensing method
US12455178B2 (en) 2023-12-22 2025-10-28 Allegro Microsystems, Llc Inductive linear stroke sensor using dual tracks with different periodicity

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1493852A (zh) * 2002-09-23 2004-05-05 约翰尼斯海登海恩博士股份有限公司 位置测量装置
CN103206912A (zh) * 2013-04-24 2013-07-17 四川大学 一种磁致伸缩位移传感器测量装置
CN103868535A (zh) * 2012-12-13 2014-06-18 约翰内斯﹒海德汉博士有限公司 电感式位置测量装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19941464A1 (de) 1999-09-01 2001-03-15 Hella Kg Hueck & Co Induktiver Positionssensor
US20130090890A1 (en) * 2011-10-10 2013-04-11 Advanced Sensor Technology Limited Absolute position measuring device and method
DE102013218768A1 (de) * 2013-09-19 2015-03-19 Dr. Johannes Heidenhain Gmbh Induktive Positionsmesseinrichtung

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1493852A (zh) * 2002-09-23 2004-05-05 约翰尼斯海登海恩博士股份有限公司 位置测量装置
CN103868535A (zh) * 2012-12-13 2014-06-18 约翰内斯﹒海德汉博士有限公司 电感式位置测量装置
CN103206912A (zh) * 2013-04-24 2013-07-17 四川大学 一种磁致伸缩位移传感器测量装置

Also Published As

Publication number Publication date
EP3179214A1 (de) 2017-06-14
US20170160102A1 (en) 2017-06-08
JP6333345B2 (ja) 2018-05-30
ES2683650T3 (es) 2018-09-27
CN106969695A (zh) 2017-07-21
US9958296B2 (en) 2018-05-01
DE102015224589A1 (de) 2017-06-08
EP3179214B1 (de) 2018-08-01
JP2017106920A (ja) 2017-06-15

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